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Remi Dussart

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Publications

amael-caillard

Energy Transferred From a Hot Nickel Target During Magnetron Sputtering

Mariem El Mokh , Amaël Caillard , Nadjib Semmar , Rémi Dussart , Thomas Lecas
IEEE Transactions on Plasma Science, 2014, pp.Plasma Science, IEEE Transactions on (Volume:PP Issue: 99 ). ⟨10.1109/TPS.2014.2338742⟩
Article dans une revue hal-01057286v1

Energy flux diagnostics in thin film deposition by magnetron sputtering

Anne-Lise Thomann , Amaël Caillard , El Mokh Mariem , Nadjib Semmar , Remi Dussart
XXXII International Conference on Phenomena in Ionized Gases (ICPIG), Jul 2015, Iasi, Romania
Communication dans un congrès hal-01290726v1

Study of energy transfers at the substrate during “transition steps” in magnetron sputter deposition

Anne-Lise Thomann , El Mariem , Amaël Caillard , Nadjib Semmar , Thomas Lecas
14th International Conference on Plasma Surface Engineering PSE 2014 , Sep 2014, Garmisch-Partenkirchen, Germany
Communication dans un congrès hal-01289446v1