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Nikolay Cherkashin

14

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nikolay-cherkashin
0000-0002-0322-0864
IdRef : 183426924

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caroline-bonafos

"sylvie-schamm-chardon"

	Imaging Si nanoparticles embedded in SiO2 layers by (S)TEM-EELS Sylvie Schamm-Chardon , Caroline Bonafos , H. Coffin , Nikolay Cherkashin , Marzia Carrada Ultramicroscopy, 2008, 108 (4), pp.346--357. ⟨10.1016/j.ultramic.2007.05.008⟩ Article dans une revue hal-01736064v1
	Oxide-nitride-oxide memory stacks formed by low-energy Si ion implantation into nitride and wet oxidation V. Ioannou-Sougleridis , P. Dimitrakis , V.Em. Vamvakas , P. Normand , Caroline Bonafos Microelectronic Engineering, 2007, 84 (9-10), pp.1986--1989. ⟨10.1016/j.mee.2007.04.068⟩ Article dans une revue hal-01736069v1
	Wet oxidation of nitride layer implanted with low-energy Si ions for improved oxide-nitride-oxide memory stacks V. Ioannou-Sougleridis , P. Dimitrakis , V.Em. Vamvakas , P. Normand , Caroline Bonafos Applied Physics Letters, 2007, 90 (26), pp.263513. ⟨10.1063/1.2752769⟩ Article dans une revue hal-01736066v1
	Materials science issues for the fabrication of nanocrystal memory devices by ultra low energy ion implantation Alain Claverie , Caroline Bonafos , Gérard Benassayag , Sylvie Schamm-Chardon , Nikolay Cherkashin Defect Diffus. Forum, 2006, 258-260, pp.531-541 Article dans une revue hal-00204809v1
	Oxidation of Si nanocrystals fabricated by ultralow-energy ion implantation in thin SiO2 layers H. Coffin , Caroline Bonafos , Sylvie Schamm-Chardon , Nikolay Cherkashin , Gérard Benassayag Journal of Applied Physics, 2006, 99 (4), pp.044302. ⟨10.1063/1.2171785⟩ Article dans une revue hal-01736074v1
	Si nanocrystals by ultra-low-energy ion beam-synthesis for non-volatile memory applications Caroline Bonafos , H. Coffin , Sylvie Schamm-Chardon , Nikolay Cherkashin , Gérard Benassayag Solid-State Electronics, 2005, 49 (11), pp.1734--1744. ⟨10.1016/j.sse.2005.10.001⟩ Article dans une revue hal-01736088v1
	Fabrication of nanocrystal memories by ultra low energy ion implantation Nikolay Cherkashin , Caroline Bonafos , H. Coffin , Marzia Carrada , Sylvie Schamm-Chardon physica status solidi (c), 2005, 2 (6), pp.1907--1911. ⟨10.1002/pssc.200460523⟩ Article dans une revue hal-01736090v1
	Si nanocrystals by ultra-low energy ion implantation for non-volatile memory applications H. Coffin , Caroline Bonafos , Sylvie Schamm-Chardon , Marzia Carrada , Nikolay Cherkashin Materials Science and Engineering: B, 2005, 124-125, pp.499--503. ⟨10.1016/j.mseb.2005.08.129⟩ Article dans une revue hal-01736081v1
	Multi-dot floating-gates for nonvolatile semiconductor memories: Their ion beam synthesis and morphology T. Müller , K.-H. Heinig , W. Möller , Caroline Bonafos , H. Coffin Applied Physics Letters, 2004, 85 (12), pp.2373-2375 Article dans une revue hal-01736097v1
	Multi-Dot Floating-Gates in MOSFETs for nonvolatile memories - Their ion beam synthesis and morphology T. Müller , K.-H. Heinig , Caroline Bonafos , H. Coffin , Nikolay Cherkashin Materials Research Society Symposium - Proceedings, 2003, 792, pp.333-338. ⟨10.1557/PROC-792-R8.7⟩ Article dans une revue hal-01736111v1

	Crystalline Structure of HfZrO Thin Films and ZrO2 / HfO2 bi-Layers Grown by AVD for MOS Applications Sandrine Lhostis , Clement Gaumer , Caroline Bonafos , Sylvie Schamm-Chardon , Nikolay Cherkashin ECS Transactions, 2008, Unknown, Unknown Region. ⟨10.1149/1.2911489⟩ Communication dans un congrès hal-01736062v1
	Materials science issues for the fabrication of naocrystal memory devices by ultra low energy ion implantation Alain Claverie , Caroline Bonafos , Gérard Benassayag , Sylvie Schamm-Chardon , Nikolay Cherkashin 2nd International Conference on Diffusion in Solids and Liquids, DSL-2006, 2006, Aveiro, Portugal Communication dans un congrès hal-00115744v1
	Manipulation of 2D arrays of Si nanocrystals by ultra-low-energy ion beam-synthesis for nonvolatile memories applications Caroline Bonafos , Nikolay Cherkashin , Marzia Carrada , H. Coffin , Gérard Benassayag Symposium D – Materials and Processes for Nonvolatile Memories, 2005, indéterminée, Unknown Region. pp.217-222, ⟨10.1557/PROC-830-D5.2⟩ Communication dans un congrès hal-01736091v1
	Oxidation of Si nanocrystals fabricated by ultra-low energy ion implantation in thin SiO2 layers H. Coffin , Caroline Bonafos , Sylvie Schamm-Chardon , Nikolay Cherkashin , Marc Respaud Symposium D – Materials and Processes for Nonvolatile Memories, 2005, indéterminée, Unknown Region. pp.281-286, ⟨10.1557/PROC-830-D6.6⟩ Communication dans un congrès hal-01736087v1