Martine LE BERRE

**Research summary** Development of electronic nanocomponents Functional oxide integration Micro and nanotechnologies High frequency passive components **Keywords** Micro Nano Electronics, Micro Nano Fabrication, MEMS, RF components, Thin films for microelectronics (BaM, YIG, PZT, PEO), Thin film characterization **Teaching summary** Martine LE BERRE teaches (1) in the field of Microtechnologies and Microelectronics, at the Master level: \- Lecture on the Technologies for Microelectronics, Elec. Eng. Dpt. \- Lecture on MEMS, Materials Sci. Eng. Dpt. \- Practical in Clean Room "Technologies for Microelectronics", Elec. Eng. Dpt. (2) at the Bachelor level, in 2nd Year, courses on Electromagnetism and Waves in English **Biography** She graduated from Institut National des Sciences Appliquées (INSA) Rennes and studied one year as an exchange student in Germany. In 1994, she received a PhD from INSA Lyon for her work on the piezoresistivity of polycrystalline silicon. Since 1995 she has been working as an assistant professor at INL. She has been involved in the development of micromachined structures for Si-based MEMS (pressure sensors, micro-heat pipes arrays), their characterization as well as thin film characterization (PZT, SiC, BaM, YiG). After several studies on to the integration of ferrimagnetic oxides in microwave passive components, her latest projects contribute to the development of micro- and nanocomponents, e.g. components based on Local Anodic Oxidation by AFM or shadow-edge evaporation for nanogap fabrication. She achieved the habilitation in 2006. She is or has been implicated in several national or regional research programs. She has supervised or co-supervised 12 PhD theses, 18 internships (Master level) and participated to 20 PhD thesis boards. Through her research activities she has authored or co-authored 39 articles referenced in ISI Web of Knowledge and participated to 49 international conferences. Her H-factor rates 13. She also acts as referee for journals such as IEEE Trans. Magn., J. Micromech. Microeng., Sensors & Actuators A, J. Appl. Phys.