Co-auteurs

Nombre de documents

135

CV Bernard Legrand


Article dans une revue47 documents

  • J. Creuze, H. Guesmi, C. Mottet, B.E. Zhu, B. Legrand. Surface segregation in AuPd alloys: Ab initio analysis of the driving forces. Surface Science, Elsevier, 2015, 639, pp.48-53. <hal-01172284>
  • Jérôme Creuze, Hazar Guesmi, Christine Mottet, Beien Zhu, Bernard Legrand. Surface segregation in AuPd alloys: Ab initio analysis of the driving forces. Surface Science, Elsevier, 2015, 639, pp.48 - 53. <10.1016/j.susc.2015.04.017>. <hal-01378430>
  • B. Zhu, H. Guesmi, J. Creuze, B. Legrand, C. Mottet. Crossover among structural motifs in Pd–Au nanoalloys. Physical Chemistry Chemical Physics, Royal Society of Chemistry, 2015, 17, pp.28129-28136. <hal-01222110>
  • Denis Faure, Patricia Bonin, Robert Duran, Sophie Sablé, Pierre Amato, et al.. Environmental microbiology as a mosaic of explored ecosystems and issues. Environmental Science and Pollution Research, Springer Verlag, 2015, <10.1007/s11356-015-5164-5>. <hal-01247096>
  • B. Legrand, D. Ducatteau, D. Theron, B. Walter, H. Tanbakuchi. Detecting response of microelectromechanical resonators by microwave reflectometry. Applied Physics Letters, American Institute of Physics, 2013, 103, pp.053124-1-5. <10.1063/1.4817411>. <hal-00871931>
  • Z. Xiong, B. Walter, E. Mairiaux, M. Faucher, L. Buchaillot, et al.. Piezoresistive ring-shaped AFM sensors with pico-newton force resolution. International Journal of Intelligent Mechatronics and Robotics, 2013, 3, pp.38-52. <10.4018/ijimr.2013010104>. <hal-00871948>
  • T. Dargent, K. Haddadi, T. Lasri, N. Clément, D. Ducatteau, et al.. An interferometric scanning microwave microscope and calibration method for sub-fF microwave measurements. Review of Scientific Instruments, American Institute of Physics, 2013, 84, 123705, 7 p. <10.1063/1.4848995>. <hal-00922585>
  • Z. Xiong, B. Walter, E. Mairiaux, M. Faucher, L. Buchaillot, et al.. MEMS piezoresistive ring resonator for AFM imaging with pico-Newton force resolution. Journal of Micromechanics and Microengineering, IOP Publishing, 2013, 23, pp.035016-1-10. <10.1088/0960-1317/23/3/035016>. <hal-00795965>
  • E. Algre, Z. Xiong, M. Faucher, B. Walter, L. Buchaillot, et al.. MEMS ring resonators for laserless AFM with sub-nanoNewton force resolution. Journal of Microelectromechanical Systems, Institute of Electrical and Electronics Engineers, 2012, 21, pp.385-397. <10.1109/JMEMS.2011.2179012>. <hal-00787407>
  • E. Herth, E. Algre, P. Tilmant, M. François, C. Boyaval, et al.. Performances of the negative tone resist AZnLOF 2020 for nanotechnology applications. IEEE Transactions on Nanotechnology, Institute of Electrical and Electronics Engineers, 2012, 11, pp.854-859. <10.1109/TNANO.2012.2196802>. <hal-00787415>
  • E. Herth, E. Algré, B. Legrand, L. Buchaillot. Optimization of ohmic contact and adhesion on polysilicon in MEMS-NEMS wet etching process. Microelectronic Engineering, Elsevier, 2011, 88, pp.724-728. <10.1016/j.mee.2010.06.032>. <hal-00579051>
  • M. Sworowski, F. Neuilly, B. Legrand, A. Summanwar, P. Philippe, et al.. Fabrication of 24-MHz-disk resonators with silicon passive integration technology. IEEE Electron Device Letters, Institute of Electrical and Electronics Engineers, 2010, 31, pp.23-25. <10.1109/LED.2009.2034542>. <hal-00548984>
  • E. Herth, P. Tilmant, M. Faucher, M. François, C. Boyaval, et al.. Electron beam nanolithography in AZnLOF 2020. Microelectronic Engineering, Elsevier, 2010, 87, pp.2057-2060. <10.1016/j.mee.2009.12.079>. <hal-00548989>
  • A.S. Rollier, D.F.L. Jenkins, E. Dogheche, B. Legrand, M. Faucher, et al.. Development of a new generation of active AFM tools for applications in liquids. Journal of Micromechanics and Microengineering, IOP Publishing, 2010, 20, pp.085010-1-11. <10.1088/0960-1317/20/8/085010>. <hal-00548990>
  • G. Guisbiers, E. Herth, B. Legrand, N. Rolland, T. Lasri, et al.. Materials selection procedure for RF-MEMS. Microelectronic Engineering, Elsevier, 2010, 87, pp.1792-1795. <10.1016/j.mee.2009.10.016>. <hal-00549627>
  • E. Herth, B. Legrand, L. Buchaillot, N. Rolland, T. Lasri. Optimization of SiNX:H films deposited by PECVD for reliability of electronic, microsystems and optical applications. Microelectronics Reliability, Elsevier, 2010, 50, pp.1103-1106. <10.1016/j.microrel.2010.04.011>. <hal-00549491>
  • D. Hourlier, B. Legrand, C. Boyaval, P. Perrot. Towards silicon-nanowire-structured materials by the intimate mixing of patterning the solid state and chemical reactions. Journal of Nano Research, 2009, 6, pp.215-224. <10.4028/www.scientific.net/JNanoR.6.215>. <hal-00471951>
  • M. Ataka, B. Legrand, L. Buchaillot, D. Collard, H. Fujita. Design, fabrication, and operation of two-dimensional conveyance system with ciliary actuator arrays. IEEE/ASME Transactions on Mechatronics, Institute of Electrical and Electronics Engineers, 2009, 14, pp.119-125. <10.1109/TMECH.2008.2004770>. <hal-00472723>
  • B. Walter, M. Faucher, E. Algré, B. Legrand, Rodolphe Boisgard, et al.. Design and operation of a silicon ring resonator for force sensing applications above 1 MHz. Journal of Micromechanics and Microengineering, IOP Publishing, 2009, 19 (11), pp.115009-1-7. <10.1088/0960-1317/19/11/115009>. <hal-00472725>
  • C. Yamahata, D. Collard, B. Legrand, T. Takekawa, M. Kumemura, et al.. Silicon nanotweezers with subnanometer resolution for the micromanipulation of biomolecules. Journal of Microelectromechanical Systems, Institute of Electrical and Electronics Engineers, 2008, 17, pp.623-631. <10.1109/JMEMS.2008.922080>. <hal-00357278>
  • C. Durand, F. Casset, P. Renaux, N. Abele, B. Legrand, et al.. In-plane silicon-on-nothing nanometer-scale resonant suspended gate MOSFET for in-IC integration perspectives. IEEE Electron Device Letters, Institute of Electrical and Electronics Engineers, 2008, 29, pp.494-496. <10.1109/LED.2008.919781>. <hal-00357277>
  • Cédric Durand, Fabrice Casset, Philippe Renaux, Nicolas Abelé, Bernard Legrand, et al.. In-Plane Silicon-On-Nothing Nanometer-Scale Resonant Suspended Gate MOSFET for In-IC Integration Perspectives. IEEE Electron Device Letters, Institute of Electrical and Electronics Engineers, 2008, 29 (5), pp.494-496. <cea-00320837>
  • D. Collard, C. Yamahata, B. Legrand, T. Takekawa, M. Kumemura, et al.. Towards mechanical characterization of biomolecules by MNEMS tools. IEEJ Transactions on Electrical and Electronic Engineering, Institute of Electrical Engineers of Japan, 2007, 2, pp.262-271. <10.1002/tee.20154>. <hal-00283054>
  • B. Legrand, A.E. Ashcroft, L. Buchaillot, S. Arscott. SOI-based nanoelectrospray emitter tips for mass spectrometry : a coupled MEMS and microfluidic design. Journal of Micromechanics and Microengineering, IOP Publishing, 2007, 17, pp.509-514. <10.1088/0960-1317/17/3/013>. <hal-00283051>
  • S. Arscott, B. Legrand, L. Buchaillot, A.E. Ashcroft. A silicon beam-based microcantilever nanoelectrosprayer. Sensors and Actuators B: Chemical, Elsevier, 2007, 125, pp.72-78. <10.1016/j.snb.2007.01.040>. <hal-00283052>
  • P. Basset, A. Kaiser, B. Legrand, D. Collard, L. Buchaillot. Complete system for wireless powering and remote control of electrostatic actuators by inductive coupling. IEEE/ASME Transactions on Mechatronics, Institute of Electrical and Electronics Engineers, 2007, 12, pp.23-31. <10.1109/TMECH.2006.886245>. <hal-00255847>
  • D. Galayko, A. Kaiser, B. Legrand, L. Buchaillot, C. Combi, et al.. Coupled-resonator micromechanical filters with voltage tunable bandpass characteristic in thickfilm polysilicon technology. Sensors and Actuators A: Physical, Elsevier, 2006, 126, pp.227-240. <hal-00138651>
  • B. Legrand, A.S. Rollier, D. Collard, L. Buchaillot. Suppression of the pull-in instability for parallel-plate electrostatic actuators operated in dielectric liquids. Applied Physics Letters, American Institute of Physics, 2006, 88, pp.034105-1-3. <hal-00128662>
  • A.S. Rollier, B. Legrand, D. Collard, L. Buchaillot. Stability and pull-in voltage of electrostatic parallel-plate actuators in liquid solutions. Journal of Micromechanics and Microengineering, IOP Publishing, 2006, 16, pp.794-801. <hal-00128663>
  • D. Stievenard, B. Legrand. Silicon surface nano-oxidation using scanning probe microscopy. Progress in Surface Science, Elsevier, 2006, 81, pp.112-140. <hal-00127846>
  • D. Galayko, A. Kaiser, B. Legrand, L. Buchaillot, D. Collard, et al.. Tunable passband T-filter electrostatically driven polysilicon micromechanical resonators. Sensors and Actuators A, 2005, 117, pp.115-120. <hal-00125630>
  • V. Agache, R. Ringot, P. Bigotte, V. Senez, B. Legrand, et al.. Modeling and experimental validation of sharpening mechanism based on thermal oxidation for fabrication of ultra-sharp silicon nanotips. IEEE Transactions on Nanotechnology, Institute of Electrical and Electronics Engineers, 2005, 4, pp.548-556. <hal-00125632>
  • V. Agache, B. Legrand, D. Collard, L. Buchaillot, H. Fujita. Fabrication and characterization of 1.1 GHz blade nanoelectromechanical resonator. Applied Physics Letters, American Institute of Physics, 2005, 86, pp.213104-1-3. <hal-00125633>
  • O. Millet, B. Legrand, D. Collard, L. Buchaillot. Influence on the step covering on fatigue phenomenon for polycrystalline silicon MEMS. Japanese Journal of Applied Physics, Japan Society of Applied Physics, 2003, 41, pp.L1339-L1341. <hal-00146435>
  • D. Galayko, A. Kaiser, L. Buchaillot, B. Legrand, D. Collard, et al.. Design, realization and testing of micro-mechanical resonators in thick-film silicon technology with postprocess electrode to resonator gap reduction. Journal of Micromechanics and Microengineering, IOP Publishing, 2003, 13, pp.134-140. <hal-00146391>
  • B. Legrand, D. Deresmes, D. Stievenard. Silicon nanowires with sub 10 nm lateral dimensions : from AFM lithography based fabrication to electrical measurements. Journal of Vacuum Science and Technology, American Vacuum Society (AVS), 2002, 20, pp.862-870. <hal-00148765>
  • D. Collard, H. Fujita, H. Toshiyoshi, B. Legrand, L. Buchaillot. Surface micro-machining : an overview. Nano et micro technologies, 2002, 2, pp.35-50. <hal-00148781>
  • V. Agache, B. Legrand, D. Collard, L. Buchaillot. Adhesive forces investigation on a silicon tip by contact mode atomic force microscope. Applied Physics Letters, American Institute of Physics, 2002, 81, pp.2623-2625. <hal-00148768>
  • B. Legrand, V. Agache, T. Melin, J.P. Nys, V. Senez, et al.. Thermally assisted formation of silicon islands on a silicon-on-insulator substrate. Journal of Applied Physics, American Institute of Physics, 2002, 91, pp.106-111. <hal-00149668>
  • O. Millet, B. Legrand, D. Collard, L. Buchaillot. Influence of the step covering on fatigue phenomenon for polycrystalline silicon micro-electro-mechanical-systems (MEMS). Japanese Journal of Applied Physics, part 2 : Letters, 2002, 41, pp.L1339-L1341. <hal-00250391>
  • D. Collard, H. Fujita, H. Toshiyoshi, B. Legrand, L. Buchaillot. Electrostatic micro actuators. Nano et micro technologies, 2002, 2, pp.83-124. <hal-00148761>
  • B. Legrand, E. Quévy, B. Stefanelli, D. Collard, L. Buchaillot. Vacuum and cryogenic station for Micro-Electro-Mechanical Systems probing and testing. Review of Scientific Instruments, American Institute of Physics, 2002, 73, pp.4393-4395. <hal-00148782>
  • B. Legrand, V. Agache, T. Mélin, J.P. Nys, V. Senez, et al.. Thermally assisted formation of silicon islands on a silicon on insulator substrate. Journal of Applied Physics, American Institute of Physics, 2001, 91, pp.106-111. <hal-00152464>
  • B. Grandidier, Y.M. Niquet, B. Legrand, J.P. Nys, C. Priester, et al.. Imaging the wave function amplitudes in cleaved semiconductor quantum boxes. Physical Review Letters, American Physical Society, 2000, 85, pp.1068-1071. <hal-00158644>
  • B. Legrand, D. Stievenard. Atomic force microscope tip-surface behaviour under continuous bias or pulsed voltages in non contact mode. Applied Physics Letters, American Institute of Physics, 2000, 76, pp.1018-1020. <hal-00158646>
  • B. Legrand, V. Agache, J.P. Nys, V. Senez, D. Stievenard. Formation of silicon islands on a silicon on insulator substrate upon thermal annealing. Applied Physics Letters, American Institute of Physics, 2000, 76, pp.3271-3273. <hal-00158648>
  • B. Legrand, V. Agache, J.P. Nys, V. Senez, D. Stievenard. Formation of silicon islands on a silicon on insulator substrate upon thermal annealing. Applied Physics Letters, American Institute of Physics, 2000, 76, pp.3271-3273. <hal-00158537>

Communication dans un congrès80 documents

  • Cécile Fuinel, Khadim Daffé, Adrian Laborde, Olivier Thomas, Laurent Mazenq, et al.. HIGH-K THIN FILMS AS DIELECTRIC TRANSDUCERS FOR FLEXURAL M/NEMS RESONATORS. The 29th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2016), Jan 2016, Shanghai, China. <hal-01279717>
  • Fei Wang, Nicolas Clément, Damien Ducatteau, David Troadec, Bernard Legrand, et al.. Caractérisation quantitative des capacités sous échelle de 10 nm avec un interférométrique scanning-microwave-microscopy. 17èmes Journées Nationales du Réseau Doctoral en Micro-Nanoélectronique, JNRDM 2014, 2014, Villeneuve d'Ascq, France. 3 p., 2014. <hal-01018379>
  • Lionel Buchaillot, Estelle Mairiaux, Benjamin Walter, Zhuang Xiong, Marc Faucher, et al.. Near-field microscopy : is there an alternative to micro and nano resonating cantilevers ?. IEEE International Frequency Control Symposium, IFCS 2014, 2014, Taipei, Taiwan. 2014, <10.1109/FCS.2014.6859928>. <hal-01055047>
  • Z. Xiong, E. Mairiaux, B. Walter, M. Faucher, L. Buchaillot, et al.. 5.4 MHz dog-bone oscillating AFM probe with thermal actuation and piezoresistive detection. 26th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2013, 2013, Taipei, Taiwan. pp.592-595, 2013, <10.1109/MEMSYS.2013.6474311>. <hal-00809858>
  • N. Clement, T. Dargent, H. Tanbakuchi, K. Nishiguchi, R. Sivakumarasamy, et al.. Interferometric scanning microwave microscope for nanotechnology application. American Physical Society March Meeting, APS March Meeting 2013, 2013, Baltimore, MD, United States. <hal-00811777>
  • Fei Wang, Nicolas Clément, David Troadec, Bernard Legrand, Gilles Dambrine, et al.. Nanoscale capacitors study with an interferometric scanning microwave microscope. Materials Research Society Fall Meeting, MRS Fall 2013, Symposium LL : Advances in Scanning Probe Microscopy, 2013, Boston, MA, United States. <hal-00944017>
  • B. Legrand, D. Ducatteau, D. Theron, B. Walter, H. Tanbakuchi. Microwave reflectometry : a high-resolution technique for measuring vibration of capacitive microresonators. 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2013, 2013, Barcelona, Spain. paper M3P.140, 566-569, Outstanding poster presentation award nomination, 2013, <10.1109/Transducers.2013.6626829>. <hal-00877759>
  • Z. Xiong, B. Walter, E. Mairiaux, M. Faucher, L. Buchaillot, et al.. Towards a new generation of MEMS-based AFM probes. International Scanning Probe Microscopy Conference, ISPM 2013, 2013, Dijon, France. <hal-00878807>
  • T. Dargent, D. Ducatteau, B. Legrand, H. Tanbakuchi, D. Theron. SOL-like calibrated RF measurements at the nanoscale on a modified scanning microwave microscope. 2nd Nano Measure Scientific Symposium, Nano Measure 2012, 2012, Stanford, CA, United States. <hal-00797722>
  • B. Walter, E. Mairiaux, Z. Xiong, M. Faucher, L. Buchaillot, et al.. DNA origami imaging with 10.9 MHz AFM MEMS probes. 25th IEEE Conference on Micro Electro Mechanical Systems, MEMS 2012, 2012, Paris, France. pp.555-558, 2012, <10.1109/MEMSYS.2012.6170236>. <hal-00801107>
  • B. Walter, M. Faucher, E. Mairiaux, Z. Xiong, L. Buchaillot, et al.. Micro-résonateurs haute fréquence pour la microscopie à force atomique. 15ème Forum des Microscopies à Sonde Locale, 2012, Saint-Jacut-de-la-Mer, France. <hal-00797718>
  • B. Walter, M. Faucher, E. Mairiaux, Z. Xiong, L. Buchaillot, et al.. Micro-résonateurs haute fréquence pour la microscopie à force atomique. Journées Nationales du GDR Micro Nano Systèmes-Micro Nano Fluidique, 2012, Bordeaux, France. <hal-00797720>
  • B. Walter, M. Faucher, E. Mairiaux, Z. Xiong, L. Buchaillot, et al.. [Invité] Apport des microsystèmes pour la microscopie à force atomique. Journée thématique trans-GDR '' Micromanipulation pour les Micro-Nano Systèmes '', 2012, Besançon, France. <hal-00797716>
  • Z. Xiong, B. Walter, E. Mairiaux, M. Faucher, L. Buchaillot, et al.. Conception and fabrication of piezo-resistive ring shaped AFM probe. 25th IEEE Conference on Micro Electro Mechanical Systems, MEMS 2012, 2012, Paris, France. pp.547-550, 2012, <10.1109/MEMSYS.2012.6170180>. <hal-00801106>
  • Z. Xiong, B. Walter, E. Mairiaux, M. Faucher, L. Buchaillot, et al.. Piezo-resistive ring-shaped AFM sensors with pico-newton force resolution. 2nd International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2012, 2012, Xi'an, China. Paper ID 1200991, Best application paper award, 184-189, 2012. <hal-00801105>
  • B. Walter, E. Mairiaux, M. Faucher, Z. Xiong, L. Buchaillot, et al.. 4.8 MHz AFM nanoprobes with capacitive transducers and batch-fabricated nanotips. XXIème Congrès Général de la Société Française de Physique, SFP 2011, 2011, Bordeaux, France. <hal-00807202>
  • B. Legrand, J.P. Aime, L. Buchaillot. IMPROVE-LM - Imaging probe for vacuum environment and liquid medium. Journées Nationales Nanosciences et Nanotechnologies, J3N 2011, 2011, Strasbourg, France. <hal-00807209>
  • M. Faucher, B. Legrand, B. Walter, E. Algre, A. Ben-Amar, et al.. [Invité] Micro et nanorésonateurs électromécaniques radio-fréquences. Principes et applications. TELECOM'2011 & 7èmes Journées Franco-Maghrébines des Micro-ondes et leurs Applications, 2011, Tanger, Maroc. CDROM, papier 554, 1-6, 2011. <hal-00806730>
  • A. Grira, B. Legrand, C. Rotinat-Libersa, E. Mairiaux, L. Buchaillot. Optimal design of non intuitive compliant microgripper with high resolution. IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS 2011, 2011, San Francisco, CA, United States. pp.45-50, 2011, <10.1109/IROS.2011.6048665>. <hal-00800034>
  • Z. Xiong, B. Walter, E. Mairiaux, M. Faucher, L. Buchaillot, et al.. Conception and fabrication of silicon ring resonator with piezo-resistive detection for force sensing applications. ASME 2011 International Mechanical Engineering Congress & Exposition, IMECE 2011, 2011, Denver, CO, United States. pp.IMECE2011-65083-1-5, 2011. <hal-00800036>
  • B. Walter, Z. Xiong, E. Algre, E. Mairiaux, M. Faucher, et al.. [Invité] Apport des micro et nano-systèmes pour la microscopie à force atomique. Journées Nationales Nanosciences et Nanotechnologies, J3N 2011, 2011, Strasbourg, France. <hal-00807204>
  • B. Walter, M. Faucher, E. Mairiaux, Z. Xiong, L. Buchaillot, et al.. 4.8 MHz AFM nanoprobes with capacitive transducers and batch-fabricated nanotips. 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011, 2011, Mexico. pp.517-520, 2011, <10.1109/MEMSYS.2011.5734475>. <hal-00579045>
  • E. Algre, B. Legrand, M. Faucher, B. Walter, L. Buchaillot. Surface microscopy with laserless MEMS based AFM probes. 23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010, 2010, China. _, pp.292-295, 2010, <10.1109/MEMSYS.2010.5442509>. <hal-00549972>
  • Z. Xiong, B. Walter, E. Mairiaux, M. Faucher, L. Buchaillot, et al.. Conception and fabrication of silicon ring resonator with piezo-resistive detection for force sensing applications. 5èmes Journées Nationales du GDR Micro et Nano Systèmes, 2010, Lyon, France. <hal-00808200>
  • B. Walter, M. Faucher, B. Legrand, E. Mairiaux, R. Boisgard, et al.. Improve-LM imaging probe for vacuum environment and liquid medium. Journées du Réseau National en Nanosciences et en Nanotechnologies, J3N 2010, 2010, Lille, France. <hal-00808210>
  • B. Walter, E. Mairiaux, M. Faucher, Z. Xiong, L. Buchaillot, et al.. Atomic force probe using silicon ring resonator conception. 5èmes Journées Nationales du GDR Micro et Nano Systèmes, 2010, Lyon, France. <hal-00808199>
  • E. Algré, B. Legrand, M. Faucher, B. Walter, L. Buchaillot. Tip-matter interaction measurements using MEMS ring resonators. 15th International Conference on Solid State Sensors, Actuators and Microsystems, Transducers 2009, 2009, United States. _, pp.1638-1641, 2009, <10.1109/SENSOR.2009.5285774>. <hal-00474451>
  • M. Sworowski, F. Neuilly, B. Legrand, A. Summanwar, F. Lallemand, et al.. High-Q and low-RM 24-MHz radial-contour mode disk resonators fabricated with silicon passive integration technology. 15th International Conference on Solid State Sensors, Actuators and Microsystems, Transducers 2009, 2009, United States. _, pp.2114-2117, 2009, <10.1109/SENSOR.2009.5285623>. <hal-00474452>
  • E. Algre, B. Legrand, M. Faucher, B. Walter, L. Buchaillot. Tip-matter interaction measurements using MEMS ring resonators. Forum des Microscopies à Sonde Locale, 2009, Hardelot, France. <hal-00575264>
  • B. Legrand, E. Algré, L. Buchaillot, M. Faucher, B. Walter. Vers une nouvelle génération de sonde de microscopie à force atomique à base de micro et nano-systèmes électromécaniques. 4èmes Journées Nationales en Nanosciences et Nanotechnologies, J3N 2009, 2009, Toulouse, France. <hal-00575271>
  • C. Durand, F. Casset, B. Legrand, M. Faucher, P. Renaux, et al.. Characterization of in-IC integrable in-plane nanometer scale resonators fabricated by a silicon on nothing advanced CMOS technology. 21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008, 2008, United States. IEEE, Piscataway, NJ, USA, pp.1016-1019, 2008, <10.1109/MEMSYS.2008.4443831>. <hal-00361112>
  • Cédric Durand, Fabrice Casset, Bernard Legrand, Marc Faucher, Philippe Renaux, et al.. CHARACTERIZATION OF IN-IC INTEGRABLE IN-PLANE NANOMETER SCALE RESONATORS FABRICATED BY A SILICON ON NOTHING ADVANCED CMOS TECHNOLOGY. IEEE. Micro Electro Mechanical Sysetms, Jan 2008, Tucson - AZ, United States. pp.1016-1019, 2008. <cea-00320830>
  • A.S. Rollier, C. Bernard, S. Marsaudon, A.M. Bonnot, M. Faucher, et al.. High yield grafting of carbon nanotube on ultra-sharp silicon nanotips : mechanical characterization and AFM imaging. 20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007, 2007, Japan. IEEE, Piscataway, NJ, USA, pp.851-854, 2007, <10.1109/MEMSYS.2007.4433179>. <hal-00284388>
  • J.B. Bureau, B. Legrand, D. Collard, L. Buchaillot. Compact multilayer piezoresistive gauge for in-plane strain measurement in liquids. 14th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers'07, 2007, France. IEEE, Piscataway, NJ, USA, pp.2267-2270, 2007, <10.1109/SENSOR.2007.4300621>. <hal-00284392>
  • M. Faucher, B. Walter, A.S. Rollier, K. Segueni, B. Legrand, et al.. Proposition of atomic force probes based on silicon ring-resonators. 14th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers'07, 2007, France. IEEE, Piscataway, NJ, USA, pp.1529-1532, 2007, <10.1109/SENSOR.2007.4300436>. <hal-00284391>
  • B. Legrand, L. Buchaillot, A.E. Ashcroft, S. Arscott. Silicon nano-ESI emitters for mass spectrometry : a mixed micromechanical and microfluidic design. 14th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers'07, 2007, France. IEEE, Piscataway, NJ, USA, pp.791-794, 2007, <10.1109/SENSOR.2007.4300249>. <hal-00284390>
  • B. Legrand. Résonateurs électromécaniques : principe et applications. Ecole Thématique CNRS : Microsystèmes acoustiques, 2007, Lille, France. 2007. <hal-00367378>
  • C. Yamahata, T. Takekawa, K. Ayano, M. Hosogi, M. Kumemura, et al.. Silicon nanotweezers with adjustable and controlable gap for the manipulation and characterization of DNA molecules. 2006, IEEE, Piscataway, NJ, USA, 4 pp., 2006. <hal-00147724>
  • B. Legrand, L. Buchaillot, D. Collard. Micro-machined actuators for the friction driven micro-motor. 2006, HVG Hanseatische Veranstaltungs-GmbH, Germany, pp.211-214, 2006. <hal-00128670>
  • B. Legrand, A.S. Rollier, L. Buchaillot, D. Collard. Parallel-plate electrostatic actuators in liquids : displacement-voltage optimisation for microfluidic applications. 2006, IEEE, Piscataway, NJ, USA, pp.718-721, 2006. <hal-00128668>
  • N. Abele, K. Segueni, K. Boucart, F. Casset, B. Legrand, et al.. Ultra-low voltage MEMS resonator based on RSG-MOSFET. 2006, IEEE, Piscataway, NJ, USA, pp.882-885, 2006. <hal-00128669>
  • A.S. Rollier, M. Faucher, B. Legrand, D. Collard, L. Buchaillot. Electrostatic actuators operating in liquid environment: suppression of pull-in instability and dynamic response. 2006, IEEE, Piscataway, NJ, USA, pp.244-249, 2006. <hal-00128674>
  • B. Legrand, L. Buchaillot, D. Collard. Micro et nanomécanique, MEMS et NEMS. Ecole CNRS : Nanosciences et Nanotechnologies, 2006, Autrans, France. 2006. <hal-00128667>
  • A.-S. Rollier, M. Faucher, B. Legrand, D. Collard, L. Buchaillot. ELECTROSTATIC ACTUATORS OPERATING IN LIQUID ENVIRONMENT : SUPPRESSION OF PULL-IN INSTABILITY AND DYNAMIC RESPONSE. DTIP 2006, Apr 2006, Stresa, Lago Maggiore, Italy. TIMA Editions, 6 p., 2006. <hal-00189294>
  • V. Agache, E. Quévy, O. Millet, A.S. Rollier, R. Ringot, et al.. Microsystèmes, résonateurs électromécaniques : où cela nous mène-t-il ?. Ecole Nanosciences, 2005, Anglet, France. 2005. <hal-00126215>
  • O. Millet, O. Blanrue, B. Legrand, D. Collard, L. Buchaillot. MEMS reliability : metrology set-up for investigation of fatigue causes. 2005, IEEE, Piscataway, NJ, USA, pp.483-486, 2005. <hal-00125627>
  • V. Agache, B. Legrand, K. Nakamura, H. Kawakatsu, L. Buchaillot, et al.. Characterization of vertical vibration of electrostatically actuated resonators using Atomic Force Microscope in noncontact mode. 2005, IEEE, Piscataway, NJ, USA, pp.2023-2026, 2005. <hal-00125631>
  • M. Ataka, B. Legrand, L. Buchaillot, D. Collard, H. Fujita. The 2D feedback conveyance with ciliary actuator arrays. 2005, IEEE, Piscataway, NJ, USA, pp.31-34, 2005. <hal-00125659>
  • A.S. Rollier, B. Legrand, D. Deresmes, M. Lagouge, D. Collard, et al.. Tensile stress determination in silicon nitride membrane by AFM characterization. 2005, IEEE, Piscataway, NJ, USA, pp.828-831, 2005. <hal-00125660>
  • O. Millet, P. Muller, O. Blanrue, B. Legrand, D. Collard, et al.. Reliability of non-released microstructures : failure analysis and innovative solution process. 2005, IEEE, Piscataway, NJ, USA, pp.840-842, 2005. <hal-00125662>
  • B. Legrand. Nanotechnologie, micro et nanosystèmes. 5ème Colloque International TELECOM'2005 & 4èmes Journées Franco-Magrhébines des Micro-ondes et leurs Applications, JFMMA, 2005, Rabat, Maroc. 2005. <hal-00126233>
  • V. Agache, B. Legrand, D. Collard, H. Fujita, L. Buchaillot. 1.1 GHz silicon blade nano-electromechanical resonator featuring 20 nm gap lateral transducers. 2005, IEEE, Piscataway, NJ, USA, pp.121-124, 2005. <hal-00125628>
  • B. Legrand, D. Collard, L. Buchaillot. Stiction drive operation of micromotors : direct and reverse rotation control. 2005, IEEE, Piscataway, NJ, USA, pp.57-60, 2005. <hal-00125661>
  • L. Buchaillot, D. Collard, B. Legrand. Microsystèmes : principales applications et contexte national. Ecoles Nanosciences, 2005, Anglet, France. 2005. <hal-00126216>
  • V. Agache, B. Legrand, D. Collard, H. Fujita, L. Buchaillot. RF blade nano-electromechanical resonator with self-aligned process for definition of lateral electrostatic transducers. 2005, IEEE, Piscataway, NJ, USA, pp.26-31, 2005. <hal-00128656>
  • J.B. Bureau, B. Legrand, D. Collard, L. Buchaillot. 3D self-assembling of SU-8 microstructures on silicon by plasma induced compressive stress. 2005, IEEE, Piscataway, NJ, USA, pp.19-22, 2005. <hal-00128655>
  • A.S. Rollier, B. Legrand, D. Collard, L. Buchaillot. Electrostatic actuators operating in liquid environment : position control without pull-in effect. 2005, IEEE, Piscataway, NJ, USA, pp.341-346, 2005. <hal-00128651>
  • A.S. Rollier, B. Legrand, L. Buchaillot, D. Collard. Actionneurs électrostatiques complètement isolés : fabrication, fonctionnement et caractérisation en milieu liquide. Actes du XVIIème Congrès Français de Mécanique, CFM 2005, 2005, Troyes, France. 2005. <hal-00131359>
  • B. Legrand, L. Buchaillot, D. Collard. Micromachined actuators for friction driven linear micro-motors. Proceedings of the Fifth International Symposium on Linear Drive for Industry Applications, LDIA 2005, 2005, Hyogo, Japan. 2005. <hal-00131348>
  • B. Legrand, L. Buchaillot, D. Collard. Micromoteur entraîné par friction à double sens de rotation. Actes du XVIIème Congrès Français de Mécanique, CFM 2005, 2005, Troyes, France. 2005. <hal-00131347>
  • Y.H. Cho, D. Collard, L. Buchaillot, B. Legrand, K. Beomjoon. Characterization of individual bio-cells with thermally actuated probe arrays. 2004, SPIE – The International Society for Optical Engineering, Bellingham, WA, USA, pp.425-429, 2004. <hal-00141170>
  • O. Millet, P. Bertrand, B. Legrand, D. Collard, L. Buchaillot. Predictive modelling of the fatigue phenomenon for polycristalline structural layers. 2004, IEEE, Piscataway, NJ, USA, pp.145-148, 2004. <hal-00141028>
  • O. Millet, P. Bertrand, B. Legrand, D. Collard, L. Buchaillot. Reliability of polycrystalline MEMS : prediction of the debugging-time. International Symposium for Testing and Failure Analysis, ISTFA 2004, 2004, Worcester, MA, United States. 2004. <hal-00141030>
  • O. Millet, P. Bertrand, B. Legrand, D. Collard, L. Buchaillot. An original methodology to assess fatigue behavior in RF MEMS devices. European Microwave Week, 2004, Amsterdam, Netherlands. 2004. <hal-00141031>
  • B. Legrand, H. Happy. TP de nanotechnologie : réalisation et observation de nanofils de silicium à l'aide de l'AFM. 8èmes Journées Pédagogiques du CNFM, 2004, Saint Malo, France. 2004. <hal-00133919>
  • D. Galayko, A. Kaiser, B. Legrand, L. Buchaillot, D. Collard, et al.. Microelectromechanical coupled resonsator IF filters with variable bandwidth in thick-film epitaxial polysilicon technology. 2003, Laboratoire d'Analyse et d'Architecture des Systèmes, Toulouse, France, pp.F23-F26, 2003. <hal-00146406>
  • O. Millet, V. Agache, B. Legrand, D. Collard, L. Buchaillot. Modeling of failure mechanisms for optimized MEMS CAD : design, fabrication and characterization of in situ test benches. 2003, IEEE, Piscataway, NJ, USA, pp.1578-1581, 2003. <hal-00146440>
  • K. Beomjoon, D. Collard, M. Lagouge, F. Conseil, B. Legrand, et al.. Thermally actuated probe arrays for manipulation and characterization of individual bio-cell. 2003, IEEE, Piscataway, NJ, USA, pp.1255-1258, 2003. <hal-00146460>
  • V. Agache, P. Bigotte, B. Legrand, V. Senez, L. Buchaillot, et al.. Modeling and experimental validation of silicon nanotip oxidation : towards a nanoelectromechanical filter application. 2003, IEEE, Piscataway, NJ, USA, pp.1287-1290, 2003. <hal-00146438>
  • E. Quevy, B. Legrand, D. Collard, L. Buchaillot. Ultimate technology for micromachining of nanometric gap HF micromechanical resonators. 2003, IEEE, Piscataway, NJ, USA, pp.157-160, 2003. <hal-00146462>
  • E. Quevy, B. Legrand, D. Collard, L. Buchaillot. Tapping-mode HF nanometric lateral gap resonators : experimental and theory. 2003, IEEE, Piscataway, NJ, USA, pp.879-882, 2003. <hal-00146456>
  • D. Galayko, A. Kaiser, B. Legrand, C. Combi, D. Collard, et al.. High-frequency high-Q micro-mechanical resonators in thick epipoly technology with post-process gap adjustment. 2002, IEEE, Piscataway, NJ, USA, pp.665-668, 2002. <hal-00148737>
  • O. Biloint, D. Galayko, B. Legrand, A. Kaiser. Architecture level center frequency drift compensation method for micro-mechanical filters used in IF stages of wireless telecommunication receivers. 2002, SPIE – The International Society for Optical Engineering, Bellingham, WA, USA, pp.136-142, 2002. <hal-00148741>
  • D. Galayko, A. Kaiser, B. Legrand, L. Buchaillot, D. Collard, et al.. Conception de résonateurs micromécaniques pour les filtres IF dans la technologie de couches épaisses épitaxiées. Colloque CAO des Circuits Intégrés et Systèmes, 2002, Paris, France. 2002. <hal-00148748>
  • V. Agache, B. Legrand, D. Collard, L. Buchaillot. Study of adhesive forces on a silicon nanotip force microscope in contact mode. 2002, SPIE – The International Society for Optical Engineering, Bellingham, WA, USA, pp.601-612, 2002. <hal-00148788>
  • D. Galayko, A. Kaiser, B. Legrand, L. Buchaillot, C. Combi, et al.. Design of clamped-clamped beam resonator in thick-film epitaxial polysilicon technology. 2002, University of Bologna, Bologna, Italy, pp.447-450, 2002. <hal-00148736>
  • E. Quevy, D. Galayko, B. Legrand, C. Renaux, C. Combi, et al.. IF MEMS filters for mobile communication. 2001, IEEE, Piscataway, NJ, USA, pp.733-736, 2001. <hal-00152458>
  • D. Collard, L. Buchaillot, B. Legrand. Microsystem technology : trends and possible application for textile. Conference on Modern Textile Factory, HIGHTEX 2001, 2001, Lille, France. 2001. <hal-00152473>
  • D. Collard, L. Buchaillot, B. Legrand. Microsystème : enjeux et perspectives. Journée IMAPS : International Microelectronics and Packaging Society, 2000, Lille, France. 2000. <hal-00158539>
  • D. Collard, L. Buchaillot, B. Legrand. Microsysteme : un état des lieux, enjeux et perspectives. 48èmes Journées Nationales de l'Union des Physiciens, 2000, Lille, France. 2000. <hal-00158538>

Chapitre d'ouvrage1 document

  • B. Legrand, C. Durand, M. Faucher, L. Buchaillot. Micro et nanorésonateurs radio-fréquence. Leray J.L., Boudenot J.C., Gautier J. La micro-nano électronique, enjeux et mutations, CNRS ÉDITIONS, pp.239-242, 2009. <hal-00575789>

Brevet4 documents

  • H. Tanbakuchi, B. Legrand, D. Theron, D. Ducatteau. Système pour détecter des réponses d'un dispositif résonateur micro-électromécanique (MEMS). N° de brevet: FR2985251 (A1). 2013. <hal-00846338>
  • M. Faucher, L. Buchaillot, J.P. Aime, B. Legrand, G. Couturier. Sonde pour microscopie à force atomique. N° de brevet: FR2915803 (A1). 2008. <hal-00372090>
  • A. Kaiser, O. Billoint, D. Galayko, B. Legrand. Circuit superhétérodyne à filtre passe-bande de sélection de canal. N° de brevet: FR2836765 (A1). 2003. <hal-00372460>
  • D. Stievenard, C. Delerue, B. Legrand. Détecteur infrarouge semi-conducteur et son procédé de fabrication. N° de brevet: FR2791474 (A1). 2000. <hal-00372676>

Autre publication2 documents

  • Bernard Legrand. Contribution au domaine des actionneurs et résonateurs microélectromécaniques. Applications à la nanocaractérisation. 10455. Habilitation à diriger des recherches en Sciences Physiques, Université de Lille 1, 8 juin. 2012. <hal-00799254>
  • B. Legrand. Elaboration et caractérisation physique par microscopie à champ proche de nanostructures semi-conductrices. Thèse #1168. Thèse de doctorat en Physique, Université de Lille 1, 29 septembre. 2000. <hal-00158616>

HDR1 document

  • Bernard Legrand. CONTRIBUTION AU DOMAINE DES ACTIONNEURS ET RÉSONATEURS MICRO-‐ÉLECTROMÉCANIQUES. APPLICATIONS À LA NANO­‐CARACTÉRISATION.. Micro et nanotechnologies/Microélectronique. Université des Sciences et Technologie de Lille - Lille I, 2012. <tel-00706851>