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Publications

	Energy transferred to the substrate surface during reactive magnetron sputtering of aluminum in Ar/O2 atmosphere Anne-Lise Thomann , Pierre-Antoine Cormier , Vincent Dolique , Nadjib Semmar , Remi Dussart Thin Solid Films, 2013, 539, pp.88. ⟨10.1016/j.tsf.2013.05.075⟩ Article dans une revue hal-00839010v1
	IR emission from the target during plasma magnetron sputter deposition Pierre-Antoine Cormier , Anne Lise Thomann , Vincent Dolique , A. Balhamri , Remi Dussart Thin Solid Films, 2013, pp.547(2013) 44-49. ⟨10.1016/j.tsf.2013.07.025⟩ Article dans une revue hal-00943789v1