Publications Tarik Bourouina

Mohamed Amri, Philippe Basset, Dimitri Galayko, Francesco Cottone, Einar Halvorsen, et al.. Stiffness control of a nonlinear mechanical folded beam for wideband vibration energy harvesters. Technisches Messen, Oldenbourg Verlag, 2018, 〈10.1515/teme-2017-0087〉. 〈hal-01826239〉

Yamin Leprince, Imadeddine Azzouz, Yamin Habba, Martine Capochichi-Gnambodoe, Frédéric Marty, et al.. Zinc oxide nano-enabled microfluidic reactor for water purification and its applicability to volatile organic compounds. Microsystems & Nanoengineering, 2018, 4, 〈10.1038/micronano.2017.93〉. 〈hal-01721133〉

Shaun Ferdous, Sreyash Sarkar, Frederic Marty, Patrick Poulichet, William César, et al.. Sensitivity optimization of micro-machined thermo-resistive flow-rate sensors on silicon substrates. Journal of Micromechanics and Microengineering, IOP Publishing, 2018, 28 (7), 〈10.1088/1361-6439/aab6bd〉. 〈hal-01771102〉

Ferdous Shaun, E. Nefzaoui, Frédéric Marty, William César, Tarik Bourouina. Micro-fabricated thermal flow-rate sensors: the substrate material impact on the device performance and power consumption. Microsystem Technologies, Springer Verlag, In press, 〈10.1007/s00542-018-4098-5〉. 〈hal-01865930〉

Yamin Leprince, Q. Song, W. Zhu, P. Wu, W. Zhang, et al.. Liquid-metal-based metasurface for terahertz absorption material: Frequency-agile and wide-angle. APL Materials, AIP Publishing 2017, 5 (6), 〈10.1063/1.4985288〉. 〈hal-01721125〉

Yamin Leprince, Qinghua Song, Wu Wu, Pin Chieh Wu, Weiming Zhu, et al.. Water-Resonator-Based Metasurface: An Ultrabroadband and Near-Unity Absorption. Advanced Optical Materials, Wiley, 2017, 5 (8), 〈10.1002/adom.201601103〉. 〈hal-01721123〉

X. Zhang, Elise Lorenceau, Philippe Basset, Tarik Bourouina, Florence Rouyer, et al.. Wall Slip of Soft-Jammed Systems: A Generic Simple Shear Process. Physical Review Letters, American Physical Society, 2017, 119 (20), 〈10.1103/PhysRevLett.119.208004〉. 〈hal-01763648〉

Tarik Bourouina, Noha Gaber, Yasser Sabry, Frédéric Marty. Optofluidic Fabry-Pérot Micro-Cavities Comprising Curved Surfaces for Homogeneous Liquid Refractometry—Design, Simulation, and Experimental Performance Assessment. Denki Gakkai Ronbunshi. E, Sensa, Maikuromashin Bumonshi / IEEJ Transactions on Sensors and Micromachines, Institute of Electrical Engineers of Japan, 2016, 7 (4), 〈10.3390/mi7040062〉. 〈hal-01763653〉

Yamin Leprince, Y. Liu, K. Chin, W. Ser, H. Chen, et al.. Cell refractive index for cell biology and disease diagnosis: past, present and future. Lab on a Chip, Royal Society of Chemistry, 2016, 16 (4), pp.634 - 644. 〈10.1039/C5LC01445J〉. 〈hal-01721076〉

Tarik Bourouina, Yasser Sabry, Diaa Khalil. Monolithic silicon-micromachined free-space optical interferometers onchip. Laser & Photonics Reviews, 2015, 9 (1), pp.1 - 24. 〈10.1002/lpor.201400069〉. 〈hal-01763660〉

Philippe Basset, Dimitri Galayko, Francesco Cottone, Raphaël Guillemet, Elena Blokhina, et al.. Electrostatic vibration energy harvester with combined effect of electrical nonlinearities and mechanical impact. Journal of Micromechanics and Microengineering, IOP Publishing, 2014, 24, pp.035001. 〈http://iopscience.iop.org/article/10.1088/0960-1317/24/3/035001/meta〉. 〈10.1088/0960-1317/24/3/035001〉. 〈hal-01521581〉

Noha Ali Aboulela Gaber, Maurine Malak, Frédéric Marty, Dan Angelescu, Elodie Richalot, et al.. Optical trapping and binding of particles in an optofluidic stable Fabry–Pérot resonator with single-sided injection. Lab on a Chip, Royal Society of Chemistry, 2014, 14 (13), pp.2259-2265. 〈https://www.ncbi.nlm.nih.gov/pubmed/24816268〉. 〈10.1039/c3lc51438b〉. 〈hal-01438420〉

Yamin Leprince, Y. Liu, L. Chin, W. Ser, T. Ayi, et al.. An optofluidic imaging system to measure the biophysical signature of single waterborne bacteria. Lab on a Chip, Royal Society of Chemistry, 2014, 14 (21), pp.4237 - 4243. 〈10.1039/C4LC00783B〉. 〈hal-01721070〉

Yamin Leprince, Y. Liu, L.K. Chin, W. Ser, T. Ayi, et al.. Real-time Measurement of Single Bacterium's Refractive Index Using Optofluidic Immersion Refractometry. Procedia Engineering, Elsevier, 2014, 87, pp.356 - 359. 〈10.1016/j.proeng.2014.11.743〉. 〈hal-01721074〉

Jayalakshmi Parasuraman, Anand Summanwar, Frédéric Marty, Philippe Basset, Dan Angelescu, et al.. Deep reactive ion etching of sub-micrometer trenches with ultra high aspect ratio. Microelectronic Engineering, Elsevier, 2014, 113, pp.35 - 39. 〈10.1016/j.mee.2013.06.010〉. 〈hal-01767970〉

Francesco Cottone, Philippe Basset, Helios Vocca, Luca Gammaitoni, Tarik Bourouina. Bistable electromagnetic generator based on buckled beams for vibration energy harvesting. Journal of Intelligent Material Systems and Structures, SAGE Publications, 2013, 25 (12), pp.1484 - 1495. 〈10.1177/1045389X13508330〉. 〈hal-01767964〉

Noha Gaber, Maurine Malak, X. Yuan, K.N. Nguyen, Philippe Basset, et al.. On the free-space Gaussian beam coupling to droplet optical resonators. Lab on a Chip, Royal Society of Chemistry, 2013, 13 (5), pp.826-833. 〈hal-00909496〉

Maurine Malak, Noha Gaber, F. Marty, Nicolas Pavy, Elodie Richalot, et al.. Analysis of Fabry-Pérot optical micro-cavities based on coating-free all-Silicon cylindrical Bragg reflectors. Optics Express, Optical Society of America, 2013, 21 (2), pp.2378-2392. 〈hal-00909474〉

Yamin Leprince, K. Nguyen, Philippe Basset, F. Marty, Y. Leprince-Wang, et al.. On the optical and morphological properties of microstructured Black Silicon obtained by cryogenic-enhanced plasma reactive ion etching. Journal of Applied Physics, American Institute of Physics, 2013, 113 (19), 〈10.1063/1.4805024〉. 〈hal-01721058〉

K.N. Nguyen, David Abi-Saab, Philippe Basset, Elodie Richalot, Maurine Malak, et al.. Study of black silicon obtained by cryogenic plasma etching : Approach to achieve the hot spot of a thermoelectric energy harvester. Microsystem Technologies, Springer Verlag, 2013, 18 (11), pp.1807-1814. 〈hal-00909502〉

Raphaël Guillemet, Philippe Basset, Dimitri Galayko, Tarik Bourouina. Design optimization of an out-of-plane gap-closing electrostatic Vibration Energy Harvester (VEH) with a limitation on the output voltage. Analog Integrated Circuits and Signal Processing, Springer Verlag, 2012, 71 (1), pp.39--47. 〈10.1007/s10470-011-9679-5〉. 〈hal-00692615〉

Yamin Leprince, N. Nguyen, D. Abi-Saab, Philippe Basset, E. Richalot, et al.. Study of black silicon obtained by cryogenic plasma etching: approach to achieve the hot spot of a thermoelectric energy harvester. Microsystem Technologies, Springer Verlag, 2012, 18 (11), pp.1807 - 1814. 〈10.1007/s00542-012-1486-0〉. 〈hal-01721049〉

M. Malak, N. Pavy, F. Marty, Y. -A. Peter, A. Q. Liu, et al.. Micromachined Fabry-Perot resonator combining submillimeter cavity length and high quality factor. Applied Physics Letters, American Institute of Physics, 2011, 98 (21), 〈10.1063/1.3595277〉. 〈hal-00692912〉

K. Termentzidis, Jayalakshmi Parasuraman, Carolina Abs da Cruz, Samy Merabia, Dan Angelescu, et al.. Thermal conductivity and thermal boundary resistance of nanostructures. Nanoscale Research Letters, SpringerOpen, 2011, 6, pp.288. 〈10.1186/1556-276X-6-288〉. 〈hal-01024905〉

Maurine Malak, Nicolas Pavy, Frederic Marty, Elodie Richalot, Ai-Qun Liu, et al.. Design, modeling and characterization of stable, high Q-factor curved Fabry-P,rot cavities. Microsystem Technologies, Springer Verlag, 2011, 17 (4), pp.543--552. 〈10.1007/s00542-010-1167-9〉. 〈hal-00692914〉

Maurine Malak, Nicolas Pavy, F. Marty, Elodie Richalot, Ai-Qun Liu, et al.. Design, modeling and characterization of stable, high Q-factor curved Fabry-Pérot cavities. Microsystem Technologies, Springer Verlag, 2011, 17 (4), pp.543-552. 〈hal-00909507〉

Yael Joblin, Stephane Moularat, Rukshala Anton, Faisl Bousta, Genevieve Orial, et al.. Detection of moulds by volatile organic compounds: Application to heritage conservation. International Biodeterioration and Biodegradation, Elsevier, 2010, 64 (3), pp.210--217. 〈10.1016/j.ibiod.2010.01.006〉. 〈hal-00692927〉

Ayyaz Mahmood Paracha, Philippe Basset, Dimitri Galayko, Frederic Marty, Tarik Bourouina. A Silicon MEMS DC/DC Converter for Autonomous Vibration-to-Electrical-Energy Scavenger. IEEE Electron Device Letters, Institute of Electrical and Electronics Engineers, 2009, 30 (5), pp.481--483. 〈10.1109/LED.2009.2015780〉. 〈hal-00692942〉

Philippe Basset, Dimitri Galayko, Ayyaz Mahmood Paracha, Frédéric Marty, Andrii Dudka, et al.. A batch-fabricated and electret-free silicon electrostatic vibration energy harvester. Journal of Micromechanics and Microengineering, IOP Publishing, 2009, 19 (11), pp.115025. 〈10.1088/0960-1317/19/11/115025〉. 〈hal-01653633〉

Philippe Basset, D. Galayko, A. Mahmood Paracha, F. Marty, A. Dudka, et al.. A batch-fabricated and electret-free silicon electrostatic vibration energy harvester. Journal of Micromechanics and Microengineering, IOP Publishing, 2009, 19 (11), 〈10.1088/0960-1317/19/11/115025〉. 〈hal-00692939〉

Vincent Georgel, Fabrice Verjus, Eric Van Grunsven, Patrick Poulichet, Gaelle Lissorgues, et al.. A SAW filter integrated on a silicon passive substrate used for system in package. Sensors and Actuators A: Physical , Elsevier, 2008, 142, pp.185-191. 〈10.1016/j.sna.2007.07.029〉. 〈hal-00312861〉

H. Muro, T. Oki, A. Asaoka, Tarik Bourouina, Gilbert Reyne, et al.. A Method to Measure Beam Deflections in different Resonance Modes Piezoresistively and its Incorporation into 2D Optical µ- scanners. IEEJ, Trans.SM, 2007, 127 (1). 〈hal-00283361〉

F Marty, L Rousseau, B Saadany, B Mercier, O Francais, et al.. Advanced etching of silicon based on deep reactive ion etching for silicon high aspect ratio microstructures and three-dimensional micro- and nanostructures. Microelectronics Journal, Elsevier, 2005, 36 (7), pp.673--677. 〈10.1016/j.mejo.2005.04.039〉. 〈hal-00692954〉

K Kakushima, Tarik Bourouina, T Sarnet, G Kerrien, D Debarre, et al.. Silicon periodic nano-structures obtained by laser exposure of nano-wires. Microelectronics Journal, Elsevier, 2005, 36 (7), pp.629--633. 〈10.1016/j.mejo.2005.04.034〉. 〈hal-00692953〉

Shaun Ferdous, E. Nefzaoui, Hugo Regina, William Cesar, Frederic Marty, et al.. On the co-integration of a thermo-resistive flow-rate sensor in a multi-parameter sensing chip for water network monitoring . 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS 2017), Jun 2017, Kaohsiung, Taiwan. 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), pp.1069-1072, 2017, 〈10.1109/TRANSDUCERS.2017.7994237〉. 〈hal-01578963〉

Shaun Ferdous, Hugo Regina, Frédéric Marty, E. Nefzaoui, Tarik Bourouina, et al.. Design of micro-fabricated thermal flow-rate sensor for water network monitoring. 19th Symposium on Design, Test, Integration & Packaging of MEMS and MOEM (DTIP 2017), May 2017, Bordeaux, France. 2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2017, 〈http://www.dtip-mems.org/〉. 〈10.1109/DTIP.2017.7984474〉. 〈hal-01578598〉

Imadeddine Azzouz, Patrick Poulichet, Michele Pirro, Wei Tan, Frédéric Marty, et al.. Evaluation of Tenax thin films as adsorbent material in a micro-preconcentrator and its operation as a valve-less multiple injection system in micro-gas chromatography. 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), Jun 2017, Kaohsiung, France. IEEE, 〈10.1109/TRANSDUCERS.2017.7994348〉. 〈hal-01826734〉

Massimo Pellegrino, William Cesar, Frédéric Marty, Martine Capo Chichi, Bérengère Lebental, et al.. Robust Multi-Parameter Sensing Probe for Water Monitoring Based on ALD-Coated Metallic Micro-patterns and Carbon Nanotube Printing. IEEE NEMS 2016 - The 11th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, Apr 2016, Matsushima Bay, Japan. IEEE NEMS 2016 - The 11th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 2p, 2016. 〈hal-01395020〉

Yamin Leprince, Qing Hua Song, Hong Cai, Yuan Dong Gu, Wu Wu, et al.. Tunable metamaterials for terahertz ultra-broadband absorption driven by microfluidics. 2016 IEEE 29th International Conference on Micro-Electro-Mechanical Systems (MEMS), Jan 2016, Shanghai, France. IEEE, 〈10.1109/MEMSYS.2016.7421718〉. 〈hal-01721166〉

Yamin Leprince, Qinghua Song, Wu Wu, Hong Cai, Yuan Dong Gu, et al.. A Tunable Metamaterial for Wide-Angle and Broadband Absorption through Meta-Water-Capsule Coatings. CLEO: QELS_Fundamental Science, 2016, San Jose, France. OSA, 〈10.1364/CLEO_QELS.2016.FF2D.8〉. 〈hal-01721174〉

Yamin Leprince, Patricia Yang Liu, Lip Ket Chin, Wee Ser, Teck Choon Ayi, et al.. Optofluidic Detection for Virus Infection Monitoring using Effective Refractive Index. CLEO: Applications and Technology, 2015, San Jose, France. OSA, 〈10.1364/CLEO_AT.2015.JW2A.89〉. 〈hal-01721142〉

Yamin Leprince, W. Zhu, H. Song, L. Yan, W. Zhang, et al.. Tunable flat lens based on microfluidic reconfigurable metasurface. TRANSDUCERS 2015 - 2015 18th International Solid-State Sensors, Actuators and Microsystems Conference, Jun 2015, Anchorage, France. IEEE, 〈10.1109/TRANSDUCERS.2015.7181344〉. 〈hal-01721164〉

Yamin Leprince, Q. Song, W. Zhu, W. Zhang, P. Wu, et al.. Tunable metamaterial lens array via metadroplets. 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Jan 2015, Estoril, France. IEEE, 〈10.1109/MEMSYS.2015.7051120〉. 〈hal-01721139〉

Yamin Leprince, Qinghua Song, Pin Chieh Wu, Weimiing Zhu, Wu Zhang, et al.. Transition from Plasmon Coupling to Plasmon-Microcavity Hybridization. CLEO: Science and Innovations, 2015, San Jose, France. OSA, 〈10.1364/CLEO_SI.2015.STu4H.7〉. 〈hal-01721140〉

Bérengère Lebental, François Derkx, Frédéric Bourquin, Tarik Bourouina, Bruno Mercier, et al.. The Sense-City equipment project: 9M¤ for prototyping and validation of nanosensors for sustainable cities. Nanotech, Jun 2014, France. 2 p. 〈hal-00991338〉

Francesco Cottone, Philippe Basset, Frédéric Marty, Dimitri Galayko, Luca Gammaitoni, et al.. Electrostatic generator with free micro-ball and elastic stoppers for low-frequency vibration harvesting. Micro Electro Mechanical Systems (MEMS), 2014 IEEE 27th International Conference on, Jan 2014, San Francisco, CA, United States. 〈http://ieeexplore.ieee.org/document/6765657/〉. 〈10.1109/MEMSYS.2014.6765657〉. 〈hal-01522178〉

Bérengère Lebental, Dan Angelescu, Tarik Bourouina, Frédéric Bourquin, Costel-Sorin Cojocaru, et al.. The Sense-City equipment project : insight into the prototyping and validation of environmental micro-and nanosensors for a sustainable urbanization. European Geosciences Union General Assembly, Apr 2013, Austria. 〈hal-00854208〉

Francesco Cottone, Philippe Basset, Raphaël Guillemet, Dimitri Galayko, Frédéric Marty, et al.. Bistable multiple-mass elecrostatic generator for low-frequency vibration energy harvesting. Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on, Jan 2013, taipei, Taiwan. 〈http://ieeexplore.ieee.org/document/6474379/〉. 〈10.1109/MEMSYS.2013.6474379〉. 〈hal-01522190〉

Francesco Cottone, Philippe Basset, Raphaël Guillemet, Dimitri Galayko, Frédéric Marty, et al.. Non-linear MEMS electrostatic kinetic energy harvester with a tunable multistable potential for stochastic vibrations . Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on, Jun 2013, barcelona, Spain. 〈http://ieeexplore.ieee.org/document/6627024/〉. 〈10.1109/Transducers.2013.6627024〉. 〈hal-01522182〉

Raphaël Guillemet, Philippe Basset, Dimitri Galayko, Francesco Cottone, Frédéric Marty, et al.. Wideband MEMS electrostatic vibration energy harvesters based on gap-closing interdigited combs with a trapezoidal cross section. Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on, Jan 2013, Taipei, Taiwan. 〈http://ieeexplore.ieee.org/document/6474368/〉. 〈10.1109/MEMSYS.2013.6474368〉. 〈hal-01522189〉

François Derkx, Bérengère Lebental, Tarik Bourouina, Frédéric Bourquin, Costel-Sorin Cojocaru, et al.. The Sense-City project. XVIIIth Symposium on Vibrations, Shocks and Noise, Jul 2012, France. 9p, 2012. 〈hal-00860842〉

Raphaël Guillemet, Philippe Basset, Dimitri Galayko, Tarik Bourouina. Combined optimization of electrical and mechanical parameters of in-plane and out-of-plane gap-closing electrostatic Vibration Energy Harvesters (VEHs). EUROSENSORS European Conference on sensors, actuators and microsystems, Sep 2010, Linz, Austria. Elsevier, EUROSENSORS European Conference on sensors, actuators and microsystems, 5, pp.1172-1175, Procedia Engineering. 〈10.1016/j.proeng.2010.09.320〉. 〈hal-01289308〉

Raphaël Guillemet, Philippe Basset, Dimitri Galayko, Tarik Bourouina. Combined optimization of electrical and mechanical parameters of an out-of-plane gap-closing electrostatic Vibration Energy Harvester (VEH). Symposium on Design Test Integration and Packaging of MEMS/MOEMS (DTIP), May 2010, Sevilla, Spain. IEEE, Symposium on Design Test Integration and Packaging of MEMS/MOEMS (DTIP), pp.73-78. 〈hal-01290703〉

Ayyaz Mahmood Paracha, Philippe Basset, Dimitri Galayko, Andrii Dudka, Frédéric Marty, et al.. MEMS DC/DC converter for 1D and 2D vibration-to-electricity power conversion. Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International, Jun 2009, Denver, CO, United States. 〈http://ieeexplore.ieee.org/abstract/document/5285649/〉. 〈10.1109/SENSOR.2009.5285649〉. 〈hal-01522198〉

Ayyaz Mahmood Paracha, Philippe Basset, Dimitri Galayko, Frédéric Marty, Tarik Bourouina. A bidirectional vibration powered electric energy generator based on electrostatic transduction using In-Plane Overlap Plate (IPOP) mechanism. Design, Test, Integration & Packaging of MEMS/MOEMS, 2009. MEMS/MOEMS '09. Symposium on, Apr 2009, Rome, Italy. 〈http://ieeexplore.ieee.org/document/4919558/〉. 〈hal-01522200〉

Ayyaz Mahmood Paracha, Philippe Basset, Dimitri Galayko, Frédéric Marty, Andrii Dudka, et al.. Characterization of a DC/DC converter using an in-plane bulk-silicon capacitive transducer for vibration-to-electricity power conversion. PowerMEMS Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, Nov 2008, Sendai, Japan. PowerMEMS Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, pp.297-300. 〈hal-01299222〉

Patrick Sangouard, Gaelle Lissorgues, Tarik Bourouina. A Novel Piezoelectric Microtransformer for Autonmous Sensors Applications. DTIP 2008, Apr 2008, Nice, France. EDA PUBLISHING Association, pp.42-45, 2008. 〈hal-00277675〉

A.M. Paracha, Ph. Basset, F. Marty, A. Vaisman Chasin, P. Poulichet, et al.. A High Power Density Electrostatic Vibration-to-Electric Energy Converter Based On An In-Plane Overlap Plate (IPOP) Mechanism. DTIP 2007, Apr 2007, Stresa, lago Maggiore, Italy. TIMA Editions, pp.290-296, 2007. 〈hal-00257704〉

Vincent Georgel, Fabrice Verjus, Eric Van Grunsven, Patrick Poulichet, Gaelle Lissorgues, et al.. Integrated saw filter into a silicon passive integration connecting substrate. 20th Eurosensor conference, Sep 2006, Göteborg, Sweden. pp.37, 2006. 〈hal-00165716〉

A. Phommahaxay, Gaelle Lissorgues, L. Rousseau, Tarik Bourouina, P. Nicole. SURFACE CONDITIONING EFFECT ON VACUUM MICROELECTRONICS COMPONENTS FABRICATED BY DEEP REACTIVE ION ETCHING. DTIP 2006, Apr 2006, Stresa, Lago Maggiore, Italy. TIMA Editions, 5 p., 2006. 〈hal-00189257〉

A. Giridhar, F. Verjus, F. Marty, A. Bosseboeuf, Tarik Bourouina. ELECTROSTATICALLY-DRIVEN RESONATOR ON SOI WITH IMPROVED TEMPERATURE STABILITY. DTIP 2006, Apr 2006, Stresa, Lago Maggiore, Italy. TIMA Editions, 5 p., 2006. 〈hal-00189322〉

Tarik Bourouina, B. Courtois, R. Ghodssi, J.M. Karam, A. Soma, et al.. Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP 2009). EDA Publishing Association. EDA Publishing Association, pp.429, 2009, Proceedings. 〈hal-00395521〉

V. Bright, Tarik Bourouina, B. Courtois, M. Desmulliez, J.M. Karam, et al.. Proceedings of Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP 2008), Cannes, France, April 9-11. EDA Publishing Association - CMP, Grenoble, France, 2008. 〈hal-00354566〉

Tarik Bourouina, H. Fujita, Gilbert Reyne, E. Motamedi. chapter 7: Optical Scanners. MOEMS, Micro-Opto-Electro-Mechanical Systems, Spie Press, pp.323 à 367, 2005. 〈hal-00181068〉