Publications Tarik Bourouina

Lan Gao, Elyes Nefzaoui, Frédéric Marty, Xueyong Wei, Stéphane Bastide, et al.. Two-dimensional metamaterials as meta-foams for optimized surface-enhanced solar steam generation. Solar Energy Materials and Solar Cells, Elsevier, 2022, 243, pp.111793. ⟨10.1016/j.solmat.2022.111793⟩. ⟨hal-03688508⟩

Alaa Fathy, Tarik Bourouina, Yasser M. Sabry, Diaa Khalil. Differential Optical Spectrometer based on Critical Angle Dispersion. Journal of Lightwave Technology, Institute of Electrical and Electronics Engineers (IEEE)/Optical Society of America(OSA), In press, pp.1-1. ⟨10.1109/JLT.2021.3057787⟩. ⟨hal-03161366⟩

Lan Gao, Elyes Nefzaoui, Frédéric Marty, Mazen Erfan, Stéphane Bastide, et al.. TiO2-Coated ZnO Nanowire Arrays: A Photocatalyst with Enhanced Chemical Corrosion Resistance. Catalysts, MDPI, 2021, 11 (11), pp.1289. ⟨10.3390/catal11111289⟩. ⟨hal-03543997⟩

Jin Tao, Zhongzhu Liang, Guang Zeng, Dejia Meng, David R Smith, et al.. Dual functionality metamaterial enables ultra-compact, highly sensitive uncooled infrared sensor. Nanophotonics, Walter de Gruyter, 2021, 10 (4), pp.1337-1346. ⟨10.1515/nanoph-2020-0607⟩. ⟨hal-03161354⟩

Shaobo Luo, Yuzhi Shi, Lip Ket Chin, Yi Zhang, Bihan Wen, et al.. Rare bioparticle detection via deep metric learning. RSC Advances, Royal Society of Chemistry, 2021, 11 (29), pp.17603-17610. ⟨10.1039/D1RA02869C⟩. ⟨hal-03541059⟩

Shaobo Luo, Yuzhi Shi, Lip Ket Chin, Paul Edward Hutchinson, Yi Zhang, et al.. Machine‐Learning‐Assisted Intelligent Imaging Flow Cytometry: A Review. Advanced Intelligent Systems, Wiley, 2021, 3 (11), pp.2100073. ⟨10.1002/aisy.202100073⟩. ⟨hal-03540960⟩

Mazen Erfan, Martine Gnambodoe-Capochichi, Yasser M Sabry, Diaa Khalil, Yamin Leprince-Wang, et al.. Spatiotemporal dynamics of nanowire growth in a microfluidic reactor. Microsystems & Nanoengineering, Springer Nature, 2021, 7 (1), pp.77. ⟨10.1038/s41378-021-00308-4⟩. ⟨hal-03544003⟩

Xiaoyi Liu, Joachim Trosseille, Anne Mongruel, Frédéric Marty, Philippe Basset, et al.. Tailoring silicon for dew water harvesting panels. iScience, Elsevier, 2021, 24 (7), pp.102814. ⟨10.1016/j.isci.2021.102814⟩. ⟨hal-03342194⟩

Shaobo Luo, Tarik Bourouina, Giovanni Chierchia, Hugues Talbot, Ai-Qun Liu, et al.. Deep learning‐enabled imaging flow cytometry for high‐speed Cryptosporidium and Giardia detection. Cytometry Part A, Wiley, 2021, ⟨10.1002/cyto.a.24321⟩. ⟨hal-03161362⟩

Xiaoyi Liu, Jinbo Gao, Yanchao Wang, Xiaoyi Wang, Haigui Yang, et al.. Simultaneous field enhancement and loss inhibition based on surface plasmon polariton mode hybridization. Nanophotonics, Walter de Gruyter, 2020, ⟨10.1515/nanoph-2020-0023⟩. ⟨hal-02750156⟩

Alaa Fathy, Yasser M Sabry, Sebastien Nazeer, Tarik Bourouina, Diaa Khalil. On-chip parallel Fourier transform spectrometer for broadband selective infrared spectral sensing. Microsystems & Nanoengineering, Springer Nature, 2020, 6 (1), ⟨10.1038/s41378-019-0111-0⟩. ⟨hal-02478146⟩

Alaa Fathy, Marie Le Pivert, Young Jai Kim, Mame Ousmane Ba, Mazen Erfan, et al.. Continuous Monitoring of Air Purification: A Study on Volatile Organic Compounds in a Gas Cell. Sensors, MDPI, 2020, 20 (3), pp.934. ⟨10.3390/s20030934⟩. ⟨hal-02478118⟩

Mazen Erfan, Léonce Martine Gnambodoe-Capochichi, Frédéric Marty, Yasser M Sabry, Tarik Bourouina, et al.. Rapid assessment of nanomaterial homogeneity reveals crosswise structural gradients in zinc-oxide nanowire arrays. Nanoscale, Royal Society of Chemistry, 2020, ⟨10.1039/C9NR09709K⟩. ⟨hal-02437701⟩

Hemin Zhang, Frédéric Marty, Xin Xia, Yunlong Zi, Tarik Bourouina, et al.. Employing a MEMS plasma switch for conditioning high-voltage kinetic energy harvesters. Nature Communications, Nature Publishing Group, 2020, 11 (1), pp.3221. ⟨10.1038/s41467-020-17019-5⟩. ⟨hal-03090276⟩

Shaobo Luo, Yi Zhang, Kim Truc Nguyen, Shilun Feng, Yuzhi Shi, et al.. Machine Learning-Based Pipeline for High Accuracy Bioparticle Sizing. Micromachines, MDPI, 2020, 11 (12), pp.1084. ⟨10.3390/mi11121084⟩. ⟨hal-03144923⟩

Alessandro Benfenati, Francesco Bonacci, Tarik Bourouina, Hugues Talbot. Efficient position estimation of 3D fluorescent spherical beads in confocal microscopy via Poisson denoising. Journal of Mathematical Imaging and Vision, Springer Verlag, 2020, 63 (1), pp.56-72. ⟨10.1007/s10851-020-00994-1⟩. ⟨hal-02150316v5⟩

Yi Luo, Dejia Meng, Zhongzhu Liang, Jin Tao, Jingqiu Liang, et al.. Ultra-broadband metamaterial absorber in long wavelength Infrared band based on resonant cavity modes. Optics Communications, Elsevier, 2020, 459, pp.124948. ⟨10.1016/j.optcom.2019.124948⟩. ⟨hal-02437698⟩

Haitham Omran, Mohab Sameh, Ahmed Mahfouz, Omar Saad, Maram Abou Kana, et al.. Visible Laser on Silicon Optofluidic Microcavity. Advanced Materials Technologies, Wiley, 2020, 5 (5), pp.1901132. ⟨10.1002/admt.201901132⟩. ⟨hal-02750229⟩

Hugo Serra, Ivan N. Bastos, Joao de Melo, João Oliveira, Nuno Paulino, et al.. A 0.9-V Analog-to-Digital Acquisition Channel for an IoT Water Management Sensor Node. IEEE Transactions on Circuits and Systems II: Express Briefs, Institute of Electrical and Electronics Engineers, 2019, 66 (10), pp.1678-1682. ⟨10.1109/TCSII.2019.2933276⟩. ⟨hal-02437707⟩

Chao-Mao Hsieh, Patricia Yang Liu, Lip Ket Chin, Jing Bo Zhang, Kuan Wang, et al.. Regulation of lipid droplets in live preadipocytes using optical diffraction tomography and Raman spectroscopy. Optics Express, Optical Society of America - OSA Publishing, 2019, 27 (16), pp.22994. ⟨10.1364/OE.27.022994⟩. ⟨hal-02431213⟩

Mazen Erfan, Martine Gnambodoe-Capochichi, Yamin Leprince-Wang, Yasser M Sabry, Tarik Bourouina, et al.. Nanowire Length, Density, and Crystalline Quality Retrieved from a Single Optical Spectrum. Nano Letters, American Chemical Society, 2019, 19 (4), pp.2509-2515. ⟨10.1021/acs.nanolett.9b00165⟩. ⟨hal-02431206⟩

Noha Gaber, Ahmad Altayyeb, Sherif Soliman, Yasser M Sabry, Frédéric Marty, et al.. On-Channel Integrated Optofluidic Pressure Sensor with Optically Boosted Sensitivity. Sensors, MDPI, 2019, 19 (4), pp.944. ⟨10.3390/s19040944⟩. ⟨hal-02437714⟩

Jungyoon Kim, Li Wang, Tarik Bourouina, Tianhong Cui. Ion sensitive field effect transistor based on graphene and ionophore hybrid membrane for phosphate detection. Microsystem Technologies, Springer Verlag, 2019, 25 (9), pp.3357-3364. ⟨10.1007/s00542-018-4200-z⟩. ⟨hal-02437705⟩

Q.H. Song, P.C. Wu, W. Zhu, W. Zhang, Z.X. Shen, et al.. Split Archimedean spiral metasurface for controllable GHz asymmetric transmission. Applied Physics Letters, American Institute of Physics, 2019, 114 (15), pp.151105. ⟨10.1063/1.5084329⟩. ⟨hal-02437710⟩

Mohamed Amri, Philippe Basset, Dimitri Galayko, Francesco Cottone, Einar Halvorsen, et al.. Stiffness control of a nonlinear mechanical folded beam for wideband vibration energy harvesters. Technisches Messen, Oldenbourg Verlag, 2018, ⟨10.1515/teme-2017-0087⟩. ⟨hal-01826239⟩

X. Zhang, Elise Lorenceau, Tarik Bourouina, Philippe Basset, Thomas Oerther, et al.. Wall slip mechanisms in direct and inverse emulsions. Journal of Rheology, American Institute of Physics, 2018, 62 (6), pp.1495-1513. ⟨10.1122/1.5046893⟩. ⟨hal-01931257⟩

Ferdous Shaun, E. Nefzaoui, Frédéric Marty, William César, Tarik Bourouina. Micro-fabricated thermal flow-rate sensors: the substrate material impact on the device performance and power consumption. Microsystem Technologies, Springer Verlag, 2018, ⟨10.1007/s00542-018-4098-5⟩. ⟨hal-01865930⟩

Ahmed A Elsayed, Yasser M Sabry, Frédéric Marty, Tarik Bourouina, Diaa Khalil. Optical modeling of black silicon using an effective medium/multi-layer approach. Optics Express, Optical Society of America - OSA Publishing, 2018, 26 (10), pp.13443. ⟨10.1364/OE.26.013443⟩. ⟨hal-02437731⟩

Fethi Metehri, Mahmoud Youcef Mahmoud, Ghaouti Bassou, Elodie Richalot, Tarik Bourouina. Stable optofluidic Fabry-Pérot resonator for liquid and gas sensing. Sensors and Actuators A: Physical , Elsevier, 2018, 281, pp.95-99. ⟨10.1016/j.sna.2018.08.027⟩. ⟨hal-02437720⟩

Mohamed Ali, Yasser M Sabry, Frédéric Marty, Tarik Bourouina, Khaled Kirah, et al.. In-plane coupled Fabry–Perot micro-cavities based on Si-air Bragg mirrors: a theoretical and practical study. Applied optics, Optical Society of America, 2018, 57 (18), pp.5112. ⟨10.1364/AO.57.005112⟩. ⟨hal-02437725⟩

Noha Gaber, Yasser M Sabry, Mazen Erfan, Frédéric Marty, Tarik Bourouina. High-Q Fabry–Pérot Micro-Cavities for High-Sensitivity Volume Refractometry. Micromachines, MDPI, 2018, 9 (2), pp.54. ⟨10.3390/mi9020054⟩. ⟨hal-02437742⟩

Imadeddine Azzouz, Yamina Ghozlane Habba, Martine Capochichi-Gnambodoe, Frédéric Marty, Jerome Vial, et al.. Zinc oxide nano-enabled microfluidic reactor for water purification and its applicability to volatile organic compounds. Microsystems & Nanoengineering, Springer Nature, 2018, 4, pp.17093. ⟨10.1038/micronano.2017.93⟩. ⟨hal-01721133⟩

Shaun Ferdous, Sreyash Sarkar, Frederic Marty, Patrick Poulichet, William César, et al.. Sensitivity optimization of micro-machined thermo-resistive flow-rate sensors on silicon substrates. Journal of Micromechanics and Microengineering, IOP Publishing, 2018, 28 (7), ⟨10.1088/1361-6439/aab6bd⟩. ⟨hal-01771102⟩

Yasser M Sabry, Diaa Khalil, Bassam Saadany, Tarik Bourouina. In-Plane Optical Beam Collimation Using a Three-Dimensional Curved MEMS Mirror. Micromachines, MDPI, 2017, 8 (5), pp.134. ⟨10.3390/mi8050134⟩. ⟨hal-02437753⟩

Q. Song, W. Zhu, P. Wu, W. Zhang, Y. Wu, et al.. Liquid-metal-based metasurface for terahertz absorption material: Frequency-agile and wide-angle. APL Materials, AIP Publishing 2017, 5 (6), ⟨10.1063/1.4985288⟩. ⟨hal-01721125⟩

X. Zhang, Elise Lorenceau, Philippe Basset, Tarik Bourouina, Florence Rouyer, et al.. Wall Slip of Soft-Jammed Systems: A Generic Simple Shear Process. Physical Review Letters, American Physical Society, 2017, 119 (20), ⟨10.1103/PhysRevLett.119.208004⟩. ⟨hal-01763648⟩

Qinghua Song, Wu Wu, Pin Chieh Wu, Weiming Zhu, Zhong Xiang Shen, et al.. Water-Resonator-Based Metasurface: An Ultrabroadband and Near-Unity Absorption. Advanced Optical Materials, Wiley, 2017, 5 (8), ⟨10.1002/adom.201601103⟩. ⟨hal-01721123⟩

Y. Liu, K. Chin, W. Ser, H. Chen, C.-M. Hsieh, et al.. Cell refractive index for cell biology and disease diagnosis: past, present and future. Lab on a Chip, Royal Society of Chemistry, 2016, 16 (4), pp.634 - 644. ⟨10.1039/C5LC01445J⟩. ⟨hal-01721076⟩

Noha Gaber, Yasser M Sabry, Frédéric Marty, Tarik Bourouina. Optofluidic Fabry-Pérot Micro-Cavities Comprising Curved Surfaces for Homogeneous Liquid Refractometry—Design, Simulation, and Experimental Performance Assessment. Micromachines, MDPI, 2016, 7 (4), pp.62. ⟨10.3390/mi7040062⟩. ⟨hal-02437760⟩

Tarik Bourouina, Yasser Sabry, Diaa Khalil. Monolithic silicon-micromachined free-space optical interferometers onchip. Laser & Photonics Reviews, 2015, 9 (1), pp.1 - 24. ⟨10.1002/lpor.201400069⟩. ⟨hal-01763660⟩

Noha Gaber, Yuto Takemura, Frédéric Marty, Diaa Khalil, Dan Angelescu, et al.. Volume refractometry of liquids using stable optofluidic Fabry–Pérot resonator with curved surfaces. Journal of Micro/Nanolithography, MEMS, and MOEMS, Society of Photo-optical Instrumentation Engineers, 2015, 14 (4), pp.045501. ⟨10.1117/1.JMM.14.4.045501⟩. ⟨hal-02437765⟩

Y. Liu, L.K. Chin, W. Ser, T. Ayi, P.H. Yap, et al.. Real-time Measurement of Single Bacterium's Refractive Index Using Optofluidic Immersion Refractometry. Procedia Engineering, Elsevier, 2014, 87, pp.356 - 359. ⟨10.1016/j.proeng.2014.11.743⟩. ⟨hal-01721074⟩

Jayalakshmi Parasuraman, Anand Summanwar, Frédéric Marty, Philippe Basset, Dan Angelescu, et al.. Deep reactive ion etching of sub-micrometer trenches with ultra high aspect ratio. Microelectronic Engineering, Elsevier, 2014, 113, pp.35 - 39. ⟨10.1016/j.mee.2013.06.010⟩. ⟨hal-01767970⟩

Y. Liu, L. Chin, W. Ser, T. Ayi, P. Yap, et al.. An optofluidic imaging system to measure the biophysical signature of single waterborne bacteria. Lab on a Chip, Royal Society of Chemistry, 2014, 14 (21), pp.4237 - 4243. ⟨10.1039/C4LC00783B⟩. ⟨hal-01721070⟩

Noha Ali Aboulela Gaber, Maurine Malak, Frédéric Marty, Dan E Angelescu, Elodie Richalot, et al.. Optical trapping and binding of particles in an optofluidic stable Fabry–Pérot resonator with single-sided injection. Lab on a Chip, Royal Society of Chemistry, 2014, 14 (13), pp.2259-2265. ⟨10.1039/c3lc51438b⟩. ⟨hal-01438420⟩

Philippe Basset, Dimitri Galayko, Francesco Cottone, Raphaël Guillemet, Elena Blokhina, et al.. Electrostatic vibration energy harvester with combined effect of electrical nonlinearities and mechanical impact. Journal of Micromechanics and Microengineering, IOP Publishing, 2014, 24, pp.035001. ⟨10.1088/0960-1317/24/3/035001⟩. ⟨hal-01521581⟩

Noha Gaber, Maurine Malak, X. Yuan, K.N. Nguyen, Philippe Basset, et al.. On the free-space Gaussian beam coupling to droplet optical resonators. Lab on a Chip, Royal Society of Chemistry, 2013, 13 (5), pp.826-833. ⟨hal-00909496⟩

Maurine Malak, Noha Gaber, F. Marty, Nicolas Pavy, Elodie Richalot, et al.. Analysis of Fabry-Pérot optical micro-cavities based on coating-free all-Silicon cylindrical Bragg reflectors. Optics Express, Optical Society of America - OSA Publishing, 2013, 21 (2), pp.2378-2392. ⟨hal-00909474⟩

K.N. Nguyen, David Abi Saab, Philippe Basset, Elodie Richalot, Maurine Malak, et al.. Study of black silicon obtained by cryogenic plasma etching : Approach to achieve the hot spot of a thermoelectric energy harvester. Microsystem Technologies, Springer Verlag, 2013, 18 (11), pp.1807-1814. ⟨hal-00909502⟩

Francesco Cottone, Philippe Basset, Helios Vocca, Luca Gammaitoni, Tarik Bourouina. Bistable electromagnetic generator based on buckled beams for vibration energy harvesting. Journal of Intelligent Material Systems and Structures, SAGE Publications, 2013, 25 (12), pp.1484 - 1495. ⟨10.1177/1045389X13508330⟩. ⟨hal-01767964⟩

K. N. Nguyen, Philippe Basset, F. Marty, Yamin Leprince-Wang, Tarik Bourouina. On the optical and morphological properties of microstructured Black Silicon obtained by cryogenic-enhanced plasma reactive ion etching. Journal of Applied Physics, American Institute of Physics, 2013, 113 (19), ⟨10.1063/1.4805024⟩. ⟨hal-01721058⟩

Raphaël Guillemet, Philippe Basset, Dimitri Galayko, Tarik Bourouina. Design optimization of an out-of-plane gap-closing electrostatic Vibration Energy Harvester (VEH) with a limitation on the output voltage. Analog Integrated Circuits and Signal Processing, Springer Verlag, 2012, 71 (1), pp.39--47. ⟨10.1007/s10470-011-9679-5⟩. ⟨hal-00692615⟩

M. Malak, N. Pavy, F. Marty, Y. -A. Peter, A. Q. Liu, et al.. Micromachined Fabry-Perot resonator combining submillimeter cavity length and high quality factor. Applied Physics Letters, American Institute of Physics, 2011, 98 (21), ⟨10.1063/1.3595277⟩. ⟨hal-00692912⟩

Maurine Malak, Nicolas Pavy, Frederic Marty, Elodie Richalot, Ai-Qun Liu, et al.. Design, modeling and characterization of stable, high Q-factor curved Fabry-P,rot cavities. Microsystem Technologies, Springer Verlag, 2011, 17 (4), pp.543--552. ⟨10.1007/s00542-010-1167-9⟩. ⟨hal-00692914⟩

Maurine Malak, Nicolas Pavy, F. Marty, Elodie Richalot, Ai-Qun Liu, et al.. Design, modeling and characterization of stable, high Q-factor curved Fabry-Pérot cavities. Microsystem Technologies, Springer Verlag, 2011, 17 (4), pp.543-552. ⟨hal-00909507⟩

K. Termentzidis, Jayalakshmi Parasuraman, Carolina Abs da Cruz, Samy Merabia, Dan Angelescu, et al.. Thermal conductivity and thermal boundary resistance of nanostructures. Nanoscale Research Letters, SpringerOpen, 2011, 6, pp.288. ⟨10.1186/1556-276X-6-288⟩. ⟨hal-01024905⟩

Yael Joblin, Stephane Moularat, Rukshala Anton, Faisl Bousta, Genevieve Orial, et al.. Detection of moulds by volatile organic compounds: Application to heritage conservation. International Biodeterioration and Biodegradation, Elsevier, 2010, 64 (3), pp.210--217. ⟨10.1016/j.ibiod.2010.01.006⟩. ⟨hal-00692927⟩

Philippe Basset, D. Galayko, A. Mahmood Paracha, F. Marty, A. Dudka, et al.. A batch-fabricated and electret-free silicon electrostatic vibration energy harvester. Journal of Micromechanics and Microengineering, IOP Publishing, 2009, 19 (11), ⟨10.1088/0960-1317/19/11/115025⟩. ⟨hal-00692939⟩

Philippe Basset, Dimitri Galayko, Ayyaz Mahmood Paracha, Frédéric Marty, Andrii Dudka, et al.. A batch-fabricated and electret-free silicon electrostatic vibration energy harvester. Journal of Micromechanics and Microengineering, IOP Publishing, 2009, 19 (11), pp.115025. ⟨10.1088/0960-1317/19/11/115025⟩. ⟨hal-01653633⟩

Ayyaz Mahmood Paracha, Philippe Basset, Dimitri Galayko, Frederic Marty, Tarik Bourouina. A Silicon MEMS DC/DC Converter for Autonomous Vibration-to-Electrical-Energy Scavenger. IEEE Electron Device Letters, Institute of Electrical and Electronics Engineers, 2009, 30 (5), pp.481--483. ⟨10.1109/LED.2009.2015780⟩. ⟨hal-00692942⟩

Vincent Georgel, Fabrice Verjus, Eric van Grunsven, Patrick Poulichet, Gaelle Bazin Lissorgues, et al.. A SAW filter integrated on a silicon passive substrate used for system in package. Sensors and Actuators A: Physical , Elsevier, 2008, 142, pp.185-191. ⟨10.1016/j.sna.2007.07.029⟩. ⟨hal-00312861⟩

H. Muro, T. Oki, A. Asaoka, Tarik Bourouina, Gilbert Reyne, et al.. A Method to Measure Beam Deflections in different Resonance Modes Piezoresistively and its Incorporation into 2D Optical µ- scanners. IEEJ, Trans.SM, 2007, 127 (1). ⟨hal-00283361⟩

K Kakushima, Tarik Bourouina, T Sarnet, G Kerrien, D Debarre, et al.. Silicon periodic nano-structures obtained by laser exposure of nano-wires. Microelectronics Journal, Elsevier, 2005, 36 (7), pp.629--633. ⟨10.1016/j.mejo.2005.04.034⟩. ⟨hal-00692953⟩

F Marty, L Rousseau, B Saadany, B Mercier, O Francais, et al.. Advanced etching of silicon based on deep reactive ion etching for silicon high aspect ratio microstructures and three-dimensional micro- and nanostructures. Microelectronics Journal, Elsevier, 2005, 36 (7), pp.673--677. ⟨10.1016/j.mejo.2005.04.039⟩. ⟨hal-00692954⟩

Léonce Martine Gnambodoe-Capochichi, Alaa Fathy, Young Jai Kim, Mazen Erfan, Marie Le Pivert, et al.. Monitoring the purification of tobacco smoke in air assisted by ZnO nanowires and using MEMS-FTIR spectrometer for online continuous analysis of volatile organic compounds (VOCs). Optical Components and Materials XVI, Feb 2019, San Francisco, United States. pp.61, ⟨10.1117/12.2507983⟩. ⟨hal-02431073⟩

Mazen Erfan, Martine Gnambodoe-Capochichi, Marie Le Pivert, Frédéric Marty, Yasser M Sabry, et al.. Zinc-oxide nanowires growth in-situ in microfluidic chamber. Microfluidics, BioMEMS, and Medical Microsystems XVII, Feb 2019, San Francisco, United States. pp.23, ⟨10.1117/12.2507877⟩. ⟨hal-02431183⟩

Mazen Erfan, Martine Gnambodoe-Capochichi, Marie Le Pivert, Frédéric Marty, Yasser M Sabry, et al.. Zinc-oxide nanowires characterization using optical reflectance. Oxide-based Materials and Devices X, Feb 2019, San Francisco, United States. pp.68, ⟨10.1117/12.2507935⟩. ⟨hal-02431127⟩

Alaa Fathy, Yasser M Sabry, Mariam Amr, Martine Capo-Chichi, Momen Anwar, et al.. MEMS FTIR optical spectrometer enables detection of volatile organic compounds (VOCs) in part-per-billion (ppb) range for air quality monitoring. MOEMS and Miniaturized Systems XVIII, Feb 2019, San Francisco, United States. pp.9, ⟨10.1117/12.2508239⟩. ⟨hal-02431075⟩

Sreyash Sarkar, Ahmed A Elsayed, E. Nefzaoui, Jérémie Drevillon, Philippe Basset, et al.. NIR and MIR Absorption of Ultra-Black Silicon(UBS) Application To High Emissivity, All-Silicon, Light Source. 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS), Jan 2019, Seoul, South Korea. ⟨hal-02182951⟩

Sreyash Sarkar, Ahmed A Elsayed, Frédéric Marty, Jérémie Drevillon, Yasser M Sabry, et al.. Effects of Doping on the Morphology and Infrared Radiative Properties of Black Silicon. 2019 25th International Workshop on Thermal Investigations of ICs and Systems (THERMINIC), Sep 2019, Lecco, Italy. pp.1-4, ⟨10.1109/THERMINIC.2019.8923602⟩. ⟨hal-02403395⟩

Hany A Ali, Michele Pirro, Patrick Poulichet, William Cesar, Frédéric Marty, et al.. Thermal aspects of a micro thermal conductivity detector for micro gas chromatography. 2019 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP), May 2019, Paris, France. pp.1-6, ⟨10.1109/DTIP.2019.8752795⟩. ⟨hal-02182952⟩

Shaun Ferdous, E. Nefzaoui, Frédéric Marty, Mazen Erfan, Bruno Mercier, et al.. Ateliers et Travaux Pratiques sur le thème des Capteurs pour l’Eau. 15ème Journée pédagogique du CNFM 2018, Nov 2018, St Malo, France. ⟨hal-02151552⟩

Shaun Ferdous, E. Nefzaoui, Hugo Regina, William Cesar, Frederic Marty, et al.. On the co-integration of a thermo-resistive flow-rate sensor in a multi-parameter sensing chip for water network monitoring . 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS 2017), Jun 2017, Kaohsiung, Taiwan. pp.1069-1072, ⟨10.1109/TRANSDUCERS.2017.7994237⟩. ⟨hal-01578963⟩

Imadeddine Azzouz, Patrick Poulichet, Michele Pirro, Wei Tan, Frédéric Marty, et al.. Evaluation of Tenax thin films as adsorbent material in a micro-preconcentrator and its operation as a valve-less multiple injection system in micro-gas chromatography. 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), Jun 2017, Kaohsiung, France. ⟨10.1109/TRANSDUCERS.2017.7994348⟩. ⟨hal-01826734⟩

Shaun Ferdous, Hugo Regina, Frédéric Marty, E. Nefzaoui, Tarik Bourouina, et al.. Design of micro-fabricated thermal flow-rate sensor for water network monitoring. 19th Symposium on Design, Test, Integration & Packaging of MEMS and MOEM (DTIP 2017), May 2017, Bordeaux, France. ⟨10.1109/DTIP.2017.7984474⟩. ⟨hal-01578598⟩

Qing Hua Song, Hong Cai, Yuan Dong Gu, Wu Wu, Wu Zhang, et al.. Tunable metamaterials for terahertz ultra-broadband absorption driven by microfluidics. 2016 IEEE 29th International Conference on Micro-Electro-Mechanical Systems (MEMS), Jan 2016, Shanghai, France. ⟨10.1109/MEMSYS.2016.7421718⟩. ⟨hal-01721166⟩

Massimo Pellegrino, William Cesar, Frédéric Marty, Martine Capo Chichi, Bérengère Lebental, et al.. Robust Multi-Parameter Sensing Probe for Water Monitoring Based on ALD-Coated Metallic Micro-patterns and Carbon Nanotube Printing. IEEE NEMS 2016 - The 11th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, Apr 2016, Matsushima Bay, Japan. 2p, ⟨10.1109/NEMS.2016.7758263⟩. ⟨hal-01395020⟩

Qinghua Song, Wu Wu, Hong Cai, Yuan Dong Gu, Pin Chieh Wu, et al.. A Tunable Metamaterial for Wide-Angle and Broadband Absorption through Meta-Water-Capsule Coatings. CLEO: QELS_Fundamental Science, 2016, San Jose, France. ⟨10.1364/CLEO_QELS.2016.FF2D.8⟩. ⟨hal-01721174⟩

Q. Song, W. Zhu, W. Zhang, P. Wu, Z. Shen, et al.. Tunable metamaterial lens array via metadroplets. 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Jan 2015, Estoril, France. ⟨10.1109/MEMSYS.2015.7051120⟩. ⟨hal-01721139⟩

Patricia Yang Liu, Lip Ket Chin, Wee Ser, Teck Choon Ayi, Eric Peng Huat Yap, et al.. Optofluidic Detection for Virus Infection Monitoring using Effective Refractive Index. CLEO: Applications and Technology, 2015, San Jose, France. ⟨10.1364/CLEO_AT.2015.JW2A.89⟩. ⟨hal-01721142⟩

W. Zhu, H. Song, L. Yan, W. Zhang, P. Wu, et al.. Tunable flat lens based on microfluidic reconfigurable metasurface. TRANSDUCERS 2015 - 2015 18th International Solid-State Sensors, Actuators and Microsystems Conference, Jun 2015, Anchorage, France. ⟨10.1109/TRANSDUCERS.2015.7181344⟩. ⟨hal-01721164⟩

Qinghua Song, Pin Chieh Wu, Weimiing Zhu, Wu Zhang, Zhongxiang Shen, et al.. Transition from Plasmon Coupling to Plasmon-Microcavity Hybridization. CLEO: Science and Innovations, 2015, San Jose, France. ⟨10.1364/CLEO_SI.2015.STu4H.7⟩. ⟨hal-01721140⟩

Francesco Cottone, Philippe Basset, Frédéric Marty, Dimitri Galayko, Luca Gammaitoni, et al.. Electrostatic generator with free micro-ball and elastic stoppers for low-frequency vibration harvesting. Micro Electro Mechanical Systems (MEMS), 2014 IEEE 27th International Conference on, Jan 2014, San Francisco, CA, United States. ⟨10.1109/MEMSYS.2014.6765657⟩. ⟨hal-01522178⟩

Bérengère Lebental, François Derkx, Frédéric Bourquin, Tarik Bourouina, Bruno Mercier, et al.. The Sense-City equipment project: 9M¤ for prototyping and validation of nanosensors for sustainable cities. Nanotech, Jun 2014, France. 2 p. ⟨hal-00991338⟩

Raphaël Guillemet, Philippe Basset, Dimitri Galayko, Francesco Cottone, Frédéric Marty, et al.. Wideband MEMS electrostatic vibration energy harvesters based on gap-closing interdigited combs with a trapezoidal cross section. Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on, Jan 2013, Taipei, Taiwan. ⟨10.1109/MEMSYS.2013.6474368⟩. ⟨hal-01522189⟩

Francesco Cottone, Philippe Basset, Raphaël Guillemet, Dimitri Galayko, Frédéric Marty, et al.. Bistable multiple-mass elecrostatic generator for low-frequency vibration energy harvesting. Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on, Jan 2013, taipei, Taiwan. ⟨10.1109/MEMSYS.2013.6474379⟩. ⟨hal-01522190⟩

Bérengère Lebental, Dan Angelescu, Tarik Bourouina, Frédéric Bourquin, Costel-Sorin Cojocaru, et al.. The Sense-City equipment project : insight into the prototyping and validation of environmental micro-and nanosensors for a sustainable urbanization. European Geosciences Union General Assembly, Apr 2013, Austria. ⟨hal-00854208⟩

Francesco Cottone, Philippe Basset, Raphaël Guillemet, Dimitri Galayko, Frédéric Marty, et al.. Non-linear MEMS electrostatic kinetic energy harvester with a tunable multistable potential for stochastic vibrations . Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on, Jun 2013, barcelona, Spain. ⟨10.1109/Transducers.2013.6627024⟩. ⟨hal-01522182⟩

François Derkx, Bérengère Lebental, Tarik Bourouina, Frédéric Bourquin, Costel-Sorin Cojocaru, et al.. The Sense-City project. XVIIIth Symposium on Vibrations, Shocks and Noise, Jul 2012, France. 9p. ⟨hal-00860842⟩

Raphaël Guillemet, Philippe Basset, Dimitri Galayko, Tarik Bourouina. Combined optimization of electrical and mechanical parameters of in-plane and out-of-plane gap-closing electrostatic Vibration Energy Harvesters (VEHs). EUROSENSORS European Conference on sensors, actuators and microsystems, Sep 2010, Linz, Austria. pp.1172-1175, ⟨10.1016/j.proeng.2010.09.320⟩. ⟨hal-01289308⟩

Raphaël Guillemet, Philippe Basset, Dimitri Galayko, Tarik Bourouina. Combined optimization of electrical and mechanical parameters of an out-of-plane gap-closing electrostatic Vibration Energy Harvester (VEH). Symposium on Design Test Integration and Packaging of MEMS/MOEMS (DTIP), May 2010, Sevilla, Spain. pp.73-78. ⟨hal-01290703⟩

Ayyaz Mahmood Paracha, Philippe Basset, Dimitri Galayko, Frédéric Marty, Tarik Bourouina. A bidirectional vibration powered electric energy generator based on electrostatic transduction using In-Plane Overlap Plate (IPOP) mechanism. Design, Test, Integration & Packaging of MEMS/MOEMS, 2009. MEMS/MOEMS '09. Symposium on, Apr 2009, Rome, Italy. ⟨hal-01522200⟩

Ayyaz Mahmood Paracha, Philippe Basset, Dimitri Galayko, Andrii Dudka, Frédéric Marty, et al.. MEMS DC/DC converter for 1D and 2D vibration-to-electricity power conversion. Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International, Jun 2009, Denver, CO, United States. ⟨10.1109/SENSOR.2009.5285649⟩. ⟨hal-01522198⟩

Ayyaz Mahmood Paracha, Philippe Basset, Dimitri Galayko, Frédéric Marty, Andrii Dudka, et al.. Characterization of a DC/DC converter using an in-plane bulk-silicon capacitive transducer for vibration-to-electricity power conversion. PowerMEMS Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, Nov 2008, Sendai, Japan. pp.297-300. ⟨hal-01299222⟩

Patrick Sangouard, Gaelle Bazin Lissorgues, Tarik Bourouina. A Novel Piezoelectric Microtransformer for Autonmous Sensors Applications. DTIP 2008, Apr 2008, Nice, France. pp.42-45. ⟨hal-00277675⟩

Alain Phommahaxay, Gaelle Bazin Lissorgues, Lionel Rousseau, Tarik Bourouina, Pierre Nicole. Towards a frequency-selective microwave power limiter for defense and aerospace applications. 2007 European Microwave Conference, Oct 2007, Munich, Germany. pp.1614-1617, ⟨10.1109/EUMC.2007.4405519⟩. ⟨hal-02435412⟩

Alain Phommahaxay, Gaelle Bazin Lissorgues, Lionel Rousseau, Vincent Perrais, Tarik Bourouina, et al.. Via-Free Interconnection in Quasi-Hermetic Wafer-Level Packaging for RF-MEMS Applications and 3D Integration. Transducers 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference, Jun 2007, Lyon, France. pp.2063-2066, ⟨10.1109/SENSOR.2007.4300570⟩. ⟨hal-02440162⟩

Alain Phommahaxay, Gaelle Bazin Lissorgues, Lionel Rousseau, Vincent Perrais, Olivier Français, et al.. A Simple Optical Gas Sensor Based on Micromachined Silicon Plasma Igniters and Image Processing. TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference, Jun 2007, Lyon, France. pp.995-998, ⟨10.1109/SENSOR.2007.4300300⟩. ⟨hal-02437456⟩

A.M. Paracha, Ph. Basset, F. Marty, A. Vaisman Chasin, P. Poulichet, et al.. A High Power Density Electrostatic Vibration-to-Electric Energy Converter Based On An In-Plane Overlap Plate (IPOP) Mechanism. DTIP 2007, Apr 2007, Stresa, lago Maggiore, Italy. pp.290-296. ⟨hal-00257704⟩

Alain Phommahaxay, Gaelle Bazin Lissorgues, Claudine Vasseure, Lionel Rousseau, Tarik Bourouina, et al.. Towards a Fully Passive Ku-Band Power Limiter using RF-MEMS Technologies and Vacuum Microelectronics. 2006 European Microwave Conference, Sep 2006, Manchester, United Kingdom. pp.1288-1291, ⟨10.1109/EUMC.2006.281232⟩. ⟨hal-02435451⟩

Vincent Georgel, Fabrice Verjus, Eric van Grunsven, Patrick Poulichet, Gaelle Bazin Lissorgues, et al.. Integrated saw filter into a silicon passive integration connecting substrate. 20th Eurosensor conference, Sep 2006, Göteborg, Sweden. pp.37. ⟨hal-00165716⟩

A. Phommahaxay, Gaelle Bazin Lissorgues, L. Rousseau, Tarik Bourouina, P. Nicole. SURFACE CONDITIONING EFFECT ON VACUUM MICROELECTRONICS COMPONENTS FABRICATED BY DEEP REACTIVE ION ETCHING. DTIP 2006, Apr 2006, Stresa, Lago Maggiore, Italy. 5 p. ⟨hal-00189257⟩

A. Giridhar, F. Verjus, F. Marty, A. Bosseboeuf, Tarik Bourouina. ELECTROSTATICALLY-DRIVEN RESONATOR ON SOI WITH IMPROVED TEMPERATURE STABILITY. DTIP 2006, Apr 2006, Stresa, Lago Maggiore, Italy. 5 p. ⟨hal-00189322⟩

A. Phommahaxay, Gaelle Bazin Lissorgues, Tarik Bourouina, P. Nicole. Single mask fabrication process of vacuum microelectronics components and preliminary characterization results. Technical Digest of the 18th International Vacuum Nanoelectronics Conference, 2005, Oxford, United Kingdom. pp.368-369, ⟨10.1109/IVNC.2005.1619639⟩. ⟨hal-02440267⟩

Lan Gao, Martine Gnambodoe-Capochichi, E. Nefzaoui, Frederic Marty, Tarik Bourouina, et al.. ZnO nanowires-on-quartz for efficient water purification: The issue of Volatile organic compounds (VOCs) degradation using solar energy. The 9th International Multidisciplinary Conference on Optofluidics (IMCO2019), Jun 2019, Hong Kong, China. ⟨hal-02183395⟩

Lan Gao, E. Nefzaoui, Martine Gnambodoe-Capochichi, Yamin Leprince-Wang, Tarik Bourouina. Enhanced steam generation based on a bilayer water and light absorber: Modelling and optimization of capillary imbibition and water evaporation. 9th International Multidisciplinary Conference on Optofluidics (IMCO2019), Jun 2019, Hong Kong, China. ⟨hal-02183388⟩

Tarik Bourouina, B. Courtois, R. Ghodssi, J.M. Karam, A. Soma, et al.. Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP 2009). EDA Publishing Association. EDA Publishing Association, pp.429, 2009, Proceedings. ⟨hal-00395521⟩

V. Bright, Tarik Bourouina, B. Courtois, M. Desmulliez, J.M. Karam, et al.. Proceedings of Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP 2008), Cannes, France, April 9-11. EDA Publishing Association - CMP, Grenoble, France, 2008. ⟨hal-00354566⟩

Tarik Bourouina, H. Fujita, Gilbert Reyne, E. Motamedi. chapter 7: Optical Scanners. MOEMS, Micro-Opto-Electro-Mechanical Systems, Spie Press, pp.323 à 367, 2005. ⟨hal-00181068⟩