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Remi Dussart

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	Energy Transferred From a Hot Nickel Target During Magnetron Sputtering Mariem El Mokh , Amaël Caillard , Nadjib Semmar , Rémi Dussart , Thomas Lecas IEEE Transactions on Plasma Science, 2014, pp.Plasma Science, IEEE Transactions on (Volume:PP Issue: 99 ). ⟨10.1109/TPS.2014.2338742⟩ Article dans une revue hal-01057286v1
	Titanium oxide thin film growth by magnetron sputtering: Total energy flux and its relationship with the phase constitution Pierre-Antoine Cormier , A. Balhamri , Anne-Lise Thomann , Remi Dussart , Nadjib Semmar Surface and Coatings Technology, 2014, Vol 254 (2014), Volume 254, 15 September 2014, Pages 291-297. ⟨10.1016/j.surfcoat.2014.06.037⟩ Article dans une revue hal-01057278v1
	Measuring the energy flux at the substrate position during magnetron sputter deposition processes Pierre-Antoine Cormier , A. Balhamri , Anne-Lise Thomann , Remi Dussart , Nadjib Semmar Journal of Applied Physics, 2013, 113, pp.013305. ⟨10.1063/1.4773103⟩ Article dans une revue hal-00831364v1
	IR emission from the target during plasma magnetron sputter deposition Pierre-Antoine Cormier , Anne Lise Thomann , Vincent Dolique , A. Balhamri , Remi Dussart Thin Solid Films, 2013, pp.547(2013) 44-49. ⟨10.1016/j.tsf.2013.07.025⟩ Article dans une revue hal-00943789v1
	Energy transferred to the substrate surface during reactive magnetron sputtering of aluminum in Ar/O2 atmosphere Anne-Lise Thomann , Pierre-Antoine Cormier , Vincent Dolique , Nadjib Semmar , Remi Dussart Thin Solid Films, 2013, 539, pp.88. ⟨10.1016/j.tsf.2013.05.075⟩ Article dans une revue hal-00839010v1
	IR emission from the target during plasma magnetron sputter deposition P.-A. Cormier , A.-L. Thomann , Vincent Dolique , A. Balhamri , R. Dussart Thin Solid Films, 2013, 545, pp.44-49. ⟨10.1016/j.tsf.2013.07.025⟩ Article dans une revue in2p3-00874718v1
	Probing dusty-plasma/surface interactions with a heat flux microsensor Sergey Abolmasov , Pierre-Antoine Cormier , A. Torres Rios , Remi Dussart , Nadjib Semmar Applied Physics Letters, 2012, pp.100, 1, 011601. ⟨10.1063/1.3674290⟩ Article dans une revue hal-00943785v1
	Highly sensitive measurements of the energy transferred during plasma sputter deposition of metals L Bedra , a L Thomann , N Semmar , R Dussart , J Mathias Journal of Physics D: Applied Physics, 2010, 43 (6), pp.65202. ⟨10.1088/0022-3727/43/6/065202⟩ Article dans une revue hal-00569757v1
	On the measurement of energy fluxes in plasmas using a calorimetric probe and a thermopile sensor Pierre-Antoine Cormier , Marc Stahl , Anne-Lise Thomann , Rémi Dussart , Matthias Wolter Journal of Physics D: Applied Physics, 2010, 43 (46), pp.465201. ⟨10.1088/0022-3727/43/46/465201⟩ Article dans une revue hal-00569747v1
	Direct measurements of the energy flux due to chemical reactions at the surface of a silicon sample interacting with a SF6 plasma Remi Dussart , Anne-Lise Thomann , Laurianne E. Pichon , Larbi Bedra , Nadjib Semmar Applied Physics Letters, 2008, 93, pp.131502. ⟨10.1063/1.2995988⟩ Article dans une revue hal-00336392v1
	Diagnostic system for plasma/surface energy transfer characterization Anne Lise Thomann , Nadjib Semmar , Rémi Dussart , Jacky Mathias , Vladislav Lang Review of Scientific Instruments, 2006, 77 (2), pp.033501-6 Article dans une revue hal-00097829v1

	Energy flux diagnostics in thin film deposition by magnetron sputtering Anne-Lise Thomann , Amaël Caillard , El Mokh Mariem , Nadjib Semmar , Remi Dussart XXXII International Conference on Phenomena in Ionized Gases (ICPIG), Jul 2015, Iasi, Romania Communication dans un congrès hal-01290726v1
	Study of energy transfers at the substrate during “transition steps” in magnetron sputter deposition Anne-Lise Thomann , El Mariem , Amaël Caillard , Nadjib Semmar , Thomas Lecas 14th International Conference on Plasma Surface Engineering PSE 2014 , Sep 2014, Garmisch-Partenkirchen, Germany Communication dans un congrès hal-01289446v1
	Energy flux measurements at the substrate deposition during reactive and non-reactive magnetron sputter deposition processes Pierre-Antoine Cormier , A. Balhamri , Anne Lise Thomann , Remi Dussart , Nadjib Semmar 19th International Vacuum Conference, Sep 2013, Paris, France Communication dans un congrès hal-01166024v1
	Advantages of energy influx measurements in low pressure plasma processes Pierre-Antoine Cormier , Anne-Lise Thomann , Nadjib Semmar , Remi Dussart , Vincent Dolique International Conference on Plasma Surface Engineering, Sep 2012, Garmisch-Partenkirchen, Germany Communication dans un congrès hal-00831371v1
	Balanced/unbalanced planar magnetron plasma behaviour. Microscopic analysis by PIC-MCC modelling of the ion flux on thermal probes Tiberiu Minea , Lise Caillault , Pierre-Antoine Cormier , Remi Dussart , Nadjib Semmar 13th International Conference on Plasma Surface Engineering PSE 2012, Sep 2012, Garmisch-Partenkirchen, Germany Communication dans un congrès hal-01288936v1
	Direct energy influx measurements in high power impulse sputtering Pierre-Antoine Cormier , Balharmi A. , Anne-Lise Thomann , Stephanos Konstantinidis , Remi Dussart 2nd International Conference on HiPIMS, HiPIMS2011 , Jun 2011, Braunschweig, Germany Communication dans un congrès hal-01288780v1
	Energy influx measurements in low pressure plasmas for material processing Anne-Lise Thomann , Pierre-Antoine Cormier , Remi Dussart , Nadjib Semmar , Jacky Mathias Innovations in Thin Film Processing and Characterisation, and Magnetron, Ion Processing and Arc Technologies European Conference, ITFPC-MIATEC 2011 , Nov 2011, Nancy, France Communication dans un congrès hal-01289043v1
	Direct energy influx measurements between a biased substrate and a low pressure plasma Pierre-Antoine Cormier , Anne-Lise Thomann , Remi Dussart , Nadjib Semmar , Jacky Mathias 18th International Colloquium on Plasma Processes (CIP), Jul 2011, Nantes, France Communication dans un congrès hal-00707930v1
	Comparaison d'une sonde calorimétrique et d'un capteur à thermopile pour la mesure des transferts d'énergie plasma basse pression/surface' Nadjib Semmar , Pierre-Antoine Cormier , Anne Lise Thomann , Rémi Dussart , Jacky Mathias Congrès Français de Thermique, May 2010, Le Touquet, France. pp.755-760 Communication dans un congrès hal-00504417v1
	Direct measurement of energy transfers during deposition of sputtered metal atoms Larbi Bedra , Anne-Lise Thomann , Nadjib Semmar , Rémi Dussart , Jacky Mathias 17th International Colloquium on Plasma Processes, CIP 09, Jun 2009, Marseille, France Communication dans un congrès hal-00445581v1
	Micro transfert d'énergie dans un solide mince : effet de la résistance thermique de contact Larbi Bedra , Nadjib Semmar , Anne-Lise Thomann , Rémi Dussart , Jacky Mathias Congrès Français de Thermique, SFT 2008, Jun 2008, Toulouse, France. pp.385-390 Communication dans un congrès hal-00443715v1
	Direct measurements of the energy transfers in deposition or etching low pressure plasma processes Anne-Lise Thomann , Rémi Dussart , Nadjib Semmar , Larbi Bedra , Jacky Mathias 11th International Conference on Plasma Surface Engineering, PSE2008, Sep 2008, Garmisch-Partenkirchen, Germany Communication dans un congrès hal-00445589v1
	New Approach of Heat Transfer Characterization on Thin Si and Cu Solids.-Effects of Thermal Contact Resistance Larbi Bedra , Nadjib Semmar , Anne-Lise Thomann , Rémi Dussart , Jacky Mathias 5th European Thermal-Sciences Conference, Eutrotherm 2008, May 2008, Netherlands. pp.101-106 Communication dans un congrès hal-00443101v1
	A direct measurement of the energy flux density in plasma surface interaction Rémi Dussart , Anne-Lise Thomann , Nadjib Semmar , Laurianne E. Pichon , Larbi Bedra 61st Gaseous Electronics Conference, 2008, United States Communication dans un congrès hal-00448760v1
	Global evaluation of the energy transfer between an ICP argon plasma and a surface Rémi Dussart , Anne-Lise Thomann , Nadjib Semmar , Laurianne E. Pichon , Jacky Mathias Internatinal Symposium on Plasma Chemistry, ISPC-18, Aug 2007, Kyoto, Japan. 28p-5 Communication dans un congrès hal-00443518v1
	Diagnostic des plasma par micro-fluxmètre Anne-Lise Thomann , Nadjib Semmar , Rémi Dussart , Jacky Mathias Congrès de la division plasma de la SFP, 2006, May 2006, Pont-à-Mousson, France Communication dans un congrès hal-00448844v1
	Mise au point d'un micro-fluxmètre pour la caractérisation des transferts d'énergie dans un plasma d'argon Nadjib Semmar , Anne-Lise Thomann , Rémi Dussart , Jacky Mathias Congrès Français de Thermique, SFT 2006, May 2006, Île de Ré, France. pp.727-732 Communication dans un congrès hal-00443914v1

	On the relationship between the energy flux at the substrate surface and the phase constitution of reactively magnetron sputtered titanium dioxide thin films Stephanos Konstantinidis , Pierre-Antoine Cormier , Anne-Lise Thomann , Remi Dussart , Nadjib Semmar 14th International Conference on Plasma Surface Engineering PSE 2014 , Sep 2014, Garmisch-Partenkirchen, Germany Poster de conférence hal-01289438v1
	Détermination de l'énergie transférée aux surfaces lors de la modification de matériaux par procédés plasmas basse pression Pierre-Antoine Cormier , Anne-Lise Thomann , Nadjib Semmar , Remi Dussart , Dolique Vincent 12ème congrès de la division plasma de la SFP , May 2012, Orléans, France Poster de conférence hal-01288927v1
	Direct energy influx measurement in reactive magnetron sputtering Pierre-Antoine Cormier , Dolique Vincent , Anne-Lise Thomann , Jacky Mathias , Balharmi A. Reactive sputter deposition RSD 2011, Dec 2011, Linköping, Sweden Poster de conférence hal-01288906v1

	A Heat Flux Microsensor for Direct Measurements in Plasma Surface Interactions Remi Dussart , Anne-Lise Thomann , Nadjib Semmar Igor Minin. Microsensors, Intech, pp.87, 2011, 978-953-307-170-1 Chapitre d'ouvrage hal-00707968v1
	Un capteur de flux d'énergie dans les plasmas Anne Lise Thomann , Nadjib Semmar , Rémi Dussart , Larbi Bedra , Jacky Mathias MRCT CNRS. Plasmas Froids : Systèmes d'analyse, Modélisation et Rayonnement, Presses imprimerie Saint-Etienne, pp.97-120, 2009 Chapitre d'ouvrage hal-00443857v1