Sylvie Schamm-Chardon

103

Documents

Affiliations actuelles

519179

Identifiants chercheurs

sylvie-schamm-chardon
ResearcherId : A-2307-2015
0000-0001-5534-8475
IdRef : 143045121
ResearcherId : http://www.researcherid.com/rid/A-2307-2015

Présentation

Publications

	Reconstruction of depth resolved strain tensor in off-axis single crystals: Application to H + ions implanted LiTaO 3 Antonin Louiset , Sylvie Schamm-Chardon , Oleg Kononchuk , Nikolay Cherkashin Applied Physics Letters, 2021, 118 (8), pp.082903. ⟨10.1063/5.0040729⟩ Article dans une revue hal-03154232v1
	Nano-analytical investigation of the forming process in an HfO2-based resistive switching memory Gauthier Lefevre , Tristan Dewolf , Nicolas Guillaume , Serge Blonkowski , Christelle Charpin-Nicolle Journal of Applied Physics, 2021, 130 (24), pp.244501. ⟨10.1063/5.0072343⟩ Article dans une revue hal-03720298v1
	Structural and chemical investigation of interface related magnetoelectric effect in Ni/BiFe0.95Mn0.05O3 heterostructures B. Negulescu , J. Wolfman , Christophe Daumont , Nazir Jaber , Pascal Andreazza Applied Surface Science, 2019, 481, pp.234-240. ⟨10.1016/j.apsusc.2019.02.232⟩ Article dans une revue hal-02070799v1
	Detailed characterisation of focused ion beam induced lateral damage on silicon carbide samples by electrical scanning probe microscopy and transmission electron microscopy F. Stumpf , A. A. Abu Quba , P. Singer , M. Rumler , Nikolay Cherkashin Journal of Applied Physics, 2018, 123 (12), pp.125104. ⟨10.1063/1.5022558⟩ Article dans une revue hal-01745004v1
	Nanoscale control of Si nanoparticles within a 2D hexagonal array embedded in SiO2 thin films Celia Castro , Gérard Benassayag , Béatrice Pécassou , Andrea Andreozzi , Gabriele Seguini Nanotechnology, 2017, 28 (1), ⟨10.1088/0957-4484/28/1/014001⟩ Article dans une revue hal-01745005v1
	Evolution of shape, size, and areal density of a single plane of Si nanocrystals embedded in SiO2 matrix studied by atom probe tomography Bin Han , Yasuo Shimizu , Gabriele Seguini , Elisa Arduca , Celia Castro RSC Advances, 2016, 6 (5), pp.3617-3622. ⟨10.1039/c5ra26710b⟩ Article dans une revue hal-01720446v1
	Decoupling indirect topographic cross-talk in band excitation piezoresponse force microscopy imaging and spectroscopy Sang Mo Yang , Lucie Mazet , M. Baris Okatan , Stephen Jesse , Gang Niu Applied Physics Letters, 2016, 108 (25), pp.252902 - 252902. ⟨10.1063/1.4954276⟩ Article dans une revue hal-01720447v1
	Studying Thin Ge films and Ge/GeO2 interfaces by means of raman–brillouin scattering Lama Yaacoub , Sylvie Schamm-Chardon , N.N. Ovsyuk , Antoine Zwick , Jesse Groenen Bulletin of the Russian Academy of Sciences - Physics, 2015, 79 (11), pp.1397-1401. ⟨10.3103/S1062873815110246⟩ Article dans une revue hal-01720450v1
	Backside versus frontside advanced chemical analysis of high-k/metal gate stacks E. Martinez , B. Saidi , M. Veillerot , P. Caubet , J.-M. Fabbri Journal of Electron Spectroscopy and Related Phenomena, 2015, 203, pp.1-7. ⟨10.1016/j.elspec.2015.04.022⟩ Article dans une revue hal-01720448v1
	A review of molecular beam epitaxy of ferroelectric BaTiO3 films on Si, Ge and GaAs substrates and their applications Lucie Mazet , Sang Mo Yang , Sergei Kalinin , Sylvie Schamm-Chardon , Catherine Dubourdieu Science and Technology of Advanced Materials, 2015, 16 (3), pp.036005. ⟨10.1088/1468-6996/16/3/036005⟩ Article dans une revue hal-01489400v1
	Atomic scale characterization of SiO2/4H-SiC interfaces in MOSFETs devices Anna Maria Beltrán , Sébastien Duguay , Christian Strenger , Anton J Bauer , Fuccio Cristiano Solid State Communications, 2015, 221, pp.28-32. ⟨10.1016/j.ssc.2015.08.017⟩ Article dans une revue hal-01720451v1
	Atomic-layer deposited thulium oxide as a passivation layer on germanium I.Z. Mitrovic , S. Hall , M. Althobaiti , D. Hesp , V.R. Dhanak Journal of Applied Physics, 2015, 117 (21), pp.214104. ⟨10.1063/1.4922121⟩ Article dans une revue hal-01720449v1
	Structural study and ferroelectricity of epitaxial BaTiO3 films on silicon grown by molecular beam epitaxy Lucie Mazet , Romain Bachelet , Lamis Louahadj , David Albertini , Brice Gautier Journal of Applied Physics, 2014, 116 (21), pp.214102. ⟨10.1063/1.4902165⟩ Article dans une revue hal-01489886v1
	Silicon crystallization in nanodot arrays organized by block copolymer lithography Michele Perego , Andrea Andreozzi , Gabriele Seguini , Sylvie Schamm-Chardon , Celia Castro Journal of Nanoparticle Research, 2014, 16 (12), ⟨10.1007/s11051-014-2775-6⟩ Article dans une revue hal-01718638v1
	Raman-Brillouin scattering from a thin Ge layer: Acoustic phonons for probing Ge/GeO2 interfaces Lama Yaacoub , Sylvie Schamm-Chardon , N.N. Ovsyuk , Antoine Zwick , Jesse Groenen Applied Physics Letters, 2014, 104 (6), pp.061601. ⟨10.1063/1.4864790⟩ Article dans une revue hal-01720453v1
	Influence of La on the electrical properties of HfSiON: From diffusion to Vth shifts M. Hackenberg , P. Pichler , S. Baudot , Z. Essa , M. Gro-Jean Microelectronic Engineering, 2013, 109, pp.200-203. ⟨10.1016/j.mee.2013.03.071⟩ Article dans une revue hal-01745012v1
	Fabrication of well-ordered arrays of silicon nanocrystals using a block copolymer mask Paolo Pellegrino , Michele Perego , Sylvie Schamm-Chardon , Gabriele Seguini , Andrea Andreozzi physica status solidi (a), 2013, 210 (8), pp.1477-1484. ⟨10.1002/pssa.201300030⟩ Article dans une revue hal-01745010v1
	Scaling size of the interplay between quantum confinement and surface related effects in nanostructured silicon G. Seguini , Celia Castro , Sylvie Schamm-Chardon , Gérard Benassayag , P. Pellegrino Applied Physics Letters, 2013, 103 (2), pp.023103. ⟨10.1063/1.4813743⟩ Article dans une revue hal-01745007v1
	Quantumdots for memory applications P. Dimitrakis , P. Normand , V. Ioannou-Sougleridis , Caroline Bonafos , Sylvie Schamm-Chardon physica status solidi (a), 2013, 210 (8), pp.1490-1504. ⟨10.1002/pssa.201300029⟩ Article dans une revue hal-01745006v1
	In-plane organization of silicon nanocrystals embedded in SiO2 thin films Celia Castro , Sylvie Schamm-Chardon , Béatrice Pécassou , A. Andreozzi , G. Seguini Nanotechnology, 2013, 24 (7), ⟨10.1088/0957-4484/24/7/075302⟩ Article dans une revue hal-01745011v1
	Extraction of the characteristics of Si nanocrystals by the charge pumping technique Régis Diaz , Jérémie Grisolia , Gérard Benassayag , Sylvie Schamm-Chardon , Celia Castro Nanotechnology, 2012, 23 (8), ⟨10.1088/0957-4484/23/8/085206⟩ Article dans une revue hal-01745017v1
	Si and Ge nanocrystals for future memory devices Caroline Bonafos , Marzia Carrada , Gérard Benassayag , Sylvie Schamm-Chardon , Jesse Groenen Materials Science in Semiconductor Processing, 2012, 15 (6), pp.615-626. ⟨10.1016/j.mssp.2012.09.004⟩ Article dans une revue hal-01745013v1
	Implantation energy effect on photoluminescence spectroscopy of Si nanocrystals locally fabricated by stencil-masked ultra-low-energy ion-beam-synthesis in silica Régis Diaz , C. Suarez , Arnaud Arbouet , Renaud Marty , Vincent Paillard Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 2012, 272, pp.53-56. ⟨10.1016/j.nimb.2011.01.031⟩ Article dans une revue hal-01745016v1
	Comparative Study of Electrical and Microstructural Properties of 4H-SiC MOSFETs C. Strenger , V. Haeublein , T. Enbacher , A. J. Bauer , H. Ryssel Materials Science Forum, 2012, 717-720, pp.437-440. ⟨10.4028/www.scientific.net/MSF.717-720.437⟩ Article dans une revue hal-01745018v1
	Nano-Analytical and Electrical Characterization of 4H-SiC MOSFETs Anna Maria Beltrán , Sylvie Schamm-Chardon , Vincent Mortet , Matthieu Lefebvre , Eléna Bedel-Pereira Materials Science Forum, 2012, 711, pp.134-138. ⟨10.4028/www.scientific.net/MSF.711.134⟩ Article dans une revue hal-01745014v1
	The fabrication of tunable nanoporous oxide surfaces by block copolymer lithography and atomic layer deposition A. Andreozzi , L. Lamagna , G. Seguini , M. Fanciulli , Sylvie Schamm-Chardon Nanotechnology, 2011, 22 (33), ⟨10.1088/0957-4484/22/33/335303⟩ Article dans une revue hal-01745020v1
	Combining HRTEM-EELS nano-analysis with capacitance-voltage measurements to evaluate high-kappa thin films deposited on Si and Ge as candidate for future gate dielectrics Sylvie Schamm-Chardon , Pierre-Eugène Coulon , L. Lamagna , C. Wiemer , S. Baldovino Microelectronic Engineering, 2011, 88 (4), pp.419-422. ⟨10.1016/j.mee.2010.10.012⟩ Article dans une revue hal-01745022v1
	Calculated and experimental electron energy-loss spectra of La2O3, La(OH)(3), and LaOF nanophases in high permittivity lanthanum-based oxide layers Lionel Calmels , Pierre-Eugène Coulon , Sylvie Schamm-Chardon Applied Physics Letters, 2011, 98 (24), pp.243116. ⟨10.1063/1.3600783⟩ Article dans une revue hal-01745023v1
	Nanocrystallized tetragonal metastable ZrO2 thin films deposited by metal-organic chemical vapor deposition for 3D capacitors Magali Brunet , Hicham Mafhoz Kotb , Laurent Bouscayrol , Emmanuel Scheid , Michel Andrieux Thin Solid Films, 2011, 519 (16), pp.5638-5644. ⟨10.1016/j.tsf.2011.03.006⟩ Article dans une revue hal-01443083v1
	Structural and electrical properties of Er-doped HfO2 and of its interface with Ge (001) C. Wiemer , S. Baldovino , L. Lamagna , M. Perego , Sylvie Schamm-Chardon Microelectronic Engineering, 2011, 88 (4), pp.415-418. ⟨10.1016/j.mee.2010.10.032⟩ Article dans une revue hal-01745019v1
	The energy band alignment of Si nanocrystals in SiO2 G. Seguini , Sylvie Schamm-Chardon , P. Pellegrino , M. Perego Applied Physics Letters, 2011, 99 (8), pp.082107. ⟨10.1063/1.3629813⟩ Article dans une revue hal-01745021v1
	Silicon nanoclusters embedded into oxide host for non-volatile memory applications L. Khomenkova , X. Portier , B. Sahu , A. Slaoui , Caroline Bonafos ECS Transactions, 2011, 35, pp. 37-45 Article dans une revue hal-00647540v1
	Dielectric properties of Er-doped HfO2 (Er ~ 15%) grown by atomic layer deposition for high-kappa gate stacks C. Wiemer , L. Lamagna , S. Baldovino , M. Perego , Sylvie Schamm-Chardon Applied Physics Letters, 2010, 96 (18), pp.182901. ⟨10.1063/1.3400213⟩ Article dans une revue hal-01745025v1
	Ultra-low energy ion implantation of Si into HfO2 and HfSiO-based structures for non volatile memory applications Caroline Bonafos , F. Gloux , Pierre-Eugène Coulon , Jesse Groenen , Sylvie Schamm-Chardon Materials Research Society Symposia Proceedings, 2010, 1250, p. G01-07 Article dans une revue hal-00562346v1
	O-3-based atomic layer deposition of hexagonal La2O3 films on Si(100) and Ge(100) substrates L. Lamagna , C. Wiemer , M. Perego , S. N. Volkos , S. Baldovino Journal of Applied Physics, 2010, 108 (8), pp.084108. ⟨10.1063/1.3499258⟩ Article dans une revue hal-01745024v1
	Temperature-dependent low electric field charging of Si nanocrystals embedded within oxide-nitride-oxide dielectric stacks N. Nikolaou , P. Dimitrakis , P. Normand , Sylvie Schamm-Chardon , Caroline Bonafos Nanotechnology, 2009, 20 (30), ⟨10.1088/0957-4484/20/30/305704⟩ Article dans une revue hal-01745029v1
	Characterization of ZrO2 thin films deposited by MOCVD for high-density 3D capacitors. Broad experience on MOCVD techniques and high-k materials Magali Brunet , Emmanuel Scheid , Karolina Galicka-Fau , Michel Andrieux , Corinne Legros Microelectronic Engineering, 2009, 86 (10), pp.2034-2037. ⟨10.1016/j.mee.2009.01.034⟩ Article dans une revue hal-01443057v1
	Chemical/Structural Nanocharacterization and Electrical Properties of ALD-Grown La2O3/Si Interfaces for Advanced Gate Stacks Sylvie Schamm-Chardon , Pierre-Eugène Coulon , S. Miao , S. N. Volkos , L. H. Lu Journal of The Electrochemical Society, 2009, 156 (1), pp.H1-H6. ⟨10.1149/1.3000594⟩ Article dans une revue hal-01745032v1
	Thermally induced permittivity enhancement in La-doped ZrO2 grown by atomic layer deposition on Ge(100) L. Lamagna , C. Wiemer , S. Baldovino , A. Molle , M. Perego Applied Physics Letters, 2009, 95 (12), pp.122902. ⟨10.1063/1.3227669⟩ Article dans une revue hal-01745026v1
	Atomic layer deposition of LaxZr1-xO2-delta (x=0.25) high-k dielectrics for advanced gate stacks D. Tsoutsou , L. Lamagna , S. N. Volkos , A. Molle , S. Baldovino Applied Physics Letters, 2009, 94 (5), pp.53504 - 53504. ⟨10.1063/1.3075609⟩ Article dans une revue hal-01745031v1
	Ultra-low-energy ion-beam-synthesis of Ge nanocrystals in thin ALD Al2O3 layers for memory applications P. Dimitrakis , A. Mouti , Caroline Bonafos , Sylvie Schamm-Chardon , Gérard Benassayag Microelectronic Engineering, 2009, 86 (7-9), pp.1838-1841. ⟨10.1016/j.mee.2009.03.074⟩ Article dans une revue hal-01745030v1
	Structural and optical properties of Si nanocrystals embedded in SiO2/SiNx multilayers F. Delachat , Marzia Carrada , G. Ferblantier , A. Slaoui , Caroline Bonafos Physica E: Low-dimensional Systems and Nanostructures, 2009, 41, pp. 994-997 Article dans une revue hal-00408918v1
	Ultra-low energy ion implantation of Si into HfO₂-based structures for non volatile memory applications Pierre-Eugène Coulon , K. Chan Shin Yu , Sylvie Schamm-Chardon , Gérard Benassayag , Béatrice Pécassou Materials Research Society Symposia Proceedings, 2009, 1160, pp.H01-03 Article dans une revue hal-00697605v1
	ZrO2 Thin Films Grown On 2D and 3D Silicon Surfaces By DLI-MOCVD For Electronic Devices Karolina Galicka-Fau , Michel Andrieux , Corinne Legros , Michaële Herbst-Ghysel , Isabelle Gallet ECS Transactions, 2009, 25 (8), pp.1121-1128. ⟨10.1149/1.3207715⟩ Article dans une revue hal-01745028v1
	Structural and optical properties of high density Si-ncs synthesized in SiNx : H by remote PECVD and annealing Marzia Carrada , A. Zerga , A. Amann , J. J. Grob , J. P. Stoquert Materials Science and Engineering: B, 2008, 147 (2-3), pp.218-221. ⟨10.1016/j.mseb.2007.09.042⟩ Article dans une revue hal-01745037v1
	KFM detection of charges injected by AFM into a thin SiO2 layer containing Si nanocrystals C. Dumas , Laurence Ressier , Jérémie Grisolia , Arnaud Arbouet , Vincent Paillard Microelectronic Engineering, 2008, 85 (12), pp.2358-2361. ⟨10.1016/j.mee.2008.09.027⟩ Article dans une revue hal-01745038v1
	Imaging Si nanoparticles embedded in SiO2 layers by (S)TEM-EELS Sylvie Schamm-Chardon , Caroline Bonafos , H. Coffin , Nikolay Cherkashin , Marzia Carrada Ultramicroscopy, 2008, 108 (4), pp.346--357. ⟨10.1016/j.ultramic.2007.05.008⟩ Article dans une revue hal-01736064v1
	Structural and optical properties of high density Si-ncs synthezised in SiNx:H by remote PECVD and annealing Marzia Carrada , A. Zerga , A. Amann , J.J. Grob , J.P. Stoquert Mater. Sci. Eng. B, 2008, 147, pp.218-221 Article dans une revue hal-00250450v1
	Silicon nanoparticles synthesized in SiO2 pockets by stencil-masked low energy ion implantation and thermal annealing Jérémie Grisolia , C. Dumas , Gérard Benassayag , Caroline Bonafos , Sylvie Schamm-Chardon Superlattices and Microstructures, 2008, 44 (4-5), pp.395-401. ⟨10.1016/j.spmi.2007.12.013⟩ Article dans une revue hal-01745035v1
	Infrared spectroscopy and X-ray diffraction studies on the crystallographic evolution of La2O3 films upon annealing D. Tsoutsou , G. Scarel , A. Debernardi , S. C. Capelli , S. N. Volkos Microelectronic Engineering, 2008, 85 (12), pp.2411-2413. ⟨10.1016/j.mee.2008.09.033⟩ Article dans une revue hal-01745039v1
	Photoluminescence spectroscopy and transport electrical measurements reveal the quantized features of Si nanocrystals embedded in an ultra thin SiO2 layer C. Dumas , Jérémie Grisolia , Marzia Carrada , Arnaud Arbouet , Vincent Paillard physica status solidi (c), 2007, 4, pp.311-315. ⟨10.1002/pssc.200673272⟩ Article dans une revue hal-01745040v1
	Preparation and microstructures of BaTi1-xZrxO3 hetero-epitaxial thin films on SrTiO3 substrates D. Wu , Philippe Sciau , Sylvie Schamm-Chardon , F. Gloux , M. Varela Fernandez Journal of Physics D: Applied Physics, 2007, 40 (15), pp.4701-4706. ⟨10.1088/0022-3727/40/15/052⟩ Article dans une revue hal-01745042v1
	Wet oxidation of nitride layer implanted with low-energy Si ions for improved oxide-nitride-oxide memory stacks V. Ioannou-Sougleridis , P. Dimitrakis , V.Em. Vamvakas , P. Normand , Caroline Bonafos Applied Physics Letters, 2007, 90 (26), pp.263513. ⟨10.1063/1.2752769⟩ Article dans une revue hal-01736066v1
	Oxide-nitride-oxide dielectric stacks with Si nanoparticles obtained by low-energy ion beam synthesis V. Ioannou-Sougleridis , P. Dimitrakis , V. Em Vamvakas , P. Normand , Caroline Bonafos Nanotechnology, 2007, 18 (21), ⟨10.1088/0957-4484/18/21/215204⟩ Article dans une revue hal-01745043v1
	Oxide-nitride-oxide memory stacks formed by low-energy Si ion implantation into nitride and wet oxidation V. Ioannou-Sougleridis , P. Dimitrakis , V.Em. Vamvakas , P. Normand , Caroline Bonafos Microelectronic Engineering, 2007, 84 (9-10), pp.1986--1989. ⟨10.1016/j.mee.2007.04.068⟩ Article dans une revue hal-01736069v1
	Influence of the thickness of the tunnel layer on the charging characteristics of Si nanocrystals embedded in an ultra-thin SiO2 layer C. Dumas , Jérémie Grisolia , Gérard Benassayag , Caroline Bonafos , Sylvie Schamm-Chardon Physica E: Low-dimensional Systems and Nanostructures, 2007, 38 (1-2), pp.80-84. ⟨10.1016/j.physe.2006.12.026⟩ Article dans une revue hal-01745045v1
	Field effect white and tunable electroluminescence from ion beam synthesized Si- and C-rich SiO2 layers O. Jambois , Josep Carreras , A. Perez-Rodriguez , B. Garrido , Caroline Bonafos Applied Physics Letters, 2007, 91 (21), pp.211105 - 253124. ⟨10.1063/1.2807281⟩ Article dans une revue hal-01745044v1
	Oxidation of Si nanocrystals fabricated by ultralow-energy ion implantation in thin SiO2 layers H. Coffin , Caroline Bonafos , Sylvie Schamm-Chardon , Nikolay Cherkashin , Gérard Benassayag Journal of Applied Physics, 2006, 99 (4), pp.044302. ⟨10.1063/1.2171785⟩ Article dans une revue hal-01736074v1
	Photoluminescence characterization of few-nanocrystals electronic devices Arnaud Arbouet , Marzia Carrada , François Demangeot , Vincent Paillard , Gérard Benassayag Journal of Luminescence, 2006, 121 (2), pp.340-343. ⟨10.1016/j.jlumin.2006.08.070⟩ Article dans une revue hal-01745048v1
	White electroluminescence from C- and Si-rich thin silicon oxides O. Jambois , B. Garrido , P. Pellegrino , Josep Carreras , A. Perez-Rodriguez Applied Physics Letters, 2006, 89 (25), pp.253124 - 253124. ⟨10.1063/1.2423244⟩ Article dans une revue hal-01745047v1
	Materials science issues for the fabrication of nanocrystal memory devices by ultra low energy ion implantation Alain Claverie , Caroline Bonafos , Gérard Benassayag , Sylvie Schamm-Chardon , Nikolay Cherkashin Defect Diffus. Forum, 2006, 258-260, pp.531-541 Article dans une revue hal-00204809v1
	Si nanocrystals by ultra-low energy ion implantation for non-volatile memory applications H. Coffin , Caroline Bonafos , Sylvie Schamm-Chardon , Marzia Carrada , Nikolay Cherkashin Materials Science and Engineering: B, 2005, 124-125, pp.499--503. ⟨10.1016/j.mseb.2005.08.129⟩ Article dans une revue hal-01736081v1
	The effects of oxidation conditions on structural and electrical properties of silicon nanoparticles obtained by ultra-low-energy ion implantation J Grisolia , M Shalchian , Gérard Benassayag , H. Coffin , Caroline Bonafos Nanotechnology, 2005, 16 (12), pp.2987-2992. ⟨10.1088/0957-4484/16/12/043⟩ Article dans une revue hal-01745049v1
	Elaboration by spray pyrolysis and characterization in the VUV range of phosphor particles with spherical shape and micronic size Nicolas Joffin , Bruno Caillier , Jeannette Dexpert-Ghys , Marc Verelst , Guy Baret Journal of Physics D: Applied Physics, 2005, 38 (17), pp.3261-3268. ⟨10.1088/0022-3727/38/17/S30⟩ Article dans une revue hal-00359209v1
	Fabrication of nanocrystal memories by ultra low energy ion implantation Nikolay Cherkashin , Caroline Bonafos , H. Coffin , Marzia Carrada , Sylvie Schamm-Chardon physica status solidi (c), 2005, 2 (6), pp.1907--1911. ⟨10.1002/pssc.200460523⟩ Article dans une revue hal-01736090v1
	Oxidation effects on transport characteristics of nanoscale MOS capacitors with an embedded layer of silicon nanocrystals obtained by low energy ion implantation J Grisolia , M Shalchian , Gérard Benassayag , H. Coffin , Caroline Bonafos Materials Science and Engineering: B, 2005, 124, pp.494-498. ⟨10.1016/j.mseb.2005.08.082⟩ Article dans une revue hal-01745050v1
	Si nanocrystals by ultra-low-energy ion beam-synthesis for non-volatile memory applications Caroline Bonafos , H. Coffin , Sylvie Schamm-Chardon , Nikolay Cherkashin , Gérard Benassayag Solid-State Electronics, 2005, 49 (11), pp.1734--1744. ⟨10.1016/j.sse.2005.10.001⟩ Article dans une revue hal-01736088v1
	Study of the chemical and structural organization of SIPOS films at the nanometer scale by TEM-EELS and XPS Sylvie Schamm-Chardon , R Berjoan , P Barathieu Materials Science and Engineering: B, 2004, 107 (1), pp.58-65. ⟨10.1016/j.mseb.2003.10.010⟩ Article dans une revue hal-01745051v1
	Multi-dot floating-gates for nonvolatile semiconductor memories: Their ion beam synthesis and morphology T. Müller , K.-H. Heinig , W. Möller , Caroline Bonafos , H. Coffin Applied Physics Letters, 2004, 85 (12), pp.2373-2375 Article dans une revue hal-01736097v1
	Multi-scale analysis of the dielectric properties and structure of resin/carbon-black nanocomposites S. Paciornik , O. da Fonseca Martins Gomes , Arnaud Delarue , Sylvie Schamm-Chardon , Dominique Jeulin European Physical Journal: Applied Physics, 2003, 21 (1), pp.17-26. ⟨10.1051/epjap:2002107⟩ Article dans une revue hal-00166093v1
	Study of the dielectric properties near the band gap by VEELS: gap measurement in bulk materials Sylvie Schamm-Chardon , G. Zanchi Ultramicroscopy, 2003, 96 (3-4), pp.559-564. ⟨10.1016/S0304-3991(03)00116-5⟩ Article dans une revue hal-01745053v1
	Thermodynamic study and characterization of low pressure chemically vapor deposited silicon oxynitride films from tetraethylorthosilicate, dichlorosilane and ammonia gas mixtures V Vamvakas , D Davazoglou , R Berjoan , Sylvie Schamm-Chardon , Constantin Vahlas Thin Solid Films, 2003, 429 (1-2), pp.77-83. ⟨10.1016/S0040-6090(03)00061-0⟩ Article dans une revue hal-01745054v1
	Multi-Dot Floating-Gates in MOSFETs for nonvolatile memories - Their ion beam synthesis and morphology T. Müller , K.-H. Heinig , Caroline Bonafos , H. Coffin , Nikolay Cherkashin Materials Research Society Symposium - Proceedings, 2003, 792, pp.333-338. ⟨10.1557/PROC-792-R8.7⟩ Article dans une revue hal-01736111v1
	VUV absorption coefficient measurements of borate matrices B Moine , J Mugnier , D Boyer , R Mahiou , Sylvie Schamm-Chardon Journal of Alloys and Compounds, 2001, 323, pp.816-819. ⟨10.1016/S0925-8388(01)01151-3⟩ Article dans une revue hal-01745055v1
	Contamination and the quantitative exploitation of EELS low-loss experiments Sylvie Schamm-Chardon , G. Zanchi Ultramicroscopy, 2001, 88 (3), pp.211-217. ⟨10.1016/S0304-3991(01)00070-5⟩ Article dans une revue hal-01745056v1
	Low pressure chemical vapor deposition of silicon oxynitride films using tetraethylorthosilicate, dichlorosilane and ammonia mixtures V Vamvakas , R Berjoan , Sylvie Schamm-Chardon , D Davazoglou , Constantin Vahlas Journal de Physique IV Proceedings, 2001, 11 (PR3), pp.231-238. ⟨10.1051/jp4:2001329⟩ Article dans une revue hal-01745057v1
	High-resolution electron microscopy investigations of stacking faults in Y1Ba2Cu3O7−δ metalorganic chemical vapor deposited thin films C Grigis , Sylvie Schamm-Chardon , Dominique Dorignac Journal of Materials Research, 1999, 14 (7), pp.2732-2738. ⟨10.1557/JMR.1999.0366⟩ Article dans une revue hal-01745058v1
	Element and phase identification via fine structure analysis in EELS: application to MOCVD-Y1Ba2Cu3O7-delta thin films C Grigis , Sylvie Schamm-Chardon Ultramicroscopy, 1998, 74 (3), pp.159-167. ⟨10.1016/S0304-3991(98)00040-0⟩ Article dans une revue hal-01745060v1
	Studies of LPCVD Al–Fe–O deposits by XPS, EELS and Mössbauer spectroscopies C Labatut , R Berjoan , B Armas , Sylvie Schamm-Chardon , Jean Sévely Surface and Coatings Technology, 1998, 105 (1-2), pp.31-37. ⟨10.1016/S0257-8972(97)00562-8⟩ Article dans une revue hal-01745059v1
	Structural characterization of amorphous SiCxNy chemical vapor deposited coatings A Bendeddouche , R Berjoan , E Beche , T Merlemejean , Sylvie Schamm-Chardon Journal of Applied Physics, 1997, 81 (9), pp.6147-6154. ⟨10.1063/1.364396⟩ Article dans une revue hal-01745062v1
	Correlations between gas phase supersaturation, nucleation process and physico-chemical characteristics of silicon carbide deposited from Si-C-H-Cl system on silica substrates D Lespiaux , F Langlais , R Naslain , Sylvie Schamm-Chardon , Jean Sévely Journal of Materials Science, 1995, 30 (6), pp.1500-1510. ⟨10.1007/BF00375255⟩ Article dans une revue hal-01745067v1
	SiCN Amorphous Materials Chemical Vapour Deposited Using the Si(CH3)4-NH3-H2 System A Bendeddouche , R Berjoan , E Beche , Sylvie Schamm-Chardon , Virginie Serin Journal de Physique IV Proceedings, 1995, 5 (C5), pp.793-800. ⟨10.1051/jphyscol:1995594⟩ Article dans une revue hal-01745065v1
	Chlorine and oxygen inhibition effects in the deposition of SiC-based ceramics from the Si-C-H-Cl system D Lespiaux , F Langlais , R Naslain , Sylvie Schamm-Chardon , Jean Sévely Journal of the European Ceramic Society, 1995, 15 (1), pp.81-88. ⟨10.1016/0955-2219(95)91303-6⟩ Article dans une revue hal-01745066v1
	SiCN Amorphous Materials Chemical Vapour Deposited Using the Si(CH3)4-NH3-H2 System A. Bendeddouche , R. Berjoan , E. Bêche , Sylvie Schamm-Chardon , V. Serin Journal de Physique IV Proceedings, 1995, 05 (C5), pp.C5-793-C5-800. ⟨10.1051/jphyscol:1995594⟩ Article dans une revue jpa-00253957v1
	Preparation of YBCO on YSZ Layers Deposited on Silicon and Sapphire by MOCVD : Influence of the Intermediate Layer on the Quality of the Superconducting Film G Garcia , J Casado , J Llibre , M Doudkowski , J Santiso Journal de Physique IV Proceedings, 1995, Proceedings of the Tenth European Conference on Chemical Vapour Deposition, 5 (C5), pp.439-445. ⟨10.1051/jphyscol:1995551⟩ Article dans une revue hal-01745063v1
	Kinetic Processes in the CVD of SiC from CH3SiCl3-H2 in a Vertical Hot-Wall Reactor F. Langlais , F. Loumagne , D. Lespiaux , Sylvie Schamm-Chardon , R. Naslain Journal de Physique IV Proceedings, 1995, 05 (C5), pp.C5-105-C5-112. ⟨10.1051/jphyscol:1995510⟩ Article dans une revue jpa-00253766v1
	Preparation of YBCO on YSZ Layers Deposited on Silicon and Sapphire by MOCVD : Influence of the Intermediate Layer on the Quality of the Superconducting Film G. Garcia , J. Casado , J. Llibre , M. Doudkowski , J. Santiso Journal de Physique IV Proceedings, 1995, 05 (C5), pp.C5-439-C5-447. ⟨10.1051/jphyscol:1995551⟩ Article dans une revue jpa-00253913v1
	HREM Characterization of Interfaces in Thin MOCVD Superconducting Films Dominique Dorignac , Sylvie Schamm-Chardon , Ch. Grigis , J. Santiso , G. Garcia Journal de Physique IV Proceedings, 1995, 05 (C5), pp.C5-927-C5-934. ⟨10.1051/jphyscol:19955110⟩ Article dans une revue jpa-00253779v1
	Physicochemical properties of SiC-based ceramics deposited by low pressure chemical vapor deposition from CH3SiCl3H2 F Loumagne , F Langlais , R Naslain , Sylvie Schamm-Chardon , Dominique Dorignac Thin Solid Films, 1995, 254 (1-2), pp.75-82. ⟨10.1016/0040-6090(94)06237-F⟩ Article dans une revue hal-01745064v1
	Y2O3 nanoprecipitate/YBaCuO matrix interfaces: HREM study Dominique Dorignac , Sylvie Schamm-Chardon , C Grigis , Jean Sévely , J Santiso Physica C: Superconductivity and its Applications, 1994, 235, pp.617-618. ⟨10.1016/0921-4534(94)91532-6⟩ Article dans une revue hal-01745069v1
	Y2O3 nanoprecipitates in YBCO thin films obtained by thermal- MOCVD J Santiso , A Figueras , Sylvie Schamm-Chardon , C Grigis , Dominique Dorignac Physica C: Superconductivity and its Applications, 1994, 235, pp.619-620. ⟨10.1016/0921-4534(94)91533-4⟩ Article dans une revue hal-01745068v1
	The K2ZrF6 wetting process: Effect of surface chemistry on the ability of a SiC-Fiber preform to be impregnated by aluminum Sylvie Schamm-Chardon , R Fedou , Jp Rocher , Jm Quenisset , R Naslain Metallurgical Transactions a-Physical Metallurgy and Materials Science, 1991, 22 (9), pp.2133-2139. ⟨10.1007/BF02669881⟩ Article dans une revue hal-01745070v1
	Compatibility between SiC filaments and aluminim in the K2ZrF6 wetting process and its effect on filament strength Sylvie Schamm-Chardon , Y Lepetitcorps , R Naslain Composites Science and Technology, 1991, 40 (2), pp.193-211. ⟨10.1016/0266-3538(91)90097-9⟩ Article dans une revue hal-01745072v1
	HREM identification of "one-dimensionally-disordered" polytypes in the SiC (CVI) matrix of SiC/SiC composites Sylvie Schamm-Chardon , Annie Mazel , Dominique Dorignac , Jean Sévely Microscopy, Microanalysis, Microstructures, 1991, 2 (1), pp.59-73. ⟨10.1051/mmm:019910020105900⟩ Article dans une revue hal-01745071v1
	Partial phase diagram of the ternary reciprocal system KF-AlF3-Al2O3-K2O Sylvie Schamm-Chardon , L Rabardel , J Grannec , R Naslain , C Bernard Calphad, 1990, 14 (4), pp.385-402. ⟨10.1016/0364-5916(90)90006-L⟩ Article dans une revue hal-01745073v1
	Liquid-process production of composite-materials with aluminum-based matrix reinforced by fibers of carbon or silicon-carbide Sylvie Schamm-Chardon , Jp Rocher , R Naslain Memoires et Etudes Scientifiques de la revue de Metallurgie, 1988, 85 (9), pp.483 Article dans une revue hal-01745074v1

	Nano-composite MOx materials for NVMs Caroline Bonafos , L. Khomenkhova , F. Gourbilleau , Etienne Talbot , Abdelilah Slaoui Metal Oxides for Non-volatile Memory, chapitre 7, Elsevier, pp.201-244, 2022, ⟨10.1016/B978-0-12-814629-3.00007-6⟩ Chapitre d'ouvrage hal-03661308v1
	Interdiffusion and Chemical Reaction at Interfaces by TEM/EELS Sylvie Schamm-Chardon in Transmission Electron Microscopy in Micro-Nanoelectronics, Nanoscience and Nanotechnology Series, ISTE Ltd and John Wiley & Sons, Inc., UK, pp. 135-163, 2013, ⟨10.1002/9781118579022.ch6⟩ Chapitre d'ouvrage hal-01745009v1
	Nanoparticle-based memories : concept and operation principles P. Dimitrakis , Sylvie Schamm-Chardon , Caroline Bonafos , P. Normand Applications of Nanomaterials, American Scientific Publishers, Chap. 2, 2012, 1-58883-181-7 Chapitre d'ouvrage hprints-01745475v1
	Synthesis and Packaging of Nanocrystals by Ultra Low Energy Ion Implantation for Applications in Electronics, Optics and Plasmonics Alain Claverie , Caroline Bonafos , Robert Carles , Sylvie Schamm-Chardon , Arnaud Arbouet Synthesis and Engineering of Nanostructures by Energetic Ions, Nova Science, Chap. 9, pp. 153-172, 2011 Chapitre d'ouvrage hprints-01745455v1
	Local structure, composition and electronic properties of rare earth oxide thin films studied using advanced transmission electron microscopy techniques (TEM-EELS) Sylvie Schamm-Chardon , Giovanna Scarel , Marco Fanciulli Rare Earth Oxide Thin Films: Growth Characterization and Applications, 106, pp.153-177, 2007, ⟨10.1007/11499893_11⟩ Chapitre d'ouvrage hal-01745046v1
	Morphological and Structural Aspects of Thin Films Prepared by Vapor Deposition J. Caro , M. Doudkowsky , A. Figueras , J. Praxedas , G. Garcia Handbook of Surfaces and Interfaces of Materials, Elsevier, Vol. 4, Chap. 4, pp. 229-280, 2001, ⟨10.1016/B978-012513910-6/50050-5⟩ Chapitre d'ouvrage hprints-01745420v1

	Sur l'élaboration des composites SiC/Al par le procédé au K₂ZrF₆ bases physico-chimiques et incidence sur la résistance des fibres Sylvie Schamm-Chardon Matériaux. Université Sciences et Technologies - Bordeaux I, 1989. Français. ⟨NNT : 1989BOR10541⟩ Thèse tel-00374529v1

Sylvie Schamm-Chardon

Présentation

Publications

Reconstruction of depth resolved strain tensor in off-axis single crystals: Application to H + ions implanted LiTaO 3

Nano-analytical investigation of the forming process in an HfO2-based resistive switching memory

Structural and chemical investigation of interface related magnetoelectric effect in Ni/BiFe0.95Mn0.05O3 heterostructures

Detailed characterisation of focused ion beam induced lateral damage on silicon carbide samples by electrical scanning probe microscopy and transmission electron microscopy

Nanoscale control of Si nanoparticles within a 2D hexagonal array embedded in SiO2 thin films

Evolution of shape, size, and areal density of a single plane of Si nanocrystals embedded in SiO2 matrix studied by atom probe tomography

Decoupling indirect topographic cross-talk in band excitation piezoresponse force microscopy imaging and spectroscopy

Studying Thin Ge films and Ge/GeO2 interfaces by means of raman–brillouin scattering

Backside versus frontside advanced chemical analysis of high-k/metal gate stacks

A review of molecular beam epitaxy of ferroelectric BaTiO3 films on Si, Ge and GaAs substrates and their applications

Atomic scale characterization of SiO2/4H-SiC interfaces in MOSFETs devices

Atomic-layer deposited thulium oxide as a passivation layer on germanium

Structural study and ferroelectricity of epitaxial BaTiO3 films on silicon grown by molecular beam epitaxy

Silicon crystallization in nanodot arrays organized by block copolymer lithography

Raman-Brillouin scattering from a thin Ge layer: Acoustic phonons for probing Ge/GeO2 interfaces

Influence of La on the electrical properties of HfSiON: From diffusion to Vth shifts

Fabrication of well-ordered arrays of silicon nanocrystals using a block copolymer mask

Scaling size of the interplay between quantum confinement and surface related effects in nanostructured silicon

Quantumdots for memory applications

In-plane organization of silicon nanocrystals embedded in SiO2 thin films

Extraction of the characteristics of Si nanocrystals by the charge pumping technique

Si and Ge nanocrystals for future memory devices

Implantation energy effect on photoluminescence spectroscopy of Si nanocrystals locally fabricated by stencil-masked ultra-low-energy ion-beam-synthesis in silica

Comparative Study of Electrical and Microstructural Properties of 4H-SiC MOSFETs

Nano-Analytical and Electrical Characterization of 4H-SiC MOSFETs

The fabrication of tunable nanoporous oxide surfaces by block copolymer lithography and atomic layer deposition

Combining HRTEM-EELS nano-analysis with capacitance-voltage measurements to evaluate high-kappa thin films deposited on Si and Ge as candidate for future gate dielectrics

Calculated and experimental electron energy-loss spectra of La2O3, La(OH)(3), and LaOF nanophases in high permittivity lanthanum-based oxide layers

Nanocrystallized tetragonal metastable ZrO2 thin films deposited by metal-organic chemical vapor deposition for 3D capacitors

Structural and electrical properties of Er-doped HfO2 and of its interface with Ge (001)

The energy band alignment of Si nanocrystals in SiO2

Silicon nanoclusters embedded into oxide host for non-volatile memory applications

Dielectric properties of Er-doped HfO2 (Er ~ 15%) grown by atomic layer deposition for high-kappa gate stacks

Ultra-low energy ion implantation of Si into HfO2 and HfSiO-based structures for non volatile memory applications

O-3-based atomic layer deposition of hexagonal La2O3 films on Si(100) and Ge(100) substrates

Temperature-dependent low electric field charging of Si nanocrystals embedded within oxide-nitride-oxide dielectric stacks

Characterization of ZrO2 thin films deposited by MOCVD for high-density 3D capacitors. Broad experience on MOCVD techniques and high-k materials

Chemical/Structural Nanocharacterization and Electrical Properties of ALD-Grown La2O3/Si Interfaces for Advanced Gate Stacks

Thermally induced permittivity enhancement in La-doped ZrO2 grown by atomic layer deposition on Ge(100)

Atomic layer deposition of LaxZr1-xO2-delta (x=0.25) high-k dielectrics for advanced gate stacks

Ultra-low-energy ion-beam-synthesis of Ge nanocrystals in thin ALD Al2O3 layers for memory applications

Structural and optical properties of Si nanocrystals embedded in SiO2/SiNx multilayers

Ultra-low energy ion implantation of Si into HfO2-based structures for non volatile memory applications

ZrO2 Thin Films Grown On 2D and 3D Silicon Surfaces By DLI-MOCVD For Electronic Devices

Structural and optical properties of high density Si-ncs synthesized in SiNx : H by remote PECVD and annealing

KFM detection of charges injected by AFM into a thin SiO2 layer containing Si nanocrystals

Imaging Si nanoparticles embedded in SiO2 layers by (S)TEM-EELS

Structural and optical properties of high density Si-ncs synthezised in SiNx:H by remote PECVD and annealing

Silicon nanoparticles synthesized in SiO2 pockets by stencil-masked low energy ion implantation and thermal annealing

Infrared spectroscopy and X-ray diffraction studies on the crystallographic evolution of La2O3 films upon annealing

Photoluminescence spectroscopy and transport electrical measurements reveal the quantized features of Si nanocrystals embedded in an ultra thin SiO2 layer

Preparation and microstructures of BaTi1-xZrxO3 hetero-epitaxial thin films on SrTiO3 substrates

Wet oxidation of nitride layer implanted with low-energy Si ions for improved oxide-nitride-oxide memory stacks

Oxide-nitride-oxide dielectric stacks with Si nanoparticles obtained by low-energy ion beam synthesis

Oxide-nitride-oxide memory stacks formed by low-energy Si ion implantation into nitride and wet oxidation

Influence of the thickness of the tunnel layer on the charging characteristics of Si nanocrystals embedded in an ultra-thin SiO2 layer

Field effect white and tunable electroluminescence from ion beam synthesized Si- and C-rich SiO2 layers

Oxidation of Si nanocrystals fabricated by ultralow-energy ion implantation in thin SiO2 layers

Photoluminescence characterization of few-nanocrystals electronic devices

White electroluminescence from C- and Si-rich thin silicon oxides

Materials science issues for the fabrication of nanocrystal memory devices by ultra low energy ion implantation

Si nanocrystals by ultra-low energy ion implantation for non-volatile memory applications

The effects of oxidation conditions on structural and electrical properties of silicon nanoparticles obtained by ultra-low-energy ion implantation

Elaboration by spray pyrolysis and characterization in the VUV range of phosphor particles with spherical shape and micronic size

Fabrication of nanocrystal memories by ultra low energy ion implantation

Oxidation effects on transport characteristics of nanoscale MOS capacitors with an embedded layer of silicon nanocrystals obtained by low energy ion implantation

Si nanocrystals by ultra-low-energy ion beam-synthesis for non-volatile memory applications

Study of the chemical and structural organization of SIPOS films at the nanometer scale by TEM-EELS and XPS

Multi-dot floating-gates for nonvolatile semiconductor memories: Their ion beam synthesis and morphology

Multi-scale analysis of the dielectric properties and structure of resin/carbon-black nanocomposites

Study of the dielectric properties near the band gap by VEELS: gap measurement in bulk materials

Thermodynamic study and characterization of low pressure chemically vapor deposited silicon oxynitride films from tetraethylorthosilicate, dichlorosilane and ammonia gas mixtures

Multi-Dot Floating-Gates in MOSFETs for nonvolatile memories - Their ion beam synthesis and morphology

VUV absorption coefficient measurements of borate matrices

Contamination and the quantitative exploitation of EELS low-loss experiments

Low pressure chemical vapor deposition of silicon oxynitride films using tetraethylorthosilicate, dichlorosilane and ammonia mixtures

High-resolution electron microscopy investigations of stacking faults in Y1Ba2Cu3O7−δ metalorganic chemical vapor deposited thin films

Ultra-low energy ion implantation of Si into HfO₂-based structures for non volatile memory applications

Sur l'élaboration des composites SiC/Al par le procédé au K₂ZrF₆ bases physico-chimiques et incidence sur la résistance des fibres