Bernard Legrand

102

Documents

Publications

lionel-buchaillot

	A Novel Dog-Bone Oscillating AFM Probe with Thermal Actuation and Piezoresistive Detection Zhuang Xiong , Estelle Mairiaux , Benjamin Walter , Marc Faucher , Lionel Buchaillot Sensors, 2014, 14 (11), pp.20667-20686. ⟨10.3390/s141120667⟩ Article dans une revue hal-01960848v1
	Two types of MEMS-based oscillating AFM probes Zhuang Xiong , Estelle Mairiaux , Benjamin Walter , Marc Faucher , Lionel Buchaillot Journal of Chinese Electron Microscopy Society , 2014, 2, pp.137-141 Article dans une revue hal-01960910v1
	MEMS piezoresistive ring resonator for AFM imaging with pico-Newton force resolution Z. Xiong , B. Walter , E. Mairiaux , M. Faucher , L. Buchaillot Journal of Micromechanics and Microengineering, 2013, 23, pp.035016-1-10. ⟨10.1088/0960-1317/23/3/035016⟩ Article dans une revue hal-00795965v1
	Piezoresistive ring-shaped AFM sensors with pico-newton force resolution Z. Xiong , B. Walter , E. Mairiaux , M. Faucher , L. Buchaillot International Journal of Intelligent Mechatronics and Robotics, 2013, 3, pp.38-52. ⟨10.4018/ijimr.2013010104⟩ Article dans une revue hal-00871948v1
	MEMS ring resonators for laserless AFM with sub-nanoNewton force resolution Emmanuelle Algre , Zhuang Xiong , Marc Faucher , Benjamin Walter , Lionel Buchaillot Journal of Microelectromechanical Systems, 2012, 21, pp.385-397. ⟨10.1109/JMEMS.2011.2179012⟩ Article dans une revue hal-00787407v1
	Optimization of ohmic contact and adhesion on polysilicon in MEMS–NEMS wet etching process Etienne Herth , Emmanuelle Algré , Bernard Legrand , Lionel Buchaillot Microelectronic Engineering, 2011, 88 (5), pp.724-728. ⟨10.1016/j.mee.2010.06.032⟩ Article dans une revue hal-02300269v1
	Fabrication of 24-MHz-disk resonators with silicon passive integration technology M. Sworowski , F. Neuilly , Bernard Legrand , A. Summanwar , P. Philippe IEEE Electron Device Letters, 2010, 31, pp.23-25. ⟨10.1109/LED.2009.2034542⟩ Article dans une revue hal-00548984v1
	Electron beam nanolithography in AZnLOF 2020 E. Herth , P. Tilmant , M. Faucher , M. François , Christophe Boyaval Microelectronic Engineering, 2010, 87, pp.2057-2060. ⟨10.1016/j.mee.2009.12.079⟩ Article dans une revue hal-00548989v1
	Optimization of SiNX:H films deposited by PECVD for reliability of electronic, microsystems and optical applications E. Herth , Bernard Legrand , L. Buchaillot , N. Rolland , T. Lasri Microelectronics Reliability, 2010, 50, pp.1103-1106. ⟨10.1016/j.microrel.2010.04.011⟩ Article dans une revue hal-00549491v1
	Development of a new generation of active AFM tools for applications in liquids A.S. Rollier , D.F.L. Jenkins , El Hadj Dogheche , Bernard Legrand , M. Faucher Journal of Micromechanics and Microengineering, 2010, 20, pp.085010-1-11. ⟨10.1088/0960-1317/20/8/085010⟩ Article dans une revue hal-00548990v1
	Materials selection procedure for RF-MEMS G. Guisbiers , E. Herth , Bernard Legrand , N. Rolland , T. Lasri Microelectronic Engineering, 2010, 87, pp.1792-1795. ⟨10.1016/j.mee.2009.10.016⟩ Article dans une revue hal-00549627v1
	Design, fabrication, and operation of two-dimensional conveyance system with ciliary actuator arrays M. Ataka , Bernard Legrand , L. Buchaillot , D. Collard , H. Fujita IEEE/ASME Transactions on Mechatronics, 2009, 14, pp.119-125. ⟨10.1109/TMECH.2008.2004770⟩ Article dans une revue hal-00472723v1
	Design and operation of a silicon ring resonator for force sensing applications above 1 MHz Benjamin Walter , Marc Faucher , Emmanuelle Algre , Bernard Legrand , Rodolphe Boisgard Journal of Micromechanics and Microengineering, 2009, 19 (11), pp.115009-1-7. ⟨10.1088/0960-1317/19/11/115009⟩ Article dans une revue hal-00472725v1
	In-Plane Silicon-On-Nothing Nanometer-Scale Resonant Suspended Gate MOSFET for In-IC Integration Perspectives Cédric Durand , Fabrice Casset , Philippe Renaux , Nicolas Abelé , Bernard Legrand IEEE Electron Device Letters, 2008, 29 (5), pp.494-496. ⟨10.1109/LED.2008.919781⟩ Article dans une revue cea-00320837v1
	SOI-based nanoelectrospray emitter tips for mass spectrometry: a coupled MEMS and microfluidic design Bernard Legrand , Alison Ashcroft , Lionel Buchaillot , S. Arscott Journal of Micromechanics and Microengineering, 2007, 17 (3), pp.509-514. ⟨10.1088/0960-1317/17/3/013⟩ Article dans une revue hal-02347438v1
	A silicon beam-based microcantilever nanoelectrosprayer S. Arscott , Bernard Legrand , Lionel Buchaillot , Alison Ashcroft Sensors and Actuators B: Chemical, 2007, 125 (1), pp.72-78. ⟨10.1016/j.snb.2007.01.040⟩ Article dans une revue hal-02347442v1
	Complete system for wireless powering and remote control of electrostatic actuators by inductive coupling Philippe Basset , A. Kaiser , Bernard Legrand , D. Collard , L. Buchaillot IEEE/ASME Transactions on Mechatronics, 2007, 12, pp.23-31. ⟨10.1109/TMECH.2006.886245⟩ Article dans une revue hal-00255847v1
	Coupled-resonator micromechanical filters with voltage tunable bandpass characteristic in thickfilm polysilicon technology D. Galayko , A. Kaiser , Bernard Legrand , L. Buchaillot , C. Combi Sensors and Actuators A: Physical , 2006, 126, pp.227-240 Article dans une revue hal-00138651v1
	Stability and pull-in voltage of electrostatic parallel-plate actuators in liquid solutions Anne-Sophie Rollier , Bernard Legrand , Dominique Collard , Lionel Buchaillot Journal of Micromechanics and Microengineering, 2006, 16, pp.794-801. ⟨10.1088/0960-1317/16/4/016⟩ Article dans une revue hal-00128663v1
	Suppression of the pull-in instability for parallel-plate electrostatic actuators operated in dielectric liquids Bernard Legrand , Anne-Sophie Rollier , Dominique Collard , Lionel Buchaillot Applied Physics Letters, 2006, 88 (3), pp.034105-1-3. ⟨10.1063/1.2165282⟩ Article dans une revue hal-00128662v1
	Coupled-resonator micromechanical filters with voltage tuneable bandpass characteristic in thick-film polysilicon technology Dimitri Galayko , Andreas Kaiser , Bernard Legrand , Lionel Buchaillot , Dominique Collard Sensors and Actuators A: Physical , 2006, 126 (1), pp.227-240. ⟨10.1016/j.sna.2005.10.033⟩ Article dans une revue hal-01195973v1
	Fabrication and characterization of 1.1 GHz blade nanoelectromechanical resonator Vincent Agache , Bernard Legrand , Dominique Collard , Lionel Buchaillot , Hiroyuki Fujita Applied Physics Letters, 2005, 86, pp.213104-1-3. ⟨10.1063/1.1929873⟩ Article dans une revue hal-00125633v1
	Modeling and experimental validation of sharpening mechanism based on thermal oxidation for fabrication of ultra-sharp silicon nanotips Vincent Agache , Roger Ringot , Patrice Bigotte , Vincent Senez , Bernard Legrand IEEE Transactions on Nanotechnology, 2005, 4, pp.548-556. ⟨10.1109/TNANO.2005.851386⟩ Article dans une revue hal-00125632v1
	Tunable passband T-filter electrostatically driven polysilicon micromechanical resonators D. Galayko , A. Kaiser , Bernard Legrand , L. Buchaillot , D. Collard Sensors and Actuators A: Physical , 2005, 117, pp.115-120 Article dans une revue hal-00125630v1
	Influence on the step covering on fatigue phenomenon for polycrystalline silicon MEMS O. Millet , Bernard Legrand , D. Collard , L. Buchaillot Japanese Journal of Applied Physics, 2003, 41, pp.L1339-L1341 Article dans une revue hal-00146435v1
	Design, realization and testing of micro-mechanical resonators in thick-film silicon technology with postprocess electrode to resonator gap reduction D. Galayko , A. Kaiser , L. Buchaillot , Bernard Legrand , D. Collard Journal of Micromechanics and Microengineering, 2003, 13, pp.134-140 Article dans une revue hal-00146391v1
	Electrostatic micro actuators D. Collard , H. Fujita , H. Toshiyoshi , Bernard Legrand , L. Buchaillot Nano et micro technologies, 2002, 2, pp.83-124 Article dans une revue hal-00148761v1
	Surface micro-machining : an overview D. Collard , H. Fujita , H. Toshiyoshi , Bernard Legrand , L. Buchaillot Nano et micro technologies, 2002, 2, pp.35-50 Article dans une revue hal-00148781v1
	Adhesive forces investigation on a silicon tip by contact mode atomic force microscope Vincent Agache , Bernard Legrand , Dominique Collard , Lionel Buchaillot Applied Physics Letters, 2002, 81, pp.2623-2625. ⟨10.1063/1.1508806⟩ Article dans une revue hal-00148768v1
	Vacuum and cryogenic station for Micro-Electro-Mechanical Systems probing and testing Bernard Legrand , E. Quévy , B. Stefanelli , D. Collard , L. Buchaillot Review of Scientific Instruments, 2002, 73, pp.4393-4395 Article dans une revue hal-00148782v1
	Influence of the step covering on fatigue phenomenon for polycrystalline silicon micro-electro-mechanical-systems (MEMS) O. Millet , Bernard Legrand , D. Collard , L. Buchaillot Japanese Journal of Applied Physics, part 2 : Letters, 2002, 41, pp.L1339-L1341 Article dans une revue hal-00250391v1

	A new optimal design method for electrostatically actuated silicon-based MEMS: Application to a micro-gripper with large stroke and high force resolution A. Grira , C. Rotinat-Libersa , Bernard Legrand , L. Buchaillot 1st International Conference on Engineering and Applied Sciences Optimization, OPT-i 2014, Jun 2014, Kos Island, Greece. pp.2407-2417 Communication dans un congrès cea-01844451v1
	Near-field microscopy: Is there an alternative to micro and nano resonating cantilevers? Lionel Buchaillot , Estelle Mairiaux , Benjamin Walter , Zhuang Xiong , Marc Faucher IEEE International Frequency Control Symposium, May 2014, Taipei, Taiwan. ⟨10.1109/FCS.2014.6859928⟩ Communication dans un congrès hal-01962163v1
	Towards a new generation of MEMS-based AFM probes Z. Xiong , B. Walter , E. Mairiaux , M. Faucher , L. Buchaillot International Scanning Probe Microscopy Conference, ISPM 2013, 2013, Dijon, France Communication dans un congrès hal-00878807v1
	5.4 MHz dog-bone oscillating AFM probe with thermal actuation and piezoresistive detection Z. Xiong , E. Mairiaux , B. Walter , M. Faucher , L. Buchaillot 26th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2013, 2013, Taipei, Taiwan. pp.592-595, ⟨10.1109/MEMSYS.2013.6474311⟩ Communication dans un congrès hal-00809858v1
	Piezo-resistive ring-shaped AFM sensors with pico-newton force resolution Z. Xiong , B. Walter , E. Mairiaux , M. Faucher , L. Buchaillot 2nd International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2012, 2012, Xi'an, China. Paper ID 1200991, Best application paper award, 184-189 Communication dans un congrès hal-00801105v1
	[Invité] Apport des microsystèmes pour la microscopie à force atomique B. Walter , M. Faucher , E. Mairiaux , Z. Xiong , L. Buchaillot Journée thématique trans-GDR '' Micromanipulation pour les Micro-Nano Systèmes '', 2012, Besançon, France Communication dans un congrès hal-00797716v1
	Conception and fabrication of piezo-resistive ring shaped AFM probe Z. Xiong , B. Walter , E. Mairiaux , M. Faucher , L. Buchaillot 25th IEEE Conference on Micro Electro Mechanical Systems, MEMS 2012, 2012, Paris, France. pp.547-550, ⟨10.1109/MEMSYS.2012.6170180⟩ Communication dans un congrès hal-00801106v1
	DNA origami imaging with 10.9 MHz AFM MEMS probes B. Walter , E. Mairiaux , Z. Xiong , M. Faucher , L. Buchaillot 25th IEEE Conference on Micro Electro Mechanical Systems, MEMS 2012, 2012, Paris, France. pp.555-558, ⟨10.1109/MEMSYS.2012.6170236⟩ Communication dans un congrès hal-00801107v1
	Micro-résonateurs haute fréquence pour la microscopie à force atomique B. Walter , M. Faucher , E. Mairiaux , Z. Xiong , L. Buchaillot Journées Nationales du GDR Micro Nano Systèmes-Micro Nano Fluidique, 2012, Bordeaux, France Communication dans un congrès hal-00797720v1
	Micro-résonateurs haute fréquence pour la microscopie à force atomique B. Walter , M. Faucher , E. Mairiaux , Z. Xiong , L. Buchaillot 15ème Forum des Microscopies à Sonde Locale, 2012, Saint-Jacut-de-la-Mer, France Communication dans un congrès hal-00797718v1
	4.8 MHz AFM nanoprobes with capacitive transducers and batch-fabricated nanotips Benjamin Walter , Estelle Mairiaux , M. Faucher , Zhuang Xiong , L. Buchaillot XXIème Congrès Général de la Société Française de Physique, SFP 2011, Jul 2011, Bordeaux, France Communication dans un congrès hal-00807202v1
	Conception and fabrication of silicon ring resonator with piezo-resistive detection for force sensing applications Z. Xiong , B. Walter , E. Mairiaux , M. Faucher , L. Buchaillot ASME 2011 International Mechanical Engineering Congress & Exposition, IMECE 2011, 2011, Denver, CO, United States. pp.IMECE2011-65083-1-5 Communication dans un congrès hal-00800036v1
	[Invité] Micro et nanorésonateurs électromécaniques radio-fréquences. Principes et applications Marc Faucher , Bernard Legrand , Benjamin Walter , Emmanuelle Algre , A. Ben-Amar TELECOM'2011 & 7èmes Journées Franco-Maghrébines des Micro-ondes et leurs Applications, 2011, Tanger, Maroc. CDROM, papier 554, 1-6 Communication dans un congrès hal-00806730v1
	4.8 MHz AFM nanoprobes with capacitive transducers and batch-fabricated nanotips Benjamin Walter , M. Faucher , Estelle Mairiaux , Zhuang Xiong , L. Buchaillot 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011, Jan 2011, Cancun, Mexico. pp.517-520, ⟨10.1109/MEMSYS.2011.5734475⟩ Communication dans un congrès hal-00579045v1
	[Invité] Apport des micro et nano-systèmes pour la microscopie à force atomique Benjamin Walter , Zhuang Xiong , Emmanuelle Algre , Estelle Mairiaux , Marc Faucher Journées Nationales Nanosciences et Nanotechnologies, J3N 2011, 2011, Strasbourg, France Communication dans un congrès hal-00807204v1
	IMPROVE-LM - Imaging probe for vacuum environment and liquid medium Bernard Legrand , J.P. Aime , L. Buchaillot Journées Nationales Nanosciences et Nanotechnologies, J3N 2011, 2011, Strasbourg, France Communication dans un congrès hal-00807209v1
	Optimal design of non intuitive compliant microgripper with high resolution A. Grira , Bernard Legrand , C. Rotinat-Libersa , E. Mairiaux , L. Buchaillot IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS 2011, 2011, San Francisco, CA, United States. pp.45-50, ⟨10.1109/IROS.2011.6048665⟩ Communication dans un congrès hal-00800034v1
	Conception and fabrication of silicon ring resonator with piezo-resistive detection for force sensing applications Z. Xiong , B. Walter , E. Mairiaux , M. Faucher , L. Buchaillot 5èmes Journées Nationales du GDR Micro et Nano Systèmes, 2010, Lyon, France Communication dans un congrès hal-00808200v1
	Surface microscopy with laserless MEMS based AFM probes Emmanuelle Algre , Bernard Legrand , Marc Faucher , Benjamin Walter , Lionel Buchaillot 23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010, Jan 2010, Hong Kong, China. pp.292-295, ⟨10.1109/MEMSYS.2010.5442509⟩ Communication dans un congrès hal-00549972v1
	Improve-LM imaging probe for vacuum environment and liquid medium B. Walter , M. Faucher , Bernard Legrand , E. Mairiaux , R. Boisgard Journées du Réseau National en Nanosciences et en Nanotechnologies, J3N 2010, 2010, Lille, France Communication dans un congrès hal-00808210v1
	Atomic force probe using silicon ring resonator conception B. Walter , E. Mairiaux , M. Faucher , Z. Xiong , L. Buchaillot 5èmes Journées Nationales du GDR Micro et Nano Systèmes, 2010, Lyon, France Communication dans un congrès hal-00808199v1
	High-Q and low-RM 24-MHz radial-contour mode disk resonators fabricated with silicon passive integration technology M. Sworowski , F. Neuilly , Bernard Legrand , A. Summanwar , F. Lallemand 15th International Conference on Solid State Sensors, Actuators and Microsystems, Transducers 2009, 2009, USA, United States. pp.2114-2117, ⟨10.1109/SENSOR.2009.5285623⟩ Communication dans un congrès hal-00474452v1
	Vers une nouvelle génération de sonde de microscopie à force atomique à base de micro et nano-systèmes électromécaniques Bernard Legrand , Emmanuelle Algre , Lionel Buchaillot , Marc Faucher , Benjamin Walter 4èmes Journées Nationales en Nanosciences et Nanotechnologies, J3N 2009, 2009, Toulouse, France Communication dans un congrès hal-00575271v1
	Tip-matter interaction measurements using MEMS ring resonators Emmanuelle Algre , Bernard Legrand , Marc Faucher , Benjamin Walter , Lionel Buchaillot 15th International Conference on Solid State Sensors, Actuators and Microsystems, Transducers 2009, Jun 2009, Denver, CO, United States. pp.1638-1641, ⟨10.1109/SENSOR.2009.5285774⟩ Communication dans un congrès hal-00474451v1
	Tip-matter interaction measurements using MEMS ring resonators Emmanuelle Algre , Bernard Legrand , Marc Faucher , Benjamin Walter , Lionel Buchaillot Forum des Microscopies à Sonde Locale, 2009, Hardelot, France Communication dans un congrès hal-00575264v1
	Characterization of IN-IC integrable in-plane nanometer scale resonators fabricated by a silicon on nothing advanced CMOS technology Cédric Durand , Fabrice Casset , Bernard Legrand , Marc Faucher , Philippe Renaux 21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008, Jan 2008, Tucson - AZ, United States. pp.1016-1019, ⟨10.1109/MEMSYS.2008.4443831⟩ Communication dans un congrès cea-00320830v1
	Proposition of atomic force probes based on silicon ring-resonators M. Faucher , B. Walter , A.S. Rollier , K. Segueni , Bernard Legrand 14th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers'07, 2007, France. pp.1529-1532, ⟨10.1109/SENSOR.2007.4300436⟩ Communication dans un congrès hal-00284391v1
	High yield grafting of carbon nanotube on ultra-sharp silicon nanotips: Mechanical characterization and AFM imaging A. S. Rollier , C. Bernard , S. Marsaudon , A. M. Bonnot , M. Faucher 20th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2007), 2007, Unknown, Unknown Region. pp.878-+ Communication dans un congrès hal-01553035v1
	High yield grafting of carbon nanotube on ultra-sharp silicon nanotips : mechanical characterization and AFM imaging A.S. Rollier , C. Bernard , S. Marsaudon , A.M. Bonnot , M. Faucher 20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007, 2007, Japan. pp.851-854, ⟨10.1109/MEMSYS.2007.4433179⟩ Communication dans un congrès hal-00284388v1
	Compact multilayer piezoresistive gauge for in-plane strain measurement in liquids Jean-Baptiste Bureau , Bernard Legrand , Dominique Collard , Lionel Buchaillot 14th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers'07, Jun 2007, Lyon, France. pp.2267-2270, ⟨10.1109/SENSOR.2007.4300621⟩ Communication dans un congrès hal-00284392v1
	Micro-machined actuators for the friction driven micro-motor Bernard Legrand , L. Buchaillot , D. Collard 2006, pp.211-214 Communication dans un congrès hal-00128670v1
	Micro et nanomécanique, MEMS et NEMS Bernard Legrand , L. Buchaillot , D. Collard Ecole CNRS : Nanosciences et Nanotechnologies, 2006, Autrans, France Communication dans un congrès hal-00128667v1
	Ultra-low voltage MEMS resonator based on RSG-MOSFET N. Abele , K. Segueni , K. Boucart , F. Casset , Bernard Legrand 2006, pp.882-885 Communication dans un congrès hal-00128669v1
	Parallel-plate electrostatic actuators in liquids : displacement-voltage optimisation for microfluidic applications Bernard Legrand , A.S. Rollier , L. Buchaillot , D. Collard 2006, pp.718-721 Communication dans un congrès hal-00128668v1
	ELECTROSTATIC ACTUATORS OPERATING IN LIQUID ENVIRONMENT : SUPPRESSION OF PULL-IN INSTABILITY AND DYNAMIC RESPONSE A.-S. Rollier , Marc Faucher , Bernard Legrand , D. Collard , L. Buchaillot DTIP 2006, Apr 2006, Stresa, Lago Maggiore, Italy. 6 p Communication dans un congrès hal-00189294v1
	Electrostatic actuators operating in liquid environment: suppression of pull-in instability and dynamic response A.S. Rollier , M. Faucher , Bernard Legrand , D. Collard , L. Buchaillot 2006, pp.244-249 Communication dans un congrès hal-00128674v1
	MEMS reliability : metrology set-up for investigation of fatigue causes O. Millet , O. Blanrue , Bernard Legrand , D. Collard , L. Buchaillot 2005, pp.483-486 Communication dans un congrès hal-00125627v1
	Microsystèmes, résonateurs électromécaniques : où cela nous mène-t-il ? Vincent Agache , Emmanuel Quévy , Olivier Millet , Anne-Sophie Rollier , Roger Ringot Ecole Nanosciences, 2005, Anglet, France Communication dans un congrès hal-00126215v1
	3D self-assembling of SU-8 microstructures on silicon by plasma induced compressive stress Jean-Baptiste Bureau , Bernard Legrand , Dominique Collard , Lionel Buchaillot 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05., Jun 2005, Seoul, South Korea. pp.19-22, ⟨10.1109/SENSOR.2005.1496348⟩ Communication dans un congrès hal-00128655v1
	Tensile stress determination in silicon nitride membrane by AFM characterization A.S. Rollier , Bernard Legrand , D. Deresmes , M. Lagouge , D. Collard 2005, pp.828-831 Communication dans un congrès hal-00125660v1
	Actionneurs électrostatiques complètement isolés : fabrication, fonctionnement et caractérisation en milieu liquide Anne-Sophie Rollier , Bernard Legrand , Lionel Buchaillot , Dominique Collard 17e Congrès Français de Mécanique, 2005, Troyes, France Communication dans un congrès hal-04203498v1
	Friction driven micromotors with both clockwise and counterclockwise rotations Bernard Legrand , Lionel Buchaillot , Dominique Collard 17e Congrès Français de Mécanique, 2005, Troyes, France Communication dans un congrès hal-04279573v1
	The 2D feedback conveyance with ciliary actuator arrays M. Ataka , Bernard Legrand , L. Buchaillot , D. Collard , H. Fujita 2005, pp.31-34 Communication dans un congrès hal-00125659v1
	Characterization of vertical vibration of electrostatically actuated resonators using Atomic Force Microscope in noncontact mode Vincent Agache , Bernard Legrand , K. Nakamura , H. Kawakatsu , Lionel Buchaillot The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005, Jun 2005, Seoul, South Korea. pp.2023-2026, ⟨10.1109/SENSOR.2005.1497499⟩ Communication dans un congrès hal-00125631v1
	RF blade nano-electromechanical resonator with self-aligned process for definition of lateral electrostatic transducers Vincent Agache , Bernard Legrand , Dominique Collard , Hiroyuki Fujita , Lionel Buchaillot Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2005, 2005, Montreux, Switzerland. pp.26-31 Communication dans un congrès hal-00128656v1
	Electrostatic actuators operating in liquid environment : position control without pull-in effect A.S. Rollier , Bernard Legrand , D. Collard , L. Buchaillot 2005, pp.341-346 Communication dans un congrès hal-00128651v1
	Stiction drive operation of micromotors : direct and reverse rotation control Bernard Legrand , D. Collard , L. Buchaillot 2005, pp.57-60 Communication dans un congrès hal-00125661v1
	Micromachined actuators for friction driven linear micro-motors Bernard Legrand , L. Buchaillot , D. Collard Proceedings of the Fifth International Symposium on Linear Drive for Industry Applications, LDIA 2005, 2005, Hyogo, Japan Communication dans un congrès hal-00131348v1
	Reliability of non-released microstructures : failure analysis and innovative solution process O. Millet , P. Muller , O. Blanrue , Bernard Legrand , D. Collard 2005, pp.840-842 Communication dans un congrès hal-00125662v1
	1.1 GHz silicon blade nano-electromechanical resonator featuring 20 nm gap lateral transducers Vincent Agache , Bernard Legrand , Dominique Collard , Hiroyuki Fujita , Lionel Buchaillot 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. MEMS 2005, Jan 2005, Miami Beach, United States. pp.121-124, ⟨10.1109/MEMSYS.2005.1453882⟩ Communication dans un congrès hal-00125628v1
	Microsystèmes : principales applications et contexte national L. Buchaillot , D. Collard , Bernard Legrand Ecoles Nanosciences, 2005, Anglet, France Communication dans un congrès hal-00126216v1
	Reliability of polycrystalline MEMS : prediction of the debugging-time O. Millet , Pierre Bertrand , Bernard Legrand , D. Collard , L. Buchaillot International Symposium for Testing and Failure Analysis, ISTFA 2004, 2004, Worcester, MA, United States Communication dans un congrès hal-00141030v1
	Predictive modelling of the fatigue phenomenon for polycristalline structural layers O. Millet , Pierre Bertrand , Bernard Legrand , D. Collard , L. Buchaillot 2004, pp.145-148 Communication dans un congrès hal-00141028v1
	An original methodology to assess fatigue behavior in RF MEMS devices O. Millet , Pierre Bertrand , Bernard Legrand , D. Collard , L. Buchaillot European Microwave Week, 2004, Amsterdam, Netherlands Communication dans un congrès hal-00141031v1
	Characterization of individual bio-cells with thermally actuated probe arrays Y.H. Cho , Dominique Collard , Lionel Buchaillot , Bernard Legrand , Beomjoon Kim Nonimaging Optics and Efficient Illumination Systems, Aug 2004, Denver, CO, United States. pp.425-429 Communication dans un congrès hal-00141170v1
	Modeling of failure mechanisms for optimized MEMS CAD : design, fabrication and characterization of in situ test benches Olivier Millet , Vincent Agache , Bernard Legrand , Dominique Collard , Lionel Buchaillot 12th International Conference on Solid-State Sensors, Jun 2003, Boston, United States. pp.1578-1581, ⟨10.1109/SENSOR.2003.1217081⟩ Communication dans un congrès hal-00146440v1
	Ultimate technology for micromachining of nanometric gap HF micromechanical resonators E. Quevy , Bernard Legrand , D. Collard , L. Buchaillot 2003, pp.157-160 Communication dans un congrès hal-00146462v1
	Microelectromechanical coupled resonsator IF filters with variable bandwidth in thick-film epitaxial polysilicon technology D. Galayko , A. Kaiser , Bernard Legrand , L. Buchaillot , D. Collard 2003, pp.F23-F26 Communication dans un congrès hal-00146406v1
	Modeling and experimental validation of silicon nanotip oxidation : towards a nanoelectromechanical filter application Vincent Agache , Patrice Bigotte , Bernard Legrand , Vincent Senez , Lionel Buchaillot 12th International Conference on Solid-State Sensors, Jun 2003, Boston, United States. pp.1287-1290, ⟨10.1109/SENSOR.2003.1217008⟩ Communication dans un congrès hal-00146438v1
	Tapping-mode HF nanometric lateral gap resonators : experimental and theory E. Quevy , Bernard Legrand , D. Collard , L. Buchaillot 2003, pp.879-882 Communication dans un congrès hal-00146456v1
	Thermally actuated probe arrays for manipulation and characterization of individual bio-cell Beomjoon Kim , Dominique Collard , Matthieu Lagouge , F. Conseil , Bernard Legrand TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Jun 2003, Boston, MA, United States. pp.1255-1258, ⟨10.1109/SENSOR.2003.1217000⟩ Communication dans un congrès hal-00146460v1
	Design of clamped-clamped beam resonator in thick-film epitaxial polysilicon technology D. Galayko , A. Kaiser , Bernard Legrand , L. Buchaillot , C. Combi 2002, pp.447-450 Communication dans un congrès hal-00148736v1
	High-frequency high-Q micro-mechanical resonators in thick epipoly technology with post-process gap adjustment D. Galayko , A. Kaiser , Bernard Legrand , C. Combi , D. Collard 2002, pp.665-668 Communication dans un congrès hal-00148737v1
	Study of adhesive forces on a silicon nanotip force microscope in contact mode Vincent Agache , Bernard Legrand , Dominique Collard , Lionel Buchaillot Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, May 2002, Cannes, France. pp.601-612, ⟨10.1117/12.462861⟩ Communication dans un congrès hal-00148788v1
	Conception de résonateurs micromécaniques pour les filtres IF dans la technologie de couches épaisses épitaxiées D. Galayko , A. Kaiser , Bernard Legrand , L. Buchaillot , D. Collard Colloque CAO des Circuits Intégrés et Systèmes, 2002, Paris, France Communication dans un congrès hal-00148748v1
	IF MEMS filters for mobile communication E. Quevy , D. Galayko , Bernard Legrand , C. Renaux , C. Combi 2001, pp.733-736 Communication dans un congrès hal-00152458v1
	Microsystem technology : trends and possible application for textile D. Collard , L. Buchaillot , Bernard Legrand Conference on Modern Textile Factory, HIGHTEX 2001, 2001, Lille, France Communication dans un congrès hal-00152473v1
	Microsysteme : un état des lieux, enjeux et perspectives D. Collard , L. Buchaillot , Bernard Legrand 48èmes Journées Nationales de l'Union des Physiciens, 2000, Lille, France Communication dans un congrès hal-00158538v1
	Microsystème : enjeux et perspectives D. Collard , L. Buchaillot , Bernard Legrand Journée IMAPS : International Microelectronics and Packaging Society, 2000, Lille, France Communication dans un congrès hal-00158539v1

	Micro et nanorésonateurs radio-fréquence Bernard Legrand , C. Durand , M. Faucher , L. Buchaillot Leray J.L., Boudenot J.C., Gautier J. La micro-nano électronique, enjeux et mutations, CNRS ÉDITIONS, pp.239-242, 2009 Chapitre d'ouvrage hal-00575789v1

	Sonde pour microscopie à force atomique M. Faucher , L. Buchaillot , J.P. Aime , Bernard Legrand , G. Couturier N° de brevet: FR2915803 (A1). 2008 Brevet hal-00372090v1

Bernard Legrand

Publications

A Novel Dog-Bone Oscillating AFM Probe with Thermal Actuation and Piezoresistive Detection

Two types of MEMS-based oscillating AFM probes

MEMS piezoresistive ring resonator for AFM imaging with pico-Newton force resolution

Piezoresistive ring-shaped AFM sensors with pico-newton force resolution

MEMS ring resonators for laserless AFM with sub-nanoNewton force resolution

Optimization of ohmic contact and adhesion on polysilicon in MEMS–NEMS wet etching process

Fabrication of 24-MHz-disk resonators with silicon passive integration technology

Electron beam nanolithography in AZnLOF 2020

Optimization of SiNX:H films deposited by PECVD for reliability of electronic, microsystems and optical applications

Development of a new generation of active AFM tools for applications in liquids

Materials selection procedure for RF-MEMS

Design, fabrication, and operation of two-dimensional conveyance system with ciliary actuator arrays

Design and operation of a silicon ring resonator for force sensing applications above 1 MHz

In-Plane Silicon-On-Nothing Nanometer-Scale Resonant Suspended Gate MOSFET for In-IC Integration Perspectives

SOI-based nanoelectrospray emitter tips for mass spectrometry: a coupled MEMS and microfluidic design

A silicon beam-based microcantilever nanoelectrosprayer

Complete system for wireless powering and remote control of electrostatic actuators by inductive coupling

Coupled-resonator micromechanical filters with voltage tunable bandpass characteristic in thickfilm polysilicon technology

Stability and pull-in voltage of electrostatic parallel-plate actuators in liquid solutions

Suppression of the pull-in instability for parallel-plate electrostatic actuators operated in dielectric liquids

Coupled-resonator micromechanical filters with voltage tuneable bandpass characteristic in thick-film polysilicon technology

Fabrication and characterization of 1.1 GHz blade nanoelectromechanical resonator

Modeling and experimental validation of sharpening mechanism based on thermal oxidation for fabrication of ultra-sharp silicon nanotips

Tunable passband T-filter electrostatically driven polysilicon micromechanical resonators

Influence on the step covering on fatigue phenomenon for polycrystalline silicon MEMS

Design, realization and testing of micro-mechanical resonators in thick-film silicon technology with postprocess electrode to resonator gap reduction

Electrostatic micro actuators

Surface micro-machining : an overview

Adhesive forces investigation on a silicon tip by contact mode atomic force microscope

Vacuum and cryogenic station for Micro-Electro-Mechanical Systems probing and testing

Influence of the step covering on fatigue phenomenon for polycrystalline silicon micro-electro-mechanical-systems (MEMS)

A new optimal design method for electrostatically actuated silicon-based MEMS: Application to a micro-gripper with large stroke and high force resolution

Near-field microscopy: Is there an alternative to micro and nano resonating cantilevers?

Towards a new generation of MEMS-based AFM probes

5.4 MHz dog-bone oscillating AFM probe with thermal actuation and piezoresistive detection

Piezo-resistive ring-shaped AFM sensors with pico-newton force resolution

[Invité] Apport des microsystèmes pour la microscopie à force atomique

Conception and fabrication of piezo-resistive ring shaped AFM probe

DNA origami imaging with 10.9 MHz AFM MEMS probes

Micro-résonateurs haute fréquence pour la microscopie à force atomique

Micro-résonateurs haute fréquence pour la microscopie à force atomique

4.8 MHz AFM nanoprobes with capacitive transducers and batch-fabricated nanotips

Conception and fabrication of silicon ring resonator with piezo-resistive detection for force sensing applications

[Invité] Micro et nanorésonateurs électromécaniques radio-fréquences. Principes et applications

4.8 MHz AFM nanoprobes with capacitive transducers and batch-fabricated nanotips

[Invité] Apport des micro et nano-systèmes pour la microscopie à force atomique

IMPROVE-LM - Imaging probe for vacuum environment and liquid medium

Optimal design of non intuitive compliant microgripper with high resolution

Conception and fabrication of silicon ring resonator with piezo-resistive detection for force sensing applications

Surface microscopy with laserless MEMS based AFM probes

Improve-LM imaging probe for vacuum environment and liquid medium

Atomic force probe using silicon ring resonator conception

High-Q and low-RM 24-MHz radial-contour mode disk resonators fabricated with silicon passive integration technology

Vers une nouvelle génération de sonde de microscopie à force atomique à base de micro et nano-systèmes électromécaniques

Tip-matter interaction measurements using MEMS ring resonators

Tip-matter interaction measurements using MEMS ring resonators

Characterization of IN-IC integrable in-plane nanometer scale resonators fabricated by a silicon on nothing advanced CMOS technology

Proposition of atomic force probes based on silicon ring-resonators

High yield grafting of carbon nanotube on ultra-sharp silicon nanotips: Mechanical characterization and AFM imaging

High yield grafting of carbon nanotube on ultra-sharp silicon nanotips : mechanical characterization and AFM imaging

Compact multilayer piezoresistive gauge for in-plane strain measurement in liquids

Micro-machined actuators for the friction driven micro-motor

Micro et nanomécanique, MEMS et NEMS

Ultra-low voltage MEMS resonator based on RSG-MOSFET

Parallel-plate electrostatic actuators in liquids : displacement-voltage optimisation for microfluidic applications

ELECTROSTATIC ACTUATORS OPERATING IN LIQUID ENVIRONMENT : SUPPRESSION OF PULL-IN INSTABILITY AND DYNAMIC RESPONSE

Electrostatic actuators operating in liquid environment: suppression of pull-in instability and dynamic response

MEMS reliability : metrology set-up for investigation of fatigue causes

Microsystèmes, résonateurs électromécaniques : où cela nous mène-t-il ?

3D self-assembling of SU-8 microstructures on silicon by plasma induced compressive stress

Tensile stress determination in silicon nitride membrane by AFM characterization

Actionneurs électrostatiques complètement isolés : fabrication, fonctionnement et caractérisation en milieu liquide

Friction driven micromotors with both clockwise and counterclockwise rotations

The 2D feedback conveyance with ciliary actuator arrays

Characterization of vertical vibration of electrostatically actuated resonators using Atomic Force Microscope in noncontact mode

RF blade nano-electromechanical resonator with self-aligned process for definition of lateral electrostatic transducers

Electrostatic actuators operating in liquid environment : position control without pull-in effect

Stiction drive operation of micromotors : direct and reverse rotation control