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MD

Maxime Darnon

8
Documents
Identifiants chercheurs

Présentation

Publications

dominique-drouin

Plasma Etching of Copper for the Microfabrication of High-Density Interconnects in Advanced Packaging

Juliano Borges , Maxime Darnon , Yann Beilliard , Dominique Drouin
AVS 68th International Symposium & Exhibition, Nov 2022, Pittsburgh, United States
Communication dans un congrès hal-03910308v1

Plasma Treatment For Fluxless Flip-chip Chip-Joining Process

Maxime Godard , Maxime Darnon , Serge Martel , Dominique Drouin
3S&Systems Summit, SEMI, Jan 2020, Dresden, Germany
Communication dans un congrès hal-02463072v1

Patterning Platinum using BEOL industrially compatible processes; Chemical Mechanical Polishing vs. ICP Plasma etching

A Elshear , R Stricher , Serge Ecoffey , Maxime Darnon , Dominique Drouin
44th International Conference on Micro and Nanoengineering, Sep 2019, Copenhage, Denmark
Communication dans un congrès hal-03178730v1

Plasma Treatment for Fluxless Flip-Chip Chip-Joining Process

Maxime Godard , Maxime Darnon , Serge Martel , Clément Fortin , Dominique A Drouin
2018 IEEE 68th Electronic Components and Technology Conference (ECTC), May 2018, San Diego, United States. ⟨10.1109/ECTC.2018.00069⟩
Communication dans un congrès hal-01870584v1

Selective dry etching of titanium nitride nanostructures with chlorine-based inductively coupled plasma

Bruno Lee Sang , Marie-Josee Gour , Maxime Darnon , Serge Ecoffey , Abdelatif Jaouad
40th Micro and Nano Engineering Conference, Sep 2014, Lausanne, Switzerland
Communication dans un congrès hal-02339986v1

Inductively coupled plasma etching of ultra-shallow Si3N4 and SiO2 nanostructures

Bruno Lee Sang , Abdelatif Jaouad , Serge Ecoffey , Maxime Darnon , Marie-Josee Gour
40th Micro and Nano Engineering Conference, Sep 2014, Lausanne, Switzerland
Communication dans un congrès hal-02339985v1