Bernard Legrand

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"christian-bergaud"

	High-K thin films for simultaneous dielectric actuation and detection of M/NEMS flexural vibration Cécile Fuinel , Fabrice Mathieu , Adrian Laborde , Laurent Mazenq , Christian Bergaud 19th International Conference on Solid-State Sensors, Actuators and Microsystems TRANSDUCERS 17, Jun 2017, Kaohsiung, Taiwan. ⟨10.1109/TRANSDUCERS.2017.7994155⟩ Communication dans un congrès hal-01962426v1