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Nikolay Cherkashin
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- nikolay-cherkashin
- 0000-0002-0322-0864
- IdRef : 183426924
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Solid phase epitaxy process integration on 50-nm PMOS devices: Effects of defects on chemical and electrical characteristics of ultra shallow junctionsSymposium C – Silicon Front-End Junction Formation-Physics and Technology, 2004, indéterminée, Unknown Region. pp.21-27, ⟨10.1557/PROC-810-C1.4⟩
Communication dans un congrès
hal-01736099v1
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