Documentation
Français (FR)

Anglais (EN)

Bernard Legrand

3

Documents

Publications

fabrice-mathieu

"thierry-leichle"

	A Simple Fabrication Process Based on Micro-masonry for the Realization of Nanoplate Resonators with Integrated Actuation and Detection Schemes Adhitya Bhaswara , Hohyun Keum , Fabrice Mathieu , Bernard Legrand , Seok Kim Frontiers of Mechanical Engineering in China, 2016, 2 (1), ⟨10.3389/fmech.2016.00001⟩ Article dans une revue hal-01960876v1
	Fabrication of nanoplate resonating structures via micro-masonry Adhitya Bhaswara , Hohyun Keum , S Rhee , Bernard Legrand , Fabrice Mathieu Journal of Micromechanics and Microengineering, 2014, 24 (11), pp.115012. ⟨10.1088/0960-1317/24/11/115012⟩ Article dans une revue hal-01687810v1

	Micro-masonry for the simple fabrication of nanoplate resonators with integrated electrostatic transduction transduction Adhitya Bhaswara , Hohyun Keum , Fabrice Mathieu , Bernard Legrand , Seok Kim 42nd International Conference on Micro and Nano Engineering, MNE 2016, Sep 2016, Vienne, Austria Communication dans un congrès hal-01962410v1