CV Accueil - Archive ouverte HAL

	Wafer-scale fabrication of self-actuated piezoelectric nanoelectromechanical resonators based on lead zirconate titanate (PZT) Denis Dezest , Olivier Thomas , Fabrice Mathieu , Laurent Mazenq , Caroline Soyer Journal of Micromechanics and Microengineering, 2015, 25 (3), pp.35002-35013. ⟨10.1088/0960-1317/25/3/035002⟩ Article dans une revue hal-01169283v1
	Effect of non-ideal clamping shape on the resonance frequencies of silicon nanocantilevers Samuel Guillon , Daisuke Saya , Laurent Mazenq , Sorin Perisanu , Pascal Vincent Nanotechnology, 2011, 22 (24), pp.id 245501. ⟨10.1088/0957-4484/22/24/245501⟩ Article dans une revue hal-01343625v1

	HIGH-K THIN FILMS AS DIELECTRIC TRANSDUCERS FOR FLEXURAL M/NEMS RESONATORS Cécile Fuinel , Khadim Daffé , Adrian Laborde , Olivier Thomas , Laurent Mazenq The 29th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2016), IEEE, Jan 2016, Shanghai, China. ⟨10.1109/MEMSYS.2016.7421850⟩ Communication dans un congrès hal-01279717v1
	PZT Nanofilm-Based Wafer Scale Nanoresonators Denis Dezest , Fabrice Mathieu , Laurent Mazenq , Liviu Nicu , Caroline Soyer IEEE Frequency Control Symposium, Apr 2015, Denver, United States. 6p Communication dans un congrès hal-01144194v1
	Wafer-scale integration of piezoelectric actuation capabilities in nanoelectromechanical systems resonators Denis Dezest , Fabrice Mathieu , Laurent Mazenq , Caroline Soyer , Jean Costecalde 2013 Nanomechanical Sensing Workshop, May 2013, Stanford, USA, United States. pp.0 Communication dans un congrès hal-03165172v1

Olivier Thomas