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Co-authors

Number of documents

134

Bertrand VILQUIN


Reader (HDR) in condensed matters

Bertrand Vilquin (reader, HDR, Ecole Centrale de Lyon) has been working on integration of perovskite materials since the beginning of his PhD in 1999 at Université de Caen (France). In 2002, he joined the Institute for Scientific and Industrial Research at Osaka University (Japan) for a JSPS post doctorate fellowship. In 2005, he moved to Université Paris XI to work on an industrial project with ALTIS Semiconductors to realize New Generation of nanoscale MRAM devices. In 2006, he became lecturer at Ecole Centrale de Lyon working on the integration of perovskite materials on silicon though academic and industrial projects. He has a rich experience in both national and international research projects and had been the coordinator of 2 ANR projects. He was invited professor at Osaka University (Japan) in 2012 and at the University of Tokyo (Japan) in 2016. He became associate professor at Université de Sherbrooke (Canada) in 2016. He is the coordinator of the “nanoscale engineering” master course of University of Lyon. He successfully obtained his habilitation to conduct research (HDR) in 2018.

 

Project leader:

-          ANR MINOS (2007-2011)

-          ANR SURFFER (2010-2013)

 

WorkPackage coordinator:

-          ANR PIEZO2POWER (2011-2015)

-          ANR INTENSE (2015-2017)

-          H2020 ICT 3eFERRO (2018-2021)

 


Journal articles55 documents

  • Yanxiao Sun, Gang Niu, Wei Ren, Jinyan Zhao, Yankun Wang, et al.. Impact of the channel length on molybdenum disulfide field effect transistors with hafnia-based high- k dielectric gate. AIP Advances, American Institute of Physics- AIP Publishing LLC, 2021, 11 (6), pp.065229. ⟨10.1063/5.0055574⟩. ⟨hal-03269195⟩
  • J.L. Wang, S.J. She, F. Gaillard, G. Niu, Bertrand Vilquin, et al.. Strain dependence of dissociative adsorption of H 2 O on epitaxially strained, out-of-plane polarized, BaTiO 3 (001) thin films. Thin Solid Films, Elsevier, 2021, 717, pp.138428. ⟨10.1016/j.tsf.2020.138428⟩. ⟨hal-03035211⟩
  • Jordan Bouaziz, P. Rojo Romeo, N. Baboux, Bertrand Vilquin. Imprint issue during retention tests for HfO2 -based FRAM: An industrial challenge?. Applied Physics Letters, American Institute of Physics, 2021, 118 (8), pp.082901. ⟨10.1063/5.0035687⟩. ⟨hal-03177059⟩
  • B. Wagué, J.-B. Brubach, G. Niu, G. Dong, L. Dai, et al.. Structural studies of epitaxial BaTiO3 thin film on silicon. Thin Solid Films, Elsevier, 2020, 693, pp.137636. ⟨10.1016/j.tsf.2019.137636⟩. ⟨hal-02324723⟩
  • Thomas Wood, Malik Kemiche, Jérémy Lhuillier, Pierre Demongodin, Bertrand Vilquin, et al.. Towards low-power near-infrared modulators operating at telecom wavelengths: when graphene plasmons frustrate their metallic counterparts. Journal of the Optical Society of America B, Optical Society of America, 2020, 37 (5), pp.1563. ⟨10.1364/JOSAB.391277⟩. ⟨hal-02618631⟩
  • Baba Wague, Nicolas Baboux, Pedro Rojo Romeo, Yves Robach, Bertrand Vilquin. Comparison of Epitaxial and Textured Ferroelectric BaTiO<sub>3</sub> Thin Films. International Journal of Modern Physics A, World Scientific Publishing, 2020, 11 (04), pp.509-516. ⟨10.4236/jmp.2020.114033⟩. ⟨hal-02536344⟩
  • Thomas Wood, Jérémy Lhuillier, Malik Kemiche, Pierre Demongodin, Bertrand Vilquin, et al.. Low-voltage, broadband graphene-coated Bragg mirror electro-optic modulator at telecom wavelengths. Optics Express, Optical Society of America - OSA Publishing, 2020, 28 (19), pp.27506. ⟨10.1364/OE.398480⟩. ⟨hal-02961285⟩
  • J. Kenji Clark, Ya-Lun Ho, Hiroaki Matsui, Bertrand Vilquin, Hitoshi Tabata, et al.. Photo-induced metal-like phase of VO 2 with sub-ns recovery. ACS photonics, American Chemical Society,, 2020, ⟨10.1021/acsphotonics.0c00280⟩. ⟨hal-02923475⟩
  • Jordan Bouaziz, Pedro Rojo Romeo, Nicolas Baboux, Bertrand Vilquin. Huge Reduction of the Wake-Up Effect in Ferroelectric HZO Thin Films. ACS Applied Electronic Materials, American Chemical Society, 2019, 1 (9), pp.1740-1745. ⟨10.1021/acsaelm.9b00367⟩. ⟨hal-02303151⟩
  • Jordan Bouaziz, Pédro Rojo Romeo, Nicolas Baboux, Raluca Negrea, Lucian Pintilie, et al.. Dramatic impact of pressure and annealing temperature on the properties of sputtered ferroelectric HZO layers. APL Materials, AIP Publishing 2019, 7 (8), pp.081109. ⟨10.1063/1.5110894⟩. ⟨hal-02273286⟩
  • Jordan Bouaziz, Pedro Rojo Romeo, Nicolas Baboux, Bertrand Vilquin. Characterization of ferroelectric hafnium/zirconium oxide solid solutions deposited by reactive magnetron sputtering. Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures, American Vacuum Society (AVS), 2019, 37 (2), pp.021203. ⟨10.1116/1.5060643⟩. ⟨hal-02062583⟩
  • R. Moalla, S. Cueff, J. Penuelas, B. Vilquin, G. Saint-Girons, et al.. Large anisotropy of ferroelectric and pyroelectric properties in heteroepitaxial oxide layers. Scientific Reports, Nature Publishing Group, 2018, 8 (1), ⟨10.1038/s41598-018-22349-y⟩. ⟨hal-01848663⟩
  • Zhiyu Wang, J. Kenji Clark, Ya-Lun Ho, Bertrand Vilquin, Hirofumi Daiguji, et al.. Narrowband Thermal Emission Realized through the Coupling of Cavity and Tamm Plasmon Resonances. ACS photonics, American Chemical Society,, 2018, 5 (6), pp.2446 - 2452. ⟨10.1021/acsphotonics.8b00236⟩. ⟨hal-01885715⟩
  • Zhiyu Wang, J. Kenji Clark, Ya-Lun Ho, Bertrand Vilquin, Hirofumi Daiguji, et al.. Narrowband thermal emission from Tamm plasmons of a modified distributed Bragg reflector. Applied Physics Letters, American Institute of Physics, 2018, 113 (16), ⟨10.1063/1.5048950⟩. ⟨hal-01919589⟩
  • Alvaro Rosa, Domenico Tulli, Pau Castera, Ana Gutierrez, Amadeu Griol, et al.. Barium titanate (BaTiO_3) RF characterization for application in electro-optic modulators. Optical Materials Express, OSA pub, 2017, 7 (12), ⟨10.1364/OME.7.004328⟩. ⟨hal-01885719⟩
  • Rahma Moalla, Bertrand Vilquin, Guillaume Saint-Girons, Gwenaël Le Rhun, Emmanuel Defay, et al.. Huge gain in pyroelectric energy conversion through epitaxy for integrated self-powered nanodevices. Nano Energy, Elsevier, 2017, 41, pp.43 - 48. ⟨10.1016/j.nanoen.2017.09.001⟩. ⟨hal-01848668⟩
  • Wei-Wei Peng, Robert Tétot, Gang Niu, Emilie Amzallag, Bertrand Vilquin, et al.. Room-temperature soft mode and ferroelectric like polarization in SrTiO3 ultrathin films: Infrared and ab initio study. Scientific Reports, Nature Publishing Group, 2017, 7, pp.2160. ⟨10.1038/s41598-017-02113-4⟩. ⟨hal-01724280⟩
  • A. Apostoluk, R. Parize, B. Vilquin, T. H. Nguyen, Vincent Consonni, et al.. Room temperature optical response of zinc oxide nanowires synthesized by chemical bath deposition to toluene vapors. physica status solidi (a), Wiley, 2016, 213 (5), pp.1115-1119. ⟨10.1002/pssa.201532748⟩. ⟨hal-01456370⟩
  • Julien Pézard, Mihai Lazar, Naoufel Haddour, Claude Botella, Pascale Roy, et al.. Realization of a graphene gate field effect transistor for electrochemical detection and biosensors. Thin Solid Films, Elsevier, 2016, ⟨10.1016/j.tsf.2016.04.031⟩. ⟨hal-01389621⟩
  • Rahma Moalla, B. Vilquin, G. Saint-Girons, Gaël Sebald, N. Baboux, et al.. Dramatic effect of thermal expansion mismatch on the structural, dielectric, ferroelectric and pyroelectric properties of low-cost epitaxial PZT films on SrTiO 3 and Si (001) subtrates.. CrystEngComm, Royal Society of Chemistry, 2016, 18 (11), pp.1887 - 1891. ⟨10.1039/C5CE02311D⟩. ⟨hal-01848710⟩
  • Benjamin Meunier, L. Largeau, Philippe Regreny, Jose Penuelas, Romain Bachelet, et al.. Chemical reactivity between sol–gel deposited Pb(Zr,Ti)O3 layers and their GaAs substrates. CrystEngComm, Royal Society of Chemistry, 2016, 18, pp.7494. ⟨hal-01489114⟩
  • Yosri Ayadi, Lama Rahhal, Bertrand Vilquin, Céline Chevalier, Fabian Ambriz Vargas, et al.. Novel Concept of Gas Sensitivity Characterization of Materials Suited for Implementation in FET-Based Gas Sensors. Nanoscale Research Letters, SpringerOpen, 2016, 11 (1), ⟨10.1186/s11671-016-1687-z⟩. ⟨hal-01921508⟩
  • Julien Pezard, Jérémy Lhuillier, Zakarya El-Friach, Véronique Soulière, Bertrand Vilquin, et al.. Realization and Characterization of Graphene on 4H-SiC for Tera-Hertz Transistors. Materials Science Forum, Trans Tech Publications Inc., 2015, 821-823, pp.941 - 944. ⟨10.4028/www.scientific.net/MSF.821-823.941⟩. ⟨hal-01391855⟩
  • A. Boni, C. Chirila, I. Pasuk, R. Negrea, L. Trupina, et al.. Electrode interface controlled electrical properties in epitaxial Pb(Zr0.52Ti0.48)O-3 films grown on Si substrates with SrTiO3 buffer layer. Thin Solid Films, Elsevier, 2015, 593. ⟨hal-01489392⟩
  • C. Chirila, A. Boni, I. Pasuk, R. Negrea, L. Trupina, et al.. Comparison between the ferroelectric/electric properties of the PbZr0.52Ti0.48O3 films grown on Si (100) and on STO (100) substrates. Journal of Materials Sciences Letters, 2015, 50, Issue: 11, pp.3883-3894. ⟨hal-01489405⟩
  • Alexis Borowiak, K. Okada, T. Kanki, Brice Gautier, Bertrand Vilquin, et al.. Nanoscale study of perovskite BiFeO3/spinel (Fe, Zn)3O4 co-deposited thin film by electrical scanning probe methods. Applied Surface Science, Elsevier, 2015, 351, pp.531. ⟨hal-01489414⟩
  • D. Ferrah, M. El Kazzi, G. Niu, Claude Botella, J. Penuelas, et al.. X-ray photoelectron spectroscopy and diffraction investigation of a metal–oxide-semiconductor heterostructure: Pt/Gd2O3/Si(111). Journal of Crystal Growth, Elsevier, 2015, 416, pp.118 - 125. ⟨10.1016/j.jcrysgro.2015.02.001⟩. ⟨hal-01848746⟩
  • D. Le Bourdais, G. Agnus, T. Maroutian, V. Pillard, P. Aubert, et al.. Epitaxial manganite freestanding bridges for low power pressure sensors. Journal of Applied Physics, American Institute of Physics, 2015, 118 (12), ⟨10.1063/1.4931885⟩. ⟨hal-01848720⟩
  • J. L. Wang, B. Vilquin, B. Gautier, G. Dezanneau, N. Barrett. Surface atomic and chemical structure of relaxor Sr0.63Ba0.37Nb2O6(001). Applied Physics Letters, American Institute of Physics, 2015, 106, pp.242901. ⟨10.1063/1.4922773⟩. ⟨hal-01489339v2⟩
  • J.L. Wang, J. Leroy, G. Niu, G. Saint-Girons, B. Gautier, et al.. Chemistry and structure of BaTiO3 ultra-thin films grown by different O2 plasma power. Chemical Physics Letters, Elsevier, 2014, 592, pp.206 - 210. ⟨10.1016/j.cplett.2013.12.030⟩. ⟨cea-01376789⟩
  • Romain Bachelet, Patricia de Coux, Bénédicte Warot-Fonrose, Vassil Skumryev, Gang Niu, et al.. Functional spinel oxide heterostructures on silicon. CrystEngComm, Royal Society of Chemistry, 2014, 16 (47), pp.10741 - 10745. ⟨10.1039/C4CE01817F⟩. ⟨hal-01848780⟩
  • Alexis Borowiak, Nicolas Baboux, David Albertini, Bertrand Vilquin, Guillaume Saint Girons, et al.. Electromechanical response of amorphous LaAlO 3 thin film probed by scanning probe microscopies. Applied Physics Letters, American Institute of Physics, 2014, 105 (1), ⟨10.1063/1.4889853⟩. ⟨hal-01848759⟩
  • Qiang Liu, O. Marconot, M. Piquemal, C. Eypert, Alexis Borowiak, et al.. Phase transition in ferroelectric Pb(Zr0.52Ti0.48)O3 epitaxial thin films. Thin Solid Films, Elsevier, 2014, 553, pp.85. ⟨hal-01489882⟩
  • Y. Shi, M. Cueff, G. Niu, G. Le Rhun, B. Vilquin, et al.. Phase transitions in [001]-oriented morphotropic PbZr0.52Ti0.48O3 thin film deposited onto SrTiO3-buffered Si substrate. Journal of Applied Physics, American Institute of Physics, 2014, 115, pp.214108. ⟨10.1063/1.4881818⟩. ⟨hal-01053264⟩
  • S. Nassreddine, F. Morfin, G. Niu, B. Vilquin, F. Gaillard, et al.. Application of a sensitive catalytic reactor to the study of CO oxidation over SrTiO3(100) and BaTiO3/SrTiO3(100) ferroelectric surfaces. Surface and Interface Analysis, Wiley-Blackwell, 2014, 46 (10-11), pp.721-725. ⟨10.1002/sia.5391⟩. ⟨hal-01149237⟩
  • J.E. Rault, G. Agnus, T. Maroutian, V. Pillard, Ph. Lecoeur, et al.. Time-resolved photoemission spectroscopy on a metal/ferroelectric heterostructure. Physical Review B: Condensed Matter and Materials Physics (1998-2015), American Physical Society, 2013, 88, pp.155107. ⟨10.1103/PhysRevB.88.155107⟩. ⟨cea-01477621⟩
  • J.E. Rault, T. Maroutian, G. Agnus, Ph. Lecoeur, G. Niu, et al.. Interface electronic structure in a metal/ferroelectric heterostructure under applied bias. Physical Review B: Condensed Matter and Materials Physics (1998-2015), American Physical Society, 2013, 87, pp.155146. ⟨10.1103/PhysRevB.87.155146⟩. ⟨cea-01477666⟩
  • N. Barrett, J. E. Rault, L. Wang, C. Mathieu, A. Locatelli, et al.. Full field electron spectromicroscopy applied to ferroelectric materials. Journal of Applied Physics, American Institute of Physics, 2013, 113 (18), ⟨10.1063/1.4801968⟩. ⟨cea-01477631⟩
  • J. Penuelas, X. Lu, N.P. Blanchard, Guillaume Saint-Girons, B. Vilquin, et al.. Morphological and structural properties of InP/Gd2O3 nanowires grown by molecular beam epitaxy on silicon substrate. Journal of Crystal Growth, Elsevier, 2012, 347 (1), pp.49-52. ⟨10.1016/j.jcrysgro.2012.03.003⟩. ⟨hal-01939995⟩
  • G. Niu, B. Gautier, S. Yin, Guillaume Saint-Girons, P. Lecoeur, et al.. Molecular beam epitaxy growth of BaTiO3 thin films and crucial impact of oxygen content conditions on the electrical characteristics. Thin Solid Films, Elsevier, 2012, 520 (14), pp.4595-4599. ⟨hal-01939992⟩
  • J. L. Wang, F. Gaillard, A. Pancotti, B. Gautier, G. Niu, et al.. Chemistry and Atomic Distortion at the Surface of an Epitaxial BaTiO3 Thin Film after Dissociative Adsorption of Water. Journal of Physical Chemistry C, American Chemical Society, 2012, 116, pp.21802-21809. ⟨10.1021/jp305826e⟩. ⟨hal-00777517⟩
  • G. Niu, S. Yin, Guillaume Saint-Girons, B. Gautier, P. Lecoeur, et al.. Epitaxy of BaTiO3 thin film on Si(001) using a SrTiO3 buffer layer for non-volatile memory application. Microelectronic Engineering, Elsevier, 2011, 88 (7), pp.1232-1235. ⟨hal-01939990⟩
  • G. Niu, W. W. Peng, G. Saint-Girons, J. Penuelas, Pascal Roy, et al.. Direct epitaxial growth of SrTiO3 on Si (001): Interface, crystallization and IR evidence of phase transition. Thin Solid Films, Elsevier, 2011, 519 (17), pp.5722-5725. ⟨10.1016/J.TSF.2010.12.208⟩. ⟨hal-00753321⟩
  • G. Niu, B. Vilquin, J. Penuelas, C. Botella, G. Hollinger, et al.. Heteroepitaxy of SrTiO3 thin films on Si (001) using different growth strategies: Toward substratelike quality. Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics, AVS through the American Institute of Physics, 2011, 29 (4), ⟨10.1116/1.3609813⟩. ⟨hal-01892239⟩
  • G. Niu, J. Penuelas, L. Largeau, B. Vilquin, J.-L. Maurice, et al.. Evidence for the formation of two phases during the growth of SrTiO3 on silicon. Physical Review B: Condensed Matter and Materials Physics (1998-2015), American Physical Society, 2011, 83, pp.054105. ⟨10.1103/PhysRevB.83.054105⟩. ⟨hal-00601296⟩
  • G. Niu, B. Vilquin, J. Penuelas, C. Botella, G. Hollinger, et al.. Heteroepitaxy of SrTiO3 thin films on Si (001) using different growth strategies: Toward substratelike quality. Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics, AVS through the American Institute of Physics, 2011, 29 (4), pp.041207. ⟨hal-01939991⟩
  • B. Gobaut, J. Cheng, A. Chettaoui, G. Niu, J. Penuelas, et al.. Molecular beam epitaxial growth of BaTiO3 single crystal on Ge-on-Si(001) substrates. Applied Physics Letters, American Institute of Physics, 2011, 98 (9), pp.092901. ⟨hal-01939986⟩
  • C. Dubourdieu, I. Gelard, O. Salicio, G. Saint Girons, A. Chettaoui, et al.. Epitaxial growth of germanium on silicon using a Gd2O3/Si (111) crystalline template. Journal of Vacuum Science and Technology A, American Vacuum Society, 2010, 28 (5), pp.1187-1190. ⟨hal-01939983⟩
  • C. Dubourdieu, I. Gelard, O. Salicio, G. Saint-Girons, B. Vilquin, et al.. Oxides heterostructures for nanoelectronics. International Journal of Nanotechnology, Inderscience, 2010, 7 (4-8), pp.320-347. ⟨10.1504/10.31723⟩. ⟨hal-01067589⟩
  • Gang Niu, Guillaume Saint-Girons, Bertrand Vilquin, Gabriel Delhaye, Jean-Luc Maurice, et al.. Molecular beam epitaxy of SrTiO3 on Si (001): Early stages of the growth and strain relaxation. Applied Physics Letters, American Institute of Physics, 2009, 95 (6), pp.2902. ⟨10.1063/1.3193548⟩. ⟨hal-00663481⟩
  • Guillaume Saint-Girons, G. Niu, B. Vilquin, N. Baboux, C. Plossu, et al.. Growth temperature dependence of epitaxial Gd2O3 films on Si(111). Microelectronic Engineering, Elsevier, 2009, 86 (7-9), pp.1700-1702. ⟨hal-01940600⟩
  • L. Becerra, C. Merckling, M. El-Kazzi, N. Baboux, B. Vilquin, et al.. Impact of a γ-Al[sub 2]O[sub 3](001) barrier on LaAlO[sub 3] metal-oxide-semiconductor capacitor electrical properties. Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures, American Vacuum Society (AVS), 2009, 27 (1), pp.384. ⟨hal-01939927⟩
  • C. Merckling, Guillaume Saint-Girons, G. Delhaye, G. Patriarche, L. Largeau, et al.. Epitaxial growth of high-κ oxides on silicon. Thin Solid Films, Elsevier, 2008, 517 (1), pp.197-200. ⟨hal-01939925⟩
  • L. Becerra, C. Merckling, N. Baboux, C. Plossu, O. Marty, et al.. Ultralow equivalent oxide thickness obtained for thin amorphous LaAlO3 layers grown on Si(001). Applied Physics Letters, American Institute of Physics, 2007, 91 (19), pp.192909. ⟨hal-01939919⟩
  • B. Vilquin, R. Bouregba, G. Poullain, H. Murray, El Hadj Dogheche, et al.. Crystallographic and optical properties of epitaxial Pb(Zr-0.6,Ti-0.4)O-3 thin films grown on LaAlO3 substrates. Journal of Applied Physics, American Institute of Physics, 2003, 94, pp.5167-5171. ⟨hal-00162729⟩

Conference papers64 documents

  • Bertrand Vilquin, Nicolas Baboux, Pedro Rojo Romeo, Jordan Bouaziz. The discovery of ferroelectricity in HfO2. 6th Conference of Bangladesh Crystallographic Association, Bangladesh Crystallographic Association, Jan 2021, Dhaka, Bangladesh. ⟨hal-03111364⟩
  • Bertrand Vilquin, Jordan Bouaziz, Nicolas Baboux, Pedro Rojo Romeo. Tracking polarization loss and imprint during electrical tests in sputtered TiN/HZO/TiN capacitors. Novel high-k workshop applications, NamLab, Apr 2021, Dresden, Germany. ⟨hal-03273116⟩
  • Bertrand Vilquin, Greta Segantini, Benoit Manchon, Ingrid Cañero Infante, Pedro Rojo Romeo, et al.. Effect of bottom electrodes on HZO thin film properties. International Symposium on Applications of Ferroelectrics (ISAF) 2021, https://isaf-isif-pfm2021.org/, May 2021, Sydney, Australia. ⟨hal-03274229⟩
  • Greta Segantini, Benoit Manchon, Pedro Rojo Romeo, Rabei Barhoumi, Nicolas Baboux, et al.. Role of ultra-thin Ti and Al interfacial layers in HfZrO2 ferroelectric tunnel junctions. EMRS 2021 Fall Meeting, European Materials Research Society, Sep 2021, Warsaw, Poland. ⟨hal-03368741⟩
  • Greta Segantini, Pedro Rojo Romeo, Benoit Manchon, Rabei Barhoumi, Damien Deleruyelle, et al.. Impact of a dielectric layer at TiN/HfZrO2 interface for ferroelectric tunnel junctions applications. Journées de la matière condensée (JMC17), Société française de physique (SFP), Aug 2021, Rennes, France. ⟨hal-03372588⟩
  • Antonio Assaf, João Resende, Levert Theo, Bernard Pelissier, Infante Ingrid C., et al.. Développement d’un capteur environnemental ultra-basse consommation à base de SnO2 en technologie CMOS FDSOI. Journées de la matière condensée (JMC17), Société française de physique (SFP), Aug 2021, Rennes, France. ⟨hal-03375553⟩
  • Bertrand Vilquin, Jordan Bouaziz, Pédro Rojo Romeo, Nicolas Baboux. Nanostructuration effect on the properties of ferroelectric HfZrO2. 6th edition of the International Workshop of Materials Physics, The National Institute of Materials Physics (NIMP), Sep 2021, Bucarest, Romania. ⟨hal-03351080⟩
  • Bertrand Vilquin, Nicolas Baboux, Pedro Rojo Romeo, Jordan Bouaziz. Huge reduction of wake-up effect in ferroelectric HfZrO2 nanostructures. EMRS 2021 Fall Meeting, European Materials Research Society, Sep 2021, Warsaw, Poland. ⟨hal-03351082⟩
  • Benoit Manchon, Greta Segantini, Pedro Rojo Romeo, Nicolas Baboux, Rabei Barhoumi, et al.. Electrical Characterisation of HfZrO2 Ferroelectric Tunnel Junctions for Neuromorphic Application. EMRS 2021 Fall Meeting, European Materials Research Society, Sep 2021, Warsaw, Poland. ⟨hal-03354311⟩
  • Christelle Monat, Pierre Demongodin, Jérémy Lhuillier, Milan Sinobad, Houssein El Dirani, et al.. Hybrid chip-based nonlinear optical devices using graphene. graphene2020, Oct 2020, Grenoble, France. ⟨hal-03299045⟩
  • Jérémy Lhuillier, Pierre Demongodin, Thomas Wood, Malik Kemiche, Bertrand Vilquin, et al.. Towards active photonic dispersion control using graphene-induced non-radiative loss. CLEO: Science and Innovations 2020, May 2020, Washington DC, United States. pp.SW4F.4., ⟨10.1364/CLEO_SI.2020.SW4F.4⟩. ⟨hal-02617933⟩
  • Bertrand Vilquin, Jordan Bouaziz, Pédro Rojo Romeo, Nicolas Baboux. Ferroelectric HfO2 based devices fabrication and remaining issues. IEEE 39th International Conference on ELECTRONICS AND NANOTECHNOLOGY ELNANO-2019, IEEE, Apr 2019, Kyiv, Ukraine. ⟨hal-02281214⟩
  • Bertrand Vilquin, Jordan Bouaziz, Nicolas Baboux, Pedro Rojo Romeo. Ferroelectric HfZrO2 thin films for IoT applications. Rencontre RENATECH "Croissance Cristalline", Nov 2019, Grenoble, France. ⟨hal-02392443⟩
  • R. Orobtchouk, A. Belarouci, B. Vilquin, P. Rojo Romeo. Integration of Amorphous Low Refractive Index Active Materials in Silicon Photonics. 2019 21st International Conference on Transparent Optical Networks (ICTON), Jul 2019, Angers, France. pp.1-1, ⟨10.1109/ICTON.2019.8840268⟩. ⟨hal-02400096⟩
  • Bertrand Vilquin, Jordan Bouaziz, Nicolas Baboux, Pédro Rojo Romeo, Lucian Pintilie, et al.. Huge working pressure effect on the ferroelectric properties of RF sputtered hafnia/zirconia layers. High-k Workshop 2019, NamLab, Jun 2019, Dresden, Germany. ⟨hal-02281215⟩
  • Jimmy John, Regis Orobtchouk, P. Rojo-Romeo, B. Vilquin, Zhen Zhang, et al.. Vanadium Oxide Based Waveguide Modulator Integrated on Silicon. 2019 21st International Conference on Transparent Optical Networks (ICTON), Jul 2019, Angers, France. pp.1-1, ⟨10.1109/ICTON.2019.8840555⟩. ⟨hal-02408515⟩
  • Jordan Bouaziz, Pédro Rojo Romeo, Bertrand Vilquin, Nicolas Baboux. Ferroelectric hafnium/zirconium oxide solid solutions deposited by RF magnetron sputtering with a single target. E-MRS Spring Meeting 2019, May 2019, Nice, France. ⟨hal-02506544⟩
  • Jordan Bouaziz, Nicolas Baboux, Pédro Rojo Romeo, Lucian Pintilie, Raluca Negrea, et al.. Sputtered ferroelectric hafnium/zirconium oxide solid solutions from a single target. EMRS Spring Meeting 2019, Jul 2019, Nice, France. ⟨hal-02506563⟩
  • Bertrand Vilquin, Jordan Bouaziz, Nicolas Baboux, Pédro Rojo Romeo. Fabrication de dispositifs ferroélectriques à partir de HfO2 dopé et les problèmes en suspens. Réunion thématique du GDR OXYFUN « Couches minces d'oxydes fonctionnels et applications en électronique et photonique », GDR OXYFUN, Oct 2019, Caen, France. ⟨hal-02310135⟩
  • Bertrand Vilquin, Jordan Bouaziz, Nicolas Baboux, Pedro Rojo Romeo. Ferroelectric HfO2 based devices fabrication and remaining issues. IUMRS-ICA 2019, Sep 2019, Perth, Australia. ⟨hal-02310137⟩
  • Jordan Bouaziz, Bertrand Vilquin, Pédro Rojo Romeo, Nicolas Baboux, Bruno Masenelli. Deposition of hafnium/zirconium oxides solid solution by reactive magnetron sputtering for fast and low power ferroelectric devices. Journée de la matière condensée 2018, Aug 2018, Grenoble, France. ⟨hal-02506592⟩
  • Halyna Volkova, P Gemeiner, Baba Wague, B. Vilquin, J. Guillot, et al.. Photoferroelectric Ba(Sn,Ti)O3 solid solutions. Journées Nationales du GDR OXIFUN 2018, Mar 2018, Piriac sur Mer, France. ⟨hal-01808081⟩
  • Ian O'Connor, Mayeul Cantan, Cedric Marchand, Bertrand Vilquin, Bastien Giraud, et al.. Prospects for energy-efficient edge computing with integrated HfO 2-based ferroelectric devices. IFIP/IEEE International Conference on Very Large Scale Integration (VLSI-SOC), Oct 2018, Verona, Italy. ⟨10.1109/VLSI-SoC.2018.8644809⟩. ⟨hal-01916992⟩
  • Bertrand Vilquin. Infra-red characterizations of metal oxide thin films. CMOS ET, May 2017, Varsovie, Poland. ⟨hal-02017626⟩
  • Sébastien Cueff, Regis Orobtchouk, Pedro Rojo Romeo, Bertrand Vilquin, Guillaume Saint-Girons, et al.. Contrôle dynamique de la lumière par des matériaux fonctionnels. Workshop du GDR Ondes, Oct 2017, sophia-antipolis, France. ⟨hal-01965364⟩
  • Alexandra Pavlova, Malik Kemiche, Jérémy Lhuillier, Thomas Wood, Radoslaw Mazurczyk, et al.. Vers la réalisation de composants optiques nonlinéaires intégrés sur puce exploitant du graphène. colloque SFO-PAMO, 24ème Congrès Général de la SFP, Jan 2017, Orsay, France. ⟨hal-01701490⟩
  • Xin Guan, Jeanne Becdelievre, Guillaume Saint-Girons, Romain Bachelet, Philippe Regreny, et al.. Growth of hybrid GaAs core / shell nanowires. GDR PULSE, 2016, Marseille, France. ⟨hal-01489098⟩
  • Jose Penuelas, Xin Guan, Jeanne Becdelievre, Guillaume Saint-Girons, Romain Bachelet, et al.. Semiconducting core / piezoelectric shell nanowires. PiezoNEMS workshop, 2016, Grenoble, France. ⟨hal-01489081⟩
  • Benjamin Meunier, Rahma Moalla, Adrien Carretero-Genevrier, L. Largeau, J. Gazquez, et al.. Interface reactivity and epitaxial growth of SrTiO3 and other functional oxides on Si and GaAs. IC-MBE 2016 international conference, 2016, Montpellier, France. ⟨hal-01489068⟩
  • Guillaume Saint-Girons, Sébastien Cueff, Benjamin Meunier, Romain Bachelet, Jose Penuelas, et al.. Functional oxides for optical devices. E-MRS 2016 Fall Meeting, Sep 2016, Warsaw, Poland. ⟨hal-01965369⟩
  • S. Cueff, P. Castera, A. Gutierrez, P. Romeo, R. Orobtchouk, et al.. Hybrid silicon-ferroelectric oxide platform for tunable nanophotonics on silicon. 2016 18th International Conference on Transparent Optical Networks (ICTON), Jul 2016, Trento, Italy. ⟨10.1109/ICTON.2016.7550429⟩. ⟨hal-01848690⟩
  • Sébastien Cueff, Régis Orobtchouk, Pedro Rojo-Romeo, A. Gutierrez, P. Castéra, et al.. Ferroelectric oxide slot waveguide electro-optic modulator on Silicon. SPIE Photonic West 2016 Conference, 2016, San-Francisco (USA), United States. ⟨hal-01489100⟩
  • Romain Bachelet, Mihai Apreutesei, Rahma Moalla, Benjamin Meunier, Sébastien Cueff, et al.. Oxydes fonctionnels intégrés sur Si pour des applications en énergie et photonique. JNMO, Jun 2016, Les Issambres, France. ⟨hal-01965366⟩
  • Ramah Moalla, M. Apreutesei, Bertrand Vilquin, Philippe Regreny, Claude Botella, et al.. Functional oxides on silicon for on-chip thermal management. XVth Electroceramics conference, Jun 2016, Limoges, France. ⟨hal-01965438⟩
  • Romain Bachelet, Patricia de Coux, Bénédicte Warot-Fonrose, Vassil Skumryev, G. Niu, et al.. Functional spinel oxide heterostructures on silicon. MRS 2015 Spring Meeting, Apr 2015, San-Francisco, United States. ⟨hal-01965452⟩
  • Julien Pézard, Mihai Lazar, Bertrand Vilquin, Pedro Rojo Romeo, Naoufel Haddour, et al.. Graphene Field Effect Transistors on SiC for High Speed and Bio-sensing Applications. JNTE (Journées Nationales des Technologies Emergentes), Nov 2015, Ecully, France. ⟨hal-01946338⟩
  • O. Copie, G. Le Rhun, Bertrand Vilquin, L. Tortech, C. Mathieu, et al.. Towards ferroelectric control of topological insulators and surface states. EMRS Spring Meeting, 2015, Lille, France. ⟨hal-01489616⟩
  • J. Pezard, Jérémy Lhuillier, Z. El-Friakh, V. Souliere, Pedro Rojo Romeo, et al.. Realization of a single layer graphene field effect transistor. EMRS Spring Meeting, 2015, Lille, France. ⟨hal-01489358⟩
  • Baba Wague, Qiang Liu, Simon Martin, Nicolas Baboux, David Albertini, et al.. Influence of the substrate on structural and electrical behaviors of BST thin film. EMRS Spring Meeting 2015, 2015, Lille, France. ⟨hal-01489370⟩
  • P. Lecoeur, D. Le Bourdais, G. Agnus, T. Maroutian, M. Matzen, et al.. Perovskite Oxide MEMS: Strain Control and Sensor Applications. MRS 2015 Fall Meeting, 2015, Boston (USA), United States. ⟨hal-01489582⟩
  • D. Le Bourdais, G. Agnus, T. Maroutian, V. Pillard, Guillaume Saint-Girons, et al.. Functional oxide pressure sensor. EMRS Spring Meeting, 2015, Lille, France. ⟨hal-01489374⟩
  • Qiang Liu, Simon Martin, Nicolas Baboux, David Albertini, Brice Gautier, et al.. Study of the conduction mechanism through a Pb(Zr,Ti)O3 thin film. EMRS Spring Meeting, 2015, Lille, France. ⟨hal-01489622⟩
  • Rahma Moalla, Qiang Liu, J. Vila-Fungueiriño, Adrien Carretero-Genevrier, B. Rivas-Murias, et al.. Thermal energy harvesting through epitaxial pyroelectric oxide films integrated on silicon. EMRS 2015 Spring Meeting, 2015, Lille, France. ⟨hal-01489612⟩
  • Rahma Moalla, Nicolas Baboux, G. Sebald, Bertrand Vilquin, Guillaume Saint-Girons, et al.. Monolithic integration of pyroelectric oxide films on silicon for thermal energy harvesting and cooling applications. EMRS 2015 Fall Meeting, 2015, Varsovie, Poland. ⟨hal-01489342⟩
  • Rahma Moalla, Qiang Liu, Guillaume Saint-Girons, Bertrand Vilquin, Nicolas Baboux, et al.. Epitaxial pyroelectric Pb(Zr,Ti)O3 thin films on silicon for thermal energy harvesting. EMRS 2015 Spring Meeting, 2015, Lille, France. ⟨hal-01489367⟩
  • Benjamin Meunier, Romain Bachelet, Bertrand Vilquin, Pedro Rojo-Romeo, Geneviève Grenet, et al.. Epitaxial growth of ferroelectric Pb(Zr,Ti)O3 thin layers on SrTiO3-templated GaAs/InGaAs quantum well structure for opto-mechanical application. EMRS 2015 Spring Meeting, 2015, Lille, France. ⟨hal-01489362⟩
  • Alexis Borowiak, H. Tanaka, Nicolas Baboux, David Albertini, Bertrand Vilquin, et al.. Electromechanical response of amorphous LaAlO3 thin film probed by scanning probe microscopies. ISAF 2015 conference, 2015, Singapour, Singapore. ⟨hal-01489365⟩
  • Rahma Moalla, Bertrand Vilquin, Guillaume Saint-Girons, Nicolas Baboux, G. Sebald, et al.. Strong electrocaloric anisotropy in epitaxial Pb(Zr,Ti)O3 heterostructures. EMRS 2015 Fall Meeting, Sep 2015, Varsovie, Poland. ⟨hal-01489353⟩
  • Benjamin Meunier, Geneviève Grenet, Claude Botella, Philippe Regreny, Romain Bachelet, et al.. Epitaxial growth of SrTiO3 on GaAs : Towards opto-mechanical applications. Europ. Material research Society EMRS, 2015, Lille, France. ⟨hal-01489364⟩
  • Benjamin Meunier, Romain Bachelet, Bertrand Vilquin, Pedro Rojo-Romeo, Geneviève Grenet, et al.. Epitaxial growth of ferroelectric Pb(Zr,Ti)O3 thin layers on SrTiO3-templated GaAs/InGaAs quantum well structure for opto-mechanical application. EuroMBE 2015 conference, 2015, Canazei, Italy. ⟨hal-01489363⟩
  • Sébastien Cueff, Regis Orobtchouk, Pedro Rojo-Romeo, Baba Wague, Xuan Hu, et al.. Hybrid silicon-ferroelectric oxide slot waveguide for on-chip optoelectronics. MRS Fall Meeting, 2015, Boston (USA), United States. ⟨hal-01489369⟩
  • Sébastien Cueff, Mihai Apreutesei, R. Moalla, B. Meunier, X. Hu, et al.. SrTiO3 thin layers on Si: epitaxy and use as templates for thermal energy management and photonic integrated devices. Journees Nationales sur les Technologies Emergentes en micro/nanofabrication (JNTE), Nov 2015, Ecully, France. ⟨hal-01291404⟩
  • C. Debray, C. Delcamp, Z. El-Friakhj, J. Henri, Jérémy Lhuillier, et al.. Texturation control of Pb(Zr,Ti)O3 films on SOI substrate. ICMAST, 2014, Bilbao, Spain. ⟨hal-01489823⟩
  • J. Pezard, Jérémy Lhuillier, Z. El-Friakh, V. Souliere, Pédro Rojo Romeo, et al.. Graphene on 4H-SiC for terahertz transistors and ferroelectric non-volatile memories. CSCRM, 2014, Grenoble, France. ⟨hal-01489926⟩
  • X. Hu, R. Orobtchouk, S. Cueff, P. Rojo Romeo, P. Regreny, et al.. Slot waveguide electro-optic modulator with ferroelectric oxide BaTiO3 on silicon. 2014 IEEE 11th International Conference on Group IV Photonics, Aug 2014, Paris, France. ⟨10.1109/Group4.2014.6961944⟩. ⟨hal-01848756⟩
  • P. Sanchis, L. Sanchez, P. Castera, A. Rosa, A. Gutierrez, et al.. Silicon CMOS compatible transition metal dioxide technology for boosting highly integrated photonic devices with disruptive performance. 2014 16th International Conference on Transparent Optical Networks (ICTON), Jul 2014, Graz, Austria. ⟨10.1109/ICTON.2014.6876505⟩. ⟨hal-01848763⟩
  • Rahma Moalla, Lucie Mazet, Lamis Louahadj, Qiang Liu, Jose Penuelas, et al.. Epitaxial pyroelectric thin films on silicon for thermal energy harvesting. Nanotech MEET conference 2014, Apr 2014, Hammamet, Tunisia. ⟨hal-01489914⟩
  • Romain Bachelet, Lamis Louahadj, Lucie Mazet, Rahma Moalla, Gang Niu, et al.. Integration of functional oxides on silicon for nanoelectronics and energy. International Conference on Materials and Characterization Techniques (ICMCT), 2014, VIT Univ., Vellore, Chennai, India. ⟨hal-01490283⟩
  • Rahma Moalla, Lucie Mazet, Lamis Louahadj, Qiang Liu, Jose Penuelas, et al.. Epitaxial pyroelectric thin films on silicon for thermal energy harvesting. European Materials Research Society (E-MRS), Spring Meeting, 2014, Lille, France. ⟨hal-01489913⟩
  • Guillaume Saint-Girons, Sébastien Cueff, Benjamin Meunier, Xuan Hu, Lamis Louahadj, et al.. Heterostructures combining functional oxides and semiconductors for integrated photonics. Workshop “Les oxydes pour l’optique et la photonique”, Dec 2014, Meudon, France. ⟨hal-01490286⟩
  • Sébastien Cueff, Xuan Hu, Regis Orobtchouk, Pédro Rojo Romeo, C. Bachelet, et al.. Electro-optic modulation with functional oxides monolithically integrated on silicon. Silicon Photonics Summer School organized by PLAT4M project, 2014, Ghent, Belgium. ⟨hal-01489917⟩
  • Sébastien Cueff, Xuan Hu, Regis Orobtchouk, Pedro Rojo Romeo, Romain Bachelet, et al.. Electro-optic modulation using hybrid silicon-ferroelectric oxide slot waveguide. Workshop “Les oxydes pour l’optique et la photonique”, 2014, Meudon, France. ⟨hal-01489872⟩
  • J. Penuelas, F. Boudaa, R. Bachelet, B. Vilquin, Bruno Masenelli, et al.. Growth of semiconducting core / functional oxide shell nanowires. PiezoNEMS'2013, Nov 2013, grenoble, France. ⟨hal-01060922⟩
  • F. Casset, A. Devos, J. Abergel, G. Le Rhun, B. Vilquin, et al.. Young modulus and Poisson ratio of polycrystalline and single crystal PZT thin-film measured by picosecond ultrasonics. IEEE International Ultrasonics Symposium, IUS 2013, 2013, Prague, Czech Republic. ⟨hal-00944050⟩

Poster communications11 documents

  • J Bouaziz, N Baboux, P Rojo-Romeo, Bertrand Vilquin. Reduction of HfZrO2 capacitor wake-up effect. Materials Challenges for Memory, Apr 2021, New York, United States. ⟨hal-03273119⟩
  • Greta Segantini, Pedro Romeo, Benoit Manchon, Nicolas Baboux, Ingrid Infante, et al.. Bottom electrodes impact on Hf0.5Zr0.5O2 ferroelectric tunnel junctions. EMRS Spring Meeting 2021, May 2021, Virtual, France. ⟨hal-03275569⟩
  • Pedro Rojo Romeo, Infante Ingrid C., Greta Segantini, Pedro Romeo, Benoit Manchon, et al.. Influence of bottom electrodes on HZO thin film features. Material Challenge for Memory Applications 2021, Apr 2021, New York, United States. ⟨hal-03274227⟩
  • Jérémy Lhuillier, Pierre Demongodin, Thomas Wood, Malik Kemiche, Bertrand Vilquin, et al.. Spatial modulation of graphene's chemical potential. Graphene2020, Jun 2020, Grenoble, France. ⟨hal-02618057⟩
  • Sergio Gonzalez Casal, David Albertini, Infante Ingrid C., Nicolas Baboux, Solène Brottet, et al.. Study of the Electrical and Electronic Properties of Domains and Domain Walls in Ferroelectrics Combining AFM and STEM Techniques. International Symposium on the Application of Ferroelectrics (ISAF), Jul 2019, Lausanne, Switzerland. ⟨hal-02461378⟩
  • Jordan Bouaziz, Pedro Rojo Romeo, Nicolas Baboux, Brice Gautier, Bertrand Vilquin. A Thorough Study of Ferroelectric Sputtered (Hf, Zr)O2 Solid Solutions. International Symposium on the Application of Ferroelectrics, Jul 2019, Lausanne, Switzerland. ⟨hal-02461347⟩
  • Jordan Bouaziz, Bertrand Vilquin, Pedro Rojo Romeo, Nicolas Baboux, Bruno Masenelli. Deposition of doped and undoped HfO2 for fast and low energy consumption ferroelectric devices. 6th International Conference SENSO Workshop, Jun 2018, Gardanne, France. ⟨hal-02506625⟩
  • Jordan Bouaziz, Bertrand Vilquin, Pedro Rojo Romeo, Nicolas Baboux, Bruno Masenelli. Comparison between Sputtering and Atomic Layer Deposition of ferroelectric doped and undoped HfO2. EMRS Spring Meeting 2017, May 2017, Strasbourg, France. ⟨hal-02506676⟩
  • T.-H. Nguyen, A. Apostoluk, B. Masenelli, P. Rojo-Romeo, B. Vilquin, et al.. Nanofils et capteurs de gaz. Workshop Lyonnais sur les Nanosciences et les Nanotechnologies, Jun 2015, Lyon, France. 2016. ⟨hal-01374549⟩
  • T.-H. Nguyen, Vincent Consonni, E. Appert, R. Parize, F. Gaillard, et al.. Metal oxides nanowires for optical gas sensing. Journées Nationales sur les Technologies Emergentes en Micro-Nanofabrication, JNTE 2015, Nov 2015, Lyon, France. ⟨hal-01374542⟩
  • Rahma Moalla, Lucie Mazet, Lamis Louahadj, Qiang Liu, Jose Penuelas, et al.. Epitaxial pyroelectric thin films on silicon for thermal energy harvesting. Nanotech MEET conference 2014, Apr 2014, Hammamet, Tunisia. 2014. ⟨hal-01489793⟩

Book sections4 documents

  • Gang Niu, Guillaume Saint-Girons, Bertrand Vilquin. Epitaxial Systems Combining Oxides and Semiconductors. Molecular Beam Epitaxy (Second Edition) From Research to Mass Production, Elsevier, pp.377-402, 2018. ⟨hal-02273400⟩
  • Gang Niu, Guillaume Saint-Girons, Bertrand Vilquin. Epitaxial systems combining oxides and semiconductors. Molecular Beam Epitaxy, Elsevier, pp.451-475, 2013. ⟨hal-02273398⟩
  • Miao Zhong, Mario Kurniawan, Aleksandra Apostoluk, Bertrand Vilquin, Jean-Jacques Delaunay. Nanowires on film for photoelectrochemical water splitting. Nanowires - Recent Advances, InTech, 2012, ⟨10.5772/52593⟩. ⟨hal-01986747⟩
  • G. Saint-Girons, M. Gendry, H. Dumont, P. Regreny, J. Cheng, et al.. Vers l'intégration monolithique d'hétérostructures et de nanostructures III-V et Ge sur silicium pour la microélectronique et l'optoélectronique. Leray J.L., Boudenot J.C., Gautier J. La micro-nano électronique, enjeux et mutations, CNRS ÉDITIONS, pp.179-182, 2009. ⟨hal-00575787⟩