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Photon-to-Digital Converters for Wavefront Sensing

 Simon Carrier , Jean-Pierre Veran , Serge Charlebois , Jean-François Pratte
Adaptive Optics for Extremely Large Telescopes 7th Edition, ONERA, Jun 2023, Avignon, France. ⟨10.13009/AO4ELT7-2023-121⟩
Communication dans un congrès hal-04419641v1

Exploring Ru compatibility with Al-Ge eutectic wafer bonding

 Mark Ferguson , Mohamed Najah , Frederic Banville , Mohamed Boucherit , Paul Gond-Charton , et al.
Journal of Microelectromechanical Systems, 2022, 31 (4), pp.599-603. ⟨10.36227/techrxiv.19319495.v1⟩
Article dans une revue hal-03821775v1

Ru plasma etching process for thermally stable and low resistivity contacts

 Mohamed Najah , Mark Ferguson , Mohamed Boucherit , M Guillemain , Jacques Renaud , et al.
47th International Conference on Micro and Nano Engineering,, Jun 2021, Torino, Italy
Communication dans un congrès hal-03686953v1

3D Digital SiPM and Smart Silicon Interposer for nEXO

 S Charlebois , F Bourque , P Momar Souare , F Nolet , T Dequivre , et al.
nEXO Collaboration Meeting, SLAC, Oct 2016, Menlo Park, United States
Communication dans un congrès hal-02079219v1

Electrografted P4VP for High Aspect Ratio Copper TSV Insulation in Via-Last Process Flow

 Thomas Dequivre , Elias Al Alam , Josée Maurais , Gessie Brisard , J.-F. Pratte , et al.
ECS Journal of Solid State Science and Technology, 2016, 5 (6), pp.P340-P344. ⟨10.1149/2.0321606jss⟩
Article dans une revue hal-02273389v1

Sherbrooke's Electronics

 J-F Pratte , F Bourque , F Nolet , F. Dubois , X Bernard , et al.
nEXO Collaboration Meeting, SLAC, Oct 2016, Menlo Park, United States
Communication dans un congrès hal-02079217v1
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Wet Metallization of High Aspect Ratio TSV Using Electrografted Polymer Insulator to Suppress Residual Stress in Silicon

 Thomas Dequivre , Gitanjali Kolhatkar , Azza Hadj Youssef , Xuan Le , Gessie Brisard , et al.
IEEE Transactions on Device and Materials Reliability, 2017, 17 (3), pp.514 - 521. ⟨10.1109/TDMR.2017.2716943⟩
Article dans une revue hal-01914362v1
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Terahertz emission properties of arsenic and oxygen ion-implanted GaAs based photoconductive pulsed sources

 B. Salem , D. Morris , Y. Salissou , V. Aimez , S. Charlebois , et al.
Journal of Vacuum Science & Technology A, 2006, 24 (3), pp.774-777. ⟨10.1116/1.2183284⟩
Article dans une revue hal-02352919v1

Exploring Ru Compatibility With Al-Ge Eutectic Wafer Bonding

 Mark Ferguson , Mohamed Najah , Frederic Banville , Mohamed Boucherit , Paul Gond-Charton , et al.
Journal of Microelectromechanical Systems, 2022, 31 (4), pp.599-603. ⟨10.1109/JMEMS.2022.3165716⟩
Article dans une revue hal-03823296v1

Mitigating Re-Entrant Etch Profile Undercut in Au Etch with an Aqua Regia Variant

 Mark Ferguson , Mohamed Najah , Frédéric Banville , Mohamed Boucherit , Naresh Miriyala , et al.
Journal of The Electrochemical Society, 2022, 169 (8), pp.083504. ⟨10.1149/1945-7111/ac8769⟩
Article dans une revue hal-03821782v1

Characterization of a Wafer-Level Packaged Au-Ru/AlCu Contact for Micro-Switches

 Mohamed Najah , Serge Ecoffey , Tejinder Singh , Mark Ferguson , Louis-Philippe Roby , et al.
Journal of Microelectromechanical Systems, 2022, pp.1-12. ⟨10.1109/JMEMS.2022.3172920⟩
Article dans une revue hal-03686950v1
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