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Nikolay Cherkashin

17
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sylvie-schamm-chardon
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Reconstruction of depth resolved strain tensor in off-axis single crystals: Application to H + ions implanted LiTaO 3

Antonin Louiset , Sylvie Schamm-Chardon , Oleg Kononchuk , Nikolay Cherkashin
Applied Physics Letters, 2021, 118 (8), pp.082903. ⟨10.1063/5.0040729⟩
Article dans une revue hal-03154232v1
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Detailed characterisation of focused ion beam induced lateral damage on silicon carbide samples by electrical scanning probe microscopy and transmission electron microscopy

F. Stumpf , A. A. Abu Quba , P. Singer , M. Rumler , Nikolay Cherkashin
Journal of Applied Physics, 2018, 123 (12), pp.125104. ⟨10.1063/1.5022558⟩
Article dans une revue hal-01745004v1

Imaging Si nanoparticles embedded in SiO2 layers by (S)TEM-EELS

Sylvie Schamm-Chardon , Caroline Bonafos , H. Coffin , Nikolay Cherkashin , Marzia Carrada
Ultramicroscopy, 2008, 108 (4), pp.346--357. ⟨10.1016/j.ultramic.2007.05.008⟩
Article dans une revue hal-01736064v1

Oxide-nitride-oxide memory stacks formed by low-energy Si ion implantation into nitride and wet oxidation

V. Ioannou-Sougleridis , P. Dimitrakis , V.Em. Vamvakas , P. Normand , Caroline Bonafos
Microelectronic Engineering, 2007, 84 (9-10), pp.1986--1989. ⟨10.1016/j.mee.2007.04.068⟩
Article dans une revue hal-01736069v1
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Wet oxidation of nitride layer implanted with low-energy Si ions for improved oxide-nitride-oxide memory stacks

V. Ioannou-Sougleridis , P. Dimitrakis , V.Em. Vamvakas , P. Normand , Caroline Bonafos
Applied Physics Letters, 2007, 90 (26), pp.263513. ⟨10.1063/1.2752769⟩
Article dans une revue hal-01736066v1
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Oxidation of Si nanocrystals fabricated by ultralow-energy ion implantation in thin SiO2 layers

H. Coffin , Caroline Bonafos , Sylvie Schamm-Chardon , Nikolay Cherkashin , Gérard Benassayag
Journal of Applied Physics, 2006, 99 (4), pp.044302. ⟨10.1063/1.2171785⟩
Article dans une revue hal-01736074v1

Materials science issues for the fabrication of nanocrystal memory devices by ultra low energy ion implantation

Alain Claverie , Caroline Bonafos , Gérard Benassayag , Sylvie Schamm-Chardon , Nikolay Cherkashin
Defect Diffus. Forum, 2006, 258-260, pp.531-541
Article dans une revue hal-00204809v1

Si nanocrystals by ultra-low energy ion implantation for non-volatile memory applications

H. Coffin , Caroline Bonafos , Sylvie Schamm-Chardon , Marzia Carrada , Nikolay Cherkashin
Materials Science and Engineering: B, 2005, 124-125, pp.499--503. ⟨10.1016/j.mseb.2005.08.129⟩
Article dans une revue hal-01736081v1

Si nanocrystals by ultra-low-energy ion beam-synthesis for non-volatile memory applications

Caroline Bonafos , H. Coffin , Sylvie Schamm-Chardon , Nikolay Cherkashin , Gérard Benassayag
Solid-State Electronics, 2005, 49 (11), pp.1734--1744. ⟨10.1016/j.sse.2005.10.001⟩
Article dans une revue hal-01736088v1
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Fabrication of nanocrystal memories by ultra low energy ion implantation

Nikolay Cherkashin , Caroline Bonafos , H. Coffin , Marzia Carrada , Sylvie Schamm-Chardon
physica status solidi (c), 2005, 2 (6), pp.1907--1911. ⟨10.1002/pssc.200460523⟩
Article dans une revue hal-01736090v1
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Multi-dot floating-gates for nonvolatile semiconductor memories: Their ion beam synthesis and morphology

T. Müller , K.-H. Heinig , W. Möller , Caroline Bonafos , H. Coffin
Applied Physics Letters, 2004, 85 (12), pp.2373-2375
Article dans une revue hal-01736097v1

Multi-Dot Floating-Gates in MOSFETs for nonvolatile memories - Their ion beam synthesis and morphology

T. Müller , K.-H. Heinig , Caroline Bonafos , H. Coffin , Nikolay Cherkashin
Materials Research Society Symposium - Proceedings, 2003, 792, pp.333-338. ⟨10.1557/PROC-792-R8.7⟩
Article dans une revue hal-01736111v1

Fabrication of barium titanate nanopillars by neon ion milling

Ibukun Olaniyan , S.W. Schmitt , Javier Garcia-Fernandez , J. Albert , Veeresh Deshpande
IEEE ISAF 2022, Jun 2022, Tours, France
Communication dans un congrès hal-03750458v1

Crystalline Structure of HfZrO Thin Films and ZrO2 / HfO2 bi-Layers Grown by AVD for MOS Applications

Sandrine Lhostis , Clement Gaumer , Caroline Bonafos , Sylvie Schamm-Chardon , Nikolay Cherkashin
ECS Transactions, 2008, Unknown, Unknown Region. ⟨10.1149/1.2911489⟩
Communication dans un congrès hal-01736062v1

Materials science issues for the fabrication of naocrystal memory devices by ultra low energy ion implantation

Alain Claverie , Caroline Bonafos , Gérard Benassayag , Sylvie Schamm-Chardon , Nikolay Cherkashin
2nd International Conference on Diffusion in Solids and Liquids, DSL-2006, 2006, Aveiro, Portugal
Communication dans un congrès hal-00115744v1

Oxidation of Si nanocrystals fabricated by ultra-low energy ion implantation in thin SiO2 layers

H. Coffin , Caroline Bonafos , Sylvie Schamm-Chardon , Nikolay Cherkashin , Marc Respaud
Symposium D – Materials and Processes for Nonvolatile Memories, 2005, indéterminée, Unknown Region. pp.281-286, ⟨10.1557/PROC-830-D6.6⟩
Communication dans un congrès hal-01736087v1

Manipulation of 2D arrays of Si nanocrystals by ultra-low-energy ion beam-synthesis for nonvolatile memories applications

Caroline Bonafos , Nikolay Cherkashin , Marzia Carrada , H. Coffin , Gérard Benassayag
Symposium D – Materials and Processes for Nonvolatile Memories, 2005, indéterminée, Unknown Region. pp.217-222, ⟨10.1557/PROC-830-D5.2⟩
Communication dans un congrès hal-01736091v1