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Publications

	Study of porous SiOCH patterning using metallic hard mask: challenges and solutions Nicolas Posseme , Thibaut David , Thierry Chevolleau , Maxime Darnon , Fanny Bailly ECS Transactions, 2011, 35 (4), pp.667-685. ⟨10.1149/1.3572312⟩ Article dans une revue hal-00629313v1

	Chamber walls coating during patterning of dielectric damascene structures with a metal hard mask: consequence on cleaning strategies Thierry Chevolleau , Maxime Darnon , Thibaut David , Nicolas Possémé , Olivier Joubert Plasma Etch and Strip in Microelectronics Workshop, 2007, Detroit, United States Communication dans un congrès hal-00461598v1