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Very high frequency probes for atomic force microscopy with silicon optomechanicsMicrosystems & Nanoengineering, 2022, 8, pp.32. ⟨10.1038/s41378-022-00364-4⟩
Article dans une revue
hal-03326075v2
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Ultra-Low-Power Logic with Contactless Capacitive MEMS21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS 2022), Dec 2022, Salt Lake City, United States. pp.233-227, ⟨10.1109/PowerMEMS56853.2022.10007572⟩
Communication dans un congrès
hal-03946985v1
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High-K thin films for simultaneous dielectric actuation and detection of M/NEMS flexural vibration19th International Conference on Solid-State Sensors, Actuators and Microsystems TRANSDUCERS 17, Jun 2017, Kaohsiung, Taiwan. ⟨10.1109/TRANSDUCERS.2017.7994155⟩
Communication dans un congrès
hal-01962426v1
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HIGH-K THIN FILMS AS DIELECTRIC TRANSDUCERS FOR FLEXURAL M/NEMS RESONATORSThe 29th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2016), IEEE, Jan 2016, Shanghai, China. ⟨10.1109/MEMSYS.2016.7421850⟩
Communication dans un congrès
hal-01279717v1
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High Speed Atomic Force MicroscopePoster de conférence hal-01529673v1 |
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Développement d'une platine de déplacements nanométriques pour la réalisation d'un Microscope à Force Atomique (AFM) rapide[Rapport Technique] LAAS-CNRS. 2019
Rapport
hal-03603368v1
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