Remi Dussart

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Présentation

770402

	Deep silicon etching: STiGer vs. BOSCH Chengkun Tu , Ying Cui , Remi Dussart , Thomas Tillocher , Philippe Lefaucheux Plasma Etch and Strip in Microtechnology, May 2016, Grenoble, France Poster de conférence hal-01344704v1