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Publications

	Distributed Electron Cyclotron Resonance plasma: a technology for large area deposition of device quality a-Si:H at very high rate P. Leempoel , P. Descamps , T. Kervyn de Meerendré , J. Charliac , Pere Roca I Cabarrocas Thin Solid Films, 2008, 516, pp.6853 Article dans une revue hal-00350890v1

	Distributed Electron Cyclotron Resonance plasma: a technology for large area deposition of device quality a-Si:H at very high rate P. Leempoel , P. Descamps , T. Kervyn de Meerenedre , J. Charliac , Pere Roca I Cabarrocas E-MRS 2007 Spring Meeting, 2007, France Communication dans un congrès hal-00322305v1