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Bernard Legrand
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A Simple Fabrication Process Based on Micro-masonry for the Realization of Nanoplate Resonators with Integrated Actuation and Detection SchemesFrontiers of Mechanical Engineering in China, 2016, 2 (1), ⟨10.3389/fmech.2016.00001⟩
Article dans une revue
hal-01960876v1
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Fabrication of nanoplate resonating structures via micro-masonryJournal of Micromechanics and Microengineering, 2014, 24 (11), pp.115012. ⟨10.1088/0960-1317/24/11/115012⟩
Article dans une revue
hal-01687810v1
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Finite elements based reduced order models for nonlinear dynamics of piezoelectric and dielectric laminated micro/nanostructuresEUROMECH Colloquium 603, Dynamics of micro and nano systems, Sep 2018, Porto, Portugal
Communication dans un congrès
hal-01962993v1
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Driving and sensing M/NEMS flexural vibration using dielectric transduction31st International Conference EUROSENSORS, EUROSENSORS 2017, Sep 2017, Paris, France
Communication dans un congrès
hal-01962981v1
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High-K thin films for simultaneous dielectric actuation and detection of M/NEMS flexural vibration19th International Conference on Solid-State Sensors, Actuators and Microsystems TRANSDUCERS 17, Jun 2017, Kaohsiung, Taiwan. ⟨10.1109/TRANSDUCERS.2017.7994155⟩
Communication dans un congrès
hal-01962426v1
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Micro-masonry for the simple fabrication of nanoplate resonators with integrated electrostatic transduction transduction42nd International Conference on Micro and Nano Engineering, MNE 2016, Sep 2016, Vienne, Austria
Communication dans un congrès
hal-01962410v1
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