Bernard Legrand

Documents

Publications

"marc-faucher"

"pascal-tilmant"

"christophe-boyaval"

	Electron beam nanolithography in AZnLOF 2020 E. Herth , P. Tilmant , M. Faucher , M. François , Christophe Boyaval Microelectronic Engineering, 2010, 87, pp.2057-2060. ⟨10.1016/j.mee.2009.12.079⟩ Article dans une revue hal-00548989v1