Remi Dussart
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Single and multilayered materials processing by argon ion beam etching: study of ion angle incidence and defect formationJournal of Micromechanics and Microengineering, 2015, 25, pp.095011. ⟨10.1088/0960-1317/25/9/095011⟩
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hal-01217644v1
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