Bernard Legrand

Documents

Publications

dominique-deresmes

"dominique-deresmes"

	Silicon nanowires with sub 10 nm lateral dimensions : from AFM lithography based fabrication to electrical measurements Bernard Legrand , D. Deresmes , D. Stievenard Journal of Vacuum Science and Technology, 2002, 20, pp.862-870 Article dans une revue hal-00148765v1

	Tensile stress determination in silicon nitride membrane by AFM characterization A.S. Rollier , Bernard Legrand , D. Deresmes , M. Lagouge , D. Collard 2005, pp.828-831 Communication dans un congrès hal-00125660v1