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Xavier Portier

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Thermally induced evolution of optical and structural properties of Er2O3 films grown on Si substrates by thermal atomic layer deposition

 L. Khomenkova , M.-P. Chauvat , P. Marie , C. Frilay , Franck Lemarié
Materials Letters, 2020, 263, pp.127216. ⟨10.1016/j.matlet.2019.127216⟩
Article dans une revue hal-02424202v1