Bernard Legrand

Documents

Publications

lionel-buchaillot

"nathalie-rolland"

	Materials selection procedure for RF-MEMS G. Guisbiers , E. Herth , Bernard Legrand , N. Rolland , T. Lasri Microelectronic Engineering, 2010, 87, pp.1792-1795. ⟨10.1016/j.mee.2009.10.016⟩ Article dans une revue hal-00549627v1
	Optimization of SiNX:H films deposited by PECVD for reliability of electronic, microsystems and optical applications E. Herth , Bernard Legrand , L. Buchaillot , N. Rolland , T. Lasri Microelectronics Reliability, 2010, 50, pp.1103-1106. ⟨10.1016/j.microrel.2010.04.011⟩ Article dans une revue hal-00549491v1