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Co-auteurs

Nombre de documents

259

Diagnostics of Reactive Plasmas


Research interests

Physics and chemistry of electrical discharges in reactive gases and their interaction with surfaces.
Development of novel diagnostic techniques for reactive plasmas : optical techniques for measuring reactive species densities and kinetics, electric fields, and electrical plasma measurements. Laser-induced fluorescence, Ion Flux Probes, cavity ring-down spectroscopy, broad-band absorption spectroscopy, microwave resonance techniques for electron density measurements.
Development of sensors for in-situ control of industrial plasma processes.
Physics of capacitively-coupled radiofrequency plasmas : tailored voltage waveform excitation for control of ion and electron fluxes and energy distributions.
Gas breakdown in RF fields.

Brief vitae

2000-Present : Directeur de Recherche, CNRS at LPP, except :
2006-2008 : Technical Director, Lam Research Corp, Fremont, CA, USA
1990-2000 : Chargé de Recherche, CNRS, Laboratoire de Spectrométrie Physique, Grenoble
1988-1990 : Post-doctoral researcher, CNRS/CNET, Meylan, France
1985-1988 : D. Phil., Physical Chemistry Laboratory, Oxford University, UK
1980-1984 : BA & MA, Chemistry, Oxford University, UK

Distinctions :
2010 : Fellow of AVS
1984 : Physical Chemistry Part II Thesis Prize, Oxford University
1980-1983 : Stapeldon Scholarship to Exeter College, Oxford

Editorial responsabilities and Conference organisation
Associate Editor of IoP journal Plasma Sources, Science and Technology
Chair, International Workshop on Oxygen Plasma Kinetics 2016
Chair, Laser-Aided Plasma Diagnostics 2013& 2015
Program Commitee, ICPP 2014
Secretary, AVS Plasma Science and Technology Division, 2012-13
Chair, International Conference on Phenomena in Ionised Gases, 2009


Article dans une revue71 documents

  • C. Western, Jean-Paul Booth, A. Chatterjee, N. de Oliveira. Rydberg spectra of singlet metastable states of O2. Molecular Physics, Taylor & Francis, 2020, pp.e1741714. ⟨10.1080/00268976.2020.1741714⟩. ⟨hal-02544881⟩
  • Jean-Paul Booth, Abhyuday Chatterjee, Olivier Guaitella, Joao Santos Sousa, Dmitry Lopaev, et al.. Determination of absolute O(3P) and O2(a1Δg) densities and kinetics in fully modulated O2 dc glow discharges from the O2(X3Σg -) afterglow recovery dynamics. Plasma Sources Science and Technology, IOP Publishing, In press, ⟨10.1088/1361-6595/abb5e7⟩. ⟨hal-02933186⟩
  • Andrey Vladimirovich Volynets, Dmitry Lopaev, T Rakhimova, O Proshina, Alexander Chukalovsky, et al.. Fast quenching of metastable O 2 (a 1 Δ g ) and O 2 (b 1 Σ g + ) molecules by O( 3 P) atoms at high temperature. Plasma Sources Science and Technology, IOP Publishing, In press, ⟨10.1088/1361-6595/abbf92⟩. ⟨hal-02966916⟩
  • Jean-Paul Booth, Olivier Guaitella, Abhyuday Chatterjee, Cyril Drag, V. Guerra, et al.. Oxygen (3P) atom recombination on a Pyrex surface in an O2 plasma. Plasma Sources Science and Technology, IOP Publishing, 2019, 28 (5), pp.055005. ⟨10.1088/1361-6595/ab13e8⟩. ⟨hal-02272108⟩
  • Junkang Wang, Sébastien Diné, Jean-Paul Booth, Erik Johnson. Experimental demonstration of multifrequency impedance matching for tailored voltage waveform plasmas. Journal of Vacuum Science and Technology A, American Vacuum Society, 2019, 37 (2), pp.021303. ⟨10.1116/1.5056205⟩. ⟨hal-02081466⟩
  • A. S Morillo-Candas, Cyril Drag, Jean-Paul Booth, T. C Dias, V. Guerra, et al.. Oxygen atom kinetics in CO2 plasmas ignited in a DC glow discharge. Plasma Sources Science and Technology, IOP Publishing, 2019, 28 (7), pp.075010. ⟨10.1088/1361-6595/ab2b84⟩. ⟨hal-02272107⟩
  • Frederik Schmidt, J. Schulze, Erik Johnson, Jean-Paul Booth, D. Keil, et al.. Multi frequency matching for voltage waveform tailoring. Plasma Sources Science and Technology, IOP Publishing, 2018, 27 (9), pp.095012. ⟨hal-02271985⟩
  • Sandra Schröter, Apiwat Wijaikhum, Andrew Gibson, Andrew West, Helen Davies, et al.. Chemical kinetics in an atmospheric pressure helium plasma containing humidity. Physical Chemistry Chemical Physics, Royal Society of Chemistry, 2018, 20 (37), pp.24263-24286. ⟨10.1039/c8cp02473a⟩. ⟨hal-02266591⟩
  • Yue Liu, Jean-Paul Booth, Pascal Chabert. Effect of frequency on the uniformity of symmetrical RF CCP discharges. Plasma Sources Science and Technology, IOP Publishing, 2018, 27 (5), pp.055012. ⟨10.1088/1361-6595/aabfb4⟩. ⟨hal-01895562⟩
  • Yue Liu, Jean-Paul Booth, Pascal Chabert. Plasma non-uniformity in a symmetric radiofrequency capacitively-coupled reactor with dielectric side-wall: a two dimensional particle-in-cell/Monte Carlo collision simulation. Plasma Sources Science and Technology, IOP Publishing, 2018, 27 (2), pp.025006. ⟨10.1088/1361-6595/aaa86e⟩. ⟨hal-01895556⟩
  • Z. Donkó, A. Derzsi, Ihor Korolov, P. Hartmann, S. Brandt, et al.. Experimental benchmark of kinetic simulations of capacitively coupled plasmas in molecular gases. Plasma Physics and Controlled Fusion, IOP Publishing, 2018, 60 (1), pp.014010. ⟨10.1088/1361-6587/aa8378⟩. ⟨hal-01895567⟩
  • Adriana Annusova, Daniil Marinov, Jean-Paul Booth, Nishant Sirse, Mrio Lino Da Silva, et al.. Kinetics of highly vibrationally excited O2 (X) molecules in inductively-coupled oxygen plasmas. Plasma Sources Science and Technology, IOP Publishing, 2018, 27 (4), pp.045006. ⟨10.1088/1361-6595/aab47d⟩. ⟨hal-01895558⟩
  • James R. Hamilton, Jonathan Tennyson, Jean-Paul Booth, Timo Gans, Andrew Gibson. Calculated electron impact dissociation cross sections for molecular chlorine (Cl 2 ). Plasma Sources Science and Technology, IOP Publishing, 2018, 27 (9), pp.095008. ⟨10.1088/1361-6595/aada32⟩. ⟨hal-01890202⟩
  • Jonathan Tennyson, Sara Rahimi, Christian Hill, Lisa Tse, Anuradha Vibhakar, et al.. QDB: a new database of plasma chemistries and reactions. Plasma Sources Science and Technology, IOP Publishing, 2017, 26 (5), pp.055014. ⟨10.1088/1361-6595/aa6669⟩. ⟨hal-01895568⟩
  • J. Dedrick, Sandra Schröter, K. Niemi, A. Wijaikhum, E. Wagenaars, et al.. Controlled production of atomic oxygen and nitrogen in a pulsed radio-frequency atmospheric-pressure plasma. Journal of Physics D: Applied Physics, IOP Publishing, 2017, 50 (45), pp.455204. ⟨10.1088/1361-6463/aa8da2⟩. ⟨hal-01895585⟩
  • A. Derzsi, Bastien Bruneau, Andrew Gibson, Erik Johnson, D. O'Connell, et al.. Power coupling mode transitions induced by tailored voltage waveforms in capacitive oxygen discharges. Plasma Sources Science and Technology, IOP Publishing, 2017, 26 (3), pp.034002. ⟨10.1088/1361-6595/aa56d6⟩. ⟨hal-01895575⟩
  • P. Diomede, Bastien Bruneau, S. Longo, E.V. Johnson, Jean-Paul Booth. Capacitively coupled hydrogen plasmas sustained by tailored voltage waveforms: vibrational kinetics and negative ions control. Plasma Sources Science and Technology, IOP Publishing, 2017, 26 (7), pp.075007. ⟨10.1088/1361-6595/aa752c⟩. ⟨hal-01895582⟩
  • Daniil Marinov, Jean-Paul Booth, Cyril Drag, Christophe Blondel. Measurement of the isotope shift of the 2p4 -> 2p33p 3P2 two-photon transition of O I and a revision of the triplet energy levels of atomic oxygen. Journal of Physics B: Atomic, Molecular and Optical Physics, IOP Publishing, 2017, 50 (6), pp.065003. ⟨10.1088/1361-6455/aa5a88⟩. ⟨hal-01895572⟩
  • Andrew Gibson, Mickaël Foucher, Daniil Marinov, Pascal Chabert, T. Gans, et al.. The role of thermal energy accommodation and atomic recombination probabilities in low pressure oxygen plasmas. Plasma Physics and Controlled Fusion, IOP Publishing, 2017, 59 (2), pp.024004. ⟨10.1088/1361-6587/59/2/024004⟩. ⟨hal-01895577⟩
  • Efe Kemaneci, Jean-Paul Booth, Pascal Chabert, Jan van Dijk, Thomas Mussenbrock, et al.. A computational analysis of the vibrational levels of molecular oxygen in low-pressure stationary and transient radio-frequency oxygen plasma. Plasma Sources Science and Technology, IOP Publishing, 2016, 25 (2), pp.025025. ⟨10.1088/0963-0252/25/2/025025⟩. ⟨hal-01549335⟩
  • Bastien Bruneau, Trevor Lafleur, Jean-Paul Booth, Erik Johnson. Controlling the shape of the ion energy distribution at constant ion flux and constant mean ion energy with tailored voltage waveforms. Plasma Sources Science and Technology, IOP Publishing, 2016, 25 (2), pp.025006. ⟨10.1088/0963-0252/25/2/025006⟩. ⟨hal-01549334⟩
  • S. Brandt, B. Berger, E. Schüngel, Ihor Korolov, A. Derzsi, et al.. Electron power absorption dynamics in capacitive radio frequency discharges driven by tailored voltage waveforms in CF4. Plasma Sources Science and Technology, IOP Publishing, 2016, 25 (4), pp.045015. ⟨10.1088/0963-0252/25/4/045015⟩. ⟨hal-01549325⟩
  • Daniil Marinov, Mickaël Foucher, Ewen Campbell, Mark Brouard, Pascal Chabert, et al.. High sensitivity ultra-broad-band absorption spectroscopy of inductively coupled chlorine plasma. Plasma Sources Science and Technology, IOP Publishing, 2016, 25 (3), pp.035019 ⟨10.1088/0963-0252/25/3/035019⟩. ⟨hal-01346016⟩
  • Bastien Bruneau, Ihor Korolov, Trevor Lafleur, T. Gans, D. O'Connell, et al.. Slope and amplitude asymmetry effects on low frequency capacitively coupled carbon tetrafluoride plasmas. Journal of Applied Physics, American Institute of Physics, 2016, 119 (16), pp.163301. ⟨10.1063/1.4947453⟩. ⟨hal-01549329⟩
  • Bastien Bruneau, Trevor Lafleur, T. Gans, D. O'Connell, Arthur Greb, et al.. Effect of gas properties on the dynamics of the electrical slope asymmetry effect in capacitive plasmas: comparison of Ar, H2 and CF4. Plasma Sources Science and Technology, IOP Publishing, 2016, 25 (1), pp.01LT02. ⟨10.1088/0963-0252/25/1/01LT02⟩. ⟨hal-01549332⟩
  • A. Derzsi, Trevor Lafleur, Jean-Paul Booth, Ihor Korolov, Zoltan Donko. Experimental and simulation study of a capacitively coupled oxygen discharge driven by tailored voltage waveforms. Plasma Sources Science and Technology, IOP Publishing, 2016, 25 (1), pp.015004. ⟨10.1088/0963-0252/25/1/015004⟩. ⟨hal-01549577⟩
  • E. Schüngel, Ihor Korolov, Bastien Bruneau, A. Derzsi, E.V. Johnson, et al.. Tailored voltage waveform capacitively coupled plasmas in electronegative gases: frequency dependence of asymmetry effects. Journal of Physics D: Applied Physics, IOP Publishing, 2016, 49 (26), pp.265203. ⟨10.1088/0022-3727/49/26/265203⟩. ⟨hal-01549338⟩
  • Daniil Marinov, Cyril Drag, Christophe Blondel, Olivier Guaitella, Judith Golda, et al.. Pressure broadening of atomic oxygen two-photon absorption laser induced fluorescence. Plasma Sources Science and Technology, IOP Publishing, 2016, 25 (6), pp.06LT03. ⟨10.1088/0963-0252/25/6/06LT03⟩. ⟨hal-01549339⟩
  • Jean-Paul Booth, Daniil Marinov, Mickaël Foucher, Olivier Guaitella, D. Bresteau, et al.. Gas temperature measurements in oxygen plasmas by high-resolution Two-Photon Absorption Laser-induced Fluorescence. Journal of Instrumentation, IOP Publishing, 2015, 10 (11), pp.C11003. ⟨10.1088/1748-0221/10/11/C11003⟩. ⟨hal-01549365⟩
  • Bastien Bruneau, T. Novikova, Trevor Lafleur, Jean-Paul Booth, E.V. Johnson. Control and optimization of the slope asymmetry effect in tailored voltage waveforms for capacitively coupled plasmas. Plasma Sources Science and Technology, IOP Publishing, 2015, 24 (1), pp.015021. ⟨10.1088/0963-0252/24/1/015021⟩. ⟨hal-01549355⟩
  • Mickaël Foucher, Daniil Marinov, Emile Carbone, Pascal Chabert, Jean-Paul Booth. Highly vibrationally excited O2 molecules in low-pressure inductively-coupled plasmas detected by high sensitivity ultra-broad-band optical absorption spectroscopy. Plasma Sources Science and Technology, IOP Publishing, 2015, 24 (4), pp.042001. ⟨10.1088/0963-0252/24/4/042001⟩. ⟨hal-01549357⟩
  • A.V. Klochko, J. Lemainque, Jean-Paul Booth, Svetlana Starikovskaia. TALIF measurements of oxygen atom density in the afterglow of a capillary nanosecond discharge. Plasma Sources Science and Technology, IOP Publishing, 2015, 24 (2), pp.025010. ⟨10.1088/0963-0252/24/2/025010⟩. ⟨hal-01549360⟩
  • Bastien Bruneau, T. Gans, D. O'Connell, Arthur Greb, E.V. Johnson, et al.. Strong Ionization Asymmetry in a Geometrically Symmetric Radio Frequency Capacitively Coupled Plasma Induced by Sawtooth Voltage Waveforms. Physical Review Letters, American Physical Society, 2015, 114, pp.125002. ⟨10.1103/PhysRevLett.114.125002⟩. ⟨hal-01549359⟩
  • Efe Kemaneci, Emile Carbone, Jean-Paul Booth, Wouter Graef, Jan van Dijk, et al.. Global (volume-averaged) model of inductively coupled chlorine plasma: Influence of Cl wall recombination and external heating on continuous and pulse-modulated plasmas. Plasma Sources Science and Technology, IOP Publishing, 2014, 23 (4), pp.045002. ⟨10.1088/0963-0252/23/4/045002⟩. ⟨hal-01549388⟩
  • Trevor Lafleur, Pascal Chabert, Jean-Paul Booth. Electron heating in capacitively coupled plasmas revisited. Plasma Sources Science and Technology, IOP Publishing, 2014, 23 (3), pp.035010. ⟨10.1088/0963-0252/23/3/035010⟩. ⟨hal-01549379⟩
  • Nishant Sirse, Mickaël Foucher, Pascal Chabert, Jean-Paul Booth. Ground state bromine atom density measurements by two-photon absorption laser-induced fluorescence. Plasma Sources Science and Technology, IOP Publishing, 2014, 23 (6), pp.062003. ⟨10.1088/0963-0252/23/6/062003⟩. ⟨hal-01549574⟩
  • Trevor Lafleur, Pascal Chabert, Miles Turner, Jean-Paul Booth. Equivalence of the hard-wall and kinetic-fluid models of collisionless electron heating in capacitively coupled discharges. Plasma Sources Science and Technology, IOP Publishing, 2014, 23 (1), pp.015016. ⟨10.1088/0963-0252/23/1/015016⟩. ⟨hal-01549398⟩
  • V. A. Lisovskiy, V. D. Yegorenkov, P. Ogloblina, Jean-Paul Booth, S. Martins, et al.. Electron transport parameters in NF3. Journal of Physics D: Applied Physics, IOP Publishing, 2014, 47 (11), pp.115203. ⟨10.1088/0022-3727/47/11/115203⟩. ⟨hal-01549378⟩
  • Bastien Bruneau, T. Novikova, Trevor Lafleur, Jean-Paul Booth, E.V. Johnson. Ion flux asymmetry in radiofrequency capacitively-coupled plasmas excited by sawtooth-like waveforms. Plasma Sources Science and Technology, IOP Publishing, 2014, 23 (6), pp.065010. ⟨10.1088/0963-0252/23/6/065010⟩. ⟨hal-01549377⟩
  • P. Diomede, D. J. Economou, Trevor Lafleur, Jean-Paul Booth, S. Longo. Radio-frequency capacitively coupled plasmas in hydrogen excited by tailored voltage waveforms: comparison of simulations with experiments. Plasma Sources Science and Technology, IOP Publishing, 2014, 23 (6), pp.065049. ⟨10.1088/0963-0252/23/6/065049⟩. ⟨hal-01549381⟩
  • Trevor Lafleur, Pierre-Alexandre Delattre, E.V. Johnson, Jean-Paul Booth. Capacitively coupled radio-frequency plasmas excited by tailored voltage waveforms. Plasma Physics and Controlled Fusion, IOP Publishing, 2013, 55 (12), pp.124002. ⟨10.1088/0741-3335/55/12/124002⟩. ⟨hal-01549416⟩
  • Nishant Sirse, Jean-Paul Booth, Pascal Chabert, A. Surzhykov, P. Indelicato. Chlorine atom densities in the (3p5)2 P01/2 excited spin-orbit state measured by two-photon absorption laser-induced fluorescence in a chlorine inductively coupled plasma. Journal of Physics D: Applied Physics, IOP Publishing, 2013, 46 (29), pp.295203. ⟨10.1088/0022-3727/46/29/295203⟩. ⟨hal-01549418⟩
  • Trevor Lafleur, Pascal Chabert, M.M. Turner, Jean-Paul Booth. Anomalous collisionality in low-pressure plasmas. Physics of Plasmas, American Institute of Physics, 2013, 20 (12), pp.124503. ⟨10.1063/1.4859155⟩. ⟨hal-01549421⟩
  • Daniil Marinov, Olivier Guaitella, Jean-Paul Booth, Antoine Rousseau. Direct observation of ozone formation on SiO2 surfaces in O2 discharges. Journal of Physics D: Applied Physics, IOP Publishing, 2013, 46, pp.032001. ⟨10.1088/0022-3727/46/3/032001⟩. ⟨hal-01549402⟩
  • V. A. Lisovskiy, V. D. Yegorenkov, E. Artushenko, Jean-Paul Booth, S. Martins, et al.. Normal regime of the weak-current mode of an rf capacitive discharge. Plasma Sources Science and Technology, IOP Publishing, 2013, 22 (1), pp.015018. ⟨10.1088/0963-0252/22/1/015018⟩. ⟨hal-01549408⟩
  • Pierre-Alexandre Delattre, Trevor Lafleur, Erik Johnson, Jean-Paul Booth. Radio-frequency capacitively coupled plasmas excited by tailored voltage waveforms: comparison of experiment and particle-in-cell simulations. Journal of Physics D: Applied Physics, IOP Publishing, 2013, 46, pp.235201. ⟨10.1088/0022-3727/46/23/235201⟩. ⟨hal-01549413⟩
  • Jean-Paul Booth, Trevor Lafleur. Frequency dependence of the electrical asymmetry effect in dual-frequency capacitively coupled discharges. Applied Physics Letters, American Institute of Physics, 2013, 102, pp.154104. ⟨10.1063/1.4802241⟩. ⟨hal-01549406⟩
  • Trevor Lafleur, Pascal Chabert, Jean-Paul Booth. Secondary electron induced asymmetry in capacitively coupled plasmas. Journal of Physics D: Applied Physics, IOP Publishing, 2013, 46, pp.135201. ⟨10.1088/0022-3727/46/13/135201⟩. ⟨hal-01549417⟩
  • Trevor Lafleur, Pierre-Alexandre Delattre, E.V. Johnson, Jean-Paul Booth, Sébastien Diné. Radio frequency current-voltage probe for impedance and power measurements in multi-frequency unmatched loads. Review of Scientific Instruments, American Institute of Physics, 2013, 84, pp.015001. ⟨10.1063/1.4773540⟩. ⟨hal-01549400⟩
  • K. Niemi, D. O'Connell, N. de Oliveira, D. Joyeux, L. Nahon, et al.. Absolute atomic oxygen and nitrogen densities in radio-frequency driven atmospheric pressure cold plasmas: Synchrotron vacuum ultra-violet high-resolution Fourier-transform absorption measurements. Applied Physics Letters, American Institute of Physics, 2013, 103 (3), pp.034102. ⟨10.1063/1.4813817⟩. ⟨hal-01549425⟩
  • Daniil Marinov, V. Guerra, Olivier Guaitella, Jean-Paul Booth, Antoine Rousseau. Ozone kinetics in low-pressure discharges: vibrationally excited ozone and molecule formation on surfaces. Plasma Sources Science and Technology, IOP Publishing, 2013, 22, pp.055018. ⟨10.1088/0963-0252/22/5/055018⟩. ⟨hal-01549572⟩
  • Yang Wang, Oleg Zatsarinny, Klaus Bartschat, Jean-Paul Booth. Fine-structure-resolved electron collisions from chlorine atoms in the (3p5)2P3/2o and (3p5)2P1/2o states. Physical Review A, American Physical Society, 2013, 87, pp.022703. ⟨10.1103/PhysRevA.87.022703⟩. ⟨hal-01549405⟩
  • Trevor Lafleur, Pascal Chabert, M.M. Turner, Jean-Paul Booth. Theory for the self-bias formation in capacitively coupled plasmas excited by arbitrary waveforms. Plasma Sources Science and Technology, IOP Publishing, 2013, 22 (6), pp.065013. ⟨10.1088/0963-0252/22/6/065013⟩. ⟨hal-01549415⟩
  • E.V. Johnson, S. Pouliquen, Pierre-Alexandre Delattre, Jean-Paul Booth. Hydrogenated microcrystalline silicon thin films deposited by RF-PECVD under low ion bombardment energy using voltage waveform tailoring. Journal of Non-Crystalline Solids, Elsevier, 2012, 358 (17), pp.1974-1977. ⟨10.1016/j.jnoncrysol.2012.01.014⟩. ⟨hal-01549432⟩
  • E.V. Johnson, S. Pouliquen, Pierre-Alexandre Delattre, Jean-Paul Booth. Tailored voltage waveform deposition of Microcrystalline Silicon thin films from hydrogen-diluted silane and silicon tetrafluoride: optoelectronic properties of films. Japanese Journal of Applied Physics, Japan Society of Applied Physics, 2012, 51, pp.08HF01. ⟨10.1143/JJAP.51.08HF01⟩. ⟨hal-01549433⟩
  • E.V. Johnson, Pierre-Alexandre Delattre, Jean-Paul Booth. Microcrystalline silicon solar cells deposited using a plasma process excited by tailored voltage waveforms. Applied Physics Letters, American Institute of Physics, 2012, 100, pp.133504. ⟨10.1063/1.3699222⟩. ⟨hal-01549437⟩
  • Jean-Paul Booth, Yasmina Azamoum, Nishant Sirse, Pascal Chabert. Absolute atomic chlorine densities in a Cl2 ICP determined by Two-Photon Laser Induced Fluorescence with a new calibration method. Journal of Physics D: Applied Physics, IOP Publishing, 2012, 45, pp.195201. ⟨10.1088/0022-3727/45/19/195201⟩. ⟨hal-01549434⟩
  • Trevor Lafleur, R.W. Boswell, Jean-Paul Booth. Enhanced sheath heating in capacitively coupled discharges due to non-sinusoidal voltage waveforms. Applied Physics Letters, American Institute of Physics, 2012, 100, pp.194101. ⟨10.1063/1.4712128⟩. ⟨hal-01549438⟩
  • V. Samara, Jean-Paul Booth, J.-F. de Marneffe, A.P. Milenin, M. Brouri, et al.. A dc-pulsed capacitively coupled planar Langmuir probe for plasma process diagnostics and monitoring. Plasma Sources Science and Technology, IOP Publishing, 2012, 21, pp.065004. ⟨10.1088/0963-0252/21/6/065004⟩. ⟨hal-01549444⟩
  • Trevor Lafleur, Pierre-Alexandre Delattre, E.V. Johnson, Jean-Paul Booth. Separate control of the ion flux and ion energy in capacitively coupled rf discharges using voltage waveform tailoring. Applied Physics Letters, American Institute of Physics, 2012, 101, pp.124104. ⟨10.1063/1.4754692⟩. ⟨hal-01549435⟩
  • Trevor Lafleur, Jean-Paul Booth. Control of the ion flux and ion energy in CCP discharges using non-sinusoidal voltage waveforms. Journal of Physics D: Applied Physics, IOP Publishing, 2012, 45, pp.395203. ⟨10.1088/0022-3727/45/39/395203⟩. ⟨hal-01549449⟩
  • E.V. Johnson, S. Pouliquen, Pierre-Alexandre Delattre, Jean-Paul Booth. Control of Nanocrystalline Silicon Growth Phase and Deposition Rate through Voltage Waveform Tailoring during PECVD. MRS Proceedings, 2011, 1339, pp.mrss11-1339-s04-5. ⟨10.1557/opl.2011.993⟩. ⟨hal-01549456⟩
  • V. Lisovskiy, V. Yegorenkov, Jean-Paul Booth, K. Landry, D. Douai, et al.. Electron drift velocity in SF6 in strong electric fields determined from rf breakdown curves. Journal of Physics D: Applied Physics, IOP Publishing, 2010, 43, pp.385203. ⟨10.1088/0022-3727/43/38/385203⟩. ⟨hal-01549464⟩
  • G. A. Curley, L. Gatilova, S. Guilet, S. Bouchoule, G. S. Gogna, et al.. Surface loss rates of H and Cl atoms in an inductively coupled plasma etcher using time-resolved electron density and optical emission measurements. Journal of Vacuum Science and Technology A, 2010, 28 (2), pp.360-372. ⟨10.1116/1.3330766⟩. ⟨hal-01549465⟩
  • Jean-Paul Booth, G. Curley, D. Marić, Pascal Chabert. Dual-frequency capacitive radiofrequency discharges: effect of low-frequency power on electron density and ion flux. Plasma Sources Science and Technology, IOP Publishing, 2010, 19, pp.015005. ⟨10.1088/0963-0252/19/1/015005⟩. ⟨hal-01549466⟩
  • Jean-Paul Booth, Pascal Chabert. Plasmas froids. FlashX, 2010, 12, pp.3-5. ⟨hal-02570443⟩
  • E.V. Johnson, T. Verbeke, J-C Vanel, Jean-Paul Booth. Nanocrystalline silicon film growth morphology control through RF waveform tailoring. Journal of Physics D: Applied Physics, IOP Publishing, 2010, 43, pp.412001. ⟨10.1088/0022-3727/43/41/412001⟩. ⟨hal-01549485⟩
  • Zd Nikitovic, Vd Stojanovic, Jean-Paul Booth, Zl Petrovic. Electron transport coefficients in mixtures of CF4 and CF2 radicals. Plasma Sources Science and Technology, IOP Publishing, 2009, 18, pp.035008. ⟨10.1088/0963-0252/18/3/035008⟩. ⟨hal-01549497⟩
  • F. Neuilly, J.P Booth, L. Vallier. Chlorine dissociation fraction in an inductively coupled plasma measured by ultraviolet absorption spectroscopy. Journal of Vacuum Science and Technology, American Vacuum Society (AVS), 2002, pp.A20(1), 225, (2002). ⟨hal-00475898⟩
  • G. Cunge, Pascal Chabert, Jean-Paul Booth. Absolute fluorine atoms concentration in fluorocarbon plasma determined from CF2 loss kinetics. Journal of Applied Physics, American Institute of Physics, 2001, pp.89 (12), 7750, (2001). ⟨hal-00475790⟩
  • Pascal Chabert, G. Cunge, Jean-Paul Booth. Reactive ion etching of SiC in SF6 gas: detection of CF, CF2 and SiF2 etch products. Applied Physics Letters, American Institute of Physics, 2001, pp.79, 916. ⟨hal-00475792⟩

Communication dans un congrès136 documents

  • Olivier Guaitella, Ana-Sofia Morillo-Candas, Tiago Dias, Edmond Baratte, P. Ogloblina, et al.. XXXIV ICPIG & ICRP-10. Influence of surfaces in the kinetic of CO2 plasma, Jul 2019, Sapporo, Hokkaido, Japan. ⟨hal-02371063⟩
  • Jean-Paul Booth, Abhyuday Chatterjee, Olivier Guaitella, N. de Oliveira, L. Nahon, et al.. A comprehensive diagnostic study of a DC positive column in O2: a test-bed for models of plasmas in a diatomic gas. 7th International Conference on Advanced Plasma Technologies, May 2019, Gozd Martuljek, Slovenia. ⟨hal-02341781⟩
  • Jean-Paul Booth. Vacuum ultraviolet absorption spectroscopy of oxygen discharges. 3rd European Conference on Plasma Diagnostics, May 2019, Lisbon, Portugal. ⟨hal-02341780⟩
  • Sebastien Dine, Jean-Paul Booth, E.V. Johnson, Junkang Wang. Experimental Demonstration of Multifrequency Matching for Tailored Voltage Waveform Plasma Excitation. International Conference on Phenomena in Ionised Gases, Jul 2019, Hokkaido, Japan. ⟨hal-02341689⟩
  • Florian Marmuse, Romain Lucken, Cyril Drag, Jean-Paul Booth, Anne Bourdon, et al.. Optical and electrical diagnostics in an iodine plasma. 36th International Electric Propulsion Conference, Sep 2019, Vienna, Austria. ⟨hal-02341690⟩
  • Jean-Paul Booth, Abhyuday Chatterjee, Olivier Guaitella, Cyril Drag, Dmitry Lopaev, et al.. Novel diagnostics to unravel fundamental processes in oxygen plasmas. 7th International Conference on Advanced Plasma Technologies, Feb 2019, Hue, Vietnam. ⟨hal-02341778⟩
  • Jean-Paul Booth, Abhyuday Chatterjee, Olivier Guaitella, Cyril Drag, N. de Oliveira, et al.. A comprehensive diagnostic study of a DC positive column in O2: a test-bed for models of plasmas in a diatomic gas. Frontiers in low Temperature plasma simulation, May 2019, Bad Honnef, Germany. ⟨hal-02341779⟩
  • Olivier Guaitella, Ana-Sofia Morillo-Candas, Cyril Drag, Jean-Paul Booth, Bart Klarenaar, et al.. 63rd Course of the International School of Quantum Electronics. Diagnostics to study vibrational excitation kinetics of CO2, Sep 2019, Erice, Italy. ⟨hal-02371062⟩
  • Jean-Paul Booth, Abhyuday Chatterjee, Olivier Guaitella, N. de Oliveira, L. Nahon, et al.. Oxygen metastable molecule densities in inductively-coupled plasmas in pure O2 measured by VUV absorption. 71st Annual Gaseous Electronics Conference, Nov 2018, Portland, Oregon, United States. ⟨hal-02342229⟩
  • Jean-Paul Booth, Abhyuday Chatterjee, Olivier Guaitella, N. de Oliveira, L. Nahon, et al.. Vacuum ultraviolet absorption spectroscopy of oxygen discharges. The 8th International Workshop on Plasma Spectroscopy, Sep 2018, Oxford, United Kingdom. ⟨hal-02342224⟩
  • J. Zhao, Peter L G Ventzek, Barton Lane, Toshihiko Iwao, Kiyotaka Ishibashi, et al.. Diagnostics of plasma neutral species in a very high frequency oxygen plasma with high sensitivity broadband absorption spectroscopy. AVS Symposium, Oct 2018, Long Beach, California, United States. ⟨hal-02342227⟩
  • Jean-Paul Booth, Abhyuday Chatterjee, Olivier Guaitella, N. de Oliveira, L. Nahon, et al.. High−resolution VUV absorption diagnostics of discharges in oxygen. 20th Gaseous Electronics Meeting, Jun 2018, Magnetic Island, Townsville, Queensland, Australia. ⟨hal-02341777⟩
  • Sandra Schröter, A. Wijiakaum, Andrew Gibson, Jérôme Bredin, K. Niemi, et al.. Multi-species experimental validation of plasma chemistry models at atmospheric pressure. Frontiers in Low temperature Plasma Simulation, May 2018, Dublin, Ireland. ⟨hal-02342228⟩
  • Ana-Sofia Morillo-Candas, Bart Klarenaar, Marija Grofulovic, Cyril Drag, Jean-Paul Booth, et al.. Comparison of gas temperature measurements with Raman, FTIR and HR-TALIF. ESCAMPIG XXIV, Jul 2018, Glasgow, Scotland, United Kingdom. ⟨hal-02342225⟩
  • Ana-Sofia Morillo-Candas, C. Goncalves, Bart Klarenaar, Jean-Paul Booth, Cyril Drag, et al.. Effect of high surface-area on CO2 plasma kinetics. ESCAMPIG XXIV, Jul 2018, Glasgow, Scotland, United Kingdom. ⟨hal-02342226⟩
  • Yue Liu, Jean-Paul Booth, Pascal Chabert. 2 Dimensional PIC/MCC simulations of RF CCPs with dielectric side wall: non-uniformity in electron heating. International Workshop on Radio-Frequency Plasmas, May 2017, Presqu’ile de Giens, France. ⟨hal-02593707⟩
  • Olivier Guaitella, Ana-Sofia Morillo-Candas, David Yap, Cyril Drag, Jean-Paul Booth, et al.. Vibrational excitation and temperature evolution in a pulsed CO2 discharge. 70th Annuel Gaseous Electronics Conference (GEC 2017), 2017, Pittsburgh, Pennsylvania, United States. ⟨hal-02592107⟩
  • Daniil Marinov, Christophe Blondel, Jean-Paul Booth, Olivier Guaitella, Pierre Lottigier, et al.. Single-mode nanosecond Ti: Sapphire laser for high resolution Two-photon Absorption Laser Induced-Fluorescence (TALIF). 2017 European Conference on Lasers and Electro-Optics and European Quantum Electronics Conference, Jun 2017, Munich, Germany. Paper# CH_3_3. ⟨hal-02588053⟩
  • Ana-Sofia Morillo-Candas, Bart Klarenaar, Richard Engeln, Abhyuday Chatterjee, Jean-Paul Booth, et al.. O atom kinetics in CO2 pulsed glow discharges. XXXIII ICPIG- International Conference on Phenomena in Ionised Gases, Jul 2017, Estoril/Lisbon, Portugal. ⟨hal-02593709⟩
  • Ana-Sofia Morillo-Candas, Pierre Lottigier, Cyril Drag, Christophe Blondel, Jean-Paul Booth, et al.. High resolution Two-photon Absorption Laser-Induced Fluorescence (TALIF) with a single-mode nanosecond Ti:Sapphire laser. 18th, Laser Aided Plasma Diagnostics, Sep 2017, Prague, Czech Republic, Unknown Region. ⟨hal-02593711⟩
  • Jean-Paul Booth, Abhyuday Chatterjee, Olivier Guaitella, Andrew Gibson, Cyril Drag, et al.. New methods to determine density, temperature and thermal accommodation coefficient of oxygen atoms. International Workshop on Radio-frequency Plasmas, May 2017, Presqu ile de Giens, France. ⟨hal-02593706⟩
  • Jean-Paul Booth, Abhyuday Chatterjee, Olivier Guaitella, N. de Oliveira, L. Nahon, et al.. Kinetics of metastable states and atoms in DC discharges in pure O2: An experimental study. 23rd International Symposium on Plasma Chemistry, Jul 2017, Montréal, Canada. ⟨hal-02593710⟩
  • Jean-Paul Booth. Probing mechanisms in low-temperature reactive gas plasmas: towards improved models of industrial plasma etch processes. 2nd European Conference on Plasma Diagnostics, Apr 2017, Bordeaux, France. ⟨hal-02573369⟩
  • Jean-Paul Booth. The role of translational and vibrational energy in processing plasmas: novel optical diagnostics of low-pressure Cl2 and O2 inductively-coupled plasmas. 1st Asia-Pacific Conference on Plasma Physics, Sep 2017, Chengdu, China. ⟨hal-02573371⟩
  • Jean-Paul Booth, Abhyuday Chatterjee, Olivier Guaitella, Ana-Sofia Morillo-Candas, Cyril Drag, et al.. Kinetics of atoms and metastable molecules in oxygen plasmas revisited: an experimental study. 10th EU-Japan Joint Symposium on Plasma Processing, Dec 2017, Okinawa, Japan. ⟨hal-02573372⟩
  • Jean-Paul Booth, Mickaël Foucher, Andrew Gibson, Daniil Marinov. Quantitative Diagnostics of Inductively-coupled Radiofrequency Plasmas in Cl2, O2 and mixtures. International Symposium on Gas Kinetics and Related Phenomena, Jul 2016, York, United Kingdom. ⟨hal-02593687⟩
  • Yue Liu, Jean-Paul Booth, Pascal Chabert. Two Dimensional Particle-in-cell/Monte Carlo (PIC/MC) Simulation of Radio Frequency Capacitively Coupled Plasmas with a Dielectric Side Wall Boundary. GEC, Oct 2016, Bochum, Germany. ⟨hal-02593691⟩
  • Erik Johnson, Sebastien Dine, Jean-Paul Booth. Multifrequency impedance matching solutions for plasma excitation by Tailored Voltage Waveforms. AVS Symposium, Nov 2016, Nashville, United States. ⟨hal-02593689⟩
  • Andrew Gibson, Mickaël Foucher, Daniil Marinov, Pascal Chabert, T. Gans, et al.. The role of surface interaction probabilities in reactive plasma modelling. ESCAMPIG, Jul 2016, Bratislava, Slovakia. ⟨hal-02593684⟩
  • Andrew Gibson, Mickaël Foucher, Daniil Marinov, Pascal Chabert, T. Gans, et al.. The importance of surface interaction probabilities in low pressure plasma simulations for process design. PESM (Plasma Etch and Strip for Microelectronics), May 2016, Grenoble, France. ⟨hal-02593686⟩
  • Sandra Schröter, Jérôme Bredin, A. West, J. Dedrick, K. Niemi, et al.. Reactive species in humidity containing atmospheric pressure plasma jets − Numerical and experimental investigations. GEC, Oct 2016, Bochum, Germany. ⟨hal-02593693⟩
  • Jean-Paul Booth. Gas temperature measuements by high-resolution TALIF. Workshop on Oxygen Plasma Kinetics, Sep 2016, Reykjavik, Iceland. ⟨hal-02593694⟩
  • V. Guerra, Jean-Paul Booth, Daniil Marinov, Mickaël Foucher, Adriana Annusova. Vibrational excitation in O2 and Cl2 inductively-coupled plasmas and DC discharges. GEC, Oct 2016, Bochum, Germany. ⟨hal-02593690⟩
  • B. Berger, S. Brandt, J. Franek, E. Shuengel, M. Koepke, et al.. ELECTRON POWER ABSORPTION DYNAMICS AND ION ENERGY DISTRIBUTIONS IN CAPACITIVE DISCHARGES DRIVEN BY CUSTOMIZED VOLTAGE WAVEFORMS IN ARGON AND CF4. IEEE-ICOPS, Jun 2016, Banff, Canada. ⟨hal-02593683⟩
  • Daniil Marinov, Mickaël Foucher, Andrew Gibson, Pascal Chabert, Jean-Paul Booth. Dynamics of inductive plasmas in Cl2, O2 and Cl2/O2 mixtures: quantitative diagnostics and numerical modelling. IVC (International Vacuum Conference), Aug 2016, Busan, Korea, Unknown Region. ⟨hal-02573356⟩
  • Jean-Paul Booth, Daniil Marinov, Mickaël Foucher, Olivier Guaitella, Cyril Drag, et al.. Translational and Vibrational Energy in Cl2 and O2 Plasmas Probed by Innovative Optical Diagnostics. AVS Symposium, Nov 2016, Nashville, United States. ⟨hal-02573357⟩
  • J. Schulze, B. Berger, S. Brandt, Bastien Bruneau, Y. Liu, et al.. Charged Particle Dynamics in Technological Radio Frequency Plasmas Operated in CF4. AVS Symposium, Nov 2016, Nashville, United States. ⟨hal-02573358⟩
  • P. Diomede, Trevor Lafleur, Jean-Paul Booth, S. Longo, D. J. Economou. Modelling of tailored ion energy distributions for plasma processing applications. ESCAMPIG, Jul 2016, Bratislava, Slovakia. ⟨hal-02573353⟩
  • Daniil Marinov, Olivier Guaitella, V. Guerra, Jean-Paul Booth, Antoine Rousseau. Plasma-surface interaction: Heterogeneous processes of atmospheric gases. ESCAMPIG, Jul 2016, Bratislava, Slovakia. ⟨hal-02573354⟩
  • D. Diomede, Bastien Bruneau, Trevor Lafleur, D. J. Economou, S. Longo, et al.. Modelling and experimental validation of capacitively coupled plasmas in hydrogen. EPS Plasma, Jul 2016, Leuven, Belgium. ⟨hal-02573350⟩
  • Andrew Gibson, Mickaël Foucher, Daniil Marinov, Pascal Chabert, T. Gans, et al.. Charged and neutral particle dynamics in low pressure chlorine and oxygen plasmas: the role of collisional processes. EPS Plasma, Jul 2016, Leuven, Belgium. ⟨hal-02573351⟩
  • J. Schulze, B. Berger, S. Brandt, M. Koepke, T. Mussenbrock, et al.. Heating dynamics and control of energy distribution functions in capacitive discharges driven by tailored voltage waveforms. International Conference on Plasma Physics ICPP, Jun 2016, Kaohsiung, Taiwan. ⟨hal-02573352⟩
  • Jean-Paul Booth, Mickaël Foucher, Daniil Marinov, Andrew Gibson, Pascal Chabert, et al.. Vibrational excitation in O2 and Cl2 inductively-coupled plasmas and DC discharges. ESCAMPIG Workshop on electron processes active in low temperature plasmas, Jul 2016, Bratislava, Slovakia. ⟨hal-02573355⟩
  • D. Marinov, G. Cunge, D. Ferrah, E.V. Johnson, J.P. Booth. Low Pressure Plasma Cleaning and Doping of CVD Graphene. AVS 62nd International Symposium & Exhibition, 2015, San José, United States. ⟨hal-01878405⟩
  • Andrew Gibson, T. Gans, Mickaël Foucher, Daniil Marinov, Pascal Chabert, et al.. Modelling the influence of neutral gas heating mechanisms on particle densities in inductively coupled chlorine discharges. Gaseous Electronics Conference, Oct 2015, Honolulu, United States. ⟨hal-02593670⟩
  • Sandra Schröter, Jérôme Bredin, A. West, K. Niemi, J. Dedrick, et al.. Reactive species generated in atmospheric-pressure plasmas with water admixtures for biomedical applications: Absolute measurements and numerical simulations. Gaseaous Electronics Conference, Oct 2015, Honolulu, United States. ⟨hal-02593672⟩
  • Mickaël Foucher, Daniil Marinov, Emile Carbone, Pascal Chabert, Jean-Paul Booth. Density and temperature measurements in ICP's of Cl2/O2 using high sensitivity ultra broad-band absorption spectroscopy. International Symposium on Plasma Chemistry, Jul 2015, Anvers, Belgium. ⟨hal-02593678⟩
  • Bastien Bruneau, Erik Johnson, T. Gans, Arthur Greb, Ihor Korolov, et al.. Comparison of the effect of sawtooth-like voltage waveforms on discharge dynamics of Ar, H2, and CF4 plasmas. Gaseaous Electronics Conference, Oct 2015, Honolulu, United States. ⟨hal-02593667⟩
  • Jean-Paul Booth, Olivier Guaitella, Daniil Marinov, Mickaël Foucher, Cyril Drag, et al.. Gas Temperature Measurements in Plasmas by High-Resolution TALIF. Laser AIded Plasma Diagnostics LAPD, Sep 2015, Sapporo, Japan. ⟨hal-02593665⟩
  • Daniil Marinov, Bastien Bruneau, Erik Johnson, Jean-Paul Booth. Cleaning and doping of CVD graphene using tailored voltage waveform capacitively coupled plasma. Plasma Etch and Strip in Microelectronics _PESM, Apr 2015, Louvain, Belgium. ⟨hal-02593662⟩
  • Mickaël Foucher, Daniil Marinov, Pascal Chabert, Ankur Agarwal, S. Rauf, et al.. A Comprehensive Quantitative Study of Low Pressure Inductively-Coupled Plasmas in Cl2, O2 and Mixtures. AVS Annual Symposium, Oct 2015, San Jose, California, United States. ⟨hal-02593675⟩
  • Bastien Bruneau, T. Gans, D. O'Connell, Arthur Greb, Trevor Lafleur, et al.. Ion flux asymmetry obtained by sawtooth-like waveforms: A new degree of freedom in capacitively coupled plasmas. Plasma Etch and Strip in Microelectronics (PESM), Apr 2015, Louvain, Belgium. ⟨hal-02593661⟩
  • Jean-Paul Booth, Mickaël Foucher, Daniil Marinov, Pascal Chabert, Ankur Agarwal, et al.. A Comprehensive Quantitative Study of Low Pressure Inductively-Coupled Plasmas in Cl2, O2 and Mixtures. AVS Symposium, Oct 2015, San Jose, California, United States. ⟨hal-02593682⟩
  • Jean-Paul Booth, Mickaël Foucher, Daniil Marinov, Pascal Chabert. Ultra broad-band high sensitivity absorption spectroscopy of inductively-coupled plasmas in Cl2/O2 mixtures. Frontiers in Low-temperature Plasma Diagnostics FLTPD, May 2015, Porquerolles, France. ⟨hal-02593663⟩
  • Sandra Schröter, Jérôme Bredin, K. Niemi, J. Dedrick, Mickaël Foucher, et al.. Detection of Biomedically Relevant Reactive Oxygen Species in Atmospheric Pressure Plasmas. AVS Symposium, Oct 2015, San Jose, California, United States. ⟨hal-02593680⟩
  • Jean-Paul Booth, Mickaël Foucher, Daniil Marinov, Pascal Chabert, Adriana Annusova, et al.. Vibrational kinetics in Cl2 and O2 low-pressure inductively-coupled plasmas. Gaseous Electronics Conference, Oct 2015, Honolulu, United States. ⟨hal-02593669⟩
  • Ankur Agarwal, Mickaël Foucher, S. Rauf, Jean-Paul Booth, Pascal Chabert, et al.. Validation of Inductively Coupled Plasmas Sustained in Halogen Chemistries. AVS Annual Symposium, Oct 2015, San Jose, California, United States. ⟨hal-02593676⟩
  • Jean-Paul Booth. 101 uses of Cold Plasmas: from smartphones to space travel. Plas@par International Summer School : Discover Plasmas, Aug 2015, Roscoff, France. ⟨hal-02573342⟩
  • Jean-Paul Booth. Quantitative Diagnostics of Inductive Plasmas in Chlorine, Oxygen and Chlorine-Oxygen Mixtures. Radiofrequency Plasma Workshop, Jun 2015, Dublin, Ireland. ⟨hal-02573339⟩
  • Jean-Paul Booth, Mickaël Foucher, Andrew Gibson, Daniil Marinov, Nishant Sirse, et al.. Inductively-coupled plasmas in Cl2 and O2: Comparing HPEM with advanced diagnostic measurements. Quantumol Workshop -Linking Simulation with Experiment, Sep 2015, London, United Kingdom. ⟨hal-02573341⟩
  • Jean-Paul Booth, Mickaël Foucher, Daniil Marinov, Pascal Chabert. Quantitative Diagnostics of Inductive Plasmas in Cl2, O2 AND Cl2/O2 Mixtures. Symposium on Application of Plasma Processes, Jan 2015, Vysoké Tatry, Slovakia. ⟨hal-02573337⟩
  • Bastien Bruneau, Erik Johnson, Jean-Paul Booth, Trevor Lafleur, T. Gans, et al.. Capacitively coupled CF4 discharges excited by tailored waveforms: experiments and kinetic simulations. Radiofrequency Plasma Workshop, Jun 2015, Dublin, Ireland. ⟨hal-02573343⟩
  • Jean-Paul Booth, Mickaël Foucher, Daniil Marinov, Pascal Chabert. Quantitative Diagnostics of Inductive Plasmas in Chlorine, Oxygen and Chlorine-Oxygen Mixtures. MRS-Japan, Dec 2015, Yokohama, Japan. ⟨hal-02573344⟩
  • Daniil Marinov, Olivier Guaitella, Jean-Paul Booth, Antoine Rousseau. Reactive adsorption of molecules and radicals on surfaces. 22nd International Symposium on Plasma Chemistry, Jul 2015, Antwerp, Belgium. ⟨hal-02573340⟩
  • Mickaël Foucher, Daniil Marinov, Emile Carbone, Jean-Paul Booth, Pascal Chabert. Diagnostics of Cl2/O2 Inductively-Coupled Plasmas by Ultra-High sensitivity Broad-Band Absorption Spectroscopy. AVS, Nov 2014, Baltimore, Maryland, United States. ⟨hal-02593659⟩
  • A.V. Klochko, A. Salmon, J. Lemainque, N.A. Popov, Jean-Paul Booth, et al.. Experimental and numerical study of fast gas heating and O atom production in a capillary nanosecond discharge. 52st AIAA Aerospace Sciences Meeting, Jan 2014, National Harbor, Maine, United States. pp.2014-1030. ⟨hal-02588024⟩
  • Mickaël Foucher, Emile Carbone, Jean-Paul Booth, Pascal Chabert. Inductively-coupled plasmas of Cl2, O2 and mixtures : measurement of atoms, ClxOy and electron densities. PESM, May 2014, Grenoble, France. ⟨hal-02593657⟩
  • Mickaël Foucher, Daniil Marinov, Emile Carbone, Jean-Paul Booth, Pascal Chabert. Inductively-coupled plasmas of Cl2, O2 and mixtures : measurement of atoms, ClxOy and electron densities. GEC, Nov 2014, Raleigh, North Carolina, United States. ⟨hal-02593658⟩
  • Bastien Bruneau, T. Novikova, Trevor Lafleur, Jean-Paul Booth, Erik Johnson. Control over the ion flux obtained by sawtooth-like waveforms in radiofrequency capacitively coupled plasmas. AVS Annual Symposium, Nov 2014, Baltimore, Maryland, United States. ⟨hal-02593674⟩
  • Pascal Chabert, Trevor Lafleur, Jean-Paul Booth, Miles Turner. A model for capacitive discharges with arbitrary RF waveform excitation including the electrical asymmetry effect and the associated self-bias. 8th International Conference on reactive Plasma, Feb 2014, Fukuoka, Japan. ⟨hal-02573360⟩
  • Jean-Paul Booth, Mickaël Foucher, Pascal Chabert. Dynamique des Plasmas à Couplage Inductive dans les gaz HBr, Cl2 et O2 et mixtures: Diagnostiques Laser et Absorption Ultraviolet Large-Bande. Colloque de Plasma-Québec, Jun 2014, Montreal, Canada. ⟨hal-02573338⟩
  • E.V. Johnson, Bastien Bruneau, Pierre-Alexandre Delattre, Trevor Lafleur, Jean-Paul Booth. IN-SITU OBSERVATION OF MICROCRYSTALLINE SILICON THIN FILM GROWTH USING TAILORED VOLTAGE WAVEFORMS. International Vacuum Conference, Sep 2013, Paris, France. ⟨hal-02594804⟩
  • Jean-Paul Booth, Nishant Sirse, Pascal Chabert, Mickaël Foucher. Diagnostics of inductively-coupled plasmas in hydrogen bromide : Bromine atom and electron densities. UK Technological Plasmas Workshop, Dec 2013, York, United Kingdom. ⟨hal-02594799⟩
  • A.V. Klochko, J. Lemainque, N.A. Popov, Jean-Paul Booth, Svetlana Starikovskaia. Study of fast gas heating in a capillary nanosecond discharge in air. TALIF O atoms measurements and kinetic modeling (AIAA 2013-0574). 51st AIAA Aerospace Sciences Meeting, Jan 2013, Grapevine, Texas, United States. ⟨hal-02589147⟩
  • Jean-Paul Booth, Erik Johnson, Trevor Lafleur, Pierre-Alexandre Delattre. Tailored Voltage Waveform Capacitively-Coupled Plasmas for IEDF and electron density control: Application to Microcrystalline Si Deposition. Semicon Korea, Jan 2013, Seoul, Korea, Unknown Region. ⟨hal-02573289⟩
  • Mickaël Foucher, Nishant Sirse, Jean-Paul Booth, Pascal Chabert. Ground state bromine atom density measurements by two-photon absorption laser-induced fluorescence. Journées d’Echange du Réseau des Technologies des Plasmas Froids, Oct 2013, La Rochelle, France. ⟨hal-02594807⟩
  • Jean-Paul Booth, E.V. Johnson, Trevor Lafleur, Pierre-Alexandre Delattre, R.W. Boswell. Tailoring plasma properties using pulse-shaping technology,. 21st ISPC, Aug 2013, Cairns, Australia. ⟨hal-02573330⟩
  • E.V. Johnson, Bastien Bruneau, Pierre-Alexandre Delattre, Trevor Lafleur, Jean-Paul Booth. Practical Aspects of using Tailored Voltage Waveforms for Thin Film Processing of Photovoltaic Devices. AVS Symposium, Oct 2013, Long Beach, California, United States. ⟨hal-02573331⟩
  • E.V. Johnson, Bastien Bruneau, Pierre-Alexandre Delattre, Trevor Lafleur, Jean-Paul Booth. Thin Film Deposition with Tailored Voltage Waveforms: Material Questions and Practical Answers. RF Plasma workshop, May 2013, Presqu île de Giens, France. ⟨hal-02573291⟩
  • Jean-Paul Booth, Nishant Sirse, Pascal Chabert, Mickaël Foucher. Diagnostics of Inductively-Coupled Plasmas in Hydrogen Bromide : Bromine Atom and Electron Densities. AVS Symposium, Oct 2013, Long Beach, California, United States. ⟨hal-02594800⟩
  • Trevor Lafleur, Pierre-Alexandre Delattre, E.V. Johnson, Jean-Paul Booth. Capacitively coupled plasmas excited by tailored voltage waveforms. EPS Plasma, Jul 2013, Espoo, Finland. ⟨hal-02573294⟩
  • Jean-Paul Booth, Nishant Sirse, Robert Soriano, Mickaël Foucher, Pascal Chabert. Diagnostics of inductively-coupled plasmas in HBr : Bromine atom and electron densities. Gaseous Electronics Conference, Oct 2013, Princeton, New Jersey, United States. ⟨hal-02594803⟩
  • B. Pruvost, Jean-Paul Booth, Mickaël Foucher, Pascal Chabert, V. Guerra, et al.. Vibrational kinetics in a Cl2 inductively-coupled plasma. Gaseous Electronics Conference, Oct 2013, Princeton, New Jersey, United States. ⟨hal-02594801⟩
  • Trevor Lafleur, Pascal Chabert, Miles Turner, Jean-Paul Booth. Electron heating in capacitively coupled plasmas revisited: single and multi-frequency discharges. Gaseous Electronics Conference, Oct 2013, Princeton, New Jersey, United States. ⟨hal-02573333⟩
  • V. Guerra, Daniil Marinov, Jean-Paul Booth, Olivier Guaitella, Antoine Rousseau. OZONE KINETICS IN LOW-PRESSURE DISCHARGES. SAPP, Jan 2013, Malá Fatra, Slovakia. ⟨hal-02573288⟩
  • Jean-Paul Booth. Determining atom and radical surface recombination coefficients in low-pressure plasmas. Gaseous Electronics Conference : workshop on plasma-surface interactions, Sep 2013, Princeton, New Jersey, United, Unknown Region. ⟨hal-02573332⟩
  • Jean-Paul Booth, Nishant Sirse, Pascal Chabert, B. Pruvost, M.J. Kushner. Inductively-coupled plasmas in pure chlorine: comparison of atom density, electron density and gas temperature measurements with the HPEM hybrid model.. RF Plasma workshop, May 2013, Presqu ile de Giens, France. ⟨hal-02573293⟩
  • Jean-Paul Booth, Nishant Sirse, Pascal Chabert, P. Indelicato, A. Surzhykov, et al.. Dynamics of Cl2 inductively-coupled plasmas: Role of electronic and vibrational excitation. FLTPD, Apr 2013, Rolduc, Netherlands. ⟨hal-02573290⟩
  • Jean-Paul Booth, Pascal Chabert, Nishant Sirse, P. Indelicato, A. Surzykov, et al.. Optical diagnostics of low-pressure plasmas in halogen gases. ICPIG, Jul 2013, Granada, Spain. ⟨hal-02573296⟩
  • Jean-Paul Booth, Nishant Sirse, Yasmina Azamoum, Pascal Chabert. Inductively-coupled plasmas in pure chlorine: comparison experiments/HPEM. GEC, Oct 2012, Austin, Texas, United States. ⟨hal-02594735⟩
  • Jean-Paul Booth, Pascal Chabert, Yasmina Azamoum, Nishant Sirse. Chlorine atom and molecule dynamics in an inductively coupled plasma in pure Cl2. International Workshop on Plasma Spectroscopy (IPS), May 2012, Presqu ile de Giens, France. ⟨hal-02594731⟩
  • Jean-Paul Booth, Nishant Sirse, P. Indelicato, Y. Wang, Oleg Zatsarinny, et al.. Cl atom spin-orbit excited densities in a Cl2 ICP determined by TALIF. UK Technological Plasmas Workshop, Dec 2012, Milton Keynes, United Kingdom. ⟨hal-02594805⟩
  • Jean-Paul Booth, Trevor Lafleur, Pierre-Alexandre Delattre, E.V. Johnson. Tailored Voltage Waveform Capacitively-Coupled Plasmas. GEC, Oct 2012, Austin, Texas, United States. ⟨hal-02594732⟩
  • Jean-Paul Booth, Nishant Sirse, Yasmina Azamoum, Pascal Chabert. Absolute Cl and Cl2 densities in a Cl2 ICP determined by TALIF with a new calibration method. Technological Plasmas Workshop, Jan 2012, Manchester, United Kingdom. ⟨hal-02594794⟩
  • Nishant Sirse, Quentin Délivré, Jean-Paul Booth, Pascal Chabert. Gas temperature measurement in Ar and Ar-Cl2 based ICP discharge: Comparison between experiments and simulations. IEEE International Conference on Plasma Science (ICOPS), Jul 2012, Edinburgh, United Kingdom. ⟨hal-02594795⟩
  • Jean-Paul Booth, Nishant Sirse, P. Indelicato, A. Surzhykov, Y. Wang, et al.. Cl atom spin-orbit excited densities in a Cl2 ICP determined by TALIF. UK TPW, Dec 2012, Milton Keynes, United Kingdom. ⟨hal-02594737⟩
  • Trevor Lafleur, Jean-Paul Booth. Plasma characteristics in non-sinusoidally excited CCP discharges. GEC, Oct 2012, Austin, Texas, United States. ⟨hal-02594733⟩
  • Jean-Paul Booth, Pascal Chabert, Yasmina Azamoum, Nishant Sirse. Chlorine atom and molecule dynamics in an inductively coupled plasma in pure Cl2. Plasma Etch and Strip in Microelectronics (PESM), Mar 2012, Grenoble, France. ⟨hal-02594730⟩
  • Jean-Paul Booth, E.V. Johnson, Pierre-Alexandre Delattre. Plasma deposition of nanocrystalline silicon for solar cells : RF waveform tailoring to optimize deposition rate and film morphology. Gaseous Electronics Meeting, Feb 2012, Murramarang, Australia. ⟨hal-02573287⟩
  • E.V. Johnson, Pierre-Alexandre Delattre, Trevor Lafleur, Jean-Paul Booth. Plasma Excitation using Tailored Voltage Waveforms for the Deposition of Thin Film Silicon for Photovoltaics: From Plasma Physics to Devices. 5th International Symposium on Atomically Controlled, Oct 2012, Osaka, Japan. ⟨hal-02573298⟩
  • E.V. Johnson, S. Pouliquen, Pierre-Alexandre Delattre, Jean-Paul Booth. Plasma deposition processes excited using Tailored Voltage Waveforms: from microcrystalline silicon thin films to devices. AVS Symposium, Oct 2012, Tampa, Floride, United States. ⟨hal-02573299⟩
  • Jean-Paul Booth. Seeing Inside Plasma Etch Reactors: from diagnostics to sensors for control. Fusion Frontiers and Interfaces Workshop, Mar 2012, York, United Kingdom. ⟨hal-02573297⟩
  • Jean-Paul Booth. Mesure de densité électronique dans les plasmas froids par techniques micro-ondes. Les Journées du Plasma Froid, Oct 2012, Ecully, France. ⟨hal-02573281⟩
  • Jean-Paul Booth, Nishant Sirse, Yasmina Azamoum, Pascal Chabert. Absolute atomic chlorine densities in a Cl2 ICP determined by TALIF with a new calibration method. 30th ICPIG, Aug 2011, Belfast, Northern Ireland, United Kingdom. ⟨hal-02594798⟩
  • Jean-Paul Booth, E.V. Johnson, Pierre-Alexandre Delattre, T. Verbeke, J-C Vanel. RF waveform tailoring to control film morphology during nanocrystalline silicon PECVD. International Conference on Plasmas and Nanotechnology (ICPLANTS), Feb 2011, Takayama, Japan. ⟨hal-02594739⟩
  • S. Bouchoule, L. Gatilova, G. Patriarche, S. Guilet, L. Le Gratiet, et al.. INCLINE - Inductively coupled plasma for CMOS-compatible etching of III-V integrated laser sources. Journées Nationales en Nanosciences et Nanotechnologies, 2011, Ecole Polytechnique, Palaiseau, France. ⟨hal-02594797⟩
  • V. Samara, Jean-Paul Booth, J.-F. de Marneffe, W. Boullart. Planar Langmuir probe in pulsing regime. PESM (Plasma Etch and Strip for Microelectronics), May 2011, Mechelen, Belgium. ⟨hal-02594742⟩
  • Jean-Paul Booth, Nishant Sirse, Yasmina Azamoum, Mujahid Zaka-Ul-Islam, Pascal Chabert. Recombination coefficients of Cl atoms on Al2O3 walls determined by TALIF. Plasma Etch and Strip for Microelectronics (PESM), May 2011, Mechelen, Belgium. ⟨hal-02594744⟩
  • Jean-Paul Booth, Pascal Chabert, F. Boutaiba, Mujahid Zaka-Ul-Islam. Cl atom recombination coefficients in a Cl2 ICP determined by TALIF. Frontiers in Low Temperature Plasma Diagnostics (FLTPD), May 2011, Zinnowitz, Germany. ⟨hal-02594745⟩
  • E.V. Johnson, Pierre-Alexandre Delattre, Jean-Paul Booth. Control of Nanocrystalline Growth Phase and Deposition Rate through Voltage Waveform Tailoring. MRS spring meeting, Apr 2011, San Francisco, California, United States. ⟨hal-02594741⟩
  • Nishant Sirse, Yasmina Azamoum, Pascal Chabert, Jean-Paul Booth. Absolute Cl and Cl2 densities in a Cl2 ICP determined by TALIF with a new calibration method. UK TPW, Dec 2011, Manchester, United Kingdom. ⟨hal-02594750⟩
  • Jean-Paul Booth, Nishant Sirse, Yasmina Azamoum, Pascal Chabert. Atomic Chlorine absolute densities and surface recombination coefficients in inductively coupled plasmas in Cl2. AVS, Oct 2011, Nashville, Tennessee, United States. ⟨hal-02594749⟩
  • Pierre-Alexandre Delattre, S. Pouliquen, E.V. Johnson, Nishant Sirse, Jean-Paul Booth. VOLTAGE WAVEFORM TAILORING: A PROMISING NEW METHOD FOR SILICON DEPOSITION. CIP (Congres International sur les Plasmas), Jun 2011, Nantes, France. ⟨hal-02594747⟩
  • E.V. Johnson, Pierre-Alexandre Delattre, Jean-Paul Booth. Tailored Voltage Waveforms for the Deposition of Microcrystalline Silicon. ICANS, Aug 2011, Nara, Japan. ⟨hal-02594746⟩
  • S. Pouliquen, Pierre-Alexandre Delattre, E.V. Johnson, Jean-Paul Booth. DEPOSITION OF THIN FILM OF SILICON MICROCRISTALLINE BY RADIO FREQUENCY VOLTAGE WAVEFORM TAILORING. AVS, Oct 2011, Nashville, Tennessee, United States. ⟨hal-02594748⟩
  • Jean-Paul Booth, Pascal Chabert, Rodolphe Sarot, Mujahid Zaka-Ul-Islam. Seeing Inside Plasma Etch Reactors: from diagnostics to sensors for control. IS-Plasma (International Symposium-Plasma), Feb 2011, Nagoya, Japan. ⟨hal-02573300⟩
  • Jean-Paul Booth. All you ever wanted to know about Fluorocarbon Plasmas but never dared to ask. POSMOL (International Symposium on Electron Molecule Collisions and Swarms), Jul 2011, Maynooth, Ireland. ⟨hal-02573302⟩
  • Jean-Paul Booth, Wladimir Bjelogrlic, Jérôme Bredin. MESURE DE TEMPERATURE DU GAZ DANS UN RÉACTEUR DE GRAVURE DOUBLE FRÉQUENCES CAPACITIF. Journees du Reseau Plasmas Froids, May 2011, Toulouse, France. ⟨hal-02573301⟩
  • Jean-Paul Booth, Nishant Sirse, Yasmina Azamoum, Pascal Chabert. Detection of atomic chlorine in an inductively-coupled plasma by TALIF:Absolute densities and surface recombination coefficients. LAPD, Oct 2011, Jeju, Korea, Unknown Region. ⟨hal-02573303⟩
  • G. Curley, L. Gatilova, S. Guilet, S. Bouchoule, G. Gogna, et al.. Time-resolved electron density and OES measurements for studying the surface loss rates of H and Cl atoms in a Cl2-H2 ICP plasma. 63rd Annual Gaseous Electronics Conference and 7th International Conference on Reactive Plasmas, 2010, Paris, France. TF4-005, 763-764, Hori M. and Graha W.G. (Eds), Japan Society of Applied Physics. ⟨hal-00800895⟩
  • E.V. Johnson, Jean-Paul Booth, J-C Vanel, T. Verbeke. Control of Microcrystalline Silicon Deposition by RF Waveform Tailoring. Gaseous Electronics Conference, Oct 2010, Paris, France. ⟨hal-02595158⟩
  • Jean-Paul Booth. Physique et physicochimie des Plasmas excites par radio-frequence. Journees Plasma-Photovoltaique, Nov 2010, St Cyprien, France. ⟨hal-02611098⟩
  • Jean-Paul Booth, E.V. Johnson, T. Verbeke, J-C Vanel. Nanocrystalline silicon film growth morphology control through RF waveform tailoring. AVS Symposium, Oct 2010, Albuquerque, New Mexico, United States. ⟨hal-02595160⟩
  • Jean-Paul Booth, E.V. Johnson, T. Verbeke, J-C Vanel. RF waveform tailoring to control film morphology during nanocrystalline silicon PECVD. UK-Technological Plasmas Workshop, Dec 2010, Bristol, United Kingdom. ⟨hal-02595161⟩
  • Jean-Paul Booth, G. Curley, Pascal Chabert. Effect of low-frequency power on electron density and ion flux in dual-frequency capacitive radiofrequency discharges. PESM, Mar 2010, Grenoble, France. ⟨hal-02595157⟩
  • V. A. Lisovskiy, Jean-Paul Booth, V. D. Yegorenkov, N. D. Kharchenko. GAS BREAKDOWN IN RF AND LONGITUDINAL COMBINED ELECTRIC FIELDS. RF Breakdown Workshop, Oct 2010, Paris, France. ⟨hal-02573304⟩
  • Jérôme Bredin, Jean-Paul Booth. Absorption spectroscopy diagnostics of a dual-frequency capacitive dielectric etch tool using Ultraviolet Light-Emitting Diodes. Gaseous Electronics Conference, Oct 2009, Saratoga Springs, New York, United States. ⟨hal-02595162⟩
  • Jean-Paul Booth, Jérôme Bredin. Absorption spectroscopy diagnostics of a dual-frequency capacitive dielectric etch tool using Ultraviolet Light-Emitting Diodes. AVS International Symposium, Nov 2009, San Jose, California, United States. ⟨hal-02595165⟩
  • Jean-Paul Booth, G. Curley, Pascal Chabert, D. Maric. Dual-frequency capacitive radiofrequency discharges : Effect of low-frequency power on electron density and flux. Gaseous Electronics Conference, Oct 2009, Saratoga Springs, New York, United States. ⟨hal-02595163⟩
  • Jean-Paul Booth, D. Keil, C. Thorgrimsson, M. Nagai, L. Albarede. Etch process control with a deposition-tolerant planar electrostatic probe. PESM, Feb 2009, Louvain, Belgium. ⟨hal-02573305⟩
  • Jean-Paul Booth, D. Keil, C. Thorgrimsson, M. Nagai, L. Albarede. Etch process control with a deposition-tolerant planar electrostatic probe. Radiofrequency Plasma Workshop, May 2009, Presqu ile de Giens, France. ⟨hal-02573306⟩
  • Jean-Paul Booth, D. Keil, C. Thorgrimsson, M. Nagai, L. Albarede. Etch process control with a deposition-tolerant planar electrostatic probe. Irish Plasma and Beam Processing Group Meeting, May 2009, Belfast, Northern Ireland, United Kingdom. ⟨hal-02573307⟩
  • J.P Booth, H. Abada, P. Chabert, G. Cunge. CFx kinetics, gas temperatures and instabilities in a CF4 inductively-coupled discharge. 48th AVS Annual Symposium, 2001, San Francisco, United States. ⟨hal-00486179⟩
  • J.P Booth, H. Abada, P. Chabert, G. Cunge. CFX kinetics, gas temperature and instabilities in a CF4 inductively coupled discharge. 48th National AVS symposium & Topical conferences, 2001, San Francisco, United States. ⟨hal-00494528⟩
  • P. Chabert, J. Perrin, J.P Booth, G. Cunge. High rate silicon carbide etching. ISPC, 15th International Symposium on Plasma Chemistry, 2001, Orleans, France. ⟨hal-00481964⟩
  • J.P Booth, F. Neuilly, J.M Francou, L. Vallier. Chlorine Inductively- coupled Plasma diagnostics using UV absorption spectroscopy and an ion flux probE. International Colloquium on Plasma Processes, CIP, 2001, Antibes, France. ⟨hal-00486185⟩

Poster52 documents

  • Jean-Paul Booth. Experimental determination of cross-sections/reaction rates: Methods and difficulties. Rencontres scientifiques plasmas froids et lasers, Nov 2019, Toulouse, France. 2019. ⟨hal-02861165⟩
  • Jean-Paul Booth, Abhyuday Chatterjee, Olivier Guaitella, J. Santos-Sousa, N. de Oliveira, et al.. Kinetics of active species in a DC discharge by synchrotron VUV absorption. International Symposium on Plasma Chemistry, Jun 2019, Naples, Italy. 2019. ⟨hal-02865808⟩
  • Jean-Paul Booth, Abhyuday Chatterjee, Olivier Guaitella, N. de Oliveira, L. Nahon, et al.. Vacuum ultraviolet absorption spectroscopy of oxygen discharges. Journées de la Spectroscopie Moléculaire, May 2019, Creteil, France. 2019. ⟨hal-02861164⟩
  • Abhyuday Chatterjee, Jean-Paul Booth, Olivier Guaitella, Cyril Drag, Katherine Manfred, et al.. Oxygen 3P atom and O- ion density and atomic temperature in O2 DC discharge obtained by Cavity Ringdown spectroscopy. International Symposium on Plasma Chemistry, Jun 2019, Naples, Italy. 2019. ⟨hal-02861162⟩
  • Florian Marmuse, Romain Lucken, Cyril Drag, Jean-Paul Booth, Anne Bourdon, et al.. Iodine as propellant for electric propulsion: updated global model and comparisons to experiments. International Symposium on Plasma Chemistry, Jun 2019, Naples, Italy. 2019. ⟨hal-02341688⟩
  • Jean-Paul Booth, Abhyuday Chatterjee, Olivier Guaitella, Cyril Drag, Katherine Manfred, et al.. Oxygen 3P atom density and temperature determined by Cavity Ringdown spectroscopy of the forbidden 1D2 <-3P2 transition. Frontiers in Low Temperature Plasma Diagnostics, May 2019, Bad Honnef, Germany. 2019. ⟨hal-02861161⟩
  • Jean-Paul Booth, Abhyuday Chatterjee, Olivier Guaitella, N. de Oliveira, L. Nahon, et al.. Oxygen metastable molecule densities in inductively-coupled plasmas in pure O2 measured by VUV absorption. ESCAMPIG XXIV, Jul 2018, Glasgow, Scotland, United Kingdom. 2018. ⟨hal-02864750⟩
  • Abhyuday Chatterjee, Jean-Paul Booth, Olivier Guaitella, N. de Oliveira, L. Nahon, et al.. O2 X, a and b densities and kinetics in pure O2 DC discharges: VUV absorption, IR emission and Cavity Ring Down Spectroscopy measurements. ESCAMPIG XXIV, Jul 2018, Glasgow, Scotland, United Kingdom. 2018. ⟨hal-02864738⟩
  • Florian Marmuse, Theo Courtois, Jean-Paul Booth, Cyril Drag, Ane Aanesland, et al.. Spectroscopic study of an iodine plasma in a low pressure RF-ICP ion source. 71st Annual Gaseous Electronics Conference, Nov 2018, Portland, Oregon, United States. 2018. ⟨hal-02864740⟩
  • Jean-Paul Booth, Olivier Guaitella, Abhyuday Chatterjee, Dmitry Lopaev, Sergey Zyryanov, et al.. Density of metastable O2(b 1 Sigma g+) molecules in an O2 DC discharge measured by vacuum ultraviolet absorption and optical emission spectroscopy. 71st Annual Gaseous Electronics Conference, Nov 2018, Portland, Oregon, United States. 2018. ⟨hal-02864739⟩
  • Florian Marmuse, Cyril Drag, Jean-Paul Booth, Ane Aanesland. Temperature and density measurements in an iodine RF-CCP plasma with emission and absorption spectroscopy. ESCAMPIG XXIV, Jul 2018, Glasgow, Scotland, United Kingdom. 2018. ⟨hal-02341678⟩
  • Andrew Gibson, T. Gans, M.J. Kushner, Jean-Paul Booth. Species-dependent thermal energy accommodation in low-pressure plasmas. 23rd International Symposium on Plasma Chemistry, Jul 2017, Montréal, Canada. 2017. ⟨hal-02611357⟩
  • Abhyuday Chatterjee, Jean-Paul Booth, Olivier Guaitella, Ana-Sofia Morillo-Candas, Cyril Drag, et al.. Kinetics of Metastable Molecules and O atoms in O2 Plasmas. Masterclass "New approaches for plasma/surface interaction studies", Oct 2017, Bad Honnef, Germany. 2017. ⟨hal-02611360⟩
  • Jean-Paul Booth, Olivier Guaitella, Abhyuday Chatterjee, Sergey Zyryanov, Dmitry Lopaev, et al.. O2 dissociation in plasmas and problems of the O2 cross section set. XXXIII ICPIG- International Conference on Phenomena in Ionised Gases, Jul 2017, Estoril/Lisbon, Portugal. 2017. ⟨hal-02611355⟩
  • Andrew Gibson, L. Alelyani, S. Doyle, Jérôme Bredin, Jean-Paul Booth, et al.. Control of charged species dynamics in atmospheric pressure plasmas using tailored voltage waveforms. XXXIII ICPIG- International Conference on Phenomena in Ionised Gases, Jul 2017, Estoril/Lisbon, Portugal. 2017. ⟨hal-02611352⟩
  • Abhyuday Chatterjee, Jean-Paul Booth, Olivier Guaitella, L. Nahon, Nelson d'Oliveira, et al.. Metastable Molecules in O2 Plasmas probed by High Resolution Fourier Transform Absorption Spectroscopy. XXXIII ICPIG- International Conference on Phenomena in Ionised Gases, Jul 2017, Estoril/Lisbon, Portugal. 2017. ⟨hal-02611353⟩
  • Z. Donko, Aranka Derszi, Bastien Bruneau, Andrew Gibson, E.V. Johnson, et al.. Experimental Benchmarks and sensitivity analysis of PIC/MC simulations of oxygen CCP's. International Workshop on Radio-Frequency Plasmas, May 2017, Presqu'île de Giens, France. 2017. ⟨hal-02611351⟩
  • Jean-Paul Booth, Abhyuday Chatterjee, Olivier Guaitella, N. de Oliveira, Laurent Nahon, et al.. Kinetics of metastable states and atoms in DC discharges in pure O2: an experimental study. REACPLAS Workshop (reactivity, Plasmas, Astrophysics), Nov 2017, Orsay, France. 2017. ⟨hal-02611361⟩
  • Jean-Paul Booth, Theo Courtois. Iodine atom detection in a plasma thruster by infrared diode laser absorption. 18th, Laser Aided Plasma Diagnostics, Sep 2017, Prague, Czech Republic, Unknown Region. 2017. ⟨hal-02611358⟩
  • A. Derzsi, Bastien Bruneau, Trevor Lafleur, Jean-Paul Booth, Ihor Korolov, et al.. Experimental and simulation study of capacitively coupled oxygen discharges driven by tailored voltage waveforms. ESCAMPIG, Jul 2016, Bratislava, Slovakia. 2016. ⟨hal-02611337⟩
  • J. Schulze, E. Schuengel, Bastien Bruneau, E.V. Johnson, Jean-Paul Booth, et al.. Frequency dependence of the Electrical Asymmetry Effect in electronegative capacitive RF discharges driven by Tailored Voltage Waveforms. GEC, Oct 2016, Bochum, Germany. 2016. ⟨hal-02611341⟩
  • Jean-Paul Booth, Daniil Marinov, Olivier Guaitella, Cyril Drag, Richard Engeln, et al.. High-resolution TALIF measurements of atomic oxygen: determination of gas temperature and collisional broadening coefficients. GEC (Gaseous Electronics Synposium), Oct 2016, Bochum, Germany. 2016. ⟨hal-02611340⟩
  • Daniil Marinov, Mickaël Foucher, Olivier Guaitella, Richard Engeln, Pascal Chabert, et al.. Highly vibrationally excited O2 molecules in low pressure oxygen plasmas: 1. Broad-band absorption spectroscopy. ESCAMPIG, Jul 2016, Bratislava, Slovakia. 2016. ⟨hal-02611336⟩
  • D. Meehan, Andrew Gibson, Jean-Paul Booth, E. Wagenaars. Measuring atomic oxygen densities and electron properties in an Inductively Coupled Plasma for thin film deposition. GEC, Oct 2016, Bochum, Germany. 2016. ⟨hal-02611342⟩
  • Andrew Gibson, Mickaël Foucher, Daniil Marinov, Pascal Chabert, T. Gans, et al.. The role of gas kinetics and surface interaction probabilities in simulations of industrial plasma sources at low pressure. International Symposium on Gas Kinetics, Jul 2016, York, United Kingdom. 2016. ⟨hal-02611343⟩
  • Adriana Annusova, V. Guerra, M. Silva, B. Lopez, Mickaël Foucher, et al.. Highly vibrationally excited O2 molecules in low pressure oxygen plasmas: 2. Self-consistent model. ESCAMPIG, Jul 2016, Bratislava, Slovakia. 2016. ⟨hal-02611338⟩
  • Sandra Schröter, Andrew Gibson, Jérôme Bredin, A. West, A. Wijiaikum, et al.. Atmospheric pressure plasmas as sources of reactive oxygen and hydrogen species for biomedical applications. International Symposium on Gas Kinetics, Jul 2016, York, United Kingdom. 2016. ⟨hal-02611339⟩
  • Adriana Annusova, V. Guerra, Jean-Paul Booth, Mickaël Foucher, Daniil Marinov, et al.. A model for inductively coupled plasmas in O2 including vibrational kinetics. EPS Plasma, Jun 2015, Lisbon, Portugal. 2015. ⟨hal-02611333⟩
  • Yue Liu, Jean-Paul Booth, Pascal Chabert. Capacitively Coupled Radio-Frequency Plasmas Excited by Tailored Voltage Waveforms: Particle-In-Cell/Monte Carlo Simulations in 1 and 2 Dimensions. Radiofrequency Plasma Workshop, Jun 2015, Dublin, Ireland. 2015. ⟨hal-02611334⟩
  • Aranka Derszi, Trevor Lafleur, Ihor Korolov, Jean-Paul Booth, Zoltan Donko. EXPERIMENTAL AND MODELING STUDIES OF LOW-PRESSURE CAPACITIVE OXYGEN PLASMAS EXCITED BY TAILORED VOLTAGE WAVEFORMS. Symposium on Application of Plasma Processes, Jan 2015, Tatranská Lomnica, Slovakia. 2015. ⟨hal-02611332⟩
  • Jean-Paul Booth, Mickaël Foucher, Daniil Marinov, Pascal Chabert, Adriana Annusova, et al.. Vibrational kinetics in Cl2 and O2 low-pressure inductively-coupled plasmas. POSMOL, Jul 2015, Lisbon, Portugal. 2015. ⟨hal-02611335⟩
  • Mickaël Foucher, Daniil Marinov, Emile Carbone, Jean-Paul Booth, Pascal Chabert. Inductively-coupled plasmas (ICP) of Cl2, O2 and mixtures : measurements of atoms, ClxOy and electron densities. GEC, Nov 2014, Raleigh, North Carolina, United States. 2014. ⟨hal-02611329⟩
  • Mickaël Foucher, Emile Carbone, Jean-Paul Booth, Pascal Chabert. Inductively-coupled plasmas (ICP) of Cl2, O2 and mixtures : measurements of atoms, ClxOy and electron densit. ESCAMPIG, Jul 2014, Greifswald, Germany. 2014. ⟨hal-02611327⟩
  • Mickaël Foucher, Daniil Marinov, Emile Carbone, Jean-Paul Booth, Pascal Chabert. High sensitivity ultra-broad-band absorption spectroscopy applied to etching plasmas. GEC, Nov 2014, Raleigh, North Carolina, United States. 2014. ⟨hal-02611330⟩
  • Mickaël Foucher, Emile Carbone, Jean-Paul Booth, Pascal Chabert. High sensitivity ultra-broad-band absorption spectroscopy applied to etching plasmas. ESCAMPIG, Jul 2014, Greifswald, Germany. 2014. ⟨hal-02611328⟩
  • Mickaël Foucher, Emile Carbone, Jean-Paul Booth, Pascal Chabert. Ground-state bromine atoms measurements by Two-Photon Absorption Laser-Induced Fluorescence. PESM, May 2014, Grenoble, France. 2014. ⟨hal-02611326⟩
  • Mickaël Foucher, Emile Carbone, Jean-Paul Booth, Pascal Chabert. Inductively-coupled plasmas (ICP) of Cl2,O2 and mixtures : measurements of atoms, ClxOy and electron densities. PESM, May 2014, Grenoble, France. 2014. ⟨hal-02611325⟩
  • Mickaël Foucher, Pascal Chabert, Jean-Paul Booth. Inductively-coupled plasmas in pure Cl2, O2 and mixtures: measurements of atom, ClxOy and electron densities. Plasma Kinetics Master Class, Oct 2014, Bad Honnef, Germany. 2014. ⟨hal-02611331⟩
  • Jean-Paul Booth, Nishant Sirse, Mickaël Foucher. Atomic bromine density measurements in HBr inductively coupled plasma by two-photon absorption laser-induced fluorescence. Laser Aided Plasma Diagnostics, Sep 2013, Madison, Wisconsin, United States. 2013. ⟨hal-02611316⟩
  • Mickaël Foucher, Jean-Paul Booth, B. Pruvost, Pascal Chabert. Dynamique des plasmas radio-fréquences pulsés à couplage inductif en gaz halogénés simples. Journée de l'industrie Plas@par, Nov 2013, Paris, France. 2013. ⟨hal-02611324⟩
  • Daniil Marinov, Olivier Guaitella, V. Guerra, Nishant Sirse, Jean-Paul Booth, et al.. Ozone production in O2 plasma at low pressure: evaluation of surface and gas phase mechanisms. IPS, May 2012, Presqu'île de Giens, France. 2012. ⟨hal-02611269⟩
  • T. Novikova, E.V. Johnson, M. Mao, P. Bulkin, Jean-Paul Booth, et al.. Investigation of Voltage Waveform Tailoring Effect in CapacitivelyCoupled H2 Discharge: Fluid Simulations and Experimental Validation. EPS Plasma Physics, Jul 2012, Stockholm, Sweden. 2012. ⟨hal-02611270⟩
  • Jean-Paul Booth, Nishant Sirse, Quentin Délivré, Pascal Chabert. Gas temperature and electron density measurements in Ar and Ar-Cl2 ICP discharges. ESCAMPIG, Jul 2012, Viana do Costello, Portugal. 2012. ⟨hal-02611271⟩
  • P. Diomede, Pierre-Alexandre Delattre, E.V. Johnson, Jean-Paul Booth, S. Longo, et al.. Hybrid Model of Parallel Plate RF Discharges in H2: Effect of DC and Tailored Voltage Waveforms. ESCAMPIG, Jul 2012, Viana do Costello, Portugal. 2012. ⟨hal-02611272⟩
  • Jean-Paul Booth, Nishant Sirse, Pascal Chabert, Yasmina Azamoum, Mujahid Zaka-Ul-Islam. Recombination coefficient of Cl atoms on Al2O3 walls determined byTwo-Photon Laser-Induced Fluorescence. ICPIG, Aug 2011, Belfast, Northern Ireland, United Kingdom. 2011. ⟨hal-02611274⟩
  • Jean-Paul Booth, Nishant Sirse, Yasmina Azamoum, Pascal Chabert. Electron density comparison between experiments and simulations in Chlorine based ICP discharge. ICPIG, Aug 2011, Belfast, Northern Ireland, United Kingdom. 2011. ⟨hal-02611275⟩
  • Pierre-Alexandre Delattre, S. Pouliquen, E.V. Johnson, Jean-Paul Booth. Voltage Waveform Tailoring in a RF-CCP reactor: Exploration of self-bias, electron density and current waveform. ICPIG, Aug 2011, Belfast, Northern Ireland, United Kingdom. 2011. ⟨hal-02611277⟩
  • Rodolphe Sarot, Emilie Despiau-Pujo, Pascal Chabert, Jean-Paul Booth, L. Gatilova, et al.. Plasma inductif en Cl2/Ar : comparaison entre simulations hybrides et expériences. Congres de la Division Plasma du SFP, May 2010, Bordeaux, France. 2010. ⟨hal-02611278⟩
  • Jean-Paul Booth, Rodolphe Sarot, Emilie Despiau-Pujo, Pascal Chabert, L. Gatilova, et al.. Inductive plasmas in Cl2/Ar : Comparison of hybrid model results with experimental measurements. ESCAMPIG, Jul 2010, Novi Sad, Serbia. 2010. ⟨hal-02611280⟩
  • Jean-Paul Booth, Rodolphe Sarot, Emilie Despiau-Pujo, Pascal Chabert, L. Gatilova, et al.. Electron densities and temperatures in a Cl2/Ar ICP. Gaseous Electronics Conference, Oct 2010, Paris, France. 2010. ⟨hal-02611281⟩
  • Jean-Paul Booth, Emilie Despiau-Pujo, Pascal Chabert, Rodolphe Sarot. Inductive plasmas in Cl2/Ar :Comparison of hybrid model results with experimental measurements. AVS Symposium, Oct 2010, Albuquerque, New Mexico, United States. 2010. ⟨hal-02611282⟩
  • Jérôme Bredin, Jean-Paul Booth. Broadband absorption with UV Light-Emitting Diodes in a dual-frequency capacitively coupled reactor. Radiofrequency Plasma Workshop, May 2009, Presqu ile de Giens, France. 2009. ⟨hal-02611283⟩