Bernard Legrand

Documents

Publications

emmanuelle-algre

"christophe-boyaval"

	Performances of the negative tone resist AZnLOF 2020 for nanotechnology applications Etienne Herth , Emmanuelle Algre , Pascal Tilmant , Martin François , Christophe Boyaval IEEE Transactions on Nanotechnology, 2012, 11 (4), pp.854-859. ⟨10.1109/TNANO.2012.2196802⟩ Article dans une revue hal-00787415v1