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Xavier Portier

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Thermally induced evolution of optical and structural properties of Er2O3 films grown on Si substrates by thermal atomic layer deposition

 L. Khomenkova , M.-P. Chauvat , P. Marie , C. Frilay , Franck Lemarié
Materials Letters, 2020, 263, pp.127216. ⟨10.1016/j.matlet.2019.127216⟩
Article dans une revue hal-02424202v1

Optical, structural and electrical characterization of pure ZnO films grown on p-type Si substrates by radiofrequency magnetron sputtering in different atmospheres

 O. Melnichuk , L. Melnichuk , Ye Venger , C. Guillaume , M-P Chauvat
Semiconductor Science and Technology, 2020, 35 (9), pp.095034. ⟨10.1088/1361-6641/ab9397⟩
Article dans une revue hal-03155451v1