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Remi Dussart

11

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874205

	Energy transferred to the substrate surface during reactive magnetron sputtering of aluminum in Ar/O2 atmosphere Anne-Lise Thomann , Pierre-Antoine Cormier , Vincent Dolique , Nadjib Semmar , Remi Dussart Thin Solid Films, 2013, 539, pp.88. ⟨10.1016/j.tsf.2013.05.075⟩ Article dans une revue hal-00839010v1
	Measuring the energy flux at the substrate position during magnetron sputter deposition processes Pierre-Antoine Cormier , A. Balhamri , Anne-Lise Thomann , Remi Dussart , Nadjib Semmar Journal of Applied Physics, 2013, 113, pp.013305. ⟨10.1063/1.4773103⟩ Article dans une revue hal-00831364v1
	Probing dusty-plasma/surface interactions with a heat flux microsensor Sergey Abolmasov , Pierre-Antoine Cormier , A. Torres Rios , Remi Dussart , Nadjib Semmar Applied Physics Letters, 2012, pp.100, 1, 011601. ⟨10.1063/1.3674290⟩ Article dans une revue hal-00943785v1

	Advantages of energy influx measurements in low pressure plasma processes Pierre-Antoine Cormier , Anne-Lise Thomann , Nadjib Semmar , Remi Dussart , Vincent Dolique International Conference on Plasma Surface Engineering, Sep 2012, Garmisch-Partenkirchen, Germany Communication dans un congrès hal-00831371v1
	Balanced/unbalanced planar magnetron plasma behaviour. Microscopic analysis by PIC-MCC modelling of the ion flux on thermal probes Tiberiu Minea , Lise Caillault , Pierre-Antoine Cormier , Remi Dussart , Nadjib Semmar 13th International Conference on Plasma Surface Engineering PSE 2012, Sep 2012, Garmisch-Partenkirchen, Germany Communication dans un congrès hal-01288936v1
	Direct energy influx measurements between a biased substrate and a low pressure plasma Pierre-Antoine Cormier , Anne-Lise Thomann , Remi Dussart , Nadjib Semmar , Jacky Mathias 18th International Colloquium on Plasma Processes (CIP), Jul 2011, Nantes, France Communication dans un congrès hal-00707930v1
	Energy influx measurements in low pressure plasmas for material processing Anne-Lise Thomann , Pierre-Antoine Cormier , Remi Dussart , Nadjib Semmar , Jacky Mathias Innovations in Thin Film Processing and Characterisation, and Magnetron, Ion Processing and Arc Technologies European Conference, ITFPC-MIATEC 2011 , Nov 2011, Nancy, France Communication dans un congrès hal-01289043v1
	Comparaison d'une sonde calorimétrique et d'un capteur à thermopile pour la mesure des transferts d'énergie plasma basse pression/surface' Nadjib Semmar , Pierre-Antoine Cormier , Anne Lise Thomann , Rémi Dussart , Jacky Mathias Congrès Français de Thermique, May 2010, Le Touquet, France. pp.755-760 Communication dans un congrès hal-00504417v1

	On the relationship between the energy flux at the substrate surface and the phase constitution of reactively magnetron sputtered titanium dioxide thin films Stephanos Konstantinidis , Pierre-Antoine Cormier , Anne-Lise Thomann , Remi Dussart , Nadjib Semmar 14th International Conference on Plasma Surface Engineering PSE 2014 , Sep 2014, Garmisch-Partenkirchen, Germany Poster de conférence hal-01289438v1
	Détermination de l'énergie transférée aux surfaces lors de la modification de matériaux par procédés plasmas basse pression Pierre-Antoine Cormier , Anne-Lise Thomann , Nadjib Semmar , Remi Dussart , Dolique Vincent 12ème congrès de la division plasma de la SFP , May 2012, Orléans, France Poster de conférence hal-01288927v1
	Direct energy influx measurement in reactive magnetron sputtering Pierre-Antoine Cormier , Dolique Vincent , Anne-Lise Thomann , Jacky Mathias , Balharmi A. Reactive sputter deposition RSD 2011, Dec 2011, Linköping, Sweden Poster de conférence hal-01288906v1