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Mechanical stress in InP and GaAs ridges formed by reactive ion etching

Jean-Pierre Landesman , Marc Fouchier , Erwine Pargon , Solène Gérard , Névine Rochat , et al.
Journal of Applied Physics, 2020, 128 (22), ⟨10.1063/5.0032838⟩
Article dans une revue hal-03043725v1
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Mechanical strain mapping of GaAs based VCSELs

Merwan Mokhtari , Philippe Pagnod-Rossiaux , Christophe Levallois , Francois Laruelle , Daniel T Cassidy , et al.
Applied Physics Letters, 2021, 118 (9), pp.091102. ⟨10.1063/5.0040386⟩
Article dans une revue hal-03190309v1

Étude physique des défauts induits par les procédés de fabrication de lasers à émission par la surface (VCSEL) à confinement par diaphragme d'oxyde [Defense 16.12.2019]

Merwan Mokhtari
2016
Pré-publication, Document de travail hal-02282972v1

Mechanical Stress in InP Structures Etched in an Inductively Coupled Plasma Reactor with Chlorine Chemistry

Jean-Pierre Landesman , Daniel T Cassidy , Erwine Pargon , Christophe Levallois , Merwan Mokhtari , et al.
18th Canadian Semiconductor Science and Technology Conference (CSSTC 2017), Aug 2017, Waterloo, Canada
Poster de conférence hal-01710320v1

DOP characterization of oxide-confined GaAs based VCSEL operating at 850 nm

Merwan Mokhtari , Philippe Pagnod-Rossiaux , Francois Laruelle , Jean-Pierre Landesman , Christophe Levallois , et al.
11th European Workshop on VCSELs (VCSEL Day 2018), Apr 2018, Ulm, Germany
Communication dans un congrès hal-02290642v1
Image document

Étude physique des défauts induits par les procédés de fabrication de lasers à émission par la surface (VCSEL) à confinement par diaphragme d'oxyde

Merwan Mokhtari
Matériaux et structures en mécanique [physics.class-ph]. Université de Rennes, 2019. Français. ⟨NNT : 2019REN1S073⟩
Thèse tel-02527380v1
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Chemical imaging of oxide confinement layers in GaAs/AlxGa1−xAs VCSELs

Merwan Mokhtari , Philippe Pagnod-Rossiaux , Christophe Levallois , Alexandre Pofelski , François Laruelle , et al.
Semiconductor Science and Technology, 2022, 37 (7), pp.075016. ⟨10.1088/1361-6641/ac7070⟩
Article dans une revue hal-03695451v1

Investigation of processing-induced defects in GaAs based vertical cavity surface emitting lasers with Al oxide confinement layers

Merwan Mokhtari , Philippe Pagnod-Rossiaux , François Laruelle , Jean-Pierre Landesman , Alain Moréac , et al.
18th Canadian Semiconductor Science and Technology Conference (CSSTC 2017), Aug 2017, Waterloo, Canada
Poster de conférence hal-01710316v1

Mapping of mechanical strain by DOP of oxide-confined GaAs based VCSEL operating at 850 nm

Merwan Mokhtari , Philippe Pagnod-Rossiaux , François Laruelle , Jean-Pierre Landesman , Christophe Levallois , et al.
12th European Workshop on VCSELs (VCSEL Day 2019), May 2019, Brussels, Belgium
Communication dans un congrès hal-02290406v1

Mechanical Stress in InP Structures Etched in an Inductively Coupled Plasma Reactor with Chlorine Chemistry

Jean-Pierre Landesman , Daniel T Cassidy , Erwine Pargon , Christophe Levallois , Merwan Mokhtari , et al.
17th International Conference on Defects-Recognition, Imaging and Physics in Semiconductors (DRIP XVII), Oct 2017, Valladolid, Spain
Communication dans un congrès hal-01711092v1
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Mapping of mechanical strain induced by thin and narrow dielectric stripes on InP surfaces

Jean-Pierre Landesman , Daniel T Cassidy , Marc Fouchier , Christophe Levallois , Erwine Pargon , et al.
Optics Letters, 2018, 43 (15), pp.3505. ⟨10.1364/OL.43.003505⟩
Article dans une revue hal-01861356v1

Degree of polarization of the photo-luminescence and cathodo-luminescence for plasma etched InP and GaAs under control of the built-in mechanical stress in SiNx mask layer

Solène Gérard , Merwan Mokhtari , Jean-Pierre Landesman , Christophe Levallois , Marc Fouchier , et al.
18th International Conference on Defects-Recognition, Imaging and Physics in Semiconductors (DRIP XVIII), Sep 2019, Berlin, Germany
Communication dans un congrès hal-02291428v1

Investigation of processing-induced defects in GaAs based vertical cavity surface emitting lasers with Al oxide confinement layers

Merwan Mokhtari , Philippe Pagnod-Rossiaux , François Laruelle , Jean-Pierre Landesman , Alain Moréac , et al.
18th International Conference on Defects-Recognition, Imaging and Physics in Semiconductors (DRIP XVIII), Sep 2019, Berlin, Germany
Communication dans un congrès hal-02291435v1

Micro-PL and DOP characterization of Vertical Cavity Surface Emitting Lasers (VCSEL) for emission at 850 nm with Al oxide confinement layers

Merwan Mokhtari , Philippe Pagnod-Rossiaux , François Laruelle , Jean-Pierre Landesman , Alain Moréac , et al.
17th International Conference on Defects-Recognition, Imaging and Physics in Semiconductors (DRIP XVII), Oct 2017, Valladolid, Spain
Communication dans un congrès hal-01711100v1

Micro-PL characterization of oxide-confined GaAs VCSEL operating at 850 nm

Merwan Mokhtari , Philippe Pagnod-Rossiaux , François Laruelle , Jean-Pierre Landesman , Alain Moréac , et al.
10th European Workshop on VCSELs (VCSEL Day 2017), Jun 2017, Cardiff, United Kingdom
Poster de conférence hal-01710323v1
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Optical Characterizations of VCSEL for Emission at 850 nm with Al Oxide Confinement Layers

Merwan Mokhtari , Philippe Pagnod-Rossiaux , Francois Laruelle , Jean-Pierre Landesman , Alain Moréac , et al.
Journal of Electronic Materials, 2018, Special Section: 17th Conference on Defects-Recognition, Imaging and Physics in Semiconductors (DRIP XVII), 47 (9), pp.4987-4992. ⟨10.1007/s11664-018-6221-x⟩
Article dans une revue hal-01861355v1
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Mechanical Stress in InP Structures Etched in an Inductively Coupled Plasma Reactor with Ar/Cl-2/CH4 Plasma Chemistry

Jean-Pierre Landesman , Daniel T Cassidy , Marc Fouchier , Erwine Pargon , Christophe Levallois , et al.
Journal of Electronic Materials, 2018, Special Section: 17th Conference on Defects-Recognition, Imaging and Physics in Semiconductors (DRIP XVII), 47 (9), pp.4964-4969. ⟨10.1007/s11664-018-6152-6⟩
Article dans une revue hal-01861357v1
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Degree of Polarization of Cathodoluminescence from a GaAs Facet in the Vicinity of an SiN Stripe

Daniel T Cassidy , Jean-Pierre Landesman , Merwan Mokhtari , Philippe Pagnod-Rossiaux , Marc Fouchier , et al.
Optics, 2023, 4 (2), pp.272-287. ⟨10.3390/opt4020019⟩
Article dans une revue hal-04055505v1

Mechanical Stress in InP Structures Etched in an Inductively Coupled Plasma Reactor with Ar/Cl2/CH4 Plasma Chemistry

Jean-Pierre Landesman , Daniel T. Cassidy , Marc Fouchier , Erwine Pargon , Christophe Levallois , et al.
11th International Workshop on Plasma Etch and Strip in Microelectronics (PESM 2019), May 2019, Grenoble, France
Communication dans un congrès hal-02324800v1
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Photoluminescence mapping of the strain induced in InP and GaAs substrates by SiN stripes etched from thin films grown under controlled mechanical stress

Solène Gérard , Merwan Mokhtari , Jean-Pierre Landesman , Christophe Levallois , Marc Fouchier , et al.
Thin Solid Films, 2020, 706, pp.138079. ⟨10.1016/j.tsf.2020.138079⟩
Article dans une revue hal-02876805v1

Mechanical Stress in InP Structures Etched in an Inductively Coupled Plasma Reactor with Ar/Cl2/CH4 Plasma Chemistry

Jean-Pierre Landesman , Marc Fouchier , Erwine Pargon , Névine Rochat , Daniel T Cassidy , et al.
11th Plasma Etch and Strip in Microtechnology workshop (PESM 2019), May 2019, Grenoble, France
Communication dans un congrès hal-02291455v1