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Materials science issues for the fabrication of naocrystal memory devices by ultra low energy ion implantation

 Alain Claverie , Caroline Bonafos , Gérard Benassayag , Sylvie Schamm-Chardon , Nikolay Cherkashin , et al.
2nd International Conference on Diffusion in Solids and Liquids, DSL-2006, 2006, Aveiro, Portugal
Communication dans un congrès hal-00115744v1

Materials science issues for the fabrication of nanocrystal memory devices by ultra low energy ion implantation

 Alain Claverie , Caroline Bonafos , Gérard Benassayag , Sylvie Schamm-Chardon , Nikolay Cherkashin , et al.
Defect Diffus. Forum, 2006, 258-260, pp.531-541
Article dans une revue hal-00204809v1

Dielectric functions of PECVD-grown silicon nanoscale inclusions within rapid thermal annealed silicon-rich silicon nitride films

 A.S. Keita , A. En Naciri , F. Delachat , Marzia Carrada , G. Ferblantier , et al.
Thin Solid Films, 2011, 519, pp. 2870-2873
Article dans une revue hal-00597119v1

Si nanocrystals by ultra-low-energy ion beam-synthesis for non-volatile memory applications

 Caroline Bonafos , H. Coffin , Sylvie Schamm-Chardon , Nikolay Cherkashin , Gérard Benassayag , et al.
Solid-State Electronics, 2005, 49 (11), pp.1734--1744. ⟨10.1016/j.sse.2005.10.001⟩
Article dans une revue istex hal-01736088v1
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First down converter multilayers integration in an industrial Si solar cell process

 Lucile Dumont , Julien Cardin , Christophe Labbé , Cédric Frilay , Pierre-Matthieu Anglade , et al.
Progress in Photovoltaics, 2019, 27 (2), pp.152-162. ⟨10.1002/pip.3071⟩
Article dans une revue hal-01867390v1

Influence of the thickness of the tunnel layer on the charging characteristics of Si nanocrystals embedded in an ultra-thin SiO2 layer

 C. Dumas , Jérémie Grisolia , Gérard Benassayag , Caroline Bonafos , Sylvie Schamm-Chardon , et al.
Physica E: Low-dimensional Systems and Nanostructures, 2007, 38 (1-2), pp.80-84. ⟨10.1016/j.physe.2006.12.026⟩
Article dans une revue istex hal-01745045v1

Ellipsometric demonstration of the existence of a strong correlation between size distribution and optical responses of silicon nanoclusters in a nitride matrix

 A.S. Keita , A. En Naciri , F. Delachat , Marzia Carrada , G. Ferblantier , et al.
Applied Physics Letters, 2011, 99, pp.131903_1-3
Article dans une revue hal-00675159v1
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Manipulation of two-dimensional arrays of Si nanocrystals embedded in thin SiO 2 layers by low energy ion implantation

 Caroline Bonafos , Marzia Carrada , Nikolay Cherkashin , H. Coffin , D. Chassaing , et al.
Journal of Applied Physics, 2004, 95 (10), pp.5696-5702. ⟨10.1063/1.1695594⟩
Article dans une revue hal-01736103v1

Ultra-low-energy Ion Beam Synthesis for Nanotechnology and Nanostructures

 Marzia Carrada , Caroline Bonafos , Patrizio Benzo , Gérard Benassayag , Béatrice Pécassou
TMS 2019, Mar 2019, San Antonio, United States
Communication dans un congrès hal-02364990v1
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The 3D Design of Multifunctional Silver Nanoparticle Assemblies Embedded in Dielectrics

 Caroline Bonafos , Maxime Bayle , Patrizio Benzo , Alessandro Pugliara , Kremena Makasheva , et al.
physica status solidi (a), 2020, 217 (6), pp.1900619. ⟨10.1002/pssa.201900619⟩
Article dans une revue hal-02553623v1

Effect of ion energy and dose on the positioning of 2D-arrays of Si nanocrystals ion beam synthesised in thin SiO2 layers

 Marzia Carrada , Nikolay Cherkashin , Caroline Bonafos , Gérard Benassayag , D. Chassaing , et al.
Materials Science and Engineering: B, 2003, 101 (1-3), pp.204-207. ⟨10.1016/S0921-5107(02)00724-9⟩
Article dans une revue istex hal-01736116v1

Properties of silicon nanoparticles embedded in SiNx deposited by microwave-PECVD

 F. Delachat , Marzia Carrada , G. Ferblantier , J.J. Grob , A. Slaoui
Nanotechnology, 2009, 20 (415608), pp.1-5
Article dans une revue hal-00429238v1

Effect of annealing treatments on photoluminescence and charge storage mechanism in silicon-rich SiNx:H films

 B. Sahu , F. Delachat , A. Slaoui , Marzia Carrada , G. Ferblantier , et al.
European Material Research Society (E-MRS) Fall Meeting, Symposium on Nanoscaled Si, Ge based materials, Sep 2010, Varsovie, Poland
Communication dans un congrès hal-00597207v1

Si nanocrystals by ultra-low energy ion implantation for non-volatile memory applications

 H. Coffin , Caroline Bonafos , Sylvie Schamm-Chardon , Marzia Carrada , Nikolay Cherkashin , et al.
Materials Science and Engineering: B, 2005, 124-125, pp.499--503. ⟨10.1016/j.mseb.2005.08.129⟩
Article dans une revue istex hal-01736081v1

Si nanocrystals embedded in a silicon oxynitride matrix

 M. Ficcadenti , N. Pinto , L. Morresi , G. Ferblantier , Marzia Carrada , et al.
Nanomaterials and Nanotechnology, 2011, 1 (2), pp.1-7. ⟨10.5772/50954⟩
Article dans une revue hal-00647499v1

Spectroscopic ellipsometry study of the optical properties of microwave CVD grown silicon nanoparticles embedded in a silicon nitride matrix

 A.S. Keita , A. En Naciri , F. Delachat , Marzia Carrada , G. Ferblantier , et al.
12th International Conference on the Formation of Semiconductor Interfaces (ICFSI-12), Jul 2009, Weimar, Germany
Communication dans un congrès hal-00429334v1

Effects of annealing conditions on charge storage of Si nanocrystal memory devices obtained by low-energy ion beam synthesis

 P. Normand , E. Kapetanakis , P. Dimitrakis , D. Skarlatos , D. Tsoukalas , et al.
Microelectronic Engineering, 2003, 67-68, pp.629-634. ⟨10.1016/S0167-9317(03)00124-2⟩
Article dans une revue istex hal-01736114v1

Electrical characterization of low energy Ge+ implanted Si3N4 Films With HfO2/SiO2 stack tunnel dielectric for non-volatile memory application

 B. Sahu , Marzia Carrada , A. Slaoui , Pierre-Eugène Coulon , Jesse Groenen , et al.
Material Research Society (MRS) Spring Meeting, Symposium on Materials and Physics for Nonvolatile Memories II, Apr 2010, San Francisco, United States
Communication dans un congrès hal-00697595v1

Manipulation of 2D arrays of Si nanocrystals by ultra-low-energy ion beam-synthesis for nonvolatile memories applications

 Caroline Bonafos , Nikolay Cherkashin , Marzia Carrada , H. Coffin , Gérard Benassayag , et al.
Symposium D – Materials and Processes for Nonvolatile Memories, 2005, indéterminée, Unknown Region. pp.217-222, ⟨10.1557/PROC-830-D5.2⟩
Communication dans un congrès hal-01736091v1
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SiOx /SiNy multilayers for photovoltaic and photonic applications

 Ramesh Pratibha Nalini , Larysa Khomenkova , Olivier Debieu , Julien Cardin , Christian Dufour , et al.
Nanoscale Research Letters, 2012, 7 (1), pp.1-6. ⟨10.1186/1556-276X-7-124⟩
Article dans une revue hal-01139850v1

Structural and optical properties of high density Si-ncs synthezised in SiNx:H by remote PECVD and annealing

 Marzia Carrada , A. Zerga , A. Amann , J.J. Grob , J.P. Stoquert , et al.
Mater. Sci. Eng. B, 2008, 147, pp.218-221
Article dans une revue hal-00250450v1

Structural and optical properties of Si nanocrystals embedded in SiO2/SiNx multilayers

 F. Delachat , Marzia Carrada , G. Ferblantier , A. Slaoui , Caroline Bonafos , et al.
European Material Research Society (E-MRS) Spring Conference, Symposium on Frontiers in Silicon-Based Photonics, May 2008, STRASBOURG, France. pp.994-997
Communication dans un congrès hal-00408922v1

The structural and optical properties of SiO2/Si rich SiNx Si-ncs

 F. Delachat , Marzia Carrada , G. Ferblantier , J.J. Grob , A. Slaoui , et al.
Nanotechnology, 2009, 20, 275608 pp. 1-5
Article dans une revue hal-00408937v1

Properties of silicon nanoparticles in SiNx deposited by microwave enhanced chemical vapor deposition

 F. Delachat , Marzia Carrada , G. Ferblantier , M. Amann , J.J. Grob , et al.
European Material Research Society (E-MRS) Spring Conference, Symposium on Inorganic and Nanostructured Photovoltaics, Jun 2009, STRASBOURG, France
Communication dans un congrès hal-00408941v1

Structural analysis of the interface of silicon nanocrystals embedded in a Si3N4 matrix

 Jérémy Barbé , Kremena Makasheva , S. Perraud , Marzia Carrada , Bernard Despax
Journal of Physics D: Applied Physics, 2014, 47 (25), ⟨10.1088/0022-3727/47/25/255302⟩
Article dans une revue hal-01763649v1
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Fabrication of nanocrystal memories by ultra low energy ion implantation

 Nikolay Cherkashin , Caroline Bonafos , H. Coffin , Marzia Carrada , Sylvie Schamm-Chardon , et al.
physica status solidi (c), 2005, 2 (6), pp.1907--1911. ⟨10.1002/pssc.200460523⟩
Article dans une revue hal-01736090v1

Silicon nanoclusters embedded into oxide host for non-volatile memory applications

 L. Khomenkova , X. Portier , B. Sahu , A. Slaoui , Caroline Bonafos , et al.
ECS Transactions, 2011, 35, pp. 37-45
Article dans une revue hal-00647540v1
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Atomic-scale and optical investigation of nanostructured Er disilicates in silica

 S. Guehairia , Rémi Demoulin , H. Merabet , Philippe Pareige , Julien Cardin , et al.
Journal of Alloys and Compounds, 2022, 926, pp.166947. ⟨10.1016/j.jallcom.2022.166947⟩
Article dans une revue hal-03762893v1
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Determination of the optical properties and size dispersion of Si nanoparticles within a dielectric matrix by spectroscopic ellipsometry

 A. -S. Keita , A. En Naciri , Y. Battie , F. Delachat , Marzia Carrada , et al.
Journal of Applied Physics, 2014, 116 (10), pp.103520. ⟨10.1063/1.4894619⟩
Article dans une revue hal-01517452v1

Formation and evolution of Ge nanocrystals by low-energy ion implantation in SiN/HfO2 stack layers for non-volatile memory applications

 Marzia Carrada , B. Sahu , A. Slaoui , Caroline Bonafos , Pierre-Eugène Coulon , et al.
Material Research Society (MRS) Spring Meeting, Symposium on Materials and Physics for Nonvolatile Memories II, Apr 2010, San Francisco, United States
Communication dans un congrès hal-00697580v1
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