Remi Dussart
10
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IR emission from the target during plasma magnetron sputter depositionThin Solid Films, 2013, 545, pp.44-49. ⟨10.1016/j.tsf.2013.07.025⟩
Article dans une revue
in2p3-00874718v1
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On the measurement of energy fluxes in plasmas using a calorimetric probe and a thermopile sensorJournal of Physics D: Applied Physics, 2010, 43 (46), pp.465201. ⟨10.1088/0022-3727/43/46/465201⟩
Article dans une revue
hal-00569747v1
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Highly sensitive measurements of the energy transferred during plasma sputter deposition of metalsJournal of Physics D: Applied Physics, 2010, 43 (6), pp.65202. ⟨10.1088/0022-3727/43/6/065202⟩
Article dans une revue
hal-00569757v1
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Diagnostic system for plasma/surface energy transfer characterizationReview of Scientific Instruments, 2006, 77 (2), pp.033501-6
Article dans une revue
hal-00097829v1
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Direct measurement of energy transfers during deposition of sputtered metal atoms17th International Colloquium on Plasma Processes, CIP 09, Jun 2009, Marseille, France
Communication dans un congrès
hal-00445581v1
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Direct measurements of the energy transfers in deposition or etching low pressure plasma processes11th International Conference on Plasma Surface Engineering, PSE2008, Sep 2008, Garmisch-Partenkirchen, Germany
Communication dans un congrès
hal-00445589v1
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A direct measurement of the energy flux density in plasma surface interaction61st Gaseous Electronics Conference, 2008, United States
Communication dans un congrès
hal-00448760v1
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Global evaluation of the energy transfer between an ICP argon plasma and a surfaceInternatinal Symposium on Plasma Chemistry, ISPC-18, Aug 2007, Kyoto, Japan. 28p-5
Communication dans un congrès
hal-00443518v1
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Diagnostic des plasma par micro-fluxmètreCongrès de la division plasma de la SFP, 2006, May 2006, Pont-à-Mousson, France
Communication dans un congrès
hal-00448844v1
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Un capteur de flux d'énergie dans les plasmasMRCT CNRS. Plasmas Froids : Systèmes d'analyse, Modélisation et Rayonnement, Presses imprimerie Saint-Etienne, pp.97-120, 2009
Chapitre d'ouvrage
hal-00443857v1
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