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Step conformal solid electrolyte deposited by ALD on robust 3D silicon scaffold for on chip Li-ion microbattery

 Manon Létiche , Étienne Eustache , Jeremy Freixas , Laurence Morgenroth , Pascal Tilmant , et al.
Material Research Society Spring Meeting (MRS Spring 2016), Mar 2016, Phoenix, United States
Communication dans un congrès hal-02331833v1
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A micro-electro-mechanical accelerometer based on gallium nitride on silicon

 C. Morelle , D. Théron , I. Roch-Jeune , Pascal Tilmant , Etienne Okada , et al.
Applied Physics Letters, 2023, 122 (3), pp.033502. ⟨10.1063/5.0127987⟩
Article dans une revue hal-03945292v1

Bias dependence of gallium nitride micro-electro-mechanical systems actuation using a two-dimensional electron gas

 A. Ben Amar , M. Faucher , B. Grimbert , Y. Cordier , M. François , et al.
Japanese Journal of Applied Physics, part 2 : Letters, 2012, 5, pp.067201-1-3. ⟨10.1143/APEX.5.067201⟩
Article dans une revue hal-00787414v1

Assemblage de nano-objets par diélectrophorèse

 H. Diesinger , M. Marczak , D. Luxembourg , Yannick Coffinier , D. Hourlier , et al.
Journées du GDR Nanofils Nanotubes Semiconducteurs, 2006, Villeneuve d'Ascq, France
Communication dans un congrès hal-00243975v1

Study of Various PhotoResist for Bosch Process

 Arnaud Pageau , Garrett Curley , Pascal Tilmant , Francois Vaurette , Dmitri Yarekha
Euronanolab Dry Etch Expert meeting, Dec 2019, Saclay, France
Communication dans un congrès hal-03635045v1
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Gallium nitride MEMS resonators: how residual stress impacts design and performances

 Christophe Morelle , Didier Theron , Joff Derluyn , Stefan Degroote , Marianne Germain , et al.
Microsystem Technologies, 2018, 24 (1), pp.371-377. ⟨10.1007/s00542-017-3293-0⟩
Article dans une revue hal-03183510v1

High surface capacity Li-ion all solid state 3D microbattery based on anatase TiO2 deposited by ALD on silicon microstructures

 E. Eustache , P. Tilmant , L. Morgenroth , P. Roussel , N. Rolland , et al.
ECS Transactions, 2013, 58, pp.119-129. ⟨10.1149/05810.0119ecst⟩
Article dans une revue hal-00877701v1
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Atomic Layer Deposition of Functional Layers for on Chip 3D Li-Ion All Solid State Microbattery

 Manon Letiche , Etienne Eustache , Jeremy Freixas , Arnaud Demortière , Vincent de Andrade , et al.
Advanced Energy Materials, 2016, 7 (2), ⟨10.1002/aenm.201601402⟩
Article dans une revue hal-03192855v1

Versatile bondpad report process for non-planar compound semiconductor devices

 S. Garidel , Jean-Pierre Vilcot , M. Zaknoune , P. Tilmant
Microelectronic Engineering, 2004, 71, pp.358-362
Article dans une revue hal-00162776v1
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AlGaN/GaN high electron mobility transistors on diamond substrate obtained through aluminum nitride bonding technology

 Mahmoud Abou Daher , Marie Lesecq , Pascal Tilmant , N. Defrance , Michel Rousseau , et al.
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics, 2020, 38 (3), pp.033201. ⟨10.1116/1.5143418⟩
Article dans une revue hal-02929037v1

Towards high-transconductance graphene high-speed biosensors

 W. Wei , S. Mhedbhi , P. Tilmant , H. Happy , E. Pallecchi
IEEE International Microwave Biomedical Conference, IEEE-IMBioC 2018, Jun 2018, Philadelphia, PA, United States. pp.7-9, ⟨10.1109/IMBIOC.2018.8428888⟩
Communication dans un congrès hal-03335835v1

Experimental demonstration and observation of a plasmon wave occuring at a GaAs–Au–GaN interface

 Arnaud Stolz , Maria Tchernycheva , Pascal Tilmant , El Hadj Dogheche , Dimitris Pavlidis , et al.
Optics Letters, 2013, 38 (14), pp.2425-2427. ⟨10.1364/OL.38.002425⟩
Article dans une revue hal-01264130v1

Step-conformal deposition of TiO2 and MnO2 electrodes on advanced silicon microstructures for 3D Li-ion microbatteries and micro-supercapacitors

 Étienne Eustache , Camille Douard , Pascal Tilmant , Laurence Morgenroth , Pascal Roussel , et al.
European Materials Research Society Spring Meeting, E-MRS Spring 2014, 2014, Lille, France
Communication dans un congrès hal-00976637v1

[Invited] 3D substrates for improved performance of Li-ion microbatteries

 Etienne Eustache , Olivier Crosnier , Pascal Tilmant , Laurence Morgenroth , Pascal Roussel , et al.
10th Japan-France Joint Seminar on Battery, 2014, Hakone, Japan
Communication dans un congrès hal-01044691v1

Performances of the negative tone resist AZnLOF 2020 for nanotechnology applications

 Etienne Herth , Emmanuelle Algre , Pascal Tilmant , Martin François , Christophe Boyaval , et al.
IEEE Transactions on Nanotechnology, 2012, 11 (4), pp.854-859. ⟨10.1109/TNANO.2012.2196802⟩
Article dans une revue hal-00787415v1

Novel bondpad report process for III-V semiconductor devices using full HSQ properties

 Malek Zegaoui , Nargess Choueib , P. Tilmant , Marc François , Christiane Legrand , et al.
Microelectronic Engineering, 2009, 86 (1), pp.68-71. ⟨10.1016/j.mee.2008.09.043⟩
Article dans une revue istex hal-00473043v1

Tests sur la HSQ en poudre de EMResist

 Yves Deblock , Christophe Boyaval , J. Elegbe , Saliha Ouendi , Pascal Tilmant , et al.
Rencontres 2023 Renatech Litho. Gravure, Jan 2023, Villeneuve d'Ascq, France
Communication dans un congrès hal-03994064v1

GaN MEMS resonators : from demonstration to microsystem-compatible performances

 Marc Faucher , Achraf Ben Amar , Victor Y. Zhang , Yvon Cordier , Matthieu Werquin , et al.
36th Workshop on Compound Semiconductor Devices and Integrated Circuits, WOCSDICE 2012, 2012, Porquerolles, France. pp.1-4
Communication dans un congrès hal-00801104v1

Micro-patterning of LiPON and lithium iron phosphate material deposited onto silicon nanopillars array for lithium ion solid state 3D micro-battery

 C. Lethien , Malek Zegaoui , Pascal Roussel , P. Tilmant , N. Rolland , et al.
Microelectronic Engineering, 2011, 88 (10), pp.3172-3177. ⟨10.1016/j.mee.2011.06.022⟩
Article dans une revue istex hal-00639805v1

3D micro-supercapacitor based on MnO2 electrodes on silicon substrate

 Etienne Eustache , Camille Douard , Pascal Tilmant , Dmitri Yarekha , Laurence Morgenroth , et al.
226th Meeting of the Electrochemical Society and XXIX Congreso de la Sociedad Mexicana de Electroquímica, 2014 ECS and SMEQ Joint International Meeting, 2014, Cancun, Mexico
Communication dans un congrès hal-01015285v1

Tests sur la Medusa de AllResist

 Yves Deblock , Christophe Boyaval , J. Elegbe , Saliha Ouendi , Pascal Tilmant , et al.
Rencontres 2023 Renatech Litho. Gravure, Jan 2023, Villeneuve d'Ascq, France
Communication dans un congrès hal-03994057v1

La lithographie à l'IEMN : de la micro à la nanostructuration

 Francois Vaurette , Marc François , Yves Deblock , Pascal Tilmant , Christophe Boyaval
15èmes Journées Nano, Micro et Optoélectronique, May 2016, Les Issambres, France
Communication dans un congrès hal-04115909v1

Air-bridge interconnection and bondpad process for non-planar compound semiconductor devices

 G. Ulliac , S. Garidel , Jean-Pierre Vilcot , P. Tilmant
Microelectronic Engineering, 2005, 81, pp.53-58
Article dans une revue hal-00125664v1

Interface characterization at nanometer scale using very high frequency ultrasounds

 Hilal Reda , Julien Carlier , Malika Toubal , Pierre Campistron , Pascal Tilmant , et al.
Composite Interfaces , 2019, 26 (4), pp.325-337. ⟨10.1080/09276440.2018.1500205⟩
Article dans une revue hal-03142272v1
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Fabrication of silicon nitride membrane nanoelectromechanical resonator

 Hao Xu , Srisaran Venkatachalam , Christophe Boyaval , Pascal Tilmant , Francois Vaurette , et al.
Microelectronic Engineering, 2023, 280, pp.112064. ⟨10.1016/j.mee.2023.112064⟩
Article dans une revue hal-04172152v1

Silicon-microtube scaffold decorated with anatase TiO2 as a negative electrode for a 3D litium-ion microbattery

 Etienne Eustache , Pascal Tilmant , Laurence Morgenroth , Pascal Roussel , Gilles Patriarche , et al.
Advanced Energy Materials, 2014, 4, 1301612, 11 p. ⟨10.1002/aenm.201301612⟩
Article dans une revue istex hal-00999999v1

Scanning microwave microscopy for investigations of mechanical vibrations and mode coupling

 Xin Zhou , D. Theron , H. Xu , Christophe Boyaval , Sophie Eliet , et al.
Frontiers of Nanomechanical Systems, Jun 2023, Delft, Netherlands
Communication dans un congrès hal-04234474v1

Amplification of nanoscale motion by piezoelectric transduction in GaN resonators

 M. Faucher , B. Grimbert , Y. Cordier , N. Baron , A. Wilk , et al.
18th European Workshop on Heterostructure Technology, HeTech 2009, 2009, Günzburg-Ulm, Germany
Communication dans un congrès hal-00810577v1

Amplified piezoelectric transduction of nanoscale motion in gallium nitride electromechanical resonators

 M. Faucher , B. Grimbert , Y. Cordier , N. Baron , A. Wilk , et al.
Applied Physics Letters, 2009, 94, pp.233506-1-3. ⟨10.1063/1.3153504⟩
Article dans une revue hal-00472724v1

Sputtered thin films for lithium ion microbatteries: recent results on TiN lithium barrier diffusion layer, Au negative and C-LiFePO4 positive electrodes

 Etienne Eustache , Jeremy Freixas , Olivier Crosnier , Pascal Tilmant , Dmitri Yarekha , et al.
226th Meeting of the Electrochemical Society and XXIX Congreso de la Sociedad Mexicana de Electroquímica, 2014 ECS and SMEQ Joint International Meeting, 2014, Cancun, Mexico
Communication dans un congrès hal-01015287v1
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