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Number of documents

3

Sylvie Schamm-Chardon


1789   

Journal articles3 documents

  • Magali Brunet, Hicham Mafhoz Kotb, Laurent Bouscayrol, Emmanuel Scheid, Michel Andrieux, et al.. Nanocrystallized tetragonal metastable ZrO2 thin films deposited by metal-organic chemical vapor deposition for 3D capacitors. Thin Solid Films, Elsevier, 2011, 519 (16), pp.5638-5644. ⟨10.1016/j.tsf.2011.03.006⟩. ⟨hal-01443083⟩
  • Magali Brunet, Emmanuel Scheid, Karolina Galicka-Fau, Michel Andrieux, Corinne Legros, et al.. Characterization of ZrO2 thin films deposited by MOCVD for high-density 3D capacitors. Broad experience on MOCVD techniques and high-k materials. Microelectronic Engineering, Elsevier, 2009, 86 (10), pp.2034-2037. ⟨10.1016/j.mee.2009.01.034⟩. ⟨hal-01443057⟩
  • Karolina Galicka-Fau, Michel Andrieux, Corinne Legros, Michaële Herbst-Ghysel, Isabelle Gallet, et al.. ZrO2 Thin Films Grown On 2D and 3D Silicon Surfaces By DLI-MOCVD For Electronic Devices. ECS Transactions, Electrochemical Society, Inc., 2009, 25 (8), pp.1121-1128. ⟨10.1149/1.3207715⟩. ⟨hal-01745028⟩