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Nikolay Cherkashin

8

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nikolay-cherkashin
0000-0002-0322-0864
IdRef : 183426924

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Publications

vincentpaillard

	Effect of the order of He+ and H+ ion co-implantation on damage generation and thermal evolution of complexes, platelets, and blisters in silicon Nabil Daghbouj , Nikolay Cherkashin , François-Xavier Darras , Vincent Paillard , M. Fnaiech Journal of Applied Physics, 2016, 119 (13), pp.135308 - 245301. ⟨10.1063/1.4945032⟩ Article dans une revue hal-01719485v1
	Cyclic Deposition / Etch processes for the formation of Si raised sources and drains in advanced MOSFETs J.M. Hartmann , M. Py , P.H. Morel , T. Ernst , B. Prévitali ECS Transactions, 2010, 33 (6), pp.391-407. ⟨10.1149/1.3487570⟩ Article dans une revue hal-01736046v1
	On the influence of elastic strain on the accommodation of carbon atoms into substitutional sites in strained Si:C layers grown on Si substrates Nikolay Cherkashin , Martin Hÿtch , Florent Houdellier , Florian Hüe , Vincent Paillard Applied Physics Letters, 2009, 94 (14), pp.141910. ⟨10.1063/1.3116648⟩ Article dans une revue hal-00417300v1
	Materials science issues for the fabrication of nanocrystal memory devices by ultra low energy ion implantation Alain Claverie , Caroline Bonafos , Gérard Benassayag , Sylvie Schamm-Chardon , Nikolay Cherkashin Defect Diffus. Forum, 2006, 258-260, pp.531-541 Article dans une revue hal-00204809v1
	Si nanocrystals by ultra-low-energy ion beam-synthesis for non-volatile memory applications Caroline Bonafos , H. Coffin , Sylvie Schamm-Chardon , Nikolay Cherkashin , Gérard Benassayag Solid-State Electronics, 2005, 49 (11), pp.1734--1744. ⟨10.1016/j.sse.2005.10.001⟩ Article dans une revue hal-01736088v1
	Resonant Raman scattering of a single layer of Si nanocrystals on a silicon substrate A. Wellner , Vincent Paillard , H. Coffin , Nikolay Cherkashin , Caroline Bonafos Journal of Applied Physics, 2004, 96 (4), pp.2403-2405. ⟨10.1063/1.1765853⟩ Article dans une revue hal-01736095v1

	Determination of strain within Si1-yCy layers grown by CVD on a Si substrate Nikolay Cherkashin , A. Gouye , Florian Hüe , Florent Houdellier , Martin Hÿtch Symposium C – Quantitative Electron Microscopy for Materials Science, 2007, undetermined, France. pp.12-19, ⟨10.1557/PROC-1026-C07-03⟩ Communication dans un congrès hal-01736057v1
	Materials science issues for the fabrication of naocrystal memory devices by ultra low energy ion implantation Alain Claverie , Caroline Bonafos , Gérard Benassayag , Sylvie Schamm-Chardon , Nikolay Cherkashin 2nd International Conference on Diffusion in Solids and Liquids, DSL-2006, 2006, Aveiro, Portugal Communication dans un congrès hal-00115744v1