Remi Dussart

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	Direct measurements of the energy flux due to chemical reactions at the surface of a silicon sample interacting with a SF6 plasma Remi Dussart , Anne-Lise Thomann , Laurianne E. Pichon , Larbi Bedra , Nadjib Semmar Applied Physics Letters, 2008, 93, pp.131502. ⟨10.1063/1.2995988⟩ Article dans une revue hal-00336392v1