Remi Dussart
7
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Titanium oxide thin film growth by magnetron sputtering: Total energy flux and its relationship with the phase constitutionSurface and Coatings Technology, 2014, Vol 254 (2014), Volume 254, 15 September 2014, Pages 291-297. ⟨10.1016/j.surfcoat.2014.06.037⟩
Article dans une revue
hal-01057278v1
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Energy Transferred From a Hot Nickel Target During Magnetron SputteringIEEE Transactions on Plasma Science, 2014, pp.Plasma Science, IEEE Transactions on (Volume:PP Issue: 99 ). ⟨10.1109/TPS.2014.2338742⟩
Article dans une revue
hal-01057286v1
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Energy flux diagnostics in thin film deposition by magnetron sputteringXXXII International Conference on Phenomena in Ionized Gases (ICPIG), Jul 2015, Iasi, Romania
Communication dans un congrès
hal-01290726v1
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Study of energy transfers at the substrate during “transition steps” in magnetron sputter deposition14th International Conference on Plasma Surface Engineering PSE 2014 , Sep 2014, Garmisch-Partenkirchen, Germany
Communication dans un congrès
hal-01289446v1
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Energy flux measurements at the substrate deposition during reactive and non-reactive magnetron sputter deposition processes19th International Vacuum Conference, Sep 2013, Paris, France
Communication dans un congrès
hal-01166024v1
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On the relationship between the energy flux at the substrate surface and the phase constitution of reactively magnetron sputtered titanium dioxide thin films14th International Conference on Plasma Surface Engineering PSE 2014 , Sep 2014, Garmisch-Partenkirchen, Germany
Poster de conférence
hal-01289438v1
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Détermination de l'énergie transférée aux surfaces lors de la modification de matériaux par procédés plasmas basse pression12ème congrès de la division plasma de la SFP , May 2012, Orléans, France
Poster de conférence
hal-01288927v1
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