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Remi Dussart

9

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marylene-vayer

	Morphology control in thin films of PS: PLA homopolymer blends by dip-coating deposition Alexane Vital , Marylène Vayer , Thomas Tillocher , Remi Dussart , Mohamed Boufnichel Applied Surface Science, 2017, 393, pp.127-133. ⟨10.1016/j.apsusc.2016.09.151⟩ Article dans une revue hal-01561189v1
	Modification of poly(styrene) thin films and enhancement of cryogenic plasma etching resistance by ruthenium tetroxide vapor staining Alexane Vital , Marylène Vayer , Christophe Sinturel , Thomas Tillocher , Philippe Lefaucheux Polymer, 2015, 76, pp.123-130. ⟨10.1016/j.polymer.2015.08.062⟩ Article dans une revue hal-01228427v1
	Polymer masks for structured surface and plasma etching Alexane Vital , Marylène Vayer , Christophe Sinturel , Thomas Tillocher , Philippe Lefaucheux Applied Surface Science, 2015, 332, pp.237. ⟨10.1016/j.apsusc.2015.01.040⟩ Article dans une revue hal-01219273v1

	CRYOGENIC ETCHING APPLIED TO THE REALIZATION OF HIGH DENSITY CAPACITOR WITH A HOMOPOLYMER MASK Mukesh Kulsreshath , Christophe Sinturel , Philippe Lefaucheux , Marylène Vayer , Thomas Tillocher International Conference on Plasma Processes 2017 (CIP2017), Jun 2017, Nice, France Communication dans un congrès hal-01561252v1
	Submicronic etched features of silicon with high aspect ratio obtained by cryogenic plasma deep-etching through perforated polymer thin films Alexane Vital , Mohamed Boufnichel , Remi Dussart , Nicolas Gosset , Philippe Lefaucheux 2015 MRS Spring Meeting & Exhibit, Apr 2015, San francisco, United States Communication dans un congrès hal-01151542v1
	Multiscale etching of holes by cryogenic silicon etching Thomas Tillocher , Xiao Liu , Alexane Vital , Nicolas Gosset , Philippe Lefaucheux Plasma Etch and Strip in Microtechnology, May 2014, Gernoble, France Communication dans un congrès hal-01057242v1
	Submicrometric structured silicon surfaces obtained from polymer blend film by silica replication and cryogenic plasma etching Alexane Vital , Thomas Tillocher , Remi Dussart , Marylène Vayer , Christophe Sinturel Plasma Etch and Strip in Microtechnology, May 2014, Grenoble, France Communication dans un congrès hal-01057586v1
	Plasma cryoetching processes for silicon and advanced materials Remi Dussart , Thomas Tillocher , Nicolas Gosset , Alexane Vital , Philippe Lefaucheux International Conference on Microelectronics and Plasma Technology, Jul 2014, Gunsan, South Korea Communication dans un congrès hal-01057585v1
	Cryogenic etching of submicronic features in silicon using masks based on porous polymer films Thomas Tillocher , Alexane Vital , Marylène Vayer , Nicolas Gosset , Philippe Lefaucheux 226th meeting of the Electrochemical Society, Oct 2014, Cancun, Mexico Communication dans un congrès hal-01151839v1