Pierre MONTMITONNET
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Robust design of thermo-mechanical MEMS switch embedded in aluminium BEOL interconnectMicroelectronics Reliability, 2015, Proceedings of the 26th European Symposium on Reliability of Electron Devices, Failure Physics and Analysis - Proceedings of ESREF 2015, 55 (9-10), pp.1896-1900. ⟨10.1016/j.microrel.2015.06.032⟩
Article dans une revue
hal-01180626v1
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Determination of material properties and failure using in-situ thermo-mechanical probe2014 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2014, Apr 2014, Cannes, France. pp.Article number 7056700 - ISBN 978-2-35500-028-7, ⟨10.1109/DTIP.2014.7056700⟩
Communication dans un congrès
hal-01143767v1
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Improvement of freestanding CMOS-MEMS through detailed stress analysis in metallic layers15th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2014, Apr 2014, Ghent, Belgium. 6 p. - ISBN 978-1-4799-4791-1, ⟨10.1109/EuroSimE.2014.6813834⟩
Communication dans un congrès
hal-01024062v1
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