Mechanical Stress in InP Structures Etched in an Inductively Coupled Plasma Reactor with Chlorine Chemistry
Jean-Pierre Landesman
,
Daniel T Cassidy
,
Erwine Pargon
,
Christophe Levallois
,
Merwan Mokhtari
,
et al.
18th Canadian Semiconductor Science and Technology Conference (CSSTC 2017) , Aug 2017, Waterloo, Canada
Poster de conférence
hal-01710320v1
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Mechanical stress in InP and GaAs ridges formed by reactive ion etching
Jean-Pierre Landesman
,
Marc Fouchier
,
Erwine Pargon
,
Solène Gérard
,
Névine Rochat
,
et al.
Article dans une revue
hal-03043725v1
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Mechanical strain mapping of GaAs based VCSELs
Merwan Mokhtari
,
Philippe Pagnod-Rossiaux
,
Christophe Levallois
,
Francois Laruelle
,
Daniel T Cassidy
,
et al.
Article dans une revue
hal-03190309v1
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Étude physique des défauts induits par les procédés de fabrication de lasers à émission par la surface (VCSEL) à confinement par diaphragme d'oxyde [Defense 16.12.2019]
Merwan Mokhtari
2016
Pré-publication, Document de travail
hal-02282972v1
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DOP characterization of oxide-confined GaAs based VCSEL operating at 850 nm
Merwan Mokhtari
,
Philippe Pagnod-Rossiaux
,
Francois Laruelle
,
Jean-Pierre Landesman
,
Christophe Levallois
,
et al.
11th European Workshop on VCSELs (VCSEL Day 2018) , Apr 2018, Ulm, Germany
Communication dans un congrès
hal-02290642v1
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Étude physique des défauts induits par les procédés de fabrication de lasers à émission par la surface (VCSEL) à confinement par diaphragme d'oxyde
Merwan Mokhtari
Matériaux et structures en mécanique [physics.class-ph]. Université de Rennes, 2019. Français.
⟨NNT : 2019REN1S073⟩
Thèse
tel-02527380v1
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Degree of Polarization of Cathodoluminescence from a GaAs Facet in the Vicinity of an SiN Stripe
Daniel T Cassidy
,
Jean-Pierre Landesman
,
Merwan Mokhtari
,
Philippe Pagnod-Rossiaux
,
Marc Fouchier
,
et al.
Article dans une revue
hal-04055505v1
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Mechanical Stress in InP Structures Etched in an Inductively Coupled Plasma Reactor with Ar/Cl2/CH4 Plasma Chemistry
Jean-Pierre Landesman
,
Marc Fouchier
,
Erwine Pargon
,
Névine Rochat
,
Daniel T Cassidy
,
et al.
11th Plasma Etch and Strip in Microtechnology workshop (PESM 2019) , May 2019, Grenoble, France
Communication dans un congrès
hal-02291455v1
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Photoluminescence mapping of the strain induced in InP and GaAs substrates by SiN stripes etched from thin films grown under controlled mechanical stress
Solène Gérard
,
Merwan Mokhtari
,
Jean-Pierre Landesman
,
Christophe Levallois
,
Marc Fouchier
,
et al.
Article dans une revue
hal-02876805v1
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Mechanical Stress in InP Structures Etched in an Inductively Coupled Plasma Reactor with Ar/Cl2/CH4 Plasma Chemistry
Jean-Pierre Landesman
,
Daniel T. Cassidy
,
Marc Fouchier
,
Erwine Pargon
,
Christophe Levallois
,
et al.
11th International Workshop on Plasma Etch and Strip in Microelectronics (PESM 2019) , May 2019, Grenoble, France
Communication dans un congrès
hal-02324800v1
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Degree of polarization of the photo-luminescence and cathodo-luminescence for plasma etched InP and GaAs under control of the built-in mechanical stress in SiNx mask layer
Solène Gérard
,
Merwan Mokhtari
,
Jean-Pierre Landesman
,
Christophe Levallois
,
Marc Fouchier
,
et al.
18th International Conference on Defects-Recognition, Imaging and Physics in Semiconductors (DRIP XVIII) , Sep 2019, Berlin, Germany
Communication dans un congrès
hal-02291428v1
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Investigation of processing-induced defects in GaAs based vertical cavity surface emitting lasers with Al oxide confinement layers
Merwan Mokhtari
,
Philippe Pagnod-Rossiaux
,
François Laruelle
,
Jean-Pierre Landesman
,
Alain Moréac
,
et al.
18th International Conference on Defects-Recognition, Imaging and Physics in Semiconductors (DRIP XVIII) , Sep 2019, Berlin, Germany
Communication dans un congrès
hal-02291435v1
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Mapping of mechanical strain induced by thin and narrow dielectric stripes on InP surfaces
Jean-Pierre Landesman
,
Daniel T Cassidy
,
Marc Fouchier
,
Christophe Levallois
,
Erwine Pargon
,
et al.
Article dans une revue
hal-01861356v1
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Mechanical Stress in InP Structures Etched in an Inductively Coupled Plasma Reactor with Ar/Cl-2/CH4 Plasma Chemistry
Jean-Pierre Landesman
,
Daniel T Cassidy
,
Marc Fouchier
,
Erwine Pargon
,
Christophe Levallois
,
et al.
Journal of Electronic Materials , 2018, Special Section: 17th Conference on Defects-Recognition, Imaging and Physics in Semiconductors (DRIP XVII), 47 (9), pp.4964-4969.
⟨10.1007/s11664-018-6152-6⟩
Article dans une revue
hal-01861357v1
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Micro-PL and DOP characterization of Vertical Cavity Surface Emitting Lasers (VCSEL) for emission at 850 nm with Al oxide confinement layers
Merwan Mokhtari
,
Philippe Pagnod-Rossiaux
,
François Laruelle
,
Jean-Pierre Landesman
,
Alain Moréac
,
et al.
17th International Conference on Defects-Recognition, Imaging and Physics in Semiconductors (DRIP XVII) , Oct 2017, Valladolid, Spain
Communication dans un congrès
hal-01711100v1
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Micro-PL characterization of oxide-confined GaAs VCSEL operating at 850 nm
Merwan Mokhtari
,
Philippe Pagnod-Rossiaux
,
François Laruelle
,
Jean-Pierre Landesman
,
Alain Moréac
,
et al.
10th European Workshop on VCSELs (VCSEL Day 2017) , Jun 2017, Cardiff, United Kingdom
Poster de conférence
hal-01710323v1
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Optical Characterizations of VCSEL for Emission at 850 nm with Al Oxide Confinement Layers
Merwan Mokhtari
,
Philippe Pagnod-Rossiaux
,
Francois Laruelle
,
Jean-Pierre Landesman
,
Alain Moréac
,
et al.
Journal of Electronic Materials , 2018, Special Section: 17th Conference on Defects-Recognition, Imaging and Physics in Semiconductors (DRIP XVII), 47 (9), pp.4987-4992.
⟨10.1007/s11664-018-6221-x⟩
Article dans une revue
hal-01861355v1
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Chemical imaging of oxide confinement layers in GaAs/AlxGa1−xAs VCSELs
Merwan Mokhtari
,
Philippe Pagnod-Rossiaux
,
Christophe Levallois
,
Alexandre Pofelski
,
François Laruelle
,
et al.
Article dans une revue
hal-03695451v1
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Investigation of processing-induced defects in GaAs based vertical cavity surface emitting lasers with Al oxide confinement layers
Merwan Mokhtari
,
Philippe Pagnod-Rossiaux
,
François Laruelle
,
Jean-Pierre Landesman
,
Alain Moréac
,
et al.
18th Canadian Semiconductor Science and Technology Conference (CSSTC 2017) , Aug 2017, Waterloo, Canada
Poster de conférence
hal-01710316v1
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Mapping of mechanical strain by DOP of oxide-confined GaAs based VCSEL operating at 850 nm
Merwan Mokhtari
,
Philippe Pagnod-Rossiaux
,
François Laruelle
,
Jean-Pierre Landesman
,
Christophe Levallois
,
et al.
12th European Workshop on VCSELs (VCSEL Day 2019) , May 2019, Brussels, Belgium
Communication dans un congrès
hal-02290406v1
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Mechanical Stress in InP Structures Etched in an Inductively Coupled Plasma Reactor with Chlorine Chemistry
Jean-Pierre Landesman
,
Daniel T Cassidy
,
Erwine Pargon
,
Christophe Levallois
,
Merwan Mokhtari
,
et al.
17th International Conference on Defects-Recognition, Imaging and Physics in Semiconductors (DRIP XVII) , Oct 2017, Valladolid, Spain
Communication dans un congrès
hal-01711092v1
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