CV Accueil - Archive ouverte HAL

	Robust design of thermo-mechanical MEMS switch embedded in aluminium BEOL interconnect Sebastian Orellana , Brice Arrazat , Pascal Fornara , Christian Rivero , Sylvain Blayac Microelectronics Reliability, 2015, Proceedings of the 26th European Symposium on Reliability of Electron Devices, Failure Physics and Analysis - Proceedings of ESREF 2015, 55 (9-10), pp.1896-1900. ⟨10.1016/j.microrel.2015.06.032⟩ Article dans une revue hal-01180626v1

	Improvement of freestanding CMOS-MEMS through detailed stress analysis in metallic layers Sebastian Orellana , Brice Arrazat , P. Fornara , Christian Rivero , Antonio Di Giacomo 15th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2014, Apr 2014, Ghent, Belgium. 6 p. - ISBN 978-1-4799-4791-1, ⟨10.1109/EuroSimE.2014.6813834⟩ Communication dans un congrès hal-01024062v1

Pierre MONTMITONNET