Remi Dussart
2
Documents
Présentation
Publications et communications
Publications
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Energy flux measurements at the substrate deposition during reactive and non-reactive magnetron sputter deposition processes19th International Vacuum Conference, Sep 2013, Paris, France
Communication dans un congrès
hal-01166024v1
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Advantages of energy influx measurements in low pressure plasma processesInternational Conference on Plasma Surface Engineering, Sep 2012, Garmisch-Partenkirchen, Germany
Communication dans un congrès
hal-00831371v1
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