Co-auteurs

Nombre de documents

137

CV Bernard Legrand


Article dans une revue47 documents

  • C. Goyhenex, G. Tréglia, B. Legrand. Environment dependence of magnetic moment and atomic level shifts within tight-binding approximation: An illustration in the case of cobalt. Surface Science, Elsevier, 2016, 646 (SI), pp.261-268. 〈10.1016/j.susc.2015.09.004〉. 〈hal-01455014〉
  • Denis Faure, Patricia Bonin, Robert Duran, Sophie Sablé, Pierre Amato, et al.. Environmental microbiology as a mosaic of explored ecosystems and issues. Environmental Science and Pollution Research, Springer Verlag, 2015, 22 (18), pp.13577-13598. 〈10.1007/s11356-015-5164-5〉. 〈hal-01247096〉
  • B. Zhu, H. Guesmi, J. Creuze, B. Legrand, C. Mottet. Crossover among structural motifs in Pd–Au nanoalloys. Physical Chemistry Chemical Physics, Royal Society of Chemistry, 2015, 17, pp.28129-28136. 〈hal-01222110〉
  • Jérôme Creuze, Hazar Guesmi, Christine Mottet, Beien Zhu, Bernard Legrand. Surface segregation in AuPd alloys: Ab initio analysis of the driving forces. Surface Science, Elsevier, 2015, 639, pp.48 - 53. 〈10.1016/j.susc.2015.04.017〉. 〈hal-01378430〉
  • Z. Xiong, B. Walter, E. Mairiaux, M. Faucher, L. Buchaillot, et al.. MEMS piezoresistive ring resonator for AFM imaging with pico-Newton force resolution. Journal of Micromechanics and Microengineering, IOP Publishing, 2013, 23, pp.035016-1-10. 〈10.1088/0960-1317/23/3/035016〉. 〈hal-00795965〉
  • Z. Xiong, B. Walter, E. Mairiaux, M. Faucher, L. Buchaillot, et al.. Piezoresistive ring-shaped AFM sensors with pico-newton force resolution. International Journal of Intelligent Mechatronics and Robotics, 2013, 3, pp.38-52. 〈10.4018/ijimr.2013010104〉. 〈hal-00871948〉
  • T. Dargent, K. Haddadi, T. Lasri, N. Clément, D. Ducatteau, et al.. An interferometric scanning microwave microscope and calibration method for sub-fF microwave measurements. Review of Scientific Instruments, American Institute of Physics, 2013, 84, 123705, 7 p. 〈10.1063/1.4848995〉. 〈hal-00922585〉
  • B. Legrand, D. Ducatteau, D. Theron, B. Walter, H. Tanbakuchi. Detecting response of microelectromechanical resonators by microwave reflectometry. Applied Physics Letters, American Institute of Physics, 2013, 103, pp.053124-1-5. 〈10.1063/1.4817411〉. 〈hal-00871931〉
  • E. Algre, Z. Xiong, M. Faucher, B. Walter, L. Buchaillot, et al.. MEMS ring resonators for laserless AFM with sub-nanoNewton force resolution. Journal of Microelectromechanical Systems, Institute of Electrical and Electronics Engineers, 2012, 21, pp.385-397. 〈10.1109/JMEMS.2011.2179012〉. 〈hal-00787407〉
  • E. Herth, E. Algre, P. Tilmant, M. François, C. Boyaval, et al.. Performances of the negative tone resist AZnLOF 2020 for nanotechnology applications. IEEE Transactions on Nanotechnology, Institute of Electrical and Electronics Engineers, 2012, 11, pp.854-859. 〈10.1109/TNANO.2012.2196802〉. 〈hal-00787415〉
  • E. Herth, E. Algré, B. Legrand, L. Buchaillot. Optimization of ohmic contact and adhesion on polysilicon in MEMS-NEMS wet etching process. Microelectronic Engineering, Elsevier, 2011, 88, pp.724-728. 〈10.1016/j.mee.2010.06.032〉. 〈hal-00579051〉
  • A.S. Rollier, D.F.L. Jenkins, E. Dogheche, B. Legrand, M. Faucher, et al.. Development of a new generation of active AFM tools for applications in liquids. Journal of Micromechanics and Microengineering, IOP Publishing, 2010, 20, pp.085010-1-11. 〈10.1088/0960-1317/20/8/085010〉. 〈hal-00548990〉
  • M. Sworowski, F. Neuilly, B. Legrand, A. Summanwar, P. Philippe, et al.. Fabrication of 24-MHz-disk resonators with silicon passive integration technology. IEEE Electron Device Letters, Institute of Electrical and Electronics Engineers, 2010, 31, pp.23-25. 〈10.1109/LED.2009.2034542〉. 〈hal-00548984〉
  • E. Herth, P. Tilmant, M. Faucher, M. François, C. Boyaval, et al.. Electron beam nanolithography in AZnLOF 2020. Microelectronic Engineering, Elsevier, 2010, 87, pp.2057-2060. 〈10.1016/j.mee.2009.12.079〉. 〈hal-00548989〉
  • E. Herth, B. Legrand, L. Buchaillot, N. Rolland, T. Lasri. Optimization of SiNX:H films deposited by PECVD for reliability of electronic, microsystems and optical applications. Microelectronics Reliability, Elsevier, 2010, 50, pp.1103-1106. 〈10.1016/j.microrel.2010.04.011〉. 〈hal-00549491〉
  • G. Guisbiers, E. Herth, B. Legrand, N. Rolland, T. Lasri, et al.. Materials selection procedure for RF-MEMS. Microelectronic Engineering, Elsevier, 2010, 87, pp.1792-1795. 〈10.1016/j.mee.2009.10.016〉. 〈hal-00549627〉
  • M. Ataka, B. Legrand, L. Buchaillot, D. Collard, H. Fujita. Design, fabrication, and operation of two-dimensional conveyance system with ciliary actuator arrays. IEEE/ASME Transactions on Mechatronics, Institute of Electrical and Electronics Engineers, 2009, 14, pp.119-125. 〈10.1109/TMECH.2008.2004770〉. 〈hal-00472723〉
  • B. Walter, M. Faucher, E. Algré, B. Legrand, Rodolphe Boisgard, et al.. Design and operation of a silicon ring resonator for force sensing applications above 1 MHz. Journal of Micromechanics and Microengineering, IOP Publishing, 2009, 19 (11), pp.115009-1-7. 〈10.1088/0960-1317/19/11/115009〉. 〈hal-00472725〉
  • D. Hourlier, B. Legrand, C. Boyaval, P. Perrot. Towards silicon-nanowire-structured materials by the intimate mixing of patterning the solid state and chemical reactions. Journal of Nano Research, Trans Tech Publications, 2009, 6, pp.215-224. 〈10.4028/www.scientific.net/JNanoR.6.215〉. 〈hal-00471951〉
  • C. Yamahata, D. Collard, B. Legrand, T. Takekawa, M. Kumemura, et al.. Silicon nanotweezers with subnanometer resolution for the micromanipulation of biomolecules. Journal of Microelectromechanical Systems, Institute of Electrical and Electronics Engineers, 2008, 17, pp.623-631. 〈10.1109/JMEMS.2008.922080〉. 〈hal-00357278〉
  • Cédric Durand, Fabrice Casset, Philippe Renaux, Nicolas Abelé, Bernard Legrand, et al.. In-Plane Silicon-On-Nothing Nanometer-Scale Resonant Suspended Gate MOSFET for In-IC Integration Perspectives. IEEE Electron Device Letters, Institute of Electrical and Electronics Engineers, 2008, 29 (5), pp.494-496. 〈cea-00320837〉
  • C. Durand, F. Casset, P. Renaux, N. Abele, B. Legrand, et al.. In-plane silicon-on-nothing nanometer-scale resonant suspended gate MOSFET for in-IC integration perspectives. IEEE Electron Device Letters, Institute of Electrical and Electronics Engineers, 2008, 29, pp.494-496. 〈10.1109/LED.2008.919781〉. 〈hal-00357277〉
  • B. Legrand, A.E. Ashcroft, L. Buchaillot, S. Arscott. SOI-based nanoelectrospray emitter tips for mass spectrometry : a coupled MEMS and microfluidic design. Journal of Micromechanics and Microengineering, IOP Publishing, 2007, 17, pp.509-514. 〈10.1088/0960-1317/17/3/013〉. 〈hal-00283051〉
  • D. Collard, C. Yamahata, B. Legrand, T. Takekawa, M. Kumemura, et al.. Towards mechanical characterization of biomolecules by MNEMS tools. IEEJ Transactions on Electrical and Electronic Engineering, Institute of Electrical Engineers of Japan, 2007, 2, pp.262-271. 〈10.1002/tee.20154〉. 〈hal-00283054〉
  • P. Basset, A. Kaiser, B. Legrand, D. Collard, L. Buchaillot. Complete system for wireless powering and remote control of electrostatic actuators by inductive coupling. IEEE/ASME Transactions on Mechatronics, Institute of Electrical and Electronics Engineers, 2007, 12, pp.23-31. 〈10.1109/TMECH.2006.886245〉. 〈hal-00255847〉
  • S. Arscott, B. Legrand, L. Buchaillot, A.E. Ashcroft. A silicon beam-based microcantilever nanoelectrosprayer. Sensors and Actuators B: Chemical, Elsevier, 2007, 125, pp.72-78. 〈10.1016/j.snb.2007.01.040〉. 〈hal-00283052〉
  • A.S. Rollier, B. Legrand, D. Collard, L. Buchaillot. Stability and pull-in voltage of electrostatic parallel-plate actuators in liquid solutions. Journal of Micromechanics and Microengineering, IOP Publishing, 2006, 16, pp.794-801. 〈hal-00128663〉
  • D. Galayko, A. Kaiser, B. Legrand, L. Buchaillot, C. Combi, et al.. Coupled-resonator micromechanical filters with voltage tunable bandpass characteristic in thickfilm polysilicon technology. Sensors and Actuators A: Physical , Elsevier, 2006, 126, pp.227-240. 〈hal-00138651〉
  • B. Legrand, A.S. Rollier, D. Collard, L. Buchaillot. Suppression of the pull-in instability for parallel-plate electrostatic actuators operated in dielectric liquids. Applied Physics Letters, American Institute of Physics, 2006, 88, pp.034105-1-3. 〈hal-00128662〉
  • D. Stievenard, B. Legrand. Silicon surface nano-oxidation using scanning probe microscopy. Progress in Surface Science, Elsevier, 2006, 81, pp.112-140. 〈hal-00127846〉
  • V. Agache, R. Ringot, P. Bigotte, V. Senez, B. Legrand, et al.. Modeling and experimental validation of sharpening mechanism based on thermal oxidation for fabrication of ultra-sharp silicon nanotips. IEEE Transactions on Nanotechnology, Institute of Electrical and Electronics Engineers, 2005, 4, pp.548-556. 〈hal-00125632〉
  • D. Galayko, A. Kaiser, B. Legrand, L. Buchaillot, D. Collard, et al.. Tunable passband T-filter electrostatically driven polysilicon micromechanical resonators. Sensors and Actuators A: Physical , Elsevier, 2005, 117, pp.115-120. 〈hal-00125630〉
  • V. Agache, B. Legrand, D. Collard, L. Buchaillot, H. Fujita. Fabrication and characterization of 1.1 GHz blade nanoelectromechanical resonator. Applied Physics Letters, American Institute of Physics, 2005, 86, pp.213104-1-3. 〈hal-00125633〉
  • D. Galayko, A. Kaiser, L. Buchaillot, B. Legrand, D. Collard, et al.. Design, realization and testing of micro-mechanical resonators in thick-film silicon technology with postprocess electrode to resonator gap reduction. Journal of Micromechanics and Microengineering, IOP Publishing, 2003, 13, pp.134-140. 〈hal-00146391〉
  • O. Millet, B. Legrand, D. Collard, L. Buchaillot. Influence on the step covering on fatigue phenomenon for polycrystalline silicon MEMS. Japanese Journal of Applied Physics, Japan Society of Applied Physics, 2003, 41, pp.L1339-L1341. 〈hal-00146435〉
  • D. Collard, H. Fujita, H. Toshiyoshi, B. Legrand, L. Buchaillot. Electrostatic micro actuators. Nano et micro technologies, 2002, 2, pp.83-124. 〈hal-00148761〉
  • O. Millet, B. Legrand, D. Collard, L. Buchaillot. Influence of the step covering on fatigue phenomenon for polycrystalline silicon micro-electro-mechanical-systems (MEMS). Japanese Journal of Applied Physics, part 2 : Letters, Japan Society of Applied Physics, 2002, 41, pp.L1339-L1341. 〈hal-00250391〉
  • B. Legrand, D. Deresmes, D. Stievenard. Silicon nanowires with sub 10 nm lateral dimensions : from AFM lithography based fabrication to electrical measurements. Journal of Vacuum Science and Technology, American Vacuum Society (AVS), 2002, 20, pp.862-870. 〈hal-00148765〉
  • D. Collard, H. Fujita, H. Toshiyoshi, B. Legrand, L. Buchaillot. Surface micro-machining : an overview. Nano et micro technologies, 2002, 2, pp.35-50. 〈hal-00148781〉
  • B. Legrand, E. Quévy, B. Stefanelli, D. Collard, L. Buchaillot. Vacuum and cryogenic station for Micro-Electro-Mechanical Systems probing and testing. Review of Scientific Instruments, American Institute of Physics, 2002, 73, pp.4393-4395. 〈hal-00148782〉
  • V. Agache, B. Legrand, D. Collard, L. Buchaillot. Adhesive forces investigation on a silicon tip by contact mode atomic force microscope. Applied Physics Letters, American Institute of Physics, 2002, 81, pp.2623-2625. 〈hal-00148768〉
  • B. Legrand, V. Agache, T. Melin, J.P. Nys, V. Senez, et al.. Thermally assisted formation of silicon islands on a silicon-on-insulator substrate. Journal of Applied Physics, American Institute of Physics, 2002, 91, pp.106-111. 〈hal-00149668〉
  • B. Legrand, V. Agache, T. Mélin, J.P. Nys, V. Senez, et al.. Thermally assisted formation of silicon islands on a silicon on insulator substrate. Journal of Applied Physics, American Institute of Physics, 2001, 91, pp.106-111. 〈hal-00152464〉
  • B. Legrand, D. Stievenard. Atomic force microscope tip-surface behaviour under continuous bias or pulsed voltages in non contact mode. Applied Physics Letters, American Institute of Physics, 2000, 76, pp.1018-1020. 〈hal-00158646〉
  • B. Legrand, V. Agache, J.P. Nys, V. Senez, D. Stievenard. Formation of silicon islands on a silicon on insulator substrate upon thermal annealing. Applied Physics Letters, American Institute of Physics, 2000, 76, pp.3271-3273. 〈hal-00158648〉
  • B. Legrand, V. Agache, J.P. Nys, V. Senez, D. Stievenard. Formation of silicon islands on a silicon on insulator substrate upon thermal annealing. Applied Physics Letters, American Institute of Physics, 2000, 76, pp.3271-3273. 〈hal-00158537〉
  • B. Grandidier, Y.M. Niquet, B. Legrand, J.P. Nys, C. Priester, et al.. Imaging the wave function amplitudes in cleaved semiconductor quantum boxes. Physical Review Letters, American Physical Society, 2000, 85, pp.1068-1071. 〈hal-00158644〉

Communication dans un congrès81 documents

  • Cécile Fuinel, Khadim Daffé, Adrian Laborde, Olivier Thomas, Laurent Mazenq, et al.. HIGH-K THIN FILMS AS DIELECTRIC TRANSDUCERS FOR FLEXURAL M/NEMS RESONATORS. The 29th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2016), Jan 2016, Shanghai, China. 〈hal-01279717〉
  • Fei Wang, Nicolas Clément, Damien Ducatteau, David Troadec, Bernard Legrand, et al.. Caractérisation quantitative des capacités sous échelle de 10 nm avec un interférométrique scanning-microwave-microscopy. 17èmes Journées Nationales du Réseau Doctoral en Micro-Nanoélectronique, JNRDM 2014, 2014, Villeneuve d'Ascq, France. 3 p., 2014. 〈hal-01018379〉
  • Lionel Buchaillot, Estelle Mairiaux, Benjamin Walter, Zhuang Xiong, Marc Faucher, et al.. Near-field microscopy : is there an alternative to micro and nano resonating cantilevers ?. IEEE International Frequency Control Symposium, IFCS 2014, 2014, Taipei, Taiwan. 2014, 〈10.1109/FCS.2014.6859928〉. 〈hal-01055047〉
  • Z. Xiong, B. Walter, E. Mairiaux, M. Faucher, L. Buchaillot, et al.. Towards a new generation of MEMS-based AFM probes. International Scanning Probe Microscopy Conference, ISPM 2013, 2013, Dijon, France. 〈hal-00878807〉
  • N. Clement, T. Dargent, H. Tanbakuchi, K. Nishiguchi, R. Sivakumarasamy, et al.. Interferometric scanning microwave microscope for nanotechnology application. American Physical Society March Meeting, APS March Meeting 2013, 2013, Baltimore, MD, United States. 〈hal-00811777〉
  • Z. Xiong, E. Mairiaux, B. Walter, M. Faucher, L. Buchaillot, et al.. 5.4 MHz dog-bone oscillating AFM probe with thermal actuation and piezoresistive detection. 26th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2013, 2013, Taipei, Taiwan. pp.592-595, 2013, 〈10.1109/MEMSYS.2013.6474311〉. 〈hal-00809858〉
  • Fei Wang, Nicolas Clément, David Troadec, Bernard Legrand, Gilles Dambrine, et al.. Nanoscale capacitors study with an interferometric scanning microwave microscope. Materials Research Society Fall Meeting, MRS Fall 2013, Symposium LL : Advances in Scanning Probe Microscopy, 2013, Boston, MA, United States. 〈hal-00944017〉
  • B. Legrand, D. Ducatteau, D. Theron, B. Walter, H. Tanbakuchi. Microwave reflectometry : a high-resolution technique for measuring vibration of capacitive microresonators. 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2013, 2013, Barcelona, Spain. paper M3P.140, 566-569, Outstanding poster presentation award nomination, 2013, 〈10.1109/Transducers.2013.6626829〉. 〈hal-00877759〉
  • B. Walter, E. Mairiaux, Z. Xiong, M. Faucher, L. Buchaillot, et al.. DNA origami imaging with 10.9 MHz AFM MEMS probes. 25th IEEE Conference on Micro Electro Mechanical Systems, MEMS 2012, 2012, Paris, France. pp.555-558, 2012, 〈10.1109/MEMSYS.2012.6170236〉. 〈hal-00801107〉
  • Z. Xiong, B. Walter, E. Mairiaux, M. Faucher, L. Buchaillot, et al.. Piezo-resistive ring-shaped AFM sensors with pico-newton force resolution. 2nd International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2012, 2012, Xi'an, China. Paper ID 1200991, Best application paper award, 184-189, 2012. 〈hal-00801105〉
  • B. Walter, M. Faucher, E. Mairiaux, Z. Xiong, L. Buchaillot, et al.. Micro-résonateurs haute fréquence pour la microscopie à force atomique. 15ème Forum des Microscopies à Sonde Locale, 2012, Saint-Jacut-de-la-Mer, France. 〈hal-00797718〉
  • Z. Xiong, B. Walter, E. Mairiaux, M. Faucher, L. Buchaillot, et al.. Conception and fabrication of piezo-resistive ring shaped AFM probe. 25th IEEE Conference on Micro Electro Mechanical Systems, MEMS 2012, 2012, Paris, France. pp.547-550, 2012, 〈10.1109/MEMSYS.2012.6170180〉. 〈hal-00801106〉
  • T. Dargent, D. Ducatteau, B. Legrand, H. Tanbakuchi, D. Theron. SOL-like calibrated RF measurements at the nanoscale on a modified scanning microwave microscope. 2nd Nano Measure Scientific Symposium, Nano Measure 2012, 2012, Stanford, CA, United States. 〈hal-00797722〉
  • B. Walter, M. Faucher, E. Mairiaux, Z. Xiong, L. Buchaillot, et al.. Micro-résonateurs haute fréquence pour la microscopie à force atomique. Journées Nationales du GDR Micro Nano Systèmes-Micro Nano Fluidique, 2012, Bordeaux, France. 〈hal-00797720〉
  • B. Walter, M. Faucher, E. Mairiaux, Z. Xiong, L. Buchaillot, et al.. [Invité] Apport des microsystèmes pour la microscopie à force atomique. Journée thématique trans-GDR '' Micromanipulation pour les Micro-Nano Systèmes '', 2012, Besançon, France. 〈hal-00797716〉
  • B. Walter, M. Faucher, E. Mairiaux, Z. Xiong, L. Buchaillot, et al.. 4.8 MHz AFM nanoprobes with capacitive transducers and batch-fabricated nanotips. 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011, 2011, Mexico. pp.517-520, 2011, 〈10.1109/MEMSYS.2011.5734475〉. 〈hal-00579045〉
  • B. Walter, Z. Xiong, E. Algre, E. Mairiaux, M. Faucher, et al.. [Invité] Apport des micro et nano-systèmes pour la microscopie à force atomique. Journées Nationales Nanosciences et Nanotechnologies, J3N 2011, 2011, Strasbourg, France. 〈hal-00807204〉
  • Z. Xiong, B. Walter, E. Mairiaux, M. Faucher, L. Buchaillot, et al.. Conception and fabrication of silicon ring resonator with piezo-resistive detection for force sensing applications. ASME 2011 International Mechanical Engineering Congress & Exposition, IMECE 2011, 2011, Denver, CO, United States. pp.IMECE2011-65083-1-5, 2011. 〈hal-00800036〉
  • A. Grira, B. Legrand, C. Rotinat-Libersa, E. Mairiaux, L. Buchaillot. Optimal design of non intuitive compliant microgripper with high resolution. IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS 2011, 2011, San Francisco, CA, United States. pp.45-50, 2011, 〈10.1109/IROS.2011.6048665〉. 〈hal-00800034〉
  • M. Faucher, B. Legrand, B. Walter, E. Algre, A. Ben-Amar, et al.. [Invité] Micro et nanorésonateurs électromécaniques radio-fréquences. Principes et applications. TELECOM'2011 & 7èmes Journées Franco-Maghrébines des Micro-ondes et leurs Applications, 2011, Tanger, Maroc. CDROM, papier 554, 1-6, 2011. 〈hal-00806730〉
  • B. Walter, E. Mairiaux, M. Faucher, Z. Xiong, L. Buchaillot, et al.. 4.8 MHz AFM nanoprobes with capacitive transducers and batch-fabricated nanotips. XXIème Congrès Général de la Société Française de Physique, SFP 2011, 2011, Bordeaux, France. 〈hal-00807202〉
  • B. Legrand, J.P. Aime, L. Buchaillot. IMPROVE-LM - Imaging probe for vacuum environment and liquid medium. Journées Nationales Nanosciences et Nanotechnologies, J3N 2011, 2011, Strasbourg, France. 〈hal-00807209〉
  • E. Algre, B. Legrand, M. Faucher, B. Walter, L. Buchaillot. Surface microscopy with laserless MEMS based AFM probes. 23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010, 2010, China. _, pp.292-295, 2010, 〈10.1109/MEMSYS.2010.5442509〉. 〈hal-00549972〉
  • B. Walter, E. Mairiaux, M. Faucher, Z. Xiong, L. Buchaillot, et al.. Atomic force probe using silicon ring resonator conception. 5èmes Journées Nationales du GDR Micro et Nano Systèmes, 2010, Lyon, France. 〈hal-00808199〉
  • B. Walter, M. Faucher, B. Legrand, E. Mairiaux, R. Boisgard, et al.. Improve-LM imaging probe for vacuum environment and liquid medium. Journées du Réseau National en Nanosciences et en Nanotechnologies, J3N 2010, 2010, Lille, France. 〈hal-00808210〉
  • Z. Xiong, B. Walter, E. Mairiaux, M. Faucher, L. Buchaillot, et al.. Conception and fabrication of silicon ring resonator with piezo-resistive detection for force sensing applications. 5èmes Journées Nationales du GDR Micro et Nano Systèmes, 2010, Lyon, France. 〈hal-00808200〉
  • M. Sworowski, F. Neuilly, B. Legrand, A. Summanwar, F. Lallemand, et al.. High-Q and low-RM 24-MHz radial-contour mode disk resonators fabricated with silicon passive integration technology. 15th International Conference on Solid State Sensors, Actuators and Microsystems, Transducers 2009, 2009, United States. _, pp.2114-2117, 2009, 〈10.1109/SENSOR.2009.5285623〉. 〈hal-00474452〉
  • E. Algré, B. Legrand, M. Faucher, B. Walter, L. Buchaillot. Tip-matter interaction measurements using MEMS ring resonators. 15th International Conference on Solid State Sensors, Actuators and Microsystems, Transducers 2009, 2009, United States. _, pp.1638-1641, 2009, 〈10.1109/SENSOR.2009.5285774〉. 〈hal-00474451〉
  • E. Algre, B. Legrand, M. Faucher, B. Walter, L. Buchaillot. Tip-matter interaction measurements using MEMS ring resonators. Forum des Microscopies à Sonde Locale, 2009, Hardelot, France. 〈hal-00575264〉
  • B. Legrand, E. Algré, L. Buchaillot, M. Faucher, B. Walter. Vers une nouvelle génération de sonde de microscopie à force atomique à base de micro et nano-systèmes électromécaniques. 4èmes Journées Nationales en Nanosciences et Nanotechnologies, J3N 2009, 2009, Toulouse, France. 〈hal-00575271〉
  • Cédric Durand, Fabrice Casset, Bernard Legrand, Marc Faucher, Philippe Renaux, et al.. CHARACTERIZATION OF IN-IC INTEGRABLE IN-PLANE NANOMETER SCALE RESONATORS FABRICATED BY A SILICON ON NOTHING ADVANCED CMOS TECHNOLOGY. IEEE. Micro Electro Mechanical Sysetms, Jan 2008, Tucson - AZ, United States. pp.1016-1019, 2008. 〈cea-00320830〉
  • C. Durand, F. Casset, B. Legrand, M. Faucher, P. Renaux, et al.. Characterization of in-IC integrable in-plane nanometer scale resonators fabricated by a silicon on nothing advanced CMOS technology. 21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008, 2008, United States. IEEE, Piscataway, NJ, USA, pp.1016-1019, 2008, 〈10.1109/MEMSYS.2008.4443831〉. 〈hal-00361112〉
  • J.B. Bureau, B. Legrand, D. Collard, L. Buchaillot. Compact multilayer piezoresistive gauge for in-plane strain measurement in liquids. 14th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers'07, 2007, France. IEEE, Piscataway, NJ, USA, pp.2267-2270, 2007, 〈10.1109/SENSOR.2007.4300621〉. 〈hal-00284392〉
  • B. Legrand. Résonateurs électromécaniques : principe et applications. Ecole Thématique CNRS : Microsystèmes acoustiques, 2007, Lille, France. 2007. 〈hal-00367378〉
  • A. S. Rollier, C. Bernard, S. Marsaudon, A. M. Bonnot, M. Faucher, et al.. High yield grafting of carbon nanotube on ultra-sharp silicon nanotips: Mechanical characterization and AFM imaging. 20th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2007), 2007, Unknown, Unknown or Invalid Region. pp.878-+, 2007, Proceedings IEEE Micro Electro Mechanical Systems. 〈hal-01553035〉
  • B. Legrand, L. Buchaillot, A.E. Ashcroft, S. Arscott. Silicon nano-ESI emitters for mass spectrometry : a mixed micromechanical and microfluidic design. 14th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers'07, 2007, France. IEEE, Piscataway, NJ, USA, pp.791-794, 2007, 〈10.1109/SENSOR.2007.4300249〉. 〈hal-00284390〉
  • A.S. Rollier, C. Bernard, S. Marsaudon, A.M. Bonnot, M. Faucher, et al.. High yield grafting of carbon nanotube on ultra-sharp silicon nanotips : mechanical characterization and AFM imaging. 20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007, 2007, Japan. IEEE, Piscataway, NJ, USA, pp.851-854, 2007, 〈10.1109/MEMSYS.2007.4433179〉. 〈hal-00284388〉
  • M. Faucher, B. Walter, A.S. Rollier, K. Segueni, B. Legrand, et al.. Proposition of atomic force probes based on silicon ring-resonators. 14th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers'07, 2007, France. IEEE, Piscataway, NJ, USA, pp.1529-1532, 2007, 〈10.1109/SENSOR.2007.4300436〉. 〈hal-00284391〉
  • A.-S. Rollier, M. Faucher, B. Legrand, D. Collard, L. Buchaillot. ELECTROSTATIC ACTUATORS OPERATING IN LIQUID ENVIRONMENT : SUPPRESSION OF PULL-IN INSTABILITY AND DYNAMIC RESPONSE. DTIP 2006, Apr 2006, Stresa, Lago Maggiore, Italy. TIMA Editions, 6 p., 2006. 〈hal-00189294〉
  • B. Legrand, L. Buchaillot, D. Collard. Micro-machined actuators for the friction driven micro-motor. 2006, HVG Hanseatische Veranstaltungs-GmbH, Germany, pp.211-214, 2006. 〈hal-00128670〉
  • A.S. Rollier, M. Faucher, B. Legrand, D. Collard, L. Buchaillot. Electrostatic actuators operating in liquid environment: suppression of pull-in instability and dynamic response. 2006, IEEE, Piscataway, NJ, USA, pp.244-249, 2006. 〈hal-00128674〉
  • B. Legrand, L. Buchaillot, D. Collard. Micro et nanomécanique, MEMS et NEMS. Ecole CNRS : Nanosciences et Nanotechnologies, 2006, Autrans, France. 2006. 〈hal-00128667〉
  • B. Legrand, A.S. Rollier, L. Buchaillot, D. Collard. Parallel-plate electrostatic actuators in liquids : displacement-voltage optimisation for microfluidic applications. 2006, IEEE, Piscataway, NJ, USA, pp.718-721, 2006. 〈hal-00128668〉
  • C. Yamahata, T. Takekawa, K. Ayano, M. Hosogi, M. Kumemura, et al.. Silicon nanotweezers with adjustable and controlable gap for the manipulation and characterization of DNA molecules. 2006, IEEE, Piscataway, NJ, USA, 4 pp., 2006. 〈hal-00147724〉
  • N. Abele, K. Segueni, K. Boucart, F. Casset, B. Legrand, et al.. Ultra-low voltage MEMS resonator based on RSG-MOSFET. 2006, IEEE, Piscataway, NJ, USA, pp.882-885, 2006. 〈hal-00128669〉
  • A.S. Rollier, B. Legrand, D. Deresmes, M. Lagouge, D. Collard, et al.. Tensile stress determination in silicon nitride membrane by AFM characterization. 2005, IEEE, Piscataway, NJ, USA, pp.828-831, 2005. 〈hal-00125660〉
  • V. Agache, B. Legrand, K. Nakamura, H. Kawakatsu, L. Buchaillot, et al.. Characterization of vertical vibration of electrostatically actuated resonators using Atomic Force Microscope in noncontact mode. 2005, IEEE, Piscataway, NJ, USA, pp.2023-2026, 2005. 〈hal-00125631〉
  • A.S. Rollier, B. Legrand, D. Collard, L. Buchaillot. Electrostatic actuators operating in liquid environment : position control without pull-in effect. 2005, IEEE, Piscataway, NJ, USA, pp.341-346, 2005. 〈hal-00128651〉
  • J.B. Bureau, B. Legrand, D. Collard, L. Buchaillot. 3D self-assembling of SU-8 microstructures on silicon by plasma induced compressive stress. 2005, IEEE, Piscataway, NJ, USA, pp.19-22, 2005. 〈hal-00128655〉
  • V. Agache, B. Legrand, D. Collard, H. Fujita, L. Buchaillot. RF blade nano-electromechanical resonator with self-aligned process for definition of lateral electrostatic transducers. 2005, IEEE, Piscataway, NJ, USA, pp.26-31, 2005. 〈hal-00128656〉
  • B. Legrand, L. Buchaillot, D. Collard. Micromoteur entraîné par friction à double sens de rotation. Actes du XVIIème Congrès Français de Mécanique, CFM 2005, 2005, Troyes, France. 2005. 〈hal-00131347〉
  • B. Legrand, L. Buchaillot, D. Collard. Micromachined actuators for friction driven linear micro-motors. Proceedings of the Fifth International Symposium on Linear Drive for Industry Applications, LDIA 2005, 2005, Hyogo, Japan. 2005. 〈hal-00131348〉
  • A.S. Rollier, B. Legrand, L. Buchaillot, D. Collard. Actionneurs électrostatiques complètement isolés : fabrication, fonctionnement et caractérisation en milieu liquide. Actes du XVIIème Congrès Français de Mécanique, CFM 2005, 2005, Troyes, France. 2005. 〈hal-00131359〉
  • B. Legrand, D. Collard, L. Buchaillot. Stiction drive operation of micromotors : direct and reverse rotation control. 2005, IEEE, Piscataway, NJ, USA, pp.57-60, 2005. 〈hal-00125661〉
  • O. Millet, O. Blanrue, B. Legrand, D. Collard, L. Buchaillot. MEMS reliability : metrology set-up for investigation of fatigue causes. 2005, IEEE, Piscataway, NJ, USA, pp.483-486, 2005. 〈hal-00125627〉
  • O. Millet, P. Muller, O. Blanrue, B. Legrand, D. Collard, et al.. Reliability of non-released microstructures : failure analysis and innovative solution process. 2005, IEEE, Piscataway, NJ, USA, pp.840-842, 2005. 〈hal-00125662〉
  • V. Agache, E. Quévy, O. Millet, A.S. Rollier, R. Ringot, et al.. Microsystèmes, résonateurs électromécaniques : où cela nous mène-t-il ?. Ecole Nanosciences, 2005, Anglet, France. 2005. 〈hal-00126215〉
  • L. Buchaillot, D. Collard, B. Legrand. Microsystèmes : principales applications et contexte national. Ecoles Nanosciences, 2005, Anglet, France. 2005. 〈hal-00126216〉
  • B. Legrand. Nanotechnologie, micro et nanosystèmes. 5ème Colloque International TELECOM'2005 & 4èmes Journées Franco-Magrhébines des Micro-ondes et leurs Applications, JFMMA, 2005, Rabat, Maroc. 2005. 〈hal-00126233〉
  • V. Agache, B. Legrand, D. Collard, H. Fujita, L. Buchaillot. 1.1 GHz silicon blade nano-electromechanical resonator featuring 20 nm gap lateral transducers. 2005, IEEE, Piscataway, NJ, USA, pp.121-124, 2005. 〈hal-00125628〉
  • M. Ataka, B. Legrand, L. Buchaillot, D. Collard, H. Fujita. The 2D feedback conveyance with ciliary actuator arrays. 2005, IEEE, Piscataway, NJ, USA, pp.31-34, 2005. 〈hal-00125659〉
  • B. Legrand, H. Happy. TP de nanotechnologie : réalisation et observation de nanofils de silicium à l'aide de l'AFM. 8èmes Journées Pédagogiques du CNFM, 2004, Saint Malo, France. 2004. 〈hal-00133919〉
  • O. Millet, P. Bertrand, B. Legrand, D. Collard, L. Buchaillot. An original methodology to assess fatigue behavior in RF MEMS devices. European Microwave Week, 2004, Amsterdam, Netherlands. 2004. 〈hal-00141031〉
  • O. Millet, P. Bertrand, B. Legrand, D. Collard, L. Buchaillot. Predictive modelling of the fatigue phenomenon for polycristalline structural layers. 2004, IEEE, Piscataway, NJ, USA, pp.145-148, 2004. 〈hal-00141028〉
  • O. Millet, P. Bertrand, B. Legrand, D. Collard, L. Buchaillot. Reliability of polycrystalline MEMS : prediction of the debugging-time. International Symposium for Testing and Failure Analysis, ISTFA 2004, 2004, Worcester, MA, United States. 2004. 〈hal-00141030〉
  • Y.H. Cho, D. Collard, L. Buchaillot, B. Legrand, K. Beomjoon. Characterization of individual bio-cells with thermally actuated probe arrays. 2004, SPIE – The International Society for Optical Engineering, Bellingham, WA, USA, pp.425-429, 2004. 〈hal-00141170〉
  • E. Quevy, B. Legrand, D. Collard, L. Buchaillot. Tapping-mode HF nanometric lateral gap resonators : experimental and theory. 2003, IEEE, Piscataway, NJ, USA, pp.879-882, 2003. 〈hal-00146456〉
  • D. Galayko, A. Kaiser, B. Legrand, L. Buchaillot, D. Collard, et al.. Microelectromechanical coupled resonsator IF filters with variable bandwidth in thick-film epitaxial polysilicon technology. 2003, Laboratoire d'Analyse et d'Architecture des Systèmes, Toulouse, France, pp.F23-F26, 2003. 〈hal-00146406〉
  • O. Millet, V. Agache, B. Legrand, D. Collard, L. Buchaillot. Modeling of failure mechanisms for optimized MEMS CAD : design, fabrication and characterization of in situ test benches. 2003, IEEE, Piscataway, NJ, USA, pp.1578-1581, 2003. 〈hal-00146440〉
  • V. Agache, P. Bigotte, B. Legrand, V. Senez, L. Buchaillot, et al.. Modeling and experimental validation of silicon nanotip oxidation : towards a nanoelectromechanical filter application. 2003, IEEE, Piscataway, NJ, USA, pp.1287-1290, 2003. 〈hal-00146438〉
  • E. Quevy, B. Legrand, D. Collard, L. Buchaillot. Ultimate technology for micromachining of nanometric gap HF micromechanical resonators. 2003, IEEE, Piscataway, NJ, USA, pp.157-160, 2003. 〈hal-00146462〉
  • K. Beomjoon, D. Collard, M. Lagouge, F. Conseil, B. Legrand, et al.. Thermally actuated probe arrays for manipulation and characterization of individual bio-cell. 2003, IEEE, Piscataway, NJ, USA, pp.1255-1258, 2003. 〈hal-00146460〉
  • D. Galayko, A. Kaiser, B. Legrand, C. Combi, D. Collard, et al.. High-frequency high-Q micro-mechanical resonators in thick epipoly technology with post-process gap adjustment. 2002, IEEE, Piscataway, NJ, USA, pp.665-668, 2002. 〈hal-00148737〉
  • V. Agache, B. Legrand, D. Collard, L. Buchaillot. Study of adhesive forces on a silicon nanotip force microscope in contact mode. 2002, SPIE – The International Society for Optical Engineering, Bellingham, WA, USA, pp.601-612, 2002. 〈hal-00148788〉
  • D. Galayko, A. Kaiser, B. Legrand, L. Buchaillot, D. Collard, et al.. Conception de résonateurs micromécaniques pour les filtres IF dans la technologie de couches épaisses épitaxiées. Colloque CAO des Circuits Intégrés et Systèmes, 2002, Paris, France. 2002. 〈hal-00148748〉
  • D. Galayko, A. Kaiser, B. Legrand, L. Buchaillot, C. Combi, et al.. Design of clamped-clamped beam resonator in thick-film epitaxial polysilicon technology. 2002, University of Bologna, Bologna, Italy, pp.447-450, 2002. 〈hal-00148736〉
  • O. Biloint, D. Galayko, B. Legrand, A. Kaiser. Architecture level center frequency drift compensation method for micro-mechanical filters used in IF stages of wireless telecommunication receivers. 2002, SPIE – The International Society for Optical Engineering, Bellingham, WA, USA, pp.136-142, 2002. 〈hal-00148741〉
  • E. Quevy, D. Galayko, B. Legrand, C. Renaux, C. Combi, et al.. IF MEMS filters for mobile communication. 2001, IEEE, Piscataway, NJ, USA, pp.733-736, 2001. 〈hal-00152458〉
  • D. Collard, L. Buchaillot, B. Legrand. Microsystem technology : trends and possible application for textile. Conference on Modern Textile Factory, HIGHTEX 2001, 2001, Lille, France. 2001. 〈hal-00152473〉
  • D. Collard, L. Buchaillot, B. Legrand. Microsysteme : un état des lieux, enjeux et perspectives. 48èmes Journées Nationales de l'Union des Physiciens, 2000, Lille, France. 2000. 〈hal-00158538〉
  • D. Collard, L. Buchaillot, B. Legrand. Microsystème : enjeux et perspectives. Journée IMAPS : International Microelectronics and Packaging Society, 2000, Lille, France. 2000. 〈hal-00158539〉

Poster1 document

Chapitre d'ouvrage1 document

  • B. Legrand, C. Durand, M. Faucher, L. Buchaillot. Micro et nanorésonateurs radio-fréquence. Leray J.L., Boudenot J.C., Gautier J. La micro-nano électronique, enjeux et mutations, CNRS ÉDITIONS, pp.239-242, 2009. 〈hal-00575789〉

Brevet4 documents

  • H. Tanbakuchi, B. Legrand, D. Theron, D. Ducatteau. Système pour détecter des réponses d'un dispositif résonateur micro-électromécanique (MEMS). N° de brevet: FR2985251 (A1). 2013. 〈hal-00846338〉
  • M. Faucher, L. Buchaillot, J.P. Aime, B. Legrand, G. Couturier. Sonde pour microscopie à force atomique. N° de brevet: FR2915803 (A1). 2008. 〈hal-00372090〉
  • A. Kaiser, O. Billoint, D. Galayko, B. Legrand. Circuit superhétérodyne à filtre passe-bande de sélection de canal. N° de brevet: FR2836765 (A1). 2003. 〈hal-00372460〉
  • D. Stievenard, C. Delerue, B. Legrand. Détecteur infrarouge semi-conducteur et son procédé de fabrication. N° de brevet: FR2791474 (A1). 2000. 〈hal-00372676〉

Autre publication2 documents

  • Bernard Legrand. Contribution au domaine des actionneurs et résonateurs microélectromécaniques. Applications à la nanocaractérisation. 10455. Habilitation à diriger des recherches en Sciences Physiques, Université de Lille 1, 8 juin. 2012. 〈hal-00799254〉
  • B. Legrand. Elaboration et caractérisation physique par microscopie à champ proche de nanostructures semi-conductrices. Thèse #1168. Thèse de doctorat en Physique, Université de Lille 1, 29 septembre. 2000. 〈hal-00158616〉

HDR1 document

  • Bernard Legrand. CONTRIBUTION AU DOMAINE DES ACTIONNEURS ET RÉSONATEURS MICRO-‐ÉLECTROMÉCANIQUES. APPLICATIONS À LA NANO­‐CARACTÉRISATION.. Micro et nanotechnologies/Microélectronique. Université des Sciences et Technologie de Lille - Lille I, 2012. 〈tel-00706851〉