CV Accueil - Archive ouverte HAL

Publications

	[Invited] MEMS-based atomic force microscopy probes: from electromechanical to optomechanical vibrating sensors Bernard Legrand , Lucien Schwab , Pierre Allain , Ivan Favero , Marc Faucher AVS 65th International Symposium & Exhibition, American Vacuum Society, Oct 2018, Long Beach, United States Communication dans un congrès hal-01908666v1
	Comprehensive optical losses investigation of VLSI Silicon optomechanical ring resonator sensors Lucien Schwab , Pierre Etienne Allain , L Banniard , A Fafin , Marc Gely 64th International Electron Devices Meeting (IEDM 2018), IEEE, Dec 2018, San Francisco, United States Communication dans un congrès hal-01963015v1