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Performances of the negative tone resist AZnLOF 2020 for nanotechnology applicationsIEEE Transactions on Nanotechnology, 2012, 11 (4), pp.854-859. ⟨10.1109/TNANO.2012.2196802⟩
Article dans une revue
hal-00787415v1
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Electron beam nanolithography in AZnLOF 2020Microelectronic Engineering, 2010, 87, pp.2057-2060. ⟨10.1016/j.mee.2009.12.079⟩
Article dans une revue
hal-00548989v1
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Towards silicon-nanowire-structured materials by the intimate mixing of patterning the solid state and chemical reactionsJournal of Nano Research, 2009, 6, pp.215-224. ⟨10.4028/www.scientific.net/JNanoR.6.215⟩
Article dans une revue
hal-00471951v1
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