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Bernard Legrand

3
Documents

Publications

christophe-boyaval

Performances of the negative tone resist AZnLOF 2020 for nanotechnology applications

 Etienne Herth , Emmanuelle Algre , Pascal Tilmant , Martin François , Christophe Boyaval
IEEE Transactions on Nanotechnology, 2012, 11 (4), pp.854-859. ⟨10.1109/TNANO.2012.2196802⟩
Article dans une revue hal-00787415v1

Electron beam nanolithography in AZnLOF 2020

 E. Herth , P. Tilmant , M. Faucher , M. François , Christophe Boyaval
Microelectronic Engineering, 2010, 87, pp.2057-2060. ⟨10.1016/j.mee.2009.12.079⟩
Article dans une revue hal-00548989v1

Towards silicon-nanowire-structured materials by the intimate mixing of patterning the solid state and chemical reactions

 D. Hourlier , Bernard Legrand , Christophe Boyaval , P. Perrot
Journal of Nano Research, 2009, 6, pp.215-224. ⟨10.4028/www.scientific.net/JNanoR.6.215⟩
Article dans une revue hal-00471951v1