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Quentin SIMON
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Achieving high thermal conductivity from AlN films deposited by high-power impulse magnetron sputteringJournal of Physics D: Applied Physics, 2014, 47 (355303), J. Phys. D: Appl. Phys. 47 355303. ⟨10.1088/0022-3727/47/35/355303⟩
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hal-01057144v1
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