CV Accueil - Archive ouverte HAL

	Ultra-Low-Power Logic with Contactless Capacitive MEMS Aleksandra Markovic , Laurent Mazenq , Adrian Laborde , Herve Fanet , Gael Pillonnet 21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS 2022), Dec 2022, Salt Lake City, United States. pp.233-227, ⟨10.1109/PowerMEMS56853.2022.10007572⟩ Communication dans un congrès hal-03946985v1
	High-K thin films for simultaneous dielectric actuation and detection of M/NEMS flexural vibration Cécile Fuinel , Fabrice Mathieu , Adrian Laborde , Laurent Mazenq , Christian Bergaud 19th International Conference on Solid-State Sensors, Actuators and Microsystems TRANSDUCERS 17, Jun 2017, Kaohsiung, Taiwan. ⟨10.1109/TRANSDUCERS.2017.7994155⟩ Communication dans un congrès hal-01962426v1
	HIGH-K THIN FILMS AS DIELECTRIC TRANSDUCERS FOR FLEXURAL M/NEMS RESONATORS Cécile Fuinel , Khadim Daffé , Adrian Laborde , Olivier Thomas , Laurent Mazenq The 29th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2016), IEEE, Jan 2016, Shanghai, China. ⟨10.1109/MEMSYS.2016.7421850⟩ Communication dans un congrès hal-01279717v1

Bernard Legrand