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Pierre MONTMITONNET

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Publications

881765

Robust design of thermo-mechanical MEMS switch embedded in aluminium BEOL interconnect

Sebastian Orellana , Brice Arrazat , Pascal Fornara , Christian Rivero , Sylvain Blayac
Microelectronics Reliability, 2015, Proceedings of the 26th European Symposium on Reliability of Electron Devices, Failure Physics and Analysis - Proceedings of ESREF 2015, 55 (9-10), pp.1896-1900. ⟨10.1016/j.microrel.2015.06.032⟩
Article dans une revue hal-01180626v1

Determination of material properties and failure using in-situ thermo-mechanical probe

Brice Arrazat , Sebastian Orellana , C. Rivero , P. Fornara , Antonio Di Giacomo
2014 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2014, Apr 2014, Cannes, France. pp.Article number 7056700 - ISBN 978-2-35500-028-7, ⟨10.1109/DTIP.2014.7056700⟩
Communication dans un congrès hal-01143767v1

Improvement of freestanding CMOS-MEMS through detailed stress analysis in metallic layers

Sebastian Orellana , Brice Arrazat , P. Fornara , Christian Rivero , Antonio Di Giacomo
15th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2014, Apr 2014, Ghent, Belgium. 6 p. - ISBN 978-1-4799-4791-1, ⟨10.1109/EuroSimE.2014.6813834⟩
Communication dans un congrès hal-01024062v1