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Bernard Legrand
2
Documents
Publications
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Silicon nanowires with sub 10 nm lateral dimensions : from AFM lithography based fabrication to electrical measurementsJournal of Vacuum Science and Technology, 2002, 20, pp.862-870
Article dans une revue
hal-00148765v1
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Tensile stress determination in silicon nitride membrane by AFM characterization2005, pp.828-831
Communication dans un congrès
hal-00125660v1
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